• 제목/요약/키워드: Dielectric layers

검색결과 441건 처리시간 0.024초

Impedance Characteristics of Oxide Layers on Aluminium

  • 오한준;장경욱;치충수
    • Bulletin of the Korean Chemical Society
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    • 제20권11호
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    • pp.1340-1344
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    • 1999
  • The electrochemical behavior of oxide layers on aluminium was studied using electrochemical impedance spectroscopy. Impedance spectra were taken at a compact and a porous oxide layer of Al. The anodic films on Al have a variable stoichiometry with gradual reduction of oxygen deficiency towards the oxide-electrolyte interface. Thus, the interpretation of impedance spectra for oxide layers is complicated, with the impedance of surface layers differing from those of ideal capacitors. This layer behavior with conductance gradients was caused by an inhomogeneous dielectric. The frequency response cannot be described by a single RC element. The oxide layers of Al are properly described by the Young model of dielectric constant with a vertical decay of conductivity.

극미세 전자소자 박막배선 재료 개선을 위한 엘렉트로마이그레이션 현상에 미치는 절연보호막 효과 (Dielectric Passivation Effects on the Electromigration Phenomena for the Improvement of Microelectronic Thin Film interconnection Materials)

  • 박영식;김진영
    • 한국진공학회지
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    • 제5권2호
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    • pp.161-168
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    • 1996
  • For the improvement of microelectronic thin film interconnection materials, dielectric passivation effects on the electromigration phenomena were studied. Using Al-1%Si, various shaped patterns were fabricated and dielectric passivation layers of several structures were deposited on the $SiO_2$ layer. Lifetime of straight pattern showed 2~5 times longer than the other patterns that had various line width and area. It is believed that the flux divergence due to the structural inhomogeneity and so the current crowding effects shorten the lifetime of thin film interconnections. The lifetime of thin film interconnections seems to depend on both the passivation materials and the passivation thickness. PSG/$SiO_2$ dielectric passivation layers showed longer lifetime than $Si_3N_4$ dielectric passivation layers. This results from the PSG on $SiO_2$ layer reduces stress and from the improvement of resistance to the moisture and to the mobile ion such as sodium. This is also believed that the lifetime of thin film interconnections seems to depend on the passivation thickness in case of the same deposition materials.

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그래핀 하부전극을 이용하여 BMNO 케페시터의 특성 향상을 위한 Ti Adhesion Layer의 효과 (Effect of Ti Adhesion Layer on the Electrical Properties of BMNO Capacitor Using Graphene Bottom Electrodes)

  • 박병주;윤순길
    • 한국전기전자재료학회논문지
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    • 제26권12호
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    • pp.867-871
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    • 2013
  • The Ti adhesion layers were deposited onto the glass substrate for transparent capacitors using $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMNO) dielectric thin films. Graphene was transferred onto the Ti/glass substrate after growing onto the Ni/$SiO_2$/Si using rapid-thermal pulse CVD (RTPCVD). The BMNO dielectric thin films were investigated for the microstructure, dielectric and leakage properties in the case of capacitors with and without Ti adhesion layers. Leakage current and dielectric properties were strongly dependent on the Ti adhesion layers grown for graphene bottom electrode.

접지된 2중 유전체층 사이의 도체띠 격자에 대해FGMM과 PMM을 적용한 TM 산란 해 (Solution of TM Scattering Applying FGMM and PMM for Conductive Strip Grating Between a Grounded Double Dielectric Layers)

  • 윤의중
    • 문화기술의 융합
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    • 제9권3호
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    • pp.721-726
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    • 2023
  • 본 논문에서는 접지된 2중 유전체층 사이의 도체띠 격자구조에 의한 TM(tranverse magnetic) 전자파 산란 문제를 전자파 수치해석방법으로 알려진 FGMM(fourier galerkin moment method)과 PMM(point matching method)을 적용하여 해석하였다. 경계조건들은 미지의 계수를 구하기 위하여 이용하였다. 접지된 2중 유전층의 비유전율과 두께는 동일한 값에 대해서만 취급하였으며, 유전체층의 두께와 비유전율의 값이 증가하면 전반적으로 반사전력은 증가하였으며, 반사전력의 최소값들이 스트립 폭이 증가하는 방향으로 이동하였다. 본 논문의 제안된 구조에 대해 FGMM과 PMM의 수치해석 방법을 적용한 수치결과들은 매우 잘 일치하였다.

금속나노입자-유전체 이층 구조 구현을 위한 반투명 Cu 나노입자층 형성에 관한 연구 (Study on Formation of Semitransparent Cu Nanoparticle Layers for Realizing Metal Nanoparticle-Dielectric Bilayer Structures)

  • 윤혜련;조윤이;윤회진;이승윤
    • 한국전기전자재료학회논문지
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    • 제33권6호
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    • pp.460-464
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    • 2020
  • This study reports the fabrication and application of semitransparent Cu nanoparticle layers. Spin coating and subsequent drying of a Cu colloid solution were performed to deposit Cu nanoparticle layers onto Si and glass substrates. As the spin speed of the spin coating increases, the density of the nanoparticles on the substrate decreases, and the agglomeration of nanoparticles is suppressed. This microstructural variation affects the optical properties of the nanoparticle layers. The transmittance and reflectance of the Cu nanoparticle layers increase with increasing spin speed, which results from the trade-off between the exposed substrate area and surface coverage of the Cu nanoparticles. Since the glass substrates coated with Cu nanoparticle layers are semitransparent and colored, it is anticipated that the application of a Cu nanoparticle-dielectric bilayer structure to transparent solar cells will improve the cell efficiency as well as aesthetic appearance.

