• 제목/요약/키워드: Deposition during growth

검색결과 294건 처리시간 0.034초

Cyclic 증착방법에 의해성장된 다이아몬드 박막의 cathodoluminescence 특성에 관한 연구 (Cathodoluminescence Study of Diamond Films Grown by Cyclic Deposition Method)

  • 서수형;신완철;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.12-15
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    • 2001
  • Polycrystalline diamond films are deposited by cyclic method. modulating the $H_2$ Plasma and $CH_4+H_2$ plasma during the growth step. Diamond quality is evaluated by FWHM and $I_D/I_G$ ratio obtained from Raman spectroscopic analysis. Structural defects and impurities generated during the growth step are characterized by cathodoluminescence, and the variations between band-A(430 nm) line and nitrogen-related(578 nm) line are investigated as a function of $T_E/T_G$. Furthermore, the correlations between preferential orientation. film morphologies and CL characteristics are also investigated.

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펄스레이저증착법을 이용한 $\textrm{LaAlO}_3$ 박막의 Molecular Beam Epitaxy 성장 (Molecular Beam Epitaxy Grouth of $\textrm{LaAlO}_3$ Thin Film by a Pulsed laser Deposition Technique)

  • 김인선;허남회;박용기
    • 한국재료학회지
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    • 제9권1호
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    • pp.25-29
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    • 1999
  • We have developed a laser molecular beam epitaxy system for the layer-by-layer growth of oxide thin films. Using this system, we could grow and control oxide thin films of LaAlO$_3$in a molecular layer epitaxy mode on the atomically flat SrTiO$_3$ substrate with a LaAlO$_3$single crystal target. Very clear RHEED oscillations were observed during to growth of a LaAlO$_3$ film for a long period under the optimized conditions of substrate temperature at $650^{\circ}C$, oxygen pressure at 1$\times$10\ulcorner torr, and an incident laser fluence of 4.6J/$\textrm{cm}^2$. The height of mono-layer-LaAlO$_3$ film grown during one period of RHEED intensity oscillation was 3.8$\AA$.

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Early Diet Dilution with 40% Rice Hull Induces Lower Body Fat and Lipid Metabolic Programming in Peking Ducks

  • Guo, Xiao Yang;Fang, Yong Jun;Wu, Ling Ying
    • 한국축산식품학회지
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    • 제33권3호
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    • pp.341-347
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    • 2013
  • This study was conducted to evaluate the effect of early diet dilution with 40% rice hull on growth performance, carcass characteristic and composition of meat-type ducks, and to reveal the possible mechanism for decreased body fat deposition. 160 1-day-old White Peking ducks with initial body weight of $44.5{\pm}1.0$ g were allotted to two treatments with 8 replicate pens per treatment and 10 ducks per pen (5 male and 5 female). Ducks were fed with the experimental starter diets diluted with 0% (control, RH0), 40% rice hull (RH40) during 8 to 14 d of age, respectively. Thereafter, all ducks were fed with grower diet. Ducks fed with RH40 diet from 8 to 14 d of age increased (p<0.05) feed intake, decreased (p<0.05) body weight, body weight gain and adjusted feed intake (excluded rice hull), abdominal fat, skin with fat, and fat content in carcass, and reduced (p<0.05) activities of hepatic malic dehydrogenase, glucose-6-phosphate dehydrogenase and fatty acid synthetase. When diet dilution was withdrawn in the re-fed period from 15 to 42 d of age, full compensatory growth of body weight, breast meat and leg meat weight were attained. However, ducks were still less (p<0.05) carcass fat content and showed continually lower (p<0.05) hepatic lipogenic enzyme activities at the market age in RH40 ducks than the control. These results indicated that diluting diet with 40% rice hull during 8 to 14 d of age might be a suitable method to improve feed efficiency, and to reduce carcass fat deposition in the production of meat-type ducks.

