• 제목/요약/키워드: Deposition transfer

검색결과 360건 처리시간 0.028초

Transfer-free growth of graphene by Ni-C co-deposition

  • An, Sehoon;Lee, Geun-Hyuk;Song, Inseol;Jang, Seong Woo;Lim, Sang-Ho;Han, Seunghee
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
    • /
    • pp.109.2-109.2
    • /
    • 2015
  • Graphene, as a single layer of $sp^2$-bonded carbon atoms packed into a 2D honeycomb crystal lattice, has attracted much attention due to its outstanding properties such as high carrier mobility, chemical stability, and optical transparency. In order to synthesize high quality graphene, transition metals, such as nickel and copper, have been widely employed as catalysts, which need transfer to desired substrates for various applications. However, the transfer steps inevitably induce defects, impurities, wrinkles, and cracks of graphene. Here, we report a facile transfer-free graphene synthesis method through nickel and carbon co-deposited layer, which does not require separately deposited catalytic nickel and carbon source layers. The 100 nm NiC layer was deposited on the top of $SiO_2/Si$ substrates by nickel and carbon co-deposition. When the sample was annealed at $1000^{\circ}C$, the carbon atoms diffused through the NiC layer and deposited on both sides of the layer to form graphene upon cooling. The remained NiC layer was removed by using nickel etchant, and graphene was then directly obtained on $SiO_2/Si$ without any transfer process. Raman spectroscopy was carried out to confirm the quality of resulted graphene layer. Raman spectra revealed that the resulted graphene was at high quality with low degree of $sp^3$-type structural defects. Furthermore, the Raman analysis results also demonstrated that gas flow ratio (Ar : $CH_4$) during the NiC deposition and annealing temperature significantly influence not only the number of graphene layers but also structural defects. This facile non-transfer process would consequently facilitate the future graphene research and industrial applications.

  • PDF

New SMOLED Deposition System for Mass Production

  • Lee, J.H.;Kim, C.W.;Choi, D.K.;Kim, D.S.;Bae, K.B.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
    • /
    • pp.407-410
    • /
    • 2003
  • We will introduce our new concept deposition system for SMOLED manufacturing in this conference. This system is designed to deposit organic and metal material to downward to overcome the limit of substrate size and process tact time hurdle for OLED mass production, and is organized with organic deposition chamber, substrate pre-cleaning chamber, metal deposition chamber and encapsulation system. These entire process chambers are integrated with linear type substrate transfer system. We also compare our new SMOLED manufacturing system with conventional vacuum deposition systems, and show basic organic thin film property data, organic material deposition property data, and basic device property.

  • PDF

수정된 화학증착공정에서 에어로졸 역학, 열전달 및 물질전달 해석 (Analysis of Aerosol Dynamics, Heat and Mass Transfer in the Modified Chemical Vapor Deposition)

  • 박경순;이방원;최만수
    • 대한기계학회논문집B
    • /
    • 제23권2호
    • /
    • pp.262-271
    • /
    • 1999
  • A study of aerosol dynamics has been done to obtain axially and radially varying size distributions of particles generated in the Modified Chemical Vapor Deposition process. Heat and mass transfer have also been studied since particle generation and deposition strongly depend on the temperature field in a tube. Bimodal size distributions of particles have been obtained both in the particulate flow and in the deposited particle layer for the first time using the sectional method to solve aerosol dynamics. Variations of geometric mean diameter, geometric standard deviation have been studied for various parameters; flow rates and maximum wall temperature. The comparison between one-dimensional and two-dimensional approaches has also been made.

