• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.82-83
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• 2007

DBD type을 이용한 remote plasma에서 발생된 대기압 플라즈마를 이용하여, PR에 대한 식각 실험을 진행하였다. 과거 습식 화학적 공정에서 오던 기술적 제한의 극복과 진공 플라즈마 가지는 단점을 극복하기 위해 대기압 플라즈마를 이용한 건식 세정에 관한 연구를 진행하였고, 이 때 Gas는 $N_2/O_2$+$SF_6$ 의 조합으로 사용하였으며, 각 gas의 유량에 다른 remote 플라즈마의 전기적, 광학적 특성에 대해 관찰하였다.

• 한국대기환경학회지
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• 제23권6호
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• pp.727-733
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• 2007

In this study, a newly developed biotrickling system, combined with a non-thermal plasma reactor, was investigated to effectively treat gaseous contaminants such as VOCs (Volatile Organic Compounds). Three kinds of non-thermal plasmas (NTPs) such as a rod type dielectric barrier discharge (DBD) plasma, a packed bead type DBD plasma and a gliding arc (GA) plasma, were tested and compared in terms of power consumption. The rod type DBD plasma was selected as one for integration with biotrickling system due to its relatively high VOC removal efficiency, low power consumption and low pressure drop. Toluene and xylene as representatives of VOCs were used as test gases. The experiment results showed that the efficiency of biotrickling system was especially very low at the high gas concentration and high flow rate and the removal efficiencies of VOCs were considerably enhanced in the biotrickling system, when the DBD plasma was worked in front of that even at the high gas concentration and high flow rate.

• 한국환경과학회지
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• 제27권8호
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• pp.621-629
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• 2018

Many chemically active species such as ${\cdot}H$, ${\cdot}OH$, $O_3$, $H_2O_2$, hydrated $e^-$, as well as ultraviolet rays, are produced by Dielectric Barrier Discharge (DBD) plasma in water and are widely use to remove non-biodegradable materials and deactivate microorganisms. As the plasma gas containing chemically active species that is generated from the plasma reaction has a short lifetime and low solubility in water, increasing the dissolution rate of this gas is an important challenge. To this end, the plasma gas and water within reactor were mixed using the air-automizing nozzle, and then, water-gas mixture was injected into water. The dissolving effect of plasma gas was indirectly confirmed by measuring the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the formation of OH radical) solution. The plasma system consisted of an oxygen generator, a high-voltage power supply, a plasma generator and a liquid-gas mixing reactor. Experiments were conducted to examine the effects of location of air-automizing nozzle, flow rate of plasma gas, water circulation rate, and high-voltage on RNO degradation. The experimental results showed that the RNO removal efficiency of the air-automizing nozzle is 29.8% higher than the conventional diffuser. The nozzle position from water surface was not considered to be a major factor in the design and operation of the plasma reactor. The plasma gas flow rate and water circulation rate with the highest RNO removal rate were 3.5 L/min and 1.5 L/min, respectively. The ratio of the plasma gas flow rate to the water circulation rate for obtaining an RNO removal rate of over 95% was 1.67 ~ 4.00.

• 한국산업보건학회지
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• 제29권3호
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• pp.414-419
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• 2019

Objectives: The objective of this study was to evaluate the inhibitory effect of non-thermal dielectric barrier discharge (DBD) plasma by air volume against Mycobacterium tuberculosis (MTB). Methods: Plasma generators (TB-300, Shinyoung Airtec, Seongnam-si, Korea) were operated in a 2A type biosafety cabinet. The plasma generator was set to a wind flow rate of 14 ($80m^3/h$), 18 ($110m^3/h$), and 22 ($150m^3/h$), and exposure times were set to 0 hours, 3 hours, 6 hours, 9 hours, and 24 hours. Results: The inhibitory effects of plasma at air volume 14 with prolonged exposure time of three hours was 20%, 64% at six hours, 82.3% at nine hours, and 100% after 24 hours exposure. With air volume of 18, the inhibitory effects upon plasma exposure were 36% for three hours, and 100% from 24 hours. Greater air volume resulted in greater inhibition of tuberculosis bacterial growth. In particular, the maximum inhibitory effect (100%) was shown in air volume of 22 ($150m^3/h$) after three hours of plasma exposure. Conclusions: The results showed the correlating inhibitory effects of plasma on the growth of MTB in combination with increasing plasma exposure time and air volume.

• 폴리머
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• 제29권6호
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• pp.581-587
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• 2005

상업용 폴리우레탄(PU) 필름의 표면 개질 목적으로 대기압에서 플라스마를 발생시키기 위한 dielectric barrier discharge(DBD) 구조의 평판형 플라스마 반응기 내에서 이온화된 아르곤 플라스마를 사용하였다. 플라스마 처리 공정변수인 처리 시간, 처리 RF-power, 아르곤 가스 유속을 변화시켜가며 접촉각을 측정하여 젖음성과 표면 자유 에너지 변화를 알아보았고, 필름 표면 위에 과산화물을 최대로 도입시키기 위해 플라스마 처리 공정변수를 최적화하였다. 대기압 플라스마 처리 시간 70초, RF-power 120 W, 아르곤 가스유속 6 liter per minute(LPM)에서 가장 높은 젖음성과 표면 자유 에너지 값을 보였고, 1,1-diphenyl-2-picrylhydrazy(DPPH) 법을 사용하여 PU 필름의 표면에 생성된 과산화물의 농도를 정량한 결과, 처리 시간 30초, RF-power 80 W, 아르곤 가스유속 6 LPM의 플라스마 처리 조건에서 최대 2.1 nmol/$\cm^{2}$의 과산화물이 생성되었다.