In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Property Variation of Ta2O5 Film during the Atomic Layer Deposition

  • Lee, Seung Youb;Jeon, Cheolho;Kim, Seok Hwan;Lee, Jouhahn;Yun, Hyung Joong;Park, Soo Jeong;An, Ki-Seok;Park, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.362-362
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    • 2014
  • Atomic layer deposition (ALD) can be regarded as a special variation of the chemical vapor deposition method for reducing film thickness. ALD is based on sequential self-limiting reactions from the gas phase to produce thin films and over-layers in the nanometer scale with perfect conformality and process controllability. These characteristics make ALD an important film deposition technique for nanoelectronics. Tantalum pentoxide ($Ta_2O_5$) has a number of applications in optics and electronics due to its superior properties, such as thermal and chemical stability, high refractive index (>2.0), low absorption in near-UV to IR regions, and high-k. In particular, the dielectric constant of amorphous $Ta_2O_5$ is typically close to 25. Accordingly, $Ta_2O_5$ has been extensively studied in various electronics such as metal oxide semiconductor field-effect transistors (FET), organic FET, dynamic random access memories (RAM), resistance RAM, etc. In this experiment, the variations of chemical and interfacial state during the growth of $Ta_2O_5$ films on the Si substrate by ALD was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor $Ta(N^tBu)(dmamp)_2$ Me was used as the metal precursor, with Ar as a purging gas and $H_2O$ as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of $Ta_2O_5$ growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the $Ta^{5+}$ state, which corresponds with the stoichiometric $Ta_2O_5$, only appeared after 4.0 cycles. Additionally, tantalum silicide was not detected at the interfacial states between $Ta_2O_5$ and Si. The measured valence band offset value between $Ta_2O_5$ and the Si substrate was 3.08 eV after 2.5 cycles.

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다결정 산화갈륨/다이아몬드 이종 박막 성장 및 열처리 효과 연구 (Growth and thermal annealing of polycrystalline Ga2O3/diamond thin films on Si substrates)

  • 서지연;김태규;신윤지;정성민;배시영
    • 한국결정성장학회지
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    • 제31권6호
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    • pp.233-239
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    • 2021
  • 본 연구에서는 산화갈륨의 방열 특성 향상을 위해 산화갈륨/다이아몬드 이종 박막 성장을 진행하였다. 먼저, 핫필라멘트 화학기상증착법을 이용하여 다결정 다이아몬드를 증착시킨 후, 미스트 화학기상증착법을 통해 450~600℃ 사이의 온도구간에서 산화갈륨 박막을 성장시켰다. 열처리 전후 비교를 통해 500℃에서 산화갈륨/다이아몬드 계면 분리 현상이 발생함을 확인하였다. 이는 비정질과 결정질이 혼재된 산화갈륨 박막이 성장된 후, 냉각 과정에서 열팽창계수의 차이로 인해 계면이 분리된 것으로 판단하였다. 따라서, 본 연구를 통한 산화갈륨/다이아몬드 계면의 물리적 안정성을 통해 산화갈륨의 열물성 보완및 고전력 반도체로의 활용이 기대된다.

Growth of ZnSnO3 Thin Films on c-Al2O3 (0001) Substrate by Pulsed Laser Deposition

  • Manh, Trung Tran;Lim, Jae-Ryong;Yoon, Soon-Gil
    • 한국전기전자재료학회논문지
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    • 제27권5호
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    • pp.297-302
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    • 2014
  • $La_{0.5}Sr_{0.5}CoO_3$ (LSCO) electrode thin films with a resistivity of ~ 1,600 ${\mu}{\Omega}cm$ were grown on c-$Al_2O_3$ (0001) substrate. $ZnSnO_3$ (ZTO) thin films with different thicknesses were directly grown on LSCO/c-$Al_2O_3$ (0001) substrates at a substrate temperature that ranged from 550 to $750^{\circ}C$ using Pulsed Laser Deposition (PLD). The secondary phase $Zn_2SnO_4$ occurred during the growth of ZTO films and it became more significant with further increasing substrate temperature. Polarization-electric-field (P-E) hysteresis characteristics, with a remnant polarization and coercive field of 0.05 ${\mu}C/cm^2$ and 48 kV/cm, respectively, were obtained in the ZTO film grown at $700^{\circ}C$ in 200 mTorr.

Si(111)표면 위에서 Si의 동종층상성장에 관한 연구 (The Study of Si homoepitaxial growth on Si(111) Surface)

