• 제목/요약/키워드: Deposition transfer

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수정된 화학증착과정에서 토치이송과 고체층이 열전달과 입자부착에 미치는 영향 (Effect of Torch Speed and Solid Layer Thickness on Heat Transfer and Particle Deposition During modified Chemical Vapor Deposition Process)

  • 박경순;최만수
    • 대한기계학회논문집
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    • 제18권5호
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    • pp.1301-1309
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    • 1994
  • A study of heat transfer and thermophoretic particle deposition has been carried out for the Modified Chemical Vapor Deposition(MCVD) process. A new concept utilizing two torches is suggested to simulate the heating effects from repeated traversing torches. Calculation results for the wall temperatures and deposition efficiency are in good agreement with experimental data. The effects of variable properties are included and heat flux boundary condition is used to simulate the moving torch heating. A conjugate heat transfer which includes heat conduction through solid layer and heat teansfer in a gas in a tube is analyzed. Of particular interests are the effects of torch speeds and solid layer thicknesses on the deposition efficiency, rate and the tapered entry length.

외부증착(OVD)공정에 관한 열전달과 입자부착에 관한 연구 (A Study of Heat Transfer and Particle Deposition During Outside Vapor Deposition Process)

  • 송영휘;최만수;강신형
    • 대한기계학회논문집
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    • 제18권1호
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    • pp.193-202
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    • 1994
  • A study of heat transfer and particle deposition has been made numerically for outside vapor deposition process. Heat conduction through the two layer cylinder which consists of the target and the deposited layer is included together with heat transfer and gas jet flow onto the cylinder from the torch. Temperature and flow fields have been obtained by an iterative method and thermophoretic particle deposition has been studied. Of particlar interests are effects of the thickness of the deposited layer, the torch speed and the rotation speed of the cylinder on particle deposition flux and efficiency. Effects of buoyancy, variable properties and tube rotation are included.

고용착 GMA 용접의 Arc 안정성 및 용적이행 현상에 미치는 보호gas의 영향 (Effect of Shielding gas Composition on Arc Stability and Transfer mode of High deposition GMA Welding)

  • 경규담;천홍정;이정헌;강봉용;김희진
    • Journal of Welding and Joining
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    • 제15권1호
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    • pp.109-115
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    • 1997
  • The arc stability and the metal transfer mode of high deposition GMA welding were investigated using various compositions of shielding gas with two types of filler, ie solid wire and metal cored wire. As for a solid wire, the transfer mode changed from axial spray to rotational spray with increasing wire feed rate (welding current) and the transition current was different with the gas composition. The gas composition also affected the apparent stability of rotating arc. As for a metal cored wire, on the other hand, no transition occurred and thus spray transfer mode could be applied with the welding current over 500A (deposition rate over 300g/min). Looking for the development of high deposition GMA welding process, above results were discussed in two different ways, one is to elevate the transition current, the other is to stabilize the rotational transfer mode.

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외부증착공정(OVD)에서 열전달 및 입자부착에 관한 실험적 연구 (An experimental study of heat transfer and particle deposition during the outside vapor deposition process)

  • 김재윤;조재걸
    • 대한기계학회논문집
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    • 제19권11호
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    • pp.3063-3071
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    • 1995
  • An experimental study has been carried out for the heat transfer and particle deposition during the Outside Vapor Deposition process. The surface temperatures of deposited layers, and the rates, efficiencies and porosities of particle deposition were measured. It is shown that the axial variation of the surface temperature can be assumed to be quasi-steady and that as the traversing speed of burner is increased, the deposition rate, efficiency and porosity increase due to the decreased surface temperature. As the flow rate of the chemicals is increased, both the thickness of deposition layers and the surface temperature increase. Deposition rate also increases, however, deposition efficiency decreases for tests done. Later passes in early deposition stage result in higher surface temperatures due to increased thickness of porous deposited layers, which cause the deposition rate, efficiency, and porosity to decrease.

수정된 화학증착방법에서 비정상 열 및 물질전달 해석 (A study of unsteady heat and mass transfer in the modified chemical vapor deposition process)

  • 박경순;최만수
    • 대한기계학회논문집B
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    • 제21권1호
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    • pp.79-88
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    • 1997
  • An analysis of unsteady heat and mass transfer in the Modified Chemical Vapor Deposition has been carried out including the effects of chemical reaction and variable properties. It was found that commonly used quasi-steady state assumption could be used to predict overall efficiency of deposition, however, the assumption would not provide detailed deposition profile. The present unsteady calculations of wall temperature profile and deposition profile have been compared with the existing experimental data and were in good agreement. The effects of variable torch speed were studied. Linearly varying torch speed case until time=120s resulted in much shorter tapered entry than the constant torch speed case.

저압 증기 화합물 증착 공정에서 복사열전달 및 물질전달 해석 (Analysis of Radiative Heat Transfer and Mass Transfer During Multi-Wafer Low Pressure Chemical Vapor Deposition Process)

  • 박경순;최만수;조형주
    • 대한기계학회논문집B
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    • 제24권1호
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    • pp.9-20
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    • 2000
  • An analysis of heat and mass transfer has been carried out for multi-wafer Low Pressure Chemical Vapor Deposition (LPCVD). Surface radiation analysis considering specular radiation among wafers, heaters, quartz tube and side plates of the reactor has been done to determine temperature distributions of 150 wafers in two dimensions. Velocity, temperature and concentration fields of chemical gases flowing in a reactor with multi-wafers have been then determined, which determines Si deposition growth rate and uniformity on wafers using two different surface reaction models. The calculation results of temperatures and Si deposition have been compared and found to be in a reasonable agreement with the previous experiments.

