• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.662-662
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• 2013

Over the last several decades, innovative light-harvesting devices have evolved to achieve high efficiency in solar energy transfer. Research on the mechanisms for plasmon resonance is very desirable to overcome the conventional efficiency limits of photovoltaics. The influence of localized surface plasmon resonance on hot electron flow at a metal-semiconductor interface was observed with a Schottky diode composed of a thin silver layer on $TiO_2$. The photocurrent is generated by absorption of photons when electrons have enough energy to travel over the Schottky barrier and into the titanium oxide conduction band. The correlation between the hot electrons and the surface plasmon is confirmed by matching the range of peaks between the incident photons to current conversion efficiency (IPCE, flux of collected electrons per flux of incident photons) and UV-Vis spectra. The photocurrent measured on Ag/$TiO_2$ exhibited surface plasmon peaks; whereas, in contrast to the Au/$TiO_2$, a continuous Au thin film doesn't exhibit surface plasmon peaks. We modified the thickness and morphology of a continuous Ag layer by electron beam evaporation deposition and heating under gas conditions and found that the morphological change and thickness of the Ag film are key factors in controlling the peak position of light absorption.

• Nuclear Engineering and Technology
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• 제43권3호
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• pp.195-204
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• 2011

The effects on pool boiling heat transfer of aqueous solutions of boric acid ($H_3BO_3$) and sodium chloride (NaCl) as working fluids have been studied. Borated and NaCl water were prepared by dissolving 0.5~5% volume concentration of boric acid and NaCl in distilled-deionized water. The pool boiling tests were conducted using $1{\times}1\;cm^2$ flat heaters at 1 atm. The critical heat flux (CHF) dramatically increased compared to boiling pure water. At the end of boiling tests it was observed that particles of boric acid and NaCl had deposited and formed a coating on the heater surface. The CHF enhancement and surface modification during boiling tests were very similar to those obtained from boiling with nanofluids. Additional experiments were carried out to investigate the reliability of the additives deposition in pure water. The boric acid and NaCl coatings disappeared after repeated boiling tests on the same surface due to the soluble nature of the coatings, thus CHF enhancement no longer existed. These results demonstrate that not only insoluble nanoparticles but also soluble salts can be deposited during boiling process and the deposited layer is solely responsible for significant CHF enhancement.

• Membrane and Water Treatment
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• 제3권4호
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• pp.221-230
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• 2012

This study employed the modified fouling index (MFI) to determine the performance of a two-step recycling system - a membrane filtration integrated laminar flow water storage (LFWS) tank followed by an ion exchange process to reclaim ultrapure water (UPW) from the wastewater generated from semiconductor wafer backgrinding and sawing processes. The first step consisted of the utilization of either ultrafiltration (UF) or nanofiltration (NF) membranes to remove solids in the wastewater where the second step consisted of an ion exchanger to further purify the filtrate. The system was able to produce high purity water in a continuous operating mode. However, higher recycling cost could be incurred due to membrane fouling. The feed wastewater used for this study contained high concentration of fine particles with low organic and ionic contents, hence membrane fouling was mainly attributed to particulate deposition and cake formation. Based on the MFI results, a LFWS tank that was equipped with a turbulence reducer with a pair of auto-valves was developed and found effective in minimizing fouling by discharging concentrated wastewater prior to any membrane filtration. By comparing flux behaviors of the improved system with the conventional system, the former maintained a high flux than the latter at the end of the experiment.

• The Korean Journal of Ceramics
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• 제6권2호
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• pp.129-133
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• 2000

Boron nitride films were synthesized with $N_2$ion flux of low energy, up to 100 eV, at different substrate temperatures of no heating, 200, 400, 500, and $800^{\circ}C$, respectively. Boron was supplied by e-beam evaporation at the rate of $1.5\AA$/sec. For all the conditions, hexagonal BN (h-BN) phase was mainly synthesized and high resolution transmission electron microscopy (HRTEM) showed that (002) planes of h-BN phase were aligned vertical to the Si substrate. The maximum alignment occurred around $400^{\circ}C$. In addition to major h-BN phase, transmission electron diffraction (TED) rings identified the formation of cubic BN (c-BN) phase. But HRTEM showed no distinct and continuous c-BN layer. These results suggest that c-BN phase may form in a scattered form even when h-BN phase is mainly synthesized under small momentum transfer by bombarding ions, which are not reconciled with the macro compressive stress model for the c-BN formation.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2004년도 학술대회지
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• pp.161-166
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• 2004

Research for deposits in Nakdong eatuary that research about Nakdong eatuary's sediment flows out in Nakdong-kang so far had been progressed but research about deposits that is flowed in open sea is insufficient. Observed Nakdong eatuary's characteristic of sediment transfer through observation during the second during Buteo 20 days on February 6, 2004 in this research Resuspension bed load Flux appeared high the first result St.4 point and St.5 point. St.4 branch had much bed load amount that is flowed in the east, and bed load that St.5 branch is flowed in the south appeared much Tendency such as the first showed in the second result, but compare with the first result and St.5 branch had much bed load that is transfer in end. Bed load that is transfer in observation result Nakdong river was less. As this, can know that amount of sediment that is transfer in open sea more than deposits that is transfer in Nakdong river is much Is expected to exert effect that deposits that is transfer in open sea is high in Nakdong estuary's topography change. Specially, observation result is expected that Nakdong estuary's deposition tendency becomes Jinwoodo southern and Shinho southern.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.59.1-59.1
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• 2015

