• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.616-619
• /
• 2003

Photochemical and photothermal effects have correlation with each other and depend on laser wavelength. Multi-scanning laser ablation process of polymer with DPSS(Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser with wavelength of 355nm is applied to fabricate three-dimensional micro shape. The DPSSL photomachining system can rapidly and cheaply fabricate 2D pattern or 3D shape with high efficiency because we only use CAD/CAM software and precision stages instead of complex projection mask. Photomachinability of polymer is highly influenced by laser wavelength and its own chemical structure. So the optical characteristics of polymers for 355nm laser source is investigated by experimentally and theoretically.

• 한국정밀공학회지
• /
• 제24권2호
• /
• pp.134-139
• /
• 2007

Usually nanosecond pulsed laser processing of metal is mainly affected by the thermal ablation. Many studies of the theoretical analysis and modeling to predict the laser ablation of metal are suggested on the basis of the photothermal mechanism at higher laser fluence. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper foils and propose the simplified SSB Model(Srinivasan-Smrtic-Babu model) to study the photothermal effect of nanosecond pulsed laser ablation. The experimental results show that the photothermal ablation of the 355nm DPSS $NdYVO_{4}$ laser is useful to process the copper thin foils.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.667-668
• /
• 2006

Usually nanosecond pulsing laser ablation of metal is under thermal effect. Many studies of the theoretical analysis and modeling to predict a result of laser ablation of metal are suggested on the basis of the photothermal mechanism. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper films. We proposed the simplified SSB Model(Srinivasan-Smrtic-Babudp model) to study the photothermal effect of nanosecond pulsing laser ablation of copper thin metal. The experimental results were obtained by using the 355nm DPSS $Nd:YVO_4$ laser.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.107-107
• /
• 2010

In this study, we have investigated the holographic grating formation on Ag-doped amorphous chalcogenide AsGeSeS thin films with Ag thickness. Ag/AsGeSeS thin films with the incident laser beam wavelength for the improvement of the polarization diffraction grating efficiency. Holographic gratings have been formed using Diode Pumped Solid State laser (DPSS, 532.0nm) under [P:P] polarized the intensity polarization holography. The diffraction efficiency was obtained by +1st order intensity. The result is shown that the diffraction efficiency of Ag/AsGeSeS double layer thin film for the Ag thickness, the maximum grating diffraction efficiency using 60nm Ag layer is 0.96%.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.181-182
• /
• 2011

Phase-change materials can be cycled by exposure to laser beam, and as a function of the pulse intensity and duration, the laser beam triggers the switching from crystalline to amorphous phase and back. In other to progress better crystallization transition and amorphization long phase-transformation data of phase-change memory (PRAM), we investigated about the effect of Sb doping and Ag ions percolating into Ge-Se-Te phase-change material. Doped Sb concentrations was determined each of 10, 20 and 30 wt%. As the Sb-doping concentration was increased, the resistivity decreased and the crystallization temperature increased. Ionization of Ag was progressed by DPSS laser (532 nm) for 1 hour. The resistivity was more decreased and the crystallization temperature was more increased in case of adding Ag layer under Sb-(Ge-Se-Te) thin film. At the every condition of thin films included Ag layer more stable states were indicated compare with just Sb-doped Ge-Se-Te thin films.

• 기계와재료
• /
• 제22권1호
• /
• pp.14-21
• /
• 2010

초미세 레이저 가공기술은 미세화, 대면적화, 고속화의 방향으로 발전되고 있다. 이에 따라 이를 대응한 레이저의 사양도 파장의 단파장화 또는 펄스폭의 극초단화, 펄스 반복률의 고반복률화, 출력의 고출력화가 요구되고 있다. 극초단 펄스레이저는 사용자 편의성, 안정성 측면에서 산업체의 요구에 미흡하다. 이에 따라 산업용 초미세 레이저 가공을 위한 광원으로 고품질, 고출력의 단파장 자외선 레이저 활용에 집중하고 있다. 현재 고품질 자외선 레이지는 DPSSL 형태로 구성되어 출시되고 있고, 거의 대부분 수입에 의존하고 있다. 국내외 자외선 UV 현황을 간단히 기술하고, 광주과기원 고등광기술연구소에서 산업원천기술개발사업의 일환으로 개발중인 복합형 자외선 DPSSL에 대한 개발 계획 레이저 특성과 현재의 개발 진행 상황을 소개한다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
• /
• pp.1430-1431
• /
• 2006