  • 곽호원;문병연
    • 한국산업융합학회 논문집
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    • 제7권4호
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    • pp.349-354
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    • 2004
  • The growth mode of the Si layers which were grown on Si(111) by using Ag as surfactant were investigated by intensity oscillations of the RHEED specular spot at the different temperatures. we found that the introduction of Ag as the surfactant alters the growth mode from a three-dimensional clustering mechanism to a two-dimensional layer-by-layer growth. In the growth of Si layers on Si(111) with a surfactant Ag, At $450^{\circ}C$, RHEED intensity oscillation was very stable and periodic from early stage of deposition to 32 ML. RHEED patterns during homoepitaxial growth at $450^{\circ}C$ was changed from $7{\times}7$ structure into ${\sqrt{3}}{\times}{\sqrt{3}}$ structures. Since the ${\sqrt{3}}{\times}{\sqrt{3}}$ structure include no stacking fault, the stacking fault layer seems to be reconstructed into normal stacking one at transition from the $7{\times}7$ structure to a ${\sqrt{3}}{\times}{\sqrt{3}}$ one. We also found that the number of the intensity oscillation of the specular spot for Si growth with a surfactant Ag was more than for Si growth without a surfactant. This result may be explained that the activation energy decrease for the surface diffusion of Si atoms due to segregation of the surfactant toward the growing surface.

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Nutrition-induced Changes of Growth from Birth to First Calving and Its Impact on Mammary Development and First-lactation Milk Yield in Dairy Heifers: A Review

  • Lohakare, J.D.;Sudekum, K.H.;Pattanaik, A.K.
    • Asian-Australasian Journal of Animal Sciences
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    • 제25권9호
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    • pp.1338-1350
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    • 2012
  • This review focuses on the nutritional effects from birth until age at first calving on growth, mammary developmental changes, and first-lactation milk yield in heifer calves. The advancement in the genetic potential and the nutritional requirements of the animals has hastened the growth rate. Genetic selection for high milk yield has suggested higher growth capacity and hence increasing nutritional inputs are required. Rapid rearing by feeding high energy or high concentrate diets not only reduces the age of sexual maturity but also lowers the time period of attaining the age of first calving. However, high energy diets may cause undesirable fat deposition thereby affecting future milk yield potential. Discrepancies exist whether overfed or overweight heifers at puberty can influence the mammary development and future milk yield potential and performance. The data on post-pubertal nutritional management suggested that body weight at calving and post-pubertal growth rate is important in first lactation milk yield. There is a continuous research need for strategic feeding that accelerates growth of dairy heifers without reduction in subsequent production. Nutritional management from birth, across puberty and during pregnancy is critical for mammary growth and for producing a successful cow. This review will mostly highlight studies carried out on dairy breeds and possible available opportunities to manipulate nutritional status from birth until age at first calving.

DEVELOPMENT AND VALIDATION OF THE AEROSOL TRANSPORT MODULE GAMMA-FP FOR EVALUATING RADIOACTIVE FISSION PRODUCT SOURCE TERMS IN A VHTR

  • Yoon, Churl;Lim, Hong Sik
    • Nuclear Engineering and Technology
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    • 제46권6호
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    • pp.825-836
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    • 2014
  • Predicting radioactive fission product (FP) behaviors in the reactor coolant system and the containment of a nuclear power plant (NPP) is one of the major concerns in the field of reactor safety, since the amount of radioactive FP released into the environment during the postulated accident sequences is one of the major regulatory issues. Radioactive FPs circulating in the primary coolant loop and released into the containment are basically in the form of gas or aerosol. In this study, a multi-component and multi-sectional analysis module for aerosol fission products has been developed based on the MAEROS model [1,2], and the aerosol transport model has been developed and verified against an analytic solution. The deposition of aerosol FPs to the surrounding structural surfaces is modeled with recent research achievements. The developed aerosol analysis model has been successfully validated against the STORM SR-11 experimental data [3], which is International Standard Problem No. 40. Future studies include the development of the resuspension, growth, and chemical reaction models of aerosol fission products.

ECR 플라즈마에 의한 알루미늄 질화처리시 표면조도의 영향 (Effect of Surface Roughness on Nitriding of Aluminum by Electron Cyclotron Resonance Plasma)

  • 김진수;안재현;고경현;오수기
    • 한국표면공학회지
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    • 제24권4호
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    • pp.215-221
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    • 1991
  • Microstructure evolution during low temperature vapor deposition exhibits wel-developed columnar structure mainly owing to geometrical shadowing effect of surface roughness. It is concluded that this structure is concided with many theoretical models suggested so far. In case of aluminum nitride film deposition consisted of etching and nitriding step employing ECR plasma, the rougher the surface before etching, the finer and more cone-and-whisker structure can be developed. In turn, this fine structure affects the formation and growth of columnar as well as offers many sites available for mechanical lock-up. Conclusively, the formation of well-defined columnar structures depends on the initial surface roughness.

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