• Transactions of the Korean Society of Automotive Engineers
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• v.23 no.6
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• pp.656-662
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• 2015

In the present study, multi-layered Si DLC (Silicon Diamond-Like Carbon) coatings with HMDSO (Hexamethyldisiloxane) buffer layers are applied on SKD 11 substrates by PECVD (Plasma Enhanced Chemical Vapor Deposition) with different HMDSO gas flow rates, while the gas flow rate of $C_2H_2$ is fixed to enhance the electric resistivity of forming dies for electrically assisted forming. The HMDSO buffer layer is introduced to increase adhesion between the base metal and Si-DLC layers. The result of evaluation of electric resistivity and adhesion strength shows that the properties are affected by the flow rate of HMDSO, while the flow rate of 80 sccm results in the coating with the highest electric resistivity and adhesion strength among the selected flow rates.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.3
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• pp.224-230
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• 2007

This work is aimed to explore a possibility of using the generalized Lamb waves for nondestructive evaluation of the bonding quality of layered substrates. For this purpose, we prepared two sets of specimens with imperfect bonding at their interfaces; 1) TiN-coated specimens with various wear conditions, and 2) CVD diamond specimens with various cleaning conditions. A dispersion simulation performed for layered substrates with imperfect interfaces are carried out to get the characteristics of dispersion curves that can be used for bonding quality evaluation. Then the characteristics of dispersion curves of the fabricated specimens are experimentally determined by use of an ultrasonic backward radiation measurement technique. The results obtained in the present study show that the lowest velocity mode (Rayleigh-like) of the generalized Lamb waves are sensitively affected by the bonding quality. Therefore, the generalized Lamb waves can be applied for nondestructive evaluation of imperfect bonding quality in various layered substrates.

• Corrosion Science and Technology
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• v.14 no.5
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• pp.218-225
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• 2015

The electrochemical behaviors of various metals with and without diamond-like-carbon (DLC) coating in 3.5 wt% NaCl solution were investigated. The effect of hydrodynamic conditions was focused by employing a rotating disc electrode (RDE). The experimental results showed that each bare metal had a more positive corrosion potential and a higher corrosion rate due to enhanced oxygen transport at the higher rotating speed of the RDE. DLC coating caused a substantial increase in the corrosion resistance of all metals studied. However, localized corrosion was still found in the DLC-coated metal at sites where deposition defects existed. Surface morphology examination was performed after the electrochemical test to confirm the roles of hydrodynamic conditions and DLC coating.

• Journal of Sensor Science and Technology
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• v.31 no.4
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• pp.255-259
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• 2022

In this study, we fabricated ZnS substrates with excellent transmittance in the mid-infrared region (3-5 ㎛) using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon (DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance efficiency. To reduce the reflectance and further improve transmittance in the mid-infrared region, anti-reflection (AR) coating was designed for DLC/ZnS /AR and AR/ ZnS /AR structures. The coating structure, microstructure, and optical properties of the AR-coated ZnS substrates were subsequently investigated by employing energy dispersive X-ray spectroscopy, scanning electron microscopy, and Fourier-transform infrared (FTIR) spectroscopy. The FTIR spectroscopy results demonstrated that, in the mid-infrared region, the average transmittance of the samples with AR coating on one and both sides increased by approximately 18% and 27%, respectively. Thus, AR coating improved the transmittance of the ZnS substrates.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• Korean Journal of Materials Research
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• v.21 no.3
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• pp.149-155
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• 2011

We investigated tribological characteristics of diamond-like carbon (DLC) in a condition with carbon nanotube (CNT) content of 1wt% in aqueous solution. Si-DLC films were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process on Al6061 aluminum alloy. In this study, the deposition of DLC films was carried out in vacuum with a chamber pressure of 10-5 to 10-3 Torr achieved by mechanical pump followed by turbo molecular pump. The surface adsorbed oxygen on the Aluminum substrates was removed by passing Ar gas for 10 minutes. The RF power was maintained at 500W throughout the experiment. A buffer layer of HMDSO was deposited on the substrate to improve the adhesion of DLC coating. At this point CH4 gas was introduced in the chamber using gas flow controller and DLC coating was deposited on the buffer layer along with HMDSO for 50 min. The thickness of 1 ${\mu}m$ was obtained for DLC films on aluminum substrates The tribological properties of as synthesized DLC films were analyzed by wear test in the presence of dry air, water and lubricant such as CNT ink.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.1
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• pp.26-33
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• 2016

In this study, a new method to develop a fixed diamond wire for silicon wafer machining by the multi-wire cutting method was developed. The new twist diamond wire has improved performance with high breaking strength and chip flutes structure. According to these characteristics, the new twist diamond wire can be used in the higher speed multi-wire cutting process with a long lifetime. Except the design of the new structure, the twist diamond wire is coating by electroless-electroplating process. It is good for reducing breakage and the falling-off of diamond grains. Based on the silicon material removal mechanism and performance of the wire-cutting machine, the optimal processing condition of the new twist diamond wire has been derived via mathematical analysis. At last, through the tensile testing and the machining experiments, the performance of the twist diamond wire has been obtained to achieve the development goals and exceed the single diamond wire.

• The Journal of Korean Academy of Prosthodontics
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• v.46 no.2
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• pp.209-216
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• 2008

Statement of problem: It is difficult about assessing the loosening tendency of conical connection type implant after cyclic loading with diamond like carbon coating one-piece abutments, and also about the retightening effect. Purpose: This study was performed to investigate the influence of one-piece abutment screw retightening after $5.0{\times}10^{4}$ cyclic loading and Diamond like coating Material and methods: Thirty two ITI implant were divided to 4 groups. Group 1,3-titanium abutment, group 2,4 - diamond like carbon coated abutment. Group 1,2 - $20.0{\times}10^{4}$ cyclic loading after $5.0{\times}10^{4}$ cyclic loading, Group 3,4- after $20.0{\times}10^{4}$ Cyclic loading. After cyclic loading, periotest values were taken and removal torque values of abutments were measured with a digital torque gauge. Results: 1. The removal torque of group 2 after $5.0{\times}10^{4}$ cyclic loading is slightly greater than the other groups but not significantly higher than others (P>0.05). 2. The final removal torque values after $20.0{\times}10^{4}$ cyclic loading of group 1 is bigger than group 3, and group 2 is bigger than group 4, but not significantly higher (P>0.05). 3. The final removal torque values after $20.0{\times}10^{4}$ cyclic loading of all groups are not significantly different (P>0.05).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.17-18
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• 2007

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2003.10a
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• pp.185-189
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• 2003

The effect of surface roughness of the substrate on HF-CVD diamond coating was researched. The surface roughness was changed variously by electro-chemical etching conditions. The etching process acted to remove the metallic cobalt from the WC-Co. Diamond nucleation density was higher in etched the substrate. Therefore, the etching process was effective in both Co-removal and higher surface roughness, leading to the improving the diamond nucleation and deposition.