• Title/Summary/Keyword: Deposition Path

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Atomic Layer Deposition-incorporated Catalyst Deposition for the Vertical Integration of Carbon Nanotubes

  • Jung, Sung-Hwan
    • Journal of Electrical Engineering and Technology
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    • v.6 no.5
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    • pp.688-692
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    • 2011
  • Carbon nanotubes (CNTs) are vertically grown inside high-aspect-ratio vertical pores of anodized aluminum oxide. A CNT catalyst layer is introduced by atomic layer deposition to the bottom of the pores, after which the CNTs are successfully grown from the layer using chemical vapor deposition. The CNTs formed a complete vertical conductive path. The conductivity of the CNT-vertical path is also measured and discussed. The present atomic layer deposition-incorporated catalyst deposition is predicted to enable the integration of CNTs with various challenging configurations, including high-aspect-ratio vertical channels or vertical interconnects.

Analysis of Debris Flow Deposition based on Topographic Characteristics of Debris Flow Path (유하부 지형 특성에 따른 토석류 퇴적 분석)

  • Kim, Gihong;Youn, Junhee
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.31 no.6_1
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    • pp.471-481
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    • 2013
  • Recently, the frequency of debris flow disaster has increased, which is one of the natural disasters during extremely heavy rainfall condition. This paper described the analysis method about deposition characteristics of debris flow using topographic characteristics of debris flow path. First, we observed topographic changes by differencing high- resolution LiDAR DEMs acquired before and after the occurrence of debris flow event. We assumed that deposition on outside of debris flow path was generated by movements due to the inertia of debris flows. Then, we analyzed three topographic characteristics of debris flow path: slope in flow direction, transition angle of flow path, and the net efficiency(L/H) of debris flows defined by the ratio of transport length(L) and elevation difference(H). We applied this method to Umyeon Mountain debris flow event in July 2011. The results showed that deposition on outside of debris flow path due to the inertia of debris flows was significantly related to the transition angle of debris flow path. Also, we figured out that there were more frequent such depositions in locations where the ratio of 'transition angle / (L/H)' is over 8.

A Study on the Development of Mist-CVD Equipment Using the ADRIGE Algorithm of the Problem-Solving Method TRIZ (문제해결기법 TRIZ의 ADRIGE 알고리즘을 이용한 초음파분무화학기상증착 장비 개발에 관한 연구)

  • Joohwan Ha;Seokyoon Shin;Changwoo Byun
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.2
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    • pp.133-137
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    • 2023
  • This study the problem of deposition uniformity observed during Mist-CVD deposition experiments. The TRIZ's ADRIGE algorithm, a problem-solving technique, is utilized to systematically analyze the issue and propose solutions. Through problem and resource analysis, technical contradictions are identified regarding the precursor's volume and its path when it encounters the substrate. To resolve these contradictions, the concept of applying the principle of dimensional change to transform the precursor's three-dimensional path into a one-dimensional path is suggested. The chosen solution involves the design of an enhanced Mist-CVD system, which is evaluated for feasibility and analyzed using computational fluid dynamics. The analysis confirms that the deposition uniformity consistently follows a pattern and demonstrates an improvement in uniformity. The improved Mist-CVD equipment is validated through analysis, providing evidence of its feasibility and yielding satisfactory results.

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Lost gamma source detection algorithm based on convolutional neural network

  • Fathi, Atefeh;Masoudi, S. Farhad
    • Nuclear Engineering and Technology
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    • v.53 no.11
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    • pp.3764-3771
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    • 2021
  • Based on the convolutional neural network (CNN), a novel technique is investigated for lost gamma source detection in a room. The CNN is trained with the result of a GEANT4 simulation containing a gamma source inside a meshed room. The dataset for the training process is the deposited energy in the meshes of different n-step paths. The neural network is optimized with parameters such as the number of input data and path length. Based on the proposed method, the place of the gamma source can be recognized with reasonable accuracy without human intervention. The results show that only by 5 measurements of the energy deposited in a 5-step path, (5 sequential points 50 cm apart within 1600 meshes), the gamma source location can be estimated with 94% accuracy. Also, the method is tested for the room geometry containing the interior walls. The results show 90% accuracy with the energy deposition measurement in the meshes of a 5-step path.

