• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.4
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• pp.305-310
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• 2008

Deep trench etching of silicon was investigated as a function of RF source power, DC bias voltage, $C_4F_8$ gas flow rate, and $O_2$ gas addition. On increasing the RF source power from 300 W to 700 W, the etch rate was increased from $3.52{\mu}m/min$ to $7.07{\mu}m/min$. The addition of $O_2$ gas improved the etch rate and the selectivity. The highest etch rate is achieved at the $O_2$ gas addition of 12 %, The selectivity to PR was 65.75 with $O_2$ gas addition of 24 %. At DC bias voltage of -40 V and $C_4F_8$ gas flow rate of 30 seem, We were able to achieve etch rate as high as $5.25{\mu}m/min$ with good etch profile.

• Proceedings of the Korean Geotechical Society Conference
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• 2010.09c
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• pp.135-139
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• 2010

A construction technique to install the soil-bentonite (SB) cut-off wall for in-situ geoenvironmental containment by employing the trench cutting and re-mixing deep wall method is first presented in this paper. The laboratory test results on the hydraulic barrier performance of SB in relation to the chemical compatibility are then discussed. Hydraulic conductivity tests using flexible-wall permeameters as well as swell tests were conducted for SB specimens exposed to various types and concentrations of chemicals (calcium chloride, heavy fuel oil, ethanol, and/or seawater) in the permeant and/or in the pore water of original soil. For the SB specimens in which the pore water of original soil did not contain such chemicals and thus the sufficient bentonite hydration occurred, k values were not significantly increased even when permeated with the relatively aggressive chemical solutions such as 1.0 mol/L $CaCl_2$ or 50%-concentration ethanol solution. In contrast, the SB specimens containing $CaCl_2$ in the pore water had the higher k values. The excellent linear correlation between log k and swelling pressure implies that the swelling pressure can be a good indicator for the hydraulic barrier performance of the SB.

• Current Optics and Photonics
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• v.7 no.5
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• pp.485-495
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• 2023

The pixel size in high-resolution complementary metal-oxide-semiconductor (CMOS) image sensors continues to shrink due to chip size limitations. However, the pixel pitch's miniaturization causes deterioration of optical performance. As one solution, a quad color filter (CF) array with pixel binning has been developed to enhance sensitivity. For high sensitivity, the microlens structure also needs to be optimized as the CF arrays change. In this paper, the covered microlens, which consist of four microlenses covered by one large microlens, are proposed for the quad CF array in the backside illumination pixel structure. To evaluate the optical performance, the suggested microlens structure was simulated from 0.5 ㎛ to 1.0 ㎛ pixels at the center and edge of the sensors. Moreover, all pixel structures were compared with and without in-pixel deep trench isolation (DTI), which works to distribute incident light uniformly into each photodiode. The suggested structure was evaluated with an optical simulation using the finite-difference time-domain method for numerical analysis of the optical characteristics. Compared to the conventional microlens, the suggested microlens show 29.1% and 33.9% maximum enhancement of sensitivity at the center and edge of the sensor, respectively. Therefore, the covered microlens demonstrated the highly sensitive image sensor with a quad CF array.

• Nuclear Engineering and Technology
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• v.56 no.8
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• pp.3076-3083
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• 2024

In this work, single photon avalanche diodes (SPADs) were fabricated using the standard 180 nm complementary metal-oxide semiconductor process. Their small size of 15-16 µ m and low operating voltage made it possible to easily integrate them with readout circuits for compact on-chip sensors, particularly those used in the radiation sensor network of a nuclear plant. Four architectures were proposed for the SPADs, with a shallow trench isolation (STI) guard ring and different depletion regions designed to demonstrate the main performance parameters in each experimental configuration. The wide absorption region structure with PSD and a deep N-well could achieve a uniform electric field, resulting in a stable dark count rate (DCR). Additionally, the STI guard ring was implanted to mitigate the premature edge breakdown. A breakdown voltage was achieved for a low operating voltage of 10.75 V. The DCR results showed 286.3 Hz per ㎛² at an excess voltage of 0.04 V. A photon detection probability of 21.48% was obtained at 405 nm.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.9 no.1
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• pp.1-12
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• 2004

Sedimentary facies and high-resolution echo facies were analyzed to elucidate sedimentation pattern of the late Quaternary glacial-marine deposits in the northern continental margin of the South Shetland Islands. Six sedimentary facies are classified, based on grain texture and sedimentary structures in gravity cores. The high-resolution (3.5 ㎑) echo characters are classified into 6 echo facies on the basis of clarity, continuity, and shape of bottom and subbottom echoes together with seafloor topography. Distribution of the echo and sedimentary facies suggest that there was a significant change in sedimentation pattern between the Last Glacial Maximum (LGM) and subsequent glacier-retreating period. When the grounded glaciers extended to the present shelfbreak during LGM, coarse-grained subglacial tills were widespread in the shelf area, and deep troughs in the shelf were carved beneath the fast-flowing ice steam. As the glacial margin retreated landward after LGM, dense meltwater plumes released from the retreating ice-front were funneled along the glacier-carved troughs, and accumulated channel- or cannyon-fill deposits in the shelf and the upper to mid slope. At that time, slope sediments seem to have been reworked by slope failures and unsteady contour currents, and further transported by fine-grained turbidity currents along the South Shetland Trench. After the glacial retreat, sediments in the shelf and slope areas have been mainly introduced by persistent (hemi) pelagic settling, and fine-grained turbidity currents frequently occur along the axis of the South Shetland Trench.