다층 유전체로 채워진 주기 구조에 의한 TE파의 후방 산란 (Backscattering of TE Waves by Periodical Surfaces filled with Multiple Dielectric Layers)

  • 손형석;박대우;송충호;이상설
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1999년도 하계종합학술대회 논문집
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    • pp.211-214
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    • 1999
  • Periodical surfaces with the sawtooth profile are studied on their backscattering by the TE plane wave incident. The backscattering is calculated by the mode-matching method. The surfaces are perfect conductor and are covered with dielectric materials to make a flat surface. It is observed that a cover filled with multiple dielectric layers can be used to reduce the backscattering at an arbitrary incident angle.

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수중에서의 이중 절연 방전관과 구형 유전체의 전계 분포 시뮬레이션 (The Simulation of Electric Field Distribution of Dielectric Tube with Two Layers and Gloular Dielectric in Water)

  • 이동훈;박재윤;박홍재;고희석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.1143-1146
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    • 2003
  • This paper was simulated the electric field distribution in dielectric tube with two layers and spherical dielectric in water. The reactor was made up of the spherical dielectric that is diameter : 2.5[mm], ${\epsilon}_r$ : 5, 25, 100, 1000, 5000 respectively and two glass plate being 2[mm] thickness, ${\epsilon}_r$ : 5 as electrode. The discharge gap was 9[mm]. As a result of the simulation, in case of being about the same value between the dielectric constant of spherical dielectric and water, when the reactor was applied to high voltage, dielectric polarization characteristic was trending toward disappearance. To get more strong electric field, the dielectric constant should be higher comparatively, Increasing the spherical dielectric constant, the location of equippotential line was shifting from the interior to the exterior.

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Electric double layers interactions under condition of variable dielectric permittivity

  • Payam, Amir Farrokh;Fathipour, Morteza
    • Interaction and multiscale mechanics
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    • 제3권2호
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    • pp.157-171
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    • 2010
  • In this paper, a theoretical method has been developed for the electric double layer interaction under condition of the variable dielectric permittivity of water. Using Poisson-Boltzmann equation (PBE), for one plate and two plates having similar or dissimilar constant charge or constant potential, we have investigated the electric double layer potential, its gradient and the disjoining pressure as well as the effect of variation of dielectric permittivity on these parameters. It has been assumed that plates are separated by a specific distance and contain a liquid solution in between. It is shown that reduction of the dielectric permittivity near the interfaces results in compression of electric double layers and affects the potential and its gradient which leads to a decreased electrostatic repulsion. In addition, it is shown that variation of dielectric permittivity in the case of higher electrolyte concentration, leads to a greater change in potential distribution between two plates.

Fabrication and Characterization of Dielectric Materials of Front and Back Panel for PDP

  • Chang, Myeong-Soo;Pae, Bom-Jin;Lee, Yoon-Kwan;Ryu, Byung-Gil;Park, Myung-Ho
    • Journal of Information Display
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    • 제2권3호
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    • pp.39-43
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    • 2001
  • The glass compositions of $PbO-SiO_2-B_2O_3$ system and $P_2O_5-PbO-ZnO$ system for the transparent dielectric materials for front panel and $P_2O_5$-ZnO-BaO and $SiO_2-ZnO-B_2O_3$ for the reflective dielectric materials for back panel of PDP (Plasma Display Panel) were investigated. As a result, transparent dielectric materials for front panel showed good dielectric properties, high transparency, and proper thermal expansion matching to soda lime glass substrate. And the reflective dielectric layers for back panel were prepared from two series of parent glass and oxide filler. It was found that these glassceramics are useful materials for dielectric layers in PDP device, as they have similar thermal expansion to soda-lime glass plate, high reflectance, and low sintering temperature. In particular, the addition of $BPO_4$ and $TiO_2$ as fillers to $SiO_2-ZnO-B_2O_3$ system is considered to be the most effective for acquiring good properties of lower dielectric layer for PDP device.

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Effects of Thermal Annealing on Dielectric and Piezoelectric Properties of Pb(Zn, Mg)1/3Nb2/3O3-PbTiO3 System in the Vicinity of Morphotropic Phase Boundary

  • Hyun M. Jang;Lee, Kyu-Mann
    • The Korean Journal of Ceramics
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    • 제1권1호
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    • pp.13-20
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    • 1995
  • Effects of thermal annealing on the dielectric/piezoelectric properties of $Pb(Zn, Mg)_{1/3}Nb_{2/3}O_3-PbTiO_3$ ceramics (PZMNPT) with Zn/Mg=6/4) were examined across the rhombohedral/tetragonal morphotropic phase boundary (MPB). Both the relative dielectric permittivity ($\varepsilon$r)and the piezoelectric constant($d_33$)/electromechanical coupling constant ($k_p$)were increased by thermal annealing ($800^{\circ}$~$900^{\circ}C$) after sintering at $1150^{\circ}C$ for 1 hr. Based on the dielectric analysis using the series mixing model and the concept of a random distribution of the local Curie points, the observed improvements in the dielectric and piezoelectric properties of PZMN-PT were interpreted in terms of the elimination of PbO-rich amorphous intergranular layers(~1nm) induced by thermal annealing. A concrete evidence of the presence of amorphous grain-boundary layers in the unannealed (as-sintered) specimen was obtained by examining the structure of intergranular region using a TEM.

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