• Title/Summary/Keyword: DOE-2

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Post Sliced Cleaning of Silicon Wafers using Ozone and Ultrasound (오존과 초음파를 이용한 실리콘 웨이퍼의 Post Sliced Cleaning)

  • Choi, Eun-Suck;Bae, So-Ik
    • Korean Journal of Materials Research
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    • v.16 no.2
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    • pp.75-79
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    • 2006
  • The effect of ozone and/or ultrasound treatments on the efficiency of slurry removal in post sliced cleaning (PSC) of silicon ingot was studied. Efficiency of slurry removal was evaluated as functions of time, temperature and surfactant with DOE (Design of Experiment) method. Residual slurries were observed on the wafer surface in case of cleaning by ozone or ultrasound separately. However, a clean wafer surface was appeared when cleaned with ozone and ultrasound simultaneously. It has found that cleaning time was the main effect among temperature, time and surfactant. Elevated temperature, addition of surfactant and high ozone concentration helped to accelerate efficient removal of slurry. The improvement of removal efficiency seems to be related to the formation of more active OH radicals. The highly cleaned surface was achieved at 10 wt% ozone, 1 min and 10 vol% surfactant with ultrasound. Application of ozone and ultrasound might be a useful method for PSC process in wafer cleaning.

Validating the Applicability of a Simplified Correlation Method for Economic Evaluation of Cooling Plants (냉방열원기기의 경제성 평가를 위한 간이계산법의 적용성 검토)

  • 김영섭;김강수
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.10
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    • pp.854-862
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    • 2002
  • In the previous research, a simplified correlation method was developed as an easy prediction tool for comparing energy use of cooling plants. The purpose of this paper is to test the applicability of this method for economic evaluation with two zones of a 20-story commercial building in Seoul. The results of this method were compared with the DOE-2 simulation and actual measured data. Then, Comparisons of life cycle cost were carried out for three types of cooling plants. Testing of one zone showed good agreement of within 10% error in cooling energy use and within 2% error in LCC. But testing of the other zone indicated that the use of this method were invalid when input variables were used beyond its valid range.

Athermal and Achromatic Design for a Night Vision Camera Using Tolerable Housing Boundary on an Expanded Athermal Glass Map

  • Ahn, Byoung-In;Kim, Yeong-Sik;Park, Sung-Chan
    • Current Optics and Photonics
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    • v.1 no.2
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    • pp.125-131
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    • 2017
  • We propose a new graphical method for selecting a pair of optical and housing materials to simultaneously athermalize and achromatize an LWIR optical system. To have a much better opportunity to select the IR glasses and housing materials, an athermal glass map is expanded by introducing the DOE with negative chromatic power. Additionally, from the depth of focus in an LWIR optical system, the tolerable housing boundary is provided to realize an athermal and achromatic system even for not readily available housing material. Thus, we can effectively determine a pair of optical and housing materials by reducing the thermal shift to be less than the depth of focus. By applying this method to design a night vision camera lens, the chromatic and thermal defocuses are reduced to less than the depth of focus, over the specified waveband and temperature ranges.

Evaluation of Electrochemical Characteristics on Graphene Coated Austenitic and Martensitic Stainless Steels for Metallic Bipolar Plates in PEMFC Fabricated with Hydrazine Reduction Methods (하이드라진으로 환원시킨 그래핀을 코팅한 오스테나이트와 마르텐사이트 스테인리스 강 고체고분자형 연료전지 금속 분리판의 전기화학적 특성 평가)

  • Cha, Seong-Yun;Lee, Jae-Bong
    • Corrosion Science and Technology
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    • v.15 no.2
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    • pp.92-107
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    • 2016
  • Graphene was coated on austenitic and martensitic stainless steels to simulate the metallic bipolar plate of proton exchange membrane fuel cell (PEMFC). Graphene oxide (GO) was synthesized and was reduced to reduced graphene oxide (rGO) via a hydrazine process. rGO was confirmed by FE-SEM, Raman spectroscopy and XPS. Interfacial contact resistance (ICR) between the bipolar plate and the gas diffusion layer (GDL) was measured to confirm the electrical conductivity. Both ICR and corrosion current density decreased on graphene coated stainless steels. Corrosion resistance was also improved with immersion time in cathodic environments and satisfied the criteria of the Department of Energy (DOE), USA. The total concentrations of metal ions dissolved from graphene coated stainless steels were reduced. Furthermore hydrophobicity was improved by increasing the contact angle.

A study on the energy efficient operation of economizer cycle control (외기냉방제어의 효율적인 운영에 관한 연구)

  • Lee, H.W.;Leigh, S.B.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.9 no.4
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    • pp.545-551
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    • 1997
  • As the cooling energy requirement in an office building increases due to the increased internal heat gains, the effort to minimize the energy consumption through efficient operation of existing HVAC systems will be beneficial. In this study, one of the energy conserving efforts in an office building, operational strategies of Economizer Cycle Control have been investigated through DOE-2.1E computer simulation. The findings can be summarized : 1) Economizer Cycle Control saves energy throughout the year, 2) Econo-Limit-T must be applied seasonally based on the outside and return air conditions, 3) use of Enthalpy control is more energy efficient than that of Temperature control.

