• Title/Summary/Keyword: DLC

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The Effect of High Power Sputtering Conditions on Surface Roughness of Carbon Mold for Glass Forming (유리성형용 카본금형의 표면조도에 미치는 고출력 스퍼터링 조건의 영향)

  • Sung-Hoo Ju;Jae-Woong Yang
    • Journal of the Korean Applied Science and Technology
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    • v.41 no.1
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    • pp.46-57
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    • 2024
  • In this study, the various process conditions for high-power DC Magnetron Sputtering (DCMS) on the surface roughness of carbon thin films were investigated. The optimal conditions for Si/C coating were 40min for deposition time, which does not deviate from normal plasma, to obtain the maximum deposition rate, and the conditions for the best surface roughness were -16volt bias voltage and 400watt DC power with 1.3x10-3torr chamber pressure. Under these optimal conditions, an excellent carbon thin film with a surface roughness of 1.62nm and a thickness of 724nm was obtained. As a result of XPS analysis, it was confirmed that the GLC structure (sp2 bonding) was more dominant than the DLC structure (sp3 bonding) in the thin film structure of the carbon composite layer formed by DC sputtering. Except in infrequent cases of relatively plasma instability, the lower bias voltage and applied power induces smaller surface roughness value due to the cooling effect and particle densification. For the optimal conditions for Graphite/C composite layer coating, a roughness of 36.3 nm and a thickness of 711 nm was obtained under the same conditions of the optimal process conditions for Si/C coating. This layer showed a immensely low roughness value compared to the roughness of bare graphite of 242 nm which verifies that carbon coating using DC sputtering is highly effective in modifying the surface of graphite molds for glass forming.

MORPHOLOGICAL FEATURES OF THE CROWNS OF MAXILLARY SECOND PRIMARY MOLAR AND FIRST PERMANENT MOLAR: AN ODONTOMETRIC STUDY (상악 제2유구치와 상악 제1대구치의 치관 형태: 치아계측학적 연구)

  • Kim, Ji-In;Hyun, Hong-Keun;Kim, Young-Jae;Kim, Jung-Wook;Jang, Ki-Taeg;Lee, Sang-Hoon;Hahn, Se-Hyun;Kim, Chong-Chul
    • Journal of the korean academy of Pediatric Dentistry
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    • v.38 no.4
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    • pp.337-347
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    • 2011
  • The basic structure of the primary crowns usually resemble their succeeding permanent teeth. However, maxillary second primary molars resemble ipsilateral first permanent molars. Accordingly in this study, odontometric data of the two teeth was obtained, then analyzed to verify the morphological relationship and sex difference between the two teeth. Dental study casts were examined for their mesiodistal and buccolingual width of the crowns, diameter of each cusps, and intercuspal distances. Photographs of the crowns were taken to measure the angles between each cusp tip. The results are as follows : 1. In boys, PrI, PaI, DBC angle, and MBC angle did not show any statistically significant difference between the two teeth(p>0.05), and moderate level of correlations were observed. 2. In girls, crown index, DBC angle, and MBC angle of the two teeth did not show any statistically significant difference(p>0.05), and moderate level of correlations were recognized. 3. Measurements that did not show statistically significant difference between the two teeth in both boys and girls were DBC angle and MBC angle(p>0.05). In DLC angle, however, statistically significant difference was observed(p<0.01). 4. Most of the measurements showed sex differences, except DBC angle, which did not show any sex difference in both teeth(p>0.05).