In the Linford group at Brigham Young University we have recently developed three new sets of materials for three different areas of separations science: thin layer chromatography (TLC), high performance liquid chromatography (HPLC), and solid phase microextraction (SPME). First, via microfabrication we have grown patterned carbon nanotube (CNT) forests on planar substrates that we have infiltrated with inorganic materials such as silicon nitride. The coatings on the CNTs are conformal and typically deposited in a process like low pressure chemical vapor deposition. The resulting materials have high surface areas, are porous, and function as effective separation devices, where separations on our new TLC plates are typically significantly faster than on conventional devices. Second, we used the layer-by-layer (electrostatically driven) deposition of poly (allylamine) and nanodiamond onto carbonized poly (divinylbenzene) microspheres to create superficially porous particles for HPLC. Many interesting classes of molecules have been separated with these particles, including various cannabinoids, pesticides, tricyclic antidepressants, etc. Third, we have developed new materials for SPME by sputtering silicon onto cylindrical fiber substrates in a way that creates shadowing of the incoming flux so that materials with high porosity are obtained. These materials are currently outperforming their commercial counterparts. Throughout this work, the new materials we have made have been characterized by X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, scanning electron microscopy, transmission electron microscopy, etc.

• 한국진공학회지
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• 제2권4호
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• pp.501-506
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• 1993

The spatial potential distribution of electron cyclotron resonance plasma is measured as a function of tehsubstrate DC bias by Langmuir probe method. It is observed that the substrate DC bias changes the slope of the plasma potential near the subsrate, resulting in changes in flux and energy of the impinging ions across plasma $_strate boundary along themagnetric field. The effect of the substrate DC bias on the low-temperature silicon homoepitaxy (below $560^{\circ}C$) is examine dby in situ reflection high energy electron diffraction (RHEED), cross-section transmission electron microscopy (XTEM),plan-view TEM and high resolution transmision electron microscopy(HRTEM). While the polycrystalline silicon layers are grow withnegative substrate biases, the single crystaline silicon layers are grown with negative substrate biases, the singel crystalline silicon layers are grown with positive substrate biases. As the substrate bias changes form negative to positive values, the growth rate decreases. It is concluded that the control of the ion energy during plasma deposition is very important in silicon epitaxy at low temperatures below $560^{\circ}C$ by UHV-ECRCVD.VD.

• Environmental Engineering Research
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• 제14권1호
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• pp.53-60
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• 2009

The main objective was to develop and assess a dynamic fate and transport model for lead in air, soil, sediment, water and vegetation. Daejeon was chosen as the study area for its relatively high contamination and emission levels. The model was assessed by comparing model predictions with measured concentrations in multi-media and atmospheric deposition flux. Given a lead concentration in air, the model could predict the concentrations in water and soil within a factor of five. Sensitivity analysis indicated that effective compartment volumes, rain intensity, scavenging ratio, run off, and foliar uptake were critical to accurate model prediction. Important implications include that restriction of air emission may be necessary in the future to protect the soil quality objective as the contamination level in soil is predicted to steadily increase at the present emission level and that direct discharge of lead into the water body was insignificant as compared to atmospheric deposition fluxes. The results strongly indicated that atmospheric emission governs the quality of the whole environment. Use of the model developed in this study would provide quantitative and integrated understanding of the cross-media characteristics and assessment of the relationships of the contamination levels among the multi-media environment.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권3호
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• pp.199-205
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• 2006

Patterned sapphire substrates (PSS) were fabricated by a simple wet etching process with $SiO_2$ stripe masks and a mixed solution of $H_2SO_4$ and $H_3PO_4$. GaN layers were epitaxially grown on the PSS under the optimized 2-step growth condition of metalorganic vapor deposition. During the 1st growth step, GaN layers with triangular cross sections were grown on the selected area of the surface of the PSS, and in the 2nd growth step, the GaN layers were laterally grown and coalesced with neighboring GaN layers. The density of threading dislocations on the surface of the coalesced GaN layer was $2{\sim}4\;{\times}\;10^7\;cm^{-2}$ over the entire region. The epitaxial structure of near-UV light emitting diode (LED) was grown over the GaN layers on the PSS. The internal quantum efficiency and the extraction efficiency of the LED structure grown on the PSS were remarkably increased when compared to the conventional LED structure grown on the flat sapphire substrate. The reduction in TD density and the decrease in the number of times of total internal reflections of the light flux are mainly attributed due to high level of scattering on the PSS.

• 대한전자공학회논문지SD
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• 제39권4호
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• pp.26-34
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• 2002

본 논문에서는 반도체 공정 중, 토포그래피 시뮬레이션을 수행함에 있어서, 기존의 셀 모델을 수정하여, 소요되는 메모리의 양을 최소화하는 셀 전진 모델을 개발하였다. 셀 전진 모델은, 전체 시뮬레이션 영역은 물질 정보만으로 나타내지며, 표면의 셀들만으로 리스트가 구성되고, 리스트에 표면 진화 계산에 필요한 정보가 저장된다. 개발된 시뮬레이터는 해석적 모델과 몬테카를로 모델을 이용하여 식각 공정에 있어서 입사이온 분포가 계산되며, 단위 공정 뿐만 아니라 공정 순서도에 따라 적층 캐패시터 또는 디램 셀(DRAM cell) 제조 공정과 같은 통합 공정을 수행한다. 개발된 시뮬레이터를 이용하여 디램 셀 제조 공정 시뮬레이션을 수행하였을 경우에, 소요된 셀은 5,440,500(130×155×270)개였고, 메모리 양은 22MB에 불과하였다.