• Ocean and Polar Research
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• v.25 no.2
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• pp.201-211
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• 2003

Bottom simulating reflectors (BSR), representing the base of the gas hydrate stability field, are widespread on the South Shetland continental margin (SSM), Antarctic Peninsula. With the phase diagram fur the gas hydrate stability field, heat flow can be derived from the BSR depth beneath the seafloor determined on multichannel seismic profiles. The heat flow values in the study area range from $50mW/m^2$ to $85mW/m^2$, averaging to $65mW/m^2$. Small deviation from the average heat flow values suggests that heat flow regime of the study area is relatively stable. The landward decrease of heat flow from the South Shetland Trench to the continental shelf would be attributed to the landward thickening of the accretionary prism and the upward advection of heat associated with fluid expulsion. The continental slope 1500m to 3000m deep, where BSRs are most distinguished in the SSM, shows relatively large variation of heat flow possibly due to complex tectonic activities in the study area. The local high heat flow anomalies observed along the slope may be caused by heat transport mechanisms along a NW-SE trending large-scale fault.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.13-17
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• 2006

Dense and periodic arrays of holes and tungsten none dots were fabricated on silicon oxide and silicon. The holes were approximately 25 nm wide, 40 nm deep, and 60 nm apart. To obtain nano-size patterns, self-assembling resists were used to produce layer of hexagonally ordered parallel cylinders of polymethylmethacrylate(PMMA) in polystyrene(PS) matrix. The PMMA cylinders were degraded and removed with acetic acid rinse to produce a PS mask for pattern transfer. The silicon oxide was removed by fluorine-based reactive ion etching(RIE). Selectively deposited tungsten nano dots were formed inside nano-sized trench by using a low pressure chemical vapor deposition(LPCVD) method. Tungsten nano dot and trenched silicon sizes were 26 nm and 30 nm, respectively.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.91-95
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• 2010

A UV-enhanced atomic layer deposition (UV-ALD) process was developed to deposit $TiO_2$ thin films on Si substrates using titanium isopropoxide(TIP) and $H_2O$ as precursors with UV light. In the UV-ALD process, the surface reactions were found to be self-limiting and complementary enough to yield a uniform, conformal, pure $TiO_2$ thin film on Si substrates at room temperature. The UV light was very effective to obtain the high-quality $TiO_2$ thin films with good adhesive strength on Si substrates. The UV-ALD process was applied to produce uniform and conformal $TiO_2$ coats into deep trenches with high aspect ratio.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.1 no.1
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• pp.63-69
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• 1998

The slope revegetation methods in Korea are generally the hydroseeding mixed with perennial herbs, soil, fibers, and fertilizer in consideration of scenic landscape rather than ecological and engineering effect. But perennial herbs can't protect the slope from deep surface erosion and they are not tall enough to create the original naturalness at the boundary parts of existing woodlands. This study is about the slope revegetation method using nutritional propagation capacity of plants and the experimental construction was carried out on the cut-slope of Yongin Hoam C.C. We dug several trenches to a depth of 80cm and at intervals of 150cm from each other. After placing various kinds of live branches(Salix species) into the trench, we backfilled with the excavated soils and finally sprayed water mixed with soil-stabilizer, fertilizer. As six months passed, we made a vegetation research and check the slope surface erosion. Vegetation research was performed in examining the frequency of each block using transect method. 31 kinds of plant species appeared in total area($113.6m^2$) and the dominant species are Setaria viridis, Artemisia rubripes, Persicaria pubescens, Plantago asiatica, Cyperus amuricus, Commelina communis. Among the examined blocks, '아', the top part of the slope, showed the ratio of 1.4 as the highest Alpha-diversity. With regard to life form, therophytes were shown dominant distribution of 58% of total species and neophytes relatively low distribution of 16%. It can be estimated that there is no ecological stabilization of this slope, because of ruderal species' occupation of 74% in total area. Regarding the slope stabilization, the serious surface erosion didn't take place in spite of heavy rainfall this year, but a little surface erosion took place at the block where no other species coming from outside of the site were found.

• Journal of Soil and Groundwater Environment
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• v.17 no.1
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• pp.13-21
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• 2012

This study reports a surfactant-enhanced in-situ remediation treatment at a test site which is located in a hilly terrain. The leakage oils from a storage tank situated on the top of the hill contaminated soils and groundwater in the lower elevation. Sixteen vertical injection wells (11 m deep) were installed at the top of the hill to introduce 0.1-0.5 vol.% of non-ionic Tween-80 surfactant. The contaminated area that required remediation treatment was about $1,650\;m^2$. Two cycles of injecting surfactant solution followed by water were repeated over approximately 7.5 months: first cycle with 0.5 month of surfactant injection followed by 3 months of water injection, and second cycle with 1 month of surfactant followed by 3 months of water injection. The seasonal fluctuation in groundwater table was also considered in the selection of periods for surfactant and water injection. The results showed that the initial Total Petroleum Hydrocarbon (TPH) concentration of 1,041 mg/kg (maximum 3,605 mg/kg) was reduced significantly down to 76.6 mg/kg in average. After 2nd surfactant injection process finished, average TPH concentration of soils was reduced to 7.5% compared to initial concentration. Also, average BTEX concentration of soils was reduced to 10.8%. This resultes show that the surfactant enhanced in-situ remediation processes can be applicable to LNAPL contaminated site in field scale.