Deposition of ZnO Thin Films by RF Magnetron Sputtering and Cu-doping Effects (RF 마그네트론 스퍼터링에 의한 ZnO박막의 증착 및 구리 도우핑 효과)

  • Lee, Jin-Bok;Lee, Hye-Jeong;Seo, Su-Hyeong;Park, Jin-Seok
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.12
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    • pp.654-664
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    • 2000
  • Thin films of ZnO are deposited by using an RF magnetron sputtering with varying the substrate temperature(RT~39$0^{\circ}C$) and RF power(50~250W). Cu-doped ZnO(denoted by ZnO:Cu) films have also been prepared by co-spputtering of a ZnO target on which some Cu-chips are attached. Different substrate materials, such as Si, $SiO_{2}/Si$, sapphire, DLC/Si, and poly-diamond/Si, are employed to compare the c-axial growth features of deposited ZnO films. Texture coefficient(TC) values for the (002)-preferential growth are estimated from the XRD spectra of deposited films. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values are determined. Effects of Cu-doping conditions, such as relative Cu-chip sputtering areas, $O_{2}/(Ar+O_{2})$ mixing ratios, and reactor pressures, on TC values, electrical resistivities, and relative Cu-compositions of deposited ZnO:Cu films have been systematically investigated. XPS study shows that the relative densities of metallic $Cu(Cu^{0})$ atoms and $CuO(Cu^{2+})$-phases within deposited films may play an important role of determining their electrical resistivities. It should be noted from the experimental results that highly resistive(> $10^{10}{\Omega}cm$ ZnO films with high TC values(> 80%) can be achieved by Cu-doping. SAW devices with ZnO(or Zn):Cu)/IDT/$SiO_{2}$/Si configuration are also fabricated to estimate the effective electric-mechanical coupling coefficient($k_{eff}^{2}$) and the insertion loss. It is observed that the devices using the Cu-doped ZnO films have a higher $k_{eff}^{2}$ and a lower insertion loss, compared with those using the undoped films.

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IPTV Service Provider over FTTH (광가입자망을 통한 IPTV 서비스 제공)

  • Park In-Gyu
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.43 no.5 s.347
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    • pp.7-16
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    • 2006
  • IPTV is referred to the service which provide integrated IPTV services for providing video, 10/100-Mbit/sec Internet, voice, video-on-demand (VOD), and other broadband applications including home security, video conferencing, and telemedicine. All services are integrated into an IP (Internet Protocol) architecture designed specifically for Gigabit Ethernet FTTH systems, HFC or xDLC. It is absolutely necessary that telecon operators provide IP video delivery platforms that enable service providers to transform their business. With their own products, they can better manage their existing services and generate new revenues from broadcast TV, movies on demand and multimedia. Triple-play is a combination of broadcast, telephony and broadband services offered through IPTV networks. With cable operators allowed to offer a triple-play bundle, the nation's telecom operators are beginning to get a little anxious. Cable operators assert that triple-play is a must-have and natural extension of the cable service bundle. The Korean Cable TV Association asserts that the triple-play model is of paramount importance to the cable industry's future growth. But the telecom sector considers itself unfairly disadvantaged, saying they cannot compete until regulatory issues are resolved. The start of web-based television in Korea may still be some time off with a confrontation between the nation's IT regulator and broadcasting sector over the service's legal boundaries shows no signs of being resolved my time soon. korea should be is the fastest-growing provider of IPTV solutions in the industry, with over worldwide customers.

Tribological study on the thermal stability of thick ta-C coating at elevated temperatures

  • Lee, Woo Young;Ryu, Ho Jun;Jang, Young Jun;Kim, Gi Taek;Deng, Xingrui;Umehara, Noritsugu;Kim, Jong Kuk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.144.2-144.2
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    • 2016
  • Diamond-like carbon (DLC) coatings have been widely applied to the mechanical components, cutting tools due to properties of high hardness and wear resistance. Among them, hydrogenated amorphous carbon (a-C:H) coatings are well-known for their low friction properties, stable production of thin and thick film, they were reported to be easily worn away under high temperature. Non-hydrogenated tetrahedral amorphous carbon (ta-C) is an ideal for industrial applicability due to good thermal stability from high $sp^3$-bonding fraction ranging from 70 to 80 %. However, the large compressive stress of ta-C coating limits to apply thick ta-C coating. In this study, the thick ta-C coating was deposited onto Inconel alloy disk by the FCVA technique. The thickness of the ta-C coating was about $3.5{\mu}m$. The tribological behaviors of ta-C coated disks sliding against $Si_3N_4$ balls were examined under elevated temperature divided into 23, 100, 200 and $300^{\circ}C$. The range of temperature was setting up until peel off observed. The experimental results showed that the friction coefficient was decreased from 0.14 to 0.05 with increasing temperature up to $200^{\circ}C$. At $300^{\circ}C$, the friction coefficient was dramatically increased over 5,000 cycles and then delaminated. These phenomenon was summarized two kinds of reasons: (1) Thermal degradation and (2) graphitization of ta-C coating. At first, the reason of thermal degradation was demonstrated by wear rate calculation. The wear rate of ta-C coatings showed an increasing trend with elevated temperature. For investigation of relationship between hardness and graphitization, thick ta-C coatings(2, 3 and $5{\mu}m$) were additionally deposited. As the thickness of ta-C coating was increased, hardness decreased from 58 to 49 GPa, which means that graphitization was accelerated. Therefore, now we are trying to increase $sp^3$ fraction of ta-C coating and control the coating parameters for thermal stability of thick ta-C at high temperatures.