• Journal of electromagnetic engineering and science
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• 제18권1호
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• pp.63-69
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• 2018

This work demonstrates attenuation effects of plasma on waves propagating in the 26.5-40 GHz range. The effect is investigated via experiments measuring the transmission between two Ka-band horn antennas set 30 cm apart. A dielectric-barrier-discharge (DBD) plasma generator with a size of $200mm{\times}100mm{\times}70mm$ and consisting of 20 layers of electrodes is placed between the two antennas. The DBD generator is placed in a $400mm{\times}300mm{\times}400mm$ acrylic chamber so that the experiments can be performed for plasma generated under various conditions of gas and pressure, for instance, in air, Ar, and He environments at 0.001, 0.05, and 1 atm of pressure. Attenuation is calculated by the difference in the transmission level, with and without plasma, which is generated with a bias voltage of 20 kV in the 0.1-1.4 kHz range. Results show that the attenuation varies from 0.05 dB/m to 9.0 dB/m depending on the environment. Noble gas environments show higher levels of attenuation than air, and He is lossier than Ar. In all gas environments, attenuation increases as pressure increases. Finally, electromagnetic models of plasmas generated in various conditions are provided.

• Elastomers and Composites
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• 제39권1호
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• pp.3-11
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• 2004

플라즈마 표면처리는 표면 관능기 표면 활성도 등을 증가시켜 촉매적 선택성, 염색성 및 다양한 소재의 접착력을 증가시켜주는데 큰 역할을 담당한다. 본 연구에서는 dielectric barrier discharge (DBD)를 이용한 상압 플라즈마 토치로 ethylene-vinyl acetate (EVA)의 표면을 처리하였다. 이때 사용된 가스는 아르곤, 공기, 및 산소를 이용하였으며, 표면처리에 따른 EVA의 표면 특성을 제타전위와 표면자유에너지를 이용하여 관찰하였다. 그 결과, 상압 플라즈마 표면처리에 따른 EVA의 표면 관능기는 접착 에너지 ($G_{IC}$)와 비례관계를 가지며 증가하는 것을 확인하였다. 특히, 상압 플라즈마 표면처리 공정은 EVA와 polyurethane (PU) 계면의 접착력을 크게 증가시켜 주는 것을 확인하였다.

• Korean Chemical Engineering Research
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• 제56권1호
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• pp.125-132
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• 2018

유전체 장벽 방전 반응기에서 규칙적인 메조기공 갖는 촉매를 사용하여 플라즈마 에너지를 이용한 메탄의 직접전환반응 연구를 수행하였다. 촉매는 MgO/OMA (ordered mesoporous alumina), $MgO/{\gamma}-Al_2O_3$와 $MgO/{\alpha}-Al_2O_3$를 사용하여 반응하였다. Pulse 고전압을 이용한 플라즈마 반응기에서 촉매 MgO/OMA를 사용하였을 때 $C_2$ 화합물의 선택도는 67%로 최고의 성능을 나타내었다. 금속산화물 종류, 규칙적인 메조기공 구조, 알루미나의 상변화 그리고 전원공급방식에 따른 효과를 고려하여 반응기 성능 및 생성물 분포를 비교하였다. BET (Brunauer, Emmett, Teller), X 선 회절, 주사전자현미경, 열 무게 분석으로 촉매의 반응 전후의 특성을 분석하였다.

• 한국환경과학회지
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• 제23권3호
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• pp.369-378
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• 2014

Effect of improvement of the dielectric barrier discharge (DBD) plasma system on the inactivation performance of bacteria were investigated. The improvement of plasma reactor was performed by combination with the basic plasma reactor and UV process or combination with the basic plasma reactor and circulation system which was equipped with gas-liquid mixer. Experimental results showed that tailing effect was appeared after the exponential decrease in basic plasma reactor. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of basic plasma process and UV process. The application of gas-liquid mixing device on the basic plasma reactor reduced inactivation time and led to complete sterilization. The effect existence of gas-liquid mixing device, voltage, air flow rate (1 ~ 5 L/min), water circulation rate (2.8 ~ 9.4 L/min) in gas-liquid mixing plasma, plasma voltage and UV power of gas-liquid mixing plasma+UV process were evaluated. The optimum air flow rate, water circulation rate, voltage of gas-liquid mixing system were 3 L/min, 3.5 L/min and 60 V, respectively. There was no enhancement effect on the Ralstonia Solanacearum inactivation with combination of gas-liquid mixing plasma and UV process.

• 한국표면공학회지
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• 제44권2호
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• pp.50-54
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• 2011

Hydrophobic a-C:F film was coated on polycarbonate film with $CF_4$, $C_2F_6$ and HFC ($C_2F_4H_2$) gas in helium discharge generated by 5~100 kHz AC power supply at atmospheric pressure and room temperature. The highest water contact angle of the a-C:F film formed with $He/C_2F_6$ mixed gas is $155^{\circ}$. X-ray photoelectron spectrum showed that there was 40% of C-$CF_3$ bond at the surface of the super hydrophobic film. The contact angle and deposition rate were decreased with increasing substrate temperature. The contact angle was generally increased with the surface roughness of the film. The contact angle was high when the surface microstructure of the film was fine and sharp at the similar roughness and chemical composition of the surface.