• 대한전자공학회논문지
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• 제22권6호
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• pp.34-40
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• 1985

분자선 에퍼택시 (MBE)방법을 이용하여 (100) GaAs웨이퍼 위에 GaAs에퍼충을 성장시켜 성장된 충에 대한 여러가지 특성을 조사 ·분석하였다. 분자선 에피택시 방법을 이용하여 CaAs에퍼층을 만들 때에는 기판온도와 As와 Ca의 분자선 밀도비 (As/Ga)가 가장 큰 영향을 미친다. 본 실험에서는 좋은 표면상태를 얻기 위해 480℃∼650℃로 유지시키고 As cell의 온도를 230℃, Ga eel함 온도를 917℃로 고정시켜 As와 Ga의 분자선 밀도비를 5∼10 이상으로 유지시켰다. 제작된 GaAs에피층의 표면상태를 SIMS (Seconde,y ion Mass ipectoscopy), AES(Auger Electron Spectroscopy) , SEM (Scanning Elect.on Mic,oscopy) , RHEED (Reflection High Energy Electron Diffraction) 등으로 조사한 결과 기판온도가 540℃일 때 가장 좋은 표면상태를 얻을 수 있었다. 또한 RH-EED관찰 결과 As 안정화된 표면을 관측할 수 있었으며 SIMS로 depth-Profile을 해 본 곁과, Ca 보다 As가 불안정함을 알았다. 또한 반선 회절 검사결과에서 기판온도가 520℃일때와 540℃일때 (400), (200)면에 단결정이 형성되었음을 알 수 있었다.

• 한국농공학회지
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• 제35권3호
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• pp.36-46
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• 1993

The purposes of this study are to develop three-layered Green-Ampt infiltration model considering temporal variation of physical properties of soil and to evaluate the model with field experiment on bare-tilled and soybean-growing soil plots under natural rainfalls. Infiltration tests were conducted on a sandy loam soil. The model has three-layered soil profile including a surface crust, a tilled layer, a subsoil and considers temporal variation of porosity, hydraulic conductivity, capillary pressure head on a tilled layer by natural rainfalls and canopy density variation of crop. Field measurement of porosity, average hydraulic conductivity and average capillary presure head on a tilled layer were conducted by soil sampler and air-entry permeameter at regular intervals-after tillage. It was found that temporal variation of porosity and average hydraulic conductivity might be expressed as a function of cumulative rainfall energy and average capillary pressure head might be expressed as a function of porosity of a tilled soil. The model was calibrated by an optimization technique, Hooke and Jeeves method using hourly surface runoff data. With the calibrated parameters, the model was verified satisfactorily.

• 천문학회보
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• 제41권2호
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• pp.31.3-32
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• 2016

We present the radial variations of the scale heights and the vertical velocity dispersions in a sample of nearby edge-on galaxies using BIMA/CARMA $^{12}CO$ ($J=1{\rightarrow}0$), VLA/EVLA HI, and Spitzer $3.6{\mu}m$ data. Both the disk thicknesses and the velocity dispersions of gas and stars vary with radius, contrary to assumptions of previous studies. We investigate how the interstellar gas pressure and the gravitational instability parameter differ from values derived assuming constant velocity dispersions and scale heights. Using the measurement of the disk thicknesses and the derived radial profiles of gas and stars, we estimate the corresponding volume densities. The gravitational instability parameter Q follows a fairly uniform profile with radius and is ${\geq}1$ across the star-forming disk. The star formation law has a slope that is significantly different from those found in more face-on galaxy studies. The midplane gas pressure appears to roughly hold a power-law correlation with the midplane volume density ratio (${\rho}_{H2}/{\rho}_{HI}$).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.328.2-328.2
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• 2014

Semiconductor nanowires (NWs) have attracted research interests due to the distinct physical properties that can lead to variousoptical and electrical applications. In this paper, we have grown InAs NWs viagold (Au)-assisted vapor-liquid-solid (VLS) and catalyst-free vapor-solid (VS) mechanisms and investigated on the p-type doping profile of the NWs. Metal-organic chemical vapor deposition (MOCVD) is used for the growth of the NWs. Trimethylindium (TMIn) and arsine (AsH3) were used for the precursor and diethyl zinc (DEZn) was used for the p-type doping source of the NWs. The effectiveness of p-type doping was confirmed by electrical measurement, showing an increase of the electron density with the DEZn flow. The structural properties of the InAs NWs were examined using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). In addition, we characterize atomic distribution of InAs NWs using energy-dispersive X-ray spectroscopy (EDX) analysis.

• 한국기계가공학회지
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• 제17권6호
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• pp.46-52
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• 2018

Nondestructive evaluation for mechanical degradation of ultrasuper-critical (USC) heat-resistance steel, which is attractive to the next generation of power plants is studied by magnetic reversible permeability. The interrelationship between reversible permeability and high-temperature mechanical degradation has been investigated by precise measurement of permeability nondestructively. Also, the effects of microstructural variation on reversible permeability are discussed. Isothermal aging was observed to coarsen the tempered carbides ($Cr_{23}C_6$), generated the intermetallic phases ($Fe_2W$), and grow rapidly during aging. The dislocation density also decreases steeply within lath interior. The peak to peak interval (PPI) of reversible permeability profile decreased drastically during the initial 500 h aging period, and was thereafter observed to decrease only slightly. The variation in PPI is closely related to the decrease in the number of pinning sites and the degradation in tensile strength.