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Morphology and Size of Clinical Crowns of Permanent Maxillary Molars in College Students (일부 대학생의 상악 대구치 임상치관의 형태와 크기)

  • Jeon, Eun-Suk;Lee, Jung-Hwa
    • The Journal of the Korea Contents Association
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    • v.10 no.7
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    • pp.285-296
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    • 2010
  • This study was implemented among 100 students of C College of Public Health who have healthy permanent dentition in order to measure the morphology and sizes of clinical crowns of permanent maxillary molars. The following are conclusions of this study. 1. The cusp height, crown width, crown thickness of clinical crowns appeared to be bilaterally symmetrical. 2. The strong development of the buccal groove showed to be superior in the right first molar. The appearance rate of the buccal pit was high in the right first molar also. 3. The type 4th cusp appeared as 100% in the left and right first molars, and 78%, 75% in the left and right second molars respectively. 4. The distal lingual cusp(DLC) size were bilaterally symmetrical in the type 4th cusp. 5. As for the distance between two cusp tips, it was large between mesial cusp tips in all of the first and second molars at both sides. 6. Development of the Carabelli's cusp was high in both the left and right first molars. 7. The appearance rate of the oblique ridge was 87.0% in the right first molar, 73.0% in the right second molar, 88.0% in the left first molar, and 73.0% in the left second molar. This is considered to be caused by people who have mild dental crown caries in their first molars. 8. The appearance rate of the mesial marginal ridge tubercle(DMRT) was high in both of the left and right first molars. That of the distal tubercle was 16.0% in the right first molar, 26.0% in the right second molar, 14.0% in the left first molar, and 21% in the left second molar.