We investigated the formation of 2-dimension hologram grating by means of selective etching characteristic and photo-expansion effect according to photo irradiation on amorphous As-Ge-Se-S thin film. By method of phase holography, we made the 2-dimensional hologram grating by each (S:P) and ($+45^{\circ}:-45^{\circ}$) polarized beam with DPSS laser(532nm) and He-Ne laser(632nm). A recording property was observed at each polarized beam through 2-dimensional hologram surface relief grating. Chalcogenide thin film was etched selectively by NaOH solution after the formation of 1-dimensional diffraction grating. And then etched sample was rotated 90 degree to fabricate 2 dimensional hologram grating. We found that it was observed the formation of 2-dimensional hologram grating by AFM(Atomic Force Microscopy).

• 한국광학회지
• /
• 제14권3호
• /
• pp.312-320
• /
• 2003

본 연구에서는 355 nm의 파장을 갖는 Nd:YVO$_4$ 3고주파 DPSS 레이저를 이용하여 폴리머의 3차원 미세형상 가공기술을 개발하였다. UV레이저와 폴리머의 어블레이션에 관한 메커니즘을 설명하였으며 비교적 UV영역에서 파장이 긴 355 nm파장의 영역에서는 광열분해 반응으로 가공되고 이에 따른 폴리머의 광학적 특성을 살펴보았다. 광 흡수율 특성이 우수한 폴리머가 광가공 특성이 좋은 것으로 나타났으나 벤젠구조가 많이 포함되어 있는 폴리이미드의 경우는 광분해후 다시 새로운 화학적 결합이 이루어져 가공부 면이 좋지 않은 면을 보였다. 레이저의 다중 주사방식으로 가공하기위하여 표면의 오염이 적은 폴리카보네이트를 시편으로 사용하여 3차원 적으로 모델링한 직경 1 mm와 500 $\mu\textrm{m}$의 마이크로 팬을 가공하였다. 레이저 발진 효율이 높고 유지비가 적은 355 nm의 DPSSL을 이용한 3차원 가공기술의 개발로 향후 저비용으로 빠른 시간에 미세부품을 개발하는 기술에 기여할 것으로 예상된다.

• 한국레이저가공학회지
• /
• 제17권3호
• /
• pp.19-23
• /
• 2014

To directly engrave circuit-line patterns as wide as $6{\mu}m$ in a buildup film to be used as an IC substrate, we applied a projection ablation technique in which an 8 inch dielectric ($ZrO_2/SiO_2$) mask, a DPSS 355nm laser instead of an excimer laser, a ${\pi}$-shaper and a galvo scanner are used. With the ${\pi}$-shaper and a square aperture, the Gaussian beam from the laser is shaped into a square flap-top beam. The galvo scanner before the $f-{\theta}$ lens moves the flat-top beam ($115{\mu}m{\times}105{\mu}m$) across the 8 inch dielectric mask whose patterned area is $120mm{\times}120mm$. Based on the results of the previous research by the authors, the projection ratio was set at 3:1. Experiments showed that the average width and depth of the engraved patterns are $5.41{\mu}m$ and $7.30{\mu}m$, respectively.

• 재활간호학회지
• /
• 제7권2호
• /
• pp.220-230
• /
• 2004

Purpose: The study has planned to find out the perceived social support of the families with pneumoconiosis patients. Method: The subjects of the study were the 300 family care givers of the pneumoconiosis patients who were hospitalized in Taeback, Donghae and Jeongsun Occupational Medical Center. The Social Support Survey Instrument developed by Park(1985) was adopted. Results: The Direct Perceived Supports showed statistically differences by the age(F=1.70 p=0.01) and the state of the disease(F=3.09 p=0.027) of the patients. The Health Situation Centered Support was different by the marietal situation(F=2.29 p=0.48) of the pneumoconiosis patients. The Indirect Perceived Supports were statistically different by sex(t=3.76 p=0.043) and relation with the patient (F=2.49 p=0.048), group joining(t=3.79 p=0.042) of the family care givers. The DPSs were statistically different by family income(F=2.25 p=0.025), family authority(F=2.81 p=0.031) and health insurance status(F=2.13 p=0.026). Recommendation: It is recommended to develop an active social support program at the pneumoconiosis care centers for the middle aged female family care givers of the pneumoconiosis patients with the support of Ministry of Labor, Ministry of Health and Welfare and other NGOs of pneumoconiosis.