Solid Phase Crystallizations of Sputtered and Chemical Vapor Deposited Amorphous Hydrogenated Silicon (a-Si:H) Thin Film (스퍼터링 및 화학기상 증착 비정질 수소화 실리콘박막의 고상결정화)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.11 no.4
- /
- pp.255-260
- /
- 1998