R.F. plasma assisted CVD로 합성한 BN, BCN 박막의 물성과 구조 연구

  • 김홍석;백영준;최인훈
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.114-114
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    • 1999
  • Boron nitride (BN)는 매우 뛰어난 물리적, 화학적 성질을 가지고 있는 재료로 많은 연구가 진행되고 있다. hexagonal 형태의 hBN의 경우 큰 전기 저항과 열 전도도를 가지고 있고 열적 안정성을 가지고 있어 반도체 소자에서 절연층으로 쓰일 수 있다. 또한 X-ray와 가시광선을 투과시키기 때문에 X-ray와 가시광선을 투과시키기 때문에 X-ray lithography이 mask 기판으로 사용될 수 있다. Boron-carbon-nitrogen (BCN) 역시 뛰어난 기계적 성질과 투명성을 가지고 있어 보호 코팅이나 X-ray lithography에 이용될 수 있다. 또한 원자 조성이나 구성을 변화시켜 band gap을 조절할 수 있는 가능성을 가지고 있기 때문에 전기, 광소자의 재료로 이용될 수 있다. 본 연구에서는 여러 합성 조건 변화에 따른 hBN 막의 합성 거동을 관찰하고, 카본 농도변화에 따른 BCN 막의 기계적 성질과 구조의 변화, 그리고 실리콘 첨가에 의한 물성 변화를 관찰하였다. BN박막은 실리콘 (100) 기판 위에 r.f. plasma assisted CVD를 이용하여 합성하였다. 합성 압력 0.015 torr, 원료 가스로 BCl3 1.5 sccm, NH3 6sccm을 Ar 15 sccm을 사용하여 기판 bias (-300~-700V)와 합성온도 (상온~50$0^{\circ}C$)를 변화시켜 BN막을 합성하였다. BCN 박막은 상온에서 기판 bias를 -700V로 고정시킨 후 CH4 공급량과 Ar 가스의 첨가 유무를 변화시켜 합성하였다. 또한 SiH4 가스를 이용하여 실리콘을 함유하는 Si-BCN 막을 합성하였다. 합성된 BN 막의 경우, 기판 bias와 합성 온도가 증가할수록 증착속도는 감소하는 경향을 보여 주었다. 기판 bias와 합성온도에 따른 구조 변화를 SEM과 Xray로 분석하였다. 상온에서 합성한 경우는 표면형상이 비정질 형태를 나타내었고, X-ray peak이 거의 관찰되지 않았다. 합성온도가 증가하게 되면 hBN (100) peak이 나타나게 되고 이것은 합성된 막이 turbostratic BN (tBN) 형태를 가지고 있다는 것을 나타낸다. 50$0^{\circ}C$의 합성 온도에서 기판 bias가 -300V에서 hBN (002) peak이 관찰되었고, -500, -700 V에서는 hBN (100) peak만이 관찰되었다. 따라서 고온에서의 큰 ion bombardment는 합성되는 막의 결정성을 저해하는 요소로 작용한다는 것을 확인 할 수 있었다. 합성된 BN 막은 ball on disk type의 tribometer를 이용하여 마모 거동을 관찰한 결과 대부분 1이상의 매우 큰 friction coefficient를 나타내었고, nano-indenter로 측정한 BN막의 hardness는 매우 soft한 막에서부터 10 GPa 정도 까지의 값을 나타내었고, nano-indenter로 측정한 BN 막의 hardness는 매우 soft한 막에서부터 10GPa 정도 까지의 값을 가지며 변하였다. 합성된 BCN, Si-BCN 막은 FT-IR, Raman, S-ray, TEM 분석을 통하여 그 구조와 합성된 상에 관하여 분석하였다. FT-IR 분석을 통해 B-N 결합과 C-N 결합을 확인할 수 있었고, Raman 분석을 통하여 DLC의 특성을 분석하였다. 마모 거동에서는 BCN 막의 경우 0.6~0.8 정도의 friction coefficient를 나타내었고 Si-BCN 막은 0.3이하의 낮은 friction coefficient를 나타내었다. Hardness는 carbon의 함유량과 Ar 가스의 첨가 유무에 따라 각각을 측정하였고 이것은 BN 막 보다 향상된 값을 나타내었다.

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A Study on the Effect of Si Surface on Diamond Film Growth by AES (Diamond 박막 성장에 미치는 Si 표면 영향의 AES에 의한 연구)

  • Lee, Cheol-Ro;Sin, Yong-Hyeon;Im, Jae-Yeong;Jeong, Gwang-Hwa;Cheon, Byeong-Seon
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.199-208
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    • 1993
  • The effect of nucleation free energy related to Si surface states on diamond film growth behavior has been studied. Ar first, the three kinds of diamond thin films (A, B, C) were deposited on various Si substrates (A-Si, B-Si, C-Si) whose surfaces were polished with 1 ${\mu}m$ diamond paste, 6 ${\mu}m$ Al_2O_3$ powder and 12 ${\mu}m$ Al_2O_3$ powder respectively. And then, relative nucleation free energy calculated is ${\Delta}G_{A-Si}<{\Delta}G_{B-Si}<{\Delta}G_{C-Si}$. Although there are some difference in grain size, shape and nucleated size, the thin films on A-Si and B-Si were diamond including a small amount of DLC which was confirmed by AES, SEM, XRD, and RHEED. Namely, the diamonds of films (B) were not nucleated in scratches but in dents and larger in grain size compare with the film (C) of which diamond sere nucleated not only scratches but also dents. And, the sphere diamond which is not general shape was grown on C-Si. After all, the sphere was turned out to be the diamond including much graphite as a result of the AES in situ depth profiling. Consequently, the diamond shape and quality grown on Si were Changed from the crystal which the (100) and (110) planes were predominent to the crystal in which (111) plane was predominent, and newt to sphere shape diamond including much graphite according as the nucleation free energy increases.