Analysis of Laser Control Effects for Direct Metal Deposition Process

  • Choi Joo-Hyun;Chang Yoon-Sang
    • Journal of Mechanical Science and Technology
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    • v.20 no.10
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    • pp.1680-1690
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    • 2006
  • As a promising and novel manufacturing technology, laser aided direct metal deposition (DMD) process produces near-net-shape functional metal parts directly from 3-D CAD models by repeating laser cladding layer by layer. The key of the build-up mechanism is the effective control of powder delivery and laser power to be irradiated into the melt-pool. A feedback control system using two sets of optical height sensors is designed for monitoring the melt-pool and real-time control of deposition dimension. With the feedback height control system, the dimensions of part can be controlled within designed tolerance maintaining real time control of each layer thickness. Clad nugget shapes reveal that the feedback control can affect the nugget size and morphology of microstructure. The pore/void level can be controlled by utilizing pulsed-mode laser and proper design of deposition tool-path. With the present configuration of the control system, it is believed that more innovation of the DMD process is possible to the deposition of layers in 3-D slice.

Influence of Substrate Phase and Inclination Angle on Heat Transfer Characteristics in Vicinity of Hastelloy X Regions Deposited on S45C via Directed Energy Deposition (DED 공정을 이용한 S45C 위 Hastelloy X 분말 적층 시 기저부 상과 경사각이 적층부 인근 열전달 특성에 미치는 영향에 관한 연구)

  • Baek, Sun-Ho;Lee, Kwang-Kyu;Ahn, Dong-Kyu;Kim, Woo-Sung;Lee, Ho-Jin
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.10
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    • pp.27-37
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    • 2021
  • The use of additive manufacturing processes for the repair and remanufacturing of mechanical parts has attracted considerable attention because of strict environmental regulations. Directed energy deposition (DED) is widely used to retrofit mechanical parts. In this study, finite element analyses (FEAs) were performed to investigate the influence of the substrate phase and inclination angle on the heat transfer characteristics in the vicinity of Hastelloy X regions deposited via DED. FE models that consider the bead size and hatch distance were designed. A volumetric heat source model with a Gaussian distribution in a plane was adopted as the heat flux model for DED. The substrate and the deposited powder were S45C structural steel and Hastelloy X, respectively. Temperature-dependent thermal properties were considered while performing the FEAs. The effects of the substrate phase and inclination angle on the temperature distributions and depth of the heat-affected zone (HAZ) in the vicinity of the deposited regions were examined. Furthermore, the influence of deposition paths on depths of the HAZ were investigated. The results of the analyses were used to determine the suitable phase and inclination angle of the substrate as well as the appropriate deposition path.

A Study on the Repair Work for Spindle Key with Damaged Part in Planner Miller by Directed Energy Deposition (DED 방식을 적용한 플래너 밀러의 손상된 스핀들 키 보수 작업에 관한 연구)

  • Lee, Jae-Ho;Song, Jin-Young;Jin, Chul-Kyu;Kim, Chai-Hwan
    • Journal of the Korean Society of Industry Convergence
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    • v.25 no.4_2
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    • pp.699-706
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    • 2022
  • In this study, Directed energy deposition (DED) among additive manufacturing is applied to repair damaged spindle key parts of planner miller. The material of the spindle key is SCM415, and the P21 Powder is used. In order to find the optimal deposition conditions for DED equipment, a single-line deposition experiment is conducted to analysis five parameters. The laser power affects the width, and the height is a parameter affected by coaxial gas and powder gas. In addition, laser power, powder feed rate, coaxial gas, and powder gas are parameters that affect dilution. Otimal deposition is that 400 W of laser power, 4.0 g/min of powder feed rate, 6.5 L/min of coaxial gas, 3.0 L/min of powder gas and 4.5 L/min of shield gas. By setting the optimum conditions, a uniform deposition cross section in the form of an ellipse can be obtained. Damage recovery process of spindle key consists of 3D shape design of the base and deposition parts, deposition path creation and deposition process, and post-processing. The hardness of deposited area with P21 powder on the SCM415 spindle key is 336 HV for the surface of the deposition, 260 HV for the boundary area, and 165 HV for the base material.