• Journal of Astronomy and Space Sciences
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• 제18권3호
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• pp.249-256
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• 2001

한국항공우주연구원에서는 지난 1998년 KSR-2 촤학로켓에 이온층 전자환경 측정기를 탑재하여 한반도 상공의 전자 밀도, 전자 온도, 부동 전위등을 측정하는데 성공하였다. 이온층 전자환경 측정기는 한반도 상공 이온층의 전자 온도와 밀도를 측정하는데 목적이 있다. 이번 연구에서는 2002년 상반기 발사 예정인 KSR-3 과학로켓에 탑재될 전자환경 측정기를 개발하였고 일본에서 우주 환경 모사 실험을 수행하여 측정기의 성능을 확인하였다. 전자환경 측정기는 랑뮈어 프로브(Langmuir Probe)와 전자 온도 프로브(Electron Temperature Probe)로 구성되어 있으며 이 센서들의 측정 결과로부터 이온층의 전자 밀도와 온도에 대한 정보를 얻을 수 있다. 이렇게 개발된 전자환경 측정기로부터 신뢰성 있는 자료를 얻는다면 IRI(International Reference Ionosphere) 모델이나 PIM(Parameterized Ionospheric Model)과 비교하여 한반도 상공의 이온층 전자 환경에 대한 이해를 돕는데 기여할 수 있을 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• Journal of Radiation Protection and Research
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• 제33권1호
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• pp.35-40
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• 2008

석유화학 공정의 증류탑은 공정유체를 분리, 정제하는 중요한 장치 중의 하나로 가동효율은 설비의 생산성에 큰 영향을 미친다. 본 연구는 밀봉 감마선원을 이용하여 투과 감마선의 세기를 높이별로 측정함으로써 내부 밀도의 변화를 분석하여 공정의 가동 중 내부 상황에 대한 정보를 얻고자 하였다. 이를 위하여 한국원자력연구원에서 개발된 자동 증류탑 검사장치를 이용하여 증류탑 상부 양쪽에 밀봉 감마선원과 방사선검출기를 매달아 수직으로 내리면서 실험을 수행하였으며, 이때 감마선원으로는 Co-60 150 mCi과 방사선검출기로 BGO detector를 각각 사용하였다. 진단결과 설비 내부의 tray에는 구조적 결함이 관찰되지 않았으나, 유체분포를 고려할 때 상부는 기포층(vapor)의 밀도분포가 지배적인 반면에, 하단부에는 기포에 비해 유체가 상대적으로 많이 분포하는 것으로 계측되었다. 본 실험으로부터 밀봉 감마선원을 이용한 가동 중에 있는 대형 증류탑의 tray에 대한 구조적 건전성 및 내부 유체분포에 대한 정보를 성공적으로 제시하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.141-141
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• 2013

We have generated the needle-typed nonthermal plasma jet by using an Ar gas flow at atmospheric pressure. Diagnostics of electron temperature anddensity is critical factors in optimization of the atmospheric plasma jet source in accordance with the gas flow rate. We have investigated the electron temperature and density of plasma jet by selecting the four metastable Ar emission lines based on the atmospheric collisional radiative model and radial profile characteristics of current density, respectively. The averaged electron temperature and electron density for this plasma jet are found to be ~1.6 eV and ~$3.2{\times}10^{12}cm^{-3}$, respectively, in this experiment. The densities of OH radical species inside the various bio-solutions are found to be higher by about 4~9 times than those on the surface when the argon bioplasma jet has been bombarded onto the bio-solution surface. The densities of the OH radicalspecies inside the DI water, DMEM, and PBS are measured to be about $4.3{\times}10^{16}cm^{-3}$, $2.2{\times}10^{16}cm^{-3}$, and $2.1{\times}10^{16}cm^{-3}$, respectively, at 2 mm downstream from the surface under optimized Ar gas flow 250 sccm.

• 한국농림기상학회지
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• 제12권1호
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• pp.45-62
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• 2010

영면변위(d)는 거친 식생군락에 의해 운동량이 모두 흡수되어 군락 내의 대수적 풍속 프로파일이 0이 되는 높이를 말한다. 군락의 표면 거칠기의 구조를 나타내는 영면변위는 군락난류의 분석과 지표 스칼라 플럭스의 계산에 매우 중요하다. 본 단보에서는 Monin-Obukhov 상사이론에 기반을 두고 단일층에서 관측된 평균수평풍속 자료를 사용하는 두 가지 다른 방법을 사용하여 광릉침엽수림에서 d 값을 추정하였다. 관측지의 비균질성과 복잡성을 고려해서, 표면거칠기와 바람체계가 d에 미칠수 있는 영향을 살펴보기 위해, 자료를 매 $30^{\circ}$ 간격의 풍향별로 나누었다. 전반적으로 두 방법을 사용한 결과는 서로 비슷했는데, $d/h_c$ (여기서 $h_c$는 군락의 높이로서 약 ~23m)는 풍향에 따라 0.51~0.97의 범위를 보였다. 이러한 $d/h_c$의 값의 범위는 문헌에 보고되어 있는 범위(0.64~0.94)와 크게 다르지 않았으나, 다소 높은 쪽에 분포되어 있었다. 이러한 원인의 하나로는 관측이 두 방법의 전제인 Monin-Obukhov 상사이론이 성립하지 않는 거칠기아층에서 이루어졌기 때문인 것으로 사료된다. 따라서 관측높이가 거칠기 아층에 존재할 경우에는 단일층 풍속으로부터 영면변위를 추정하는 방법을 적용하고 그 결과를 해석하는 데에 세심한 주의가 필요하다.