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전자빔의 조사가 직접이온빔으로 증착하는 CN 박막의 물성에 미치는 영향

  • 김용환;이덕연;김인교;백홍구
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.87-87
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    • 2000
  • 이온빔 증착에 있어서 전자의 조사가 이온빔 증착기구에 미치는 영향에 대한 연구는 지금까지 보고 되어지지 않았다. 특히 전자의 조사가 증착층의 물성에 영향을 미칠 수 있느지에 대하여 정량적인 결과를 실험을 통하여 제시한 보고는 내가 아는 한 존재하지 않는다. 한편 이와같이 박막 증착에 있어서 전하가 증착되어지는 박막의 물성에 미칠 수 있는 영향에 대해서는 많은 과학자들의 관심사이기도 하다. 본 실험에서는 kaufman ion gun을 이용하여 질소 양이온을, 그리고 Cs+ ion gun을 이용하여 탄소 음이온을 조사하고 이들을 이용하여 CN 박막을 증착하였다. 질소 양이온의 에너지는 100eV, 이온밀도는 70$\mu$A/$\textrm{cm}^2$로 고정하고, 탄소 이온빔(80$\mu$A/$\textrm{cm}^2$)의 에너지를 200cV까지 변화시켜가며 증착하였다. 이때 증착층의 특성에 음 전하의 효과를 유발하기 위하여 350~360$\mu$A/$\textrm{cm}^2$의 전자빔을 이온빔 증착과 동시에 추가로 조사하였고 이의 특성을 전자빔을 조사하지 않고 증착한 CN 박막의 특성과 서로 비교하였다. 또한 증착 표면의 전하 축적에 의한 입사 이온빔의 에너지 감소에 의한 영향을 방지하기 위하여 증착되는 Si 기판에 HF (300kHz, 3.5V) bias를 가하여 주었다. 전자빔의 조사와 동시에 이루어진 CN 박막의 증착은 입사하는 탄소 음 이온빔의 에너지가 80eV에서 180eV 사이일때 원자밀도의 향상과 질소함량의 증가, 그리고 sp2C-N 결합대비 sp3C-N 결합의 향상이 이루어졌음을 확인하였다. 이는 이온빔 충돌에 의하여 피코쵸 정도의 시간대에 이루어지는 박막내의 collision cascade 영역에 이에 의하여 생긴 결함부위에 유입된 음 전하가 위치하면 전하주위의 원자와 polarization을 형성하고 이에 의하여 탄소와 질소의 결합을 형성하는데 필요한 자유에너지의 감소를 수반하는 방향으로 원자의 배열이 이루어지기 때문으로 사료된다. 이와같이 이온빔 에너지가 이온빔 증착 기구의 주요한 인자로 널리 인식되고 있는 kinetic bonding process에 있어서 이온 에너지에 의하여 activation energy barrier를 넘은후, 전자의 조사가 자유에너지를 낮추는 방향으로 최종 결합경로를 조절할 수 있기 때문에 이온빔 증착을 조절할 수 있는 또 하나의 주요한 인자로 받아들여질 수 있으리라 판단된다. 이온빔 프로세스에 의한 DLC 혹은 탄소관련 필름을 형성하는데 있어서 입사 이온빔의 에너지에 의하여 수반되는 thermal spike 혹은 외부 열원에 의한 가열은 박막층의 흑연화를 수반하기 때문에 박막의 sp3 특성을 향상시키기 위하여 회피하여야 할 요소이지만 thermal spike에 의한 국부 영역의 가열과 같은 불가피한 인자가 존재하는 상황에서 전자에 의한 추가 전하의 조사에 의한 최종결합경로의 선택적 조절은 박막의 화학적 결합과 물리적 특성을 향상시킬 수 있는 중요한 방법이 될 수 있다고 판단된다.