황산용액 중에서 전해철표면상에 안연-니켈 합금도금에 관한 속도론적 연구 (A Kinetic Study on the Zinc-Nickel Plating on an Elstrolytic Sulface Bathe)

  • 이응조;노재호
    • 한국표면공학회지
    • /
    • 제22권3호
    • /
    • pp.118-127
    • /
    • 1989
  • The rate of electrodeposition Zinc-nickel alloy on to electrolytic ione in sulface solution both under an inter and air atmospherss has studied by use of a rotating disc geometry. The kinetics shows 1st order reaction, and the rate constants are proportional to the square root of rpm, however, they are less than the valuse suggested by Levich. The rate constants of zinc deposition approach the total mass transfer rate constants with increasing potential and deviate with increasing rotaing speed, but those of nickel deposition are constant. Below $40^{\circ}C$ the activation engrgies of zinc deposition and nikel deposition were 4.4Kcal/mol and 6.3Kcal/mol respectively. There results show that overall reaction rate of zinc-nickel plaeting is controlled by mixed reaction and zinc deposotion is more affected by mass transfer reaction than nickel. The current density for the zinc-nickel plating was less in an air atmosphere than in a nitrogen atmosphere. The cathode efficiency increased with decreasing cathode rotating speeds, potentials, and increasing temperatures. Zzinc-nickel platings are more improved in microhardnss than zinc platings.

  • PDF

다결정 실리콘의 화학증착에 대한 연구 (A Study on Chemical Vapor Deposition of Polycrystalline Silicon.)

  • 소명기
    • 산업기술연구
    • /
    • 제2권
    • /
    • pp.13-19
    • /
    • 1982
  • Polycrystalline silicon layers have been deposited by a chemical vapor deposition technique using $SiCl_4$, $H_2$ gas mixture on single crystal silicon substrates. In this work, the effects of depostion temperature and total flow rate on the deposition rate of polycrystalline silicon are investigated. From the experimental results it was found that the formation reaction of polycrystalline silicon was limited by surface reaction and mass transfer controlled as the deposition temperature was increased. The morphology of polycrystalline silicon layer changed from a fine structure to a coarse one as the deposition temperature was increased.

  • PDF

DED 공정을 이용한 ATC 부품의 재제조를 위한 열-기계 특성 고찰 (Investigation of Thermo-mechanical Characteristics for Remanufacturing of a ATC Part using a DED Process)

  • 이광규;안동규
    • 소성∙가공
    • /
    • 제33권4호
    • /
    • pp.277-284
    • /
    • 2024
  • Interest in remanufacturing of part has significantly increased to reduce used material and energy together. The directed energy deposition (DED) process has widely applied to remanufacturing of the part. An excessive residual stress takes place in the vicinity of the deposited region by the DED process due to rapid heating and rapid cooling (RHRC) phenomenon. The excessive residual stress decreases the reliability of the remanufactured part. Therefore, thermo-mechanical analysis for the remanufacturing of the part is needed to investigate heat transfer and residual stress characteristics in the vicinity of the deposited region. The thermo-mechanical analysis of a large volume deposition is significantly difficult to perform due to the requirement of a long computation time and a large computer memory. The goal of this paper is to investigate thermo-mechanical characteristics for remanufacturing of the ATC part using a DED process. The methodology of the thermo-mechanical analysis for a large volume deposition is proposed. From the results of analysis, heat transfer and residual stress characteristics during deposition and cooling stages are investigated. In addition, the proper deposition strategy from the viewpoint of the residual stress is discussed.

매체순환식 가스연소기용 대량생산입자의 연료별 환원반응특성 (Reduction Characteristics of Mass Produced Particle for Chemical-Looping Combustor with Different Fuels)

  • 류호정;김경수;이승용;박영성;박문희
    • 한국수소및신에너지학회논문집
    • /
    • 제19권4호
    • /
    • pp.348-358
    • /
    • 2008
  • Reduction reactivity and carbon deposition characteristics of mass produced oxygen carrier particle(OCN-650) have been investigated by using hydrogen, methane, syngas, and natural gas as fuels. For all fuels, the maximum conversion and oxygen transfer capacity increased as the temperature increase. The reduction rate and the oxygen transfer rate increased as the temperature increase for methane. However, those values showed maximum at 900$^{\circ}C$ for hydrogen, syngas, and natural gas. To explain consistently the change of maximum conversion, reduction rate, oxygen transfer capacity, oxygen transfer rate and degree of carbon deposition for different fuels, new parameters such as reactive carbon contents and require oxygen per input gas were adopted.

