• Journal of information and communication convergence engineering
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• 제10권3호
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• pp.295-299
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• 2012

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

• 한국컴퓨터그래픽스학회논문지
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• 제29권3호
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• pp.79-84
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• 2023

이미지 생성 모델은 다양한 분야에 적용되어 데이터 부족 문제와 시간 및 비용 문제를 극복하고 있다. 그러나 규칙적 패턴 이미지에서의 이미지 생성과 해당 데이터의 결함 검출에는 한계를 가진다. 본 논문에서는 이미지 생성 모델의 패턴 이미지 생성의 가능성을 확인하고 OLED 패널의 결함 검출을 위한 데이터 증강에 적용하였다. OLED 결함 검출 모델을 학습하기 위해 필요한 데이터는 OLED 패널의 높은 비용 문제로 실제 데이터 세트를 확보하기 어렵다. 그렇기 때문에 해당 데이터 세트를 확보한다 하더라도 여러가지 결함 유형을 정의하고 분류하는 작업이 필요하다. 이를 위한 가상의 기반 데이터 세트를 획득할 OLED 패널 결함 데이터 획득 시스템을 소개하고, 이미지 생성 모델로 해당 데이터를 증강한다. 또, 확산모델에서의 패턴 이미지 생성의 어려움을 확인하여 가능성을 제안하고, 이미지 생성 모델 이용한 데이터 증강 및 결함 검출 데이터 증강의 제한 사항을 개선하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 추계학술대회 논문집
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• pp.333-336
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• 2008

The groove rolling is a process that transforms the bloom or billet into a shape with circular section through a series of rolling. Inhibition of surface defect generation in groove rolling is a matter of great importance and therefore many research groups proposed a lot of models to find the location of surface defect initiation. In this study, we propose a model for maximum shear stress ratio over equivalent strain to catch the location of surface defect onset. This model is coupled with element removing method and applied to box groove rolling of POSCO No. 3 Rod Mill. Results show that proposed model in this study can find the location of surface defect initiation during groove rolling when finite element analysis results is compared with experiments. The proposed criterion has been applied successfully to design roll grooves which inhibits the generation of surface defect.

• 소성∙가공
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• 제17권8호
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• pp.607-612
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• 2008

The groove rolling is a process that transforms the bloom or billet into a shape with circular section through a series of rolling. Inhibition of surface defect generation in groove rolling is a matter of great importance and therefore many research groups proposed a lot of models to find the location of surface defect initiation. In this study, we propose a model for maximum shear stress ratio over equivalent strain to catch the location of surface defect onset. This model is coupled with element removing method and applied to box groove rolling of POSCO No.3 Rod Mill. Results show that proposed model in this study can find the location of surface defect initiation during groove rolling when finite element analysis results is compared with experiments. The proposed criterion has been applied successfully to design roll grooves which inhibit the generation of surface defect.

• 한국세라믹학회지
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• 제54권2호
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• pp.75-85
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• 2017

Thermoelectric is a key technology for energy harvesting and solid-state cooling by direct thermal-to-electric energy conversion (or vice versa); however, the relatively low efficiency has limited thermoelectric systems to niche applications such as space power generation and small-scale or high-density cooling. To expand into larger scale power generation and cooling applications such as ATEG (automotive thermoelectric generators) and HVAC (heating, ventilation, and air conditioning), high-performance bulk thermoelectric materials and their low-cost processing are essential prerequisites. Recently, the performance of commercial thermoelectric materials including $Bi_2Te_3$-, PbTe-, skutterudite-, and half-Heusler-based compounds has been significantly improved through non-equilibrium processing technologies for defect engineering. This review summarizes material design approaches for the formation of multi-dimensional and multi-scale defect structures that can be used to manipulate both the electronic and thermal transport properties, and our recent progress in the synthesis of conventional thermoelectric materials with defect structures is described.

• 비파괴검사학회지
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• 제22권6호
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• pp.637-642
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• 2002

An arc-shaped line array slit has been used for the laser generation of focused Lamb waves. The spatially expanded Nd:YAG pulse laser was illuminated through the arc-shaped line array slit on the surface of a sample plate to generate the Lamb waves of the same pattern as the slit. Then the generated Lamb waves were focused at the focal point of which distance from the slit position is dependent on the curvature of slit arc. The proposed method showed better spatial resolution than the conventional linear array slit in the detection of laser machined linear defect and drill machined circular defect on aluminum plates of 2mm thickness. Using the focused waves, we could detect the linear defect and the circular defect with the improvement of spatial resolution. The method can also be combined with the scanning mechanism to get an image just like by the scanning acoustic microscope(SAM).

• 비파괴검사학회지
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• 제35권6호
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• pp.407-413
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• 2015

Ultrasonic infrared thermography is an active thermography methods. In this method, mechanical energy is introduced to a structure, it is converted into heat energy at the defects, and an infrared camera detects the heat for inspection. The heat generation mechanisms are dependent on many factors such as structure characteristics, defect type, excitation method and contact condition, which make it difficult to predict heat distribution in ultrasonic infrared thermography. In this paper, a method to simulate frictional heating, known to be one of the main heat generation mechanisms at the closed defects in metal structures, is proposed for ultrasonic infrared thermography. This method uses linear vibration analysis results without considering the contact boundary condition at the defect so that it is intuitive and simple to implement. Its advantages and disadvantages are also discussed. The simulation results show good agreement with the modal analysis and experiment result.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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• pp.273-275
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• 2005

Active thermography is being used since several years for remote non-destructive testing. It provides thermal images for remote detection and imaging of damages. Also, it is based on propagation and reflection of thermal waves which are launched from the surface into the inspected component by absorption of modulated radiation. For energy deposition, it use external heat sources (e.g., halogen lamp or convective heating) or internal heat generation (e.g., microwaves, eddy current, or elastic wave). Among the external heat sources, the ultrasound is generally used for energy deposition because of defect selective heating up. The heat source generating a thermal wave is provided by the defect itself due to the attenuation of amplitude modulated ultrasound. A defect causes locally enhanced losses and consequently selective heating up. Therefore amplitude modulation of the injected ultrasonic wave turns a defect into a thermal wave transmitter whose signal is detected at the surface by thermal infrared camera. This way ultrasound thermography(UT) allows for selective defect detection which enhances the probability of defect detection in the presence of complicated intact structures. In this paper the applicability of UT for fast defect detection is described. Examples are presented showing the detection of defects in PCB material. Measurements were performed on various kinds of typical defects in PCB materials (both Cu metal and non-metal epoxy). The obtained thermal image reveals area of defect in row of thick epoxy material and PCB.

• 한국소음진동공학회논문집
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• 제11권4호
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• pp.31-36
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• 2001

A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference between two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter (LPC) for the two spin coaters, when the spin coaxers are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2006년도 춘계 학술대회 개요집
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• pp.148-150
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• 2006

In this paper, the applicability of an UET(ultrasound excited thermography) for a defect detection of the welded receptacle is described. An UET(ultrasound excited thermography) is a defect-selective and fast imaging tool for damage detection. A high power ultrasound-excited vibration energy with pulse durations of 280ms is injected into the outer surface of the welded receptacle made of Al material. An ultrasound vibration energy sent into the welded receptacle propagate inside the sample until they are converted into the heat in the vicinity of the defect. The injection of the ultrasound excited vibration energy results in heat generation so that the defect is turned into a local thermal wave transmitter. Its local heat emission is monitored by the thermal infrared camera. And they are processed by the image recording system. Measurement was performed on aluminum receptacle welded by using Nd:YAG laser. The observed thermal image revealed two area of defects along the welded seam.