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Experimental and numerical study on energy absorption of lattice-core sandwich beam

  • Taghipoor, Hossein;Noori, Mohammad Damghani
    • Steel and Composite Structures
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    • v.27 no.2
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    • pp.135-147
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    • 2018
  • Quasi-static three-point bending tests on sandwich beams with expanded metal sheets as core were conducted. Relationships between the force and displacement at the mid-span of the sandwich beams were obtained from the experiments. Numerical simulations were carried out using ABAQUS/EXPLCIT and the results were thoroughly compared with the experimental results. A parametric analysis was performed using a Box-Behnken design (BBD) for the design of experiments (DOE) techniques and a finite element modeling. Then, the influence of the core layers number, size of the cell and, thickness of the substrates was investigated. The results showed that the increase in the size of the expanded metal cell in a reasonable range was required to improve the performance of the structure under bending collapse. It was found that core layers number and size of the cell was key factors governing the quasi-static response of the sandwich beams with lattice cores.

Shape Optimization to Minimize The Response Time of Direct-acting Solenoid Valve

  • Shin, Yujeong;Lee, Seunghwan;Choi, Changhwan;Kim, Jinho
    • Journal of Magnetics
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    • v.20 no.2
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    • pp.193-200
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    • 2015
  • Direct-acting solenoid valves are used in the automotive industry due to their simple structure and quick response in controlling the flow of fluid. We performed an optimization study of response time in order to improve the dynamic performance of a direct-acting solenoid valve. For the optimal design process, we used the commercial optimization software PIAnO, which provides various tools for efficient optimization including design of experiments (DOE), approximation techniques, and a design optimization algorithm. 35 sampling points of computational experiments are performed to find the optimum values of the design variables. In all cases, ANSYS Maxwell electromagnetic analysis software was used to model the electromagnetic dynamics. An approximate model generated from the electromagnetic analysis was estimated and used for the optimization. The best optimization model was selected using the verified approximation model called the Kriging model, and an optimization algorithm called the progressive quadratic response surface method (PQRSM).

Utilization and Quality Standard of Fast Pyrolysis Bio-Oil (급속 열분해 바이오 오일의 활용 및 품질기준)

  • PARK, JO YONG;DOE, JIN-WOO
    • Journal of Hydrogen and New Energy
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    • v.31 no.2
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    • pp.223-233
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    • 2020
  • Fast pyrolysis is one of the most promising technologies for converting biomass to liquid fuels. Pyrolysis bio-oil can replace petroleum-based fuels used in various thermal conversion devices. However, pyrolysis bio-oil is completely different from petroleum fuels. Therefore, in order to successfully use pyrolysis bio-oil, it is necessary to understand the fuel characteristics of pyrolysis bio-oil. This paper focuses on fuel characteristics and upgrading methods of pyrolysis bio-oil and discusses how these fuel characteristics can be applied to the use of pyrolysis bio-oils. In addition, the fuel quality standards of fast pyrolysis bio-oil were examined.

Improvement of 170 etching uniformity in a large area plasma source (대면적 플라즈마 소스에서의 ITO 식각균일도 향상)

  • 김진우;조수범;김봉주;박세근;오범환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.145-148
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    • 2001
  • A large area plasma source using parallel 2x2 ICP antennas showed improved etching uniformity by the E-ICP operation. ITO etching process with CH$_4$ gas chemistry is optimized with the DOE(Design of Experiment) based on Taguchi method. Various methane ratios in methane and argon mixture are compared to confirm the effect of polymerization. The analysis shows that the effect of bias power is the largeset. We obtained higher ITO etching rate and better uniformity on 350x300mm substrate at the 50Hz magnetization frequency of the E-ICP operation technique.

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Numerical study on the relation between flow parameters and the focal point of fluidic lens (유체 렌즈의 초점과 유동 인자의 상관관계에 대한 수치해석)

  • Lahooti, Mohsen;Kim, Daegyoum
    • Journal of the Korean Society of Visualization
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    • v.17 no.2
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    • pp.90-95
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    • 2019
  • In the present work, the effect of flow parameters such as volume flow rate on focal point of fluidic micro lens is investigated numerically. ANSYS Fluent is used for simulations, and the flow parameters and number of simulations are determined using the space filling method of design of experiment (DOE). Having determined the location of interfaces between fluids inside the micro lens which acts as the lens curvature, a ray tracking simulation on each case is performed using COMSOL Multiphysics to determine the focal point for each lens. These data are then used to provide a relation between flow parameters and the focal point of the lens.