낙동강 하구의 퇴적물 이동특성에 관한 연구 (A Study on characteristics of sediment transfer in Nakdong estuary)

  • 전용호;이인철;류청로
    • 한국해양공학회:학술대회논문집
    • /
    • 한국해양공학회 2004년도 학술대회지
    • /
    • pp.161-166
    • /
    • 2004
  • Research for deposits in Nakdong eatuary that research about Nakdong eatuary's sediment flows out in Nakdong-kang so far had been progressed but research about deposits that is flowed in open sea is insufficient. Observed Nakdong eatuary's characteristic of sediment transfer through observation during the second during Buteo 20 days on February 6, 2004 in this research Resuspension bed load Flux appeared high the first result St.4 point and St.5 point. St.4 branch had much bed load amount that is flowed in the east, and bed load that St.5 branch is flowed in the south appeared much Tendency such as the first showed in the second result, but compare with the first result and St.5 branch had much bed load that is transfer in end. Bed load that is transfer in observation result Nakdong river was less. As this, can know that amount of sediment that is transfer in open sea more than deposits that is transfer in Nakdong river is much Is expected to exert effect that deposits that is transfer in open sea is high in Nakdong estuary's topography change. Specially, observation result is expected that Nakdong estuary's deposition tendency becomes Jinwoodo southern and Shinho southern.

  • PDF

DED 공정을 이용한 S45C 위 Hastelloy X 분말 적층 시 기저부 상과 경사각이 적층부 인근 열전달 특성에 미치는 영향에 관한 연구 (Influence of Substrate Phase and Inclination Angle on Heat Transfer Characteristics in Vicinity of Hastelloy X Regions Deposited on S45C via Directed Energy Deposition)

  • 백선호;이광규;안동규;김우성;이호진
    • 한국기계가공학회지
    • /
    • 제20권10호
    • /
    • pp.27-37
    • /
    • 2021
  • The use of additive manufacturing processes for the repair and remanufacturing of mechanical parts has attracted considerable attention because of strict environmental regulations. Directed energy deposition (DED) is widely used to retrofit mechanical parts. In this study, finite element analyses (FEAs) were performed to investigate the influence of the substrate phase and inclination angle on the heat transfer characteristics in the vicinity of Hastelloy X regions deposited via DED. FE models that consider the bead size and hatch distance were designed. A volumetric heat source model with a Gaussian distribution in a plane was adopted as the heat flux model for DED. The substrate and the deposited powder were S45C structural steel and Hastelloy X, respectively. Temperature-dependent thermal properties were considered while performing the FEAs. The effects of the substrate phase and inclination angle on the temperature distributions and depth of the heat-affected zone (HAZ) in the vicinity of the deposited regions were examined. Furthermore, the influence of deposition paths on depths of the HAZ were investigated. The results of the analyses were used to determine the suitable phase and inclination angle of the substrate as well as the appropriate deposition path.

Synthesis of Graphene by Plasma Enhanced Chemical Vapor Deposition and Its transfer for Device Application

  • 서동익;한정윤;김언정;박완준
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
    • /
    • pp.277-277
    • /
    • 2010
  • In this report, we present a very effective growing method of graphene using plasma enhanced chemical vapor deposition(PECVD). The graphene is successfully grown on copper substrate. Low temperature growing is obtained with methane and hydrogen plasma. The graphene layers are analyzed by Raman spectroscopy and atomic force microscope. We also provide a transfer technique of graphene layer onto silicon substrate to build up various kinds of application devices.

  • PDF