정체점 입자유동에서 복사열전달을 고려한 열영동 입자부착 연구 (A study of thermophoretic particle deposition in a particle laden stagnation flow including the effect of radiative heat transfer)

  • 정창훈;이공훈;최만수;이준식
    • 대한기계학회논문집B
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    • 제20권5호
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    • pp.1624-1638
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    • 1996
  • A study of thermophoretic particle deposition has been carried out for a particle laden stagnation flow considering the effect of radiative heat transfer. Energy, concentration and radiative transfer equations are all coupled and have been solved iteratively assuming that absorption and scattering coefficients were proportional to the local concentration of particles. Radiative heat transfer was shown to strongly affect the profiles of temperature and particle concentration. e. g., radiation increases the thickness of thermal boundary layer and wall temperature gradients significantly. As the wall temperature gradients increase, the particle concentration at the wall decreases due to thermophoretic particle transport. The deposition rate that is thermophoretic velocity times particle concentration at the wall decreases as the effects of radiation increases. The effects of optical thickness, conduction to radiation parameter and wall emissivity have been determined. The effects of anisotropic scattering are shown as insignificant.

유기전하 이동착물 Langmuir-Blodgett막의 누적조건 및 누적확인에 관한 연구 (Deposition condition and Confirmation of Organic Charge Transfer complex Langmuir-Blodgett Film)

  • 정순욱
    • 한국응용과학기술학회지
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    • 제14권1호
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    • pp.89-93
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    • 1997
  • In this research, ultra-thin films of organic charge transfer complex were deposited on to ordinary microscope slide-glass subtrates with a Langmuir-Blodgett technique. ${\pi}$-A isotherm characteristics of these complex were studied in order to find optimum conditions of deposition by varying temperature of subphase, compression speed, and spreading amount. Transfer ratio of these films were studied during the process of deposition. The UV-visible absorbance spectra of LB films were measured to find state of deposition by varing layer number. The observed optimum conditions of surface, pressure, spreading amount, and dipping speed for depositing LB films(Y-type) were 38m/Nm, $150{\mu}l$ and 5mm/min, respectively. Since the tansfer ratio is close to 100%, the monolayer on the subphase seems to be well transferred to the solid substrate. The thickness of the film was well-controlled as the UV-vis absorbance of films were changed linear according to the number of layers.

매체순환식 가스연소기용 산소공여입자들의 연료별 연소특성 (Reduction Characteristics of Oxygen Carrier Particles for Chemical-looping Combustor with Different Fuels)

  • 류호정;김경수;박영성;박문희
    • 한국수소및신에너지학회논문집
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    • 제20권1호
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    • pp.45-54
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    • 2009
  • Reduction reactivity and carbon deposition characteristics of three oxygen carrier particles(OCN01, OCN02, OCN03) have been investigated by using hydrogen, methane, syngas, and natural gas as fuels. For all particles, the maximum conversion, the oxygen transfer capacity, and the degree of carbon deposition increased as the reactive carbon contents increased. The reduction rate and the oxygen transfer rate increased as the moles of required oxygen per input gas increased. The change of maximum conversion, reduction rate, oxygen transfer capacity, oxygen transfer rate and degree of carbon deposition for different fuels can be explained consistently by using parameters such as the reactive carbon contents and the moles of require oxygen per input gas.

Tetrapyrazinoindoloporphyrazine Langmuir-Blodgett Films

  • Kim, Jong-Min;Jaung, Jae-Yun;Ahn, Hee-Joon
    • Macromolecular Research
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    • 제16권4호
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    • pp.367-372
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    • 2008
  • We fabricated tetra(5-n-nonyl-8-tert-butyl-2,3-pyrazino[2,3-b]indolo)porphyrazinato copper(II) (Cu-Pc-$C_8$) Langmuir-Blodgett (LB) films. We further investigated the influence of arachidic acid (AA) as a transfer promoter, as well as the effect of dipping speed, on the deposition of the films on hydrophilic and hydrophobic substrates. In the case of pure Cu-Pc-$C_8$ LB deposition on a hydrophilic substrate, the transfer ratio was close to one for up-stroke depositions, but the previously deposited film was peeled off and re-spread onto water at down-stroke depositions. Whereas the stability of the Cu-Pc-$C_8$ LB films was not improved by AA addition on hydrophilic substrates, the deposition of Cu-Pc-$C_8$ was significantly improved by the presence of AA on a hydrophobic substrate. The AA-assisted deposition had transfer ratio of close to 1 and was essentially stable up to 10-layer depositions. Comparison of the UV-visible spectrum of a Cu-Pc-$C_8$/AA LB film with that of Cu-Pc-$C_8$/AA solution in dichloroethane revealed that the Soret and Q bands for the Cu-Pc-$C_8$/AA LB film were broadened and red-shifted due to the aggregation of phthalocyanines upon assembly in the LB film.