Characterization of Diamond-like Carbon Films Prepared by Magnetron Plasma Chemical Vapor Deposition

  • Soung Young Kim;Jai Sung Lee;Jin Seok Park
    • The Korean Journal of Ceramics
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    • v.4 no.1
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    • pp.20-24
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    • 1998
  • Thin films of diamond-like carbon(DLC) can be successfully deposited by using a magnetron plasma chemical vapor deposition (CVD) method with an rf(13.56 MHz) plasma of $C_dH_8$. Plasma characteristics are analyzed as a function of the magnetic field. As the magnetic field increases, both electron temperature ($T_e$) and density ($n_e$)increase, but the negative dc self-bias voltage (-$V_{ab}$) decreases, irrespective of gas pressures in the range of 1~7 mTorr. High deposition rates have been obtained even at low gas pressures, which may be attributed to the increased mean free path of electrons in the magentron plasma. Effects of rf power and additive gas on the structural properties of DLC films aer also examined by using various technique namely, TED(transmissio electron diffraction) microanalysis, FTIR, and Raman spectroscopies.

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Advanced Tellurium-Based Threshold Switching Devices for High-Density Memory Arrays (Tellurium 기반 휘발성 문턱 스위칭 및 고집적 메모리용 선택소자 응용 연구)

  • Seunghwan Kim;Changhwan Kim;Namwook Hur;Joonki Suh
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.6
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    • pp.547-555
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    • 2023
  • High-density crossbar arrays based on storage class memory (SCM) are ideally suited to handle an exponential increase in data storage and processing as a central hardware unit in the era of AI-based technologies. To achieve this, selector devices are required to be co-integrated with SCM to address the sneak-path current issue that indispensably arises in such crossbar-type architecture. In this perspective, we first summarize the current state of tellurium-based threshold-switching devices and recent advances in the material, processing, and device aspects. We thoroughly review the physicochemical properties of elemental tellurium (Te) and representative binary tellurides, their tailored deposition techniques, and operating mechanisms when implemented in two-terminal threshold switching devices. Lastly, we discuss the promising research direction of Te-based selectors and possible issues that need to be considered in advance.

Controllability of Structural, Optical and Electrical Properties of Ga doped ZnO Nanowires Synthesized by Physical Vapor Deposition

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.3
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    • pp.148-151
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    • 2013
  • The control of Ga doping in ZnO nanowires (NWs) by physical vapor deposition has been implemented and characterized. Various Ga-doped ZnO NWs were grown using the vapor-liquid-solid (VLS) method, with Au catalyst on c-plane sapphire substrate by hot-walled pulsed laser deposition (HW-PLD), one of the physical vapor deposition methods. The structural, optical and electrical properties of Ga-doped ZnO NWs have been systematically analyzed, by changing Ga concentration in ZnO NWs. We observed stacking faults and different crystalline directions caused by increasing Ga concentration in ZnO NWs, using SEM and HR-TEM. A $D^0X$ peak in the PL spectra of Ga doped ZnO NWs that is sharper than that of pure ZnO NWs has been clearly observed, which indicated the substitution of Ga for Zn. The electrical properties of controlled Ga-doped ZnO NWs have been measured, and show that the conductance of ZnO NWs increased up to 3 wt% Ga doping. However, the conductance of 5 wt% Ga doped ZnO NWs decreased, because the mean free path was decreased, according to the increase of carrier concentration. This control of the structural, optical and electrical properties of ZnO NWs by doping, could provide the possibility of the fabrication of various nanowire based electronic devices, such as nano-FETs, nano-inverters, nano-logic circuits and customized nano-sensors.