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THE EFFECT OF TEMPERATURE CHANGES ON THE PHYSICAL PROPERTIES OF POSTERIOR COMPOSITE RESINS (구치부용 복합 레진 가열시 물리적 성질의 변화에 관한 실험적 연구)

  • Park, Yeon-Hong;Min, Byung-Soon;Choi, Ho-Young;Park, Sung-Jin
    • Restorative Dentistry and Endodontics
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    • v.14 no.1
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    • pp.41-56
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    • 1989
  • The purpose of this study was to examine the effect of temperature dependence of the behavior on the physical properties of posterior composite resins. Three light cure posterior composite resins (Heliomolar, Litefil-P, and P-50) and one chemical cure posterior composite resin (Bisfil-II) were used as experimental materials. Composite resin was placed in a cylindrical brass mold (2.5 mm high and 6.5 mm inside diameter) that was rested on a glass plate. Another flat glass was placed on top of the mold, and the plate was tightly clamped together. After the mold had been filled with the light cure composite material, the top surface was cured for 30 seconds with a light source. Chemical cure resin specimens were made in the same manner as above. Three hundreds and twenty composite resin specimens were constructed from the four composite materials. One hundred and sixty specimens of them were placed in a heater at $50^{\circ}C$, $75^{\circ}C$, $100^{\circ}C$, $125^{\circ}C$, $150^{\circ}C$, $175^{\circ}C$ and $200^{\circ}C$ for 5 minutes or 10 minutes respectively before compressive strengths were measured. Another one hundred and sixty specimens were tested for the diametral tensile strengths in the same way as above. They were randomly divided into eight groups according to the mode of heating methods as follows and stored in distilled water at $37^{\circ}C$ for 24 hours. Group $37^{\circ}C$ - specimens were stored at $37^{\circ}C$ in distilled water for 24 hours. Group $50^{\circ}C$ - specimens were heated at $50^{\circ}C$ after curing. Group $75^{\circ}C$ - specimens were heated at $75^{\circ}C$ after curing. Group $100^{\circ}C$ - specimens were heated at $100^{\circ}C$ after curing. Group $125^{\circ}C$ - specimens were heated at $125^{\circ}C$ after curing. Group $150^{\circ}C$ - specimens were heated at $150^{\circ}C$ after curing. Group $175^{\circ}C$ - specimens were heated at $175^{\circ}C$ after curing. Group $200^{\circ}C$ - specimens were heated at $200^{\circ}C$ after curing. Twenty specimens of each of four composite resins were respectively made by insertion of materials into same mold for examining the dimensional changes between before and after heating. The final eighty specimens were stored in distilled water at $37^{\circ}C$ for 24 hours before testing the dimensional changes. Compressive and diametral tensile strengths were measured crosshead speed 1mm/minute and 500Kg in full scale with a mechanical testing machine (DLC 500 Type, Shimadzu Co., Japan). Dimensional changes were determined by measuring the diametral changes of eighty specimens with micrometer (Mitutoyo Co., Japan). Results were as follows: 1. Diametral tensile strengths of specimens in all groups were increased with time heated compared with control group except for that in group $50^{\circ}C$ and the maximum diametral tensile strength was appeared in the specimen of Litefil-P heated for 10 minutes at $100^{\circ}C$. In heliomolar and P-50, it could be seen in the specimen heated for 10 minutes at $150^{\circ}C$, but in Bisfil-II, it could be found in the specimen heated for 5 minutes at $150^{\circ}C$. 2. Compressive strengths of specimens in all groups was tended to be also increased with time heated but that in group $50^{\circ}C$ and the maximum compressive strengths were showed in the same specimens conditioned as the diametral tensile strengths of four composite materials tested. 3. In Heliomolar, Litefil-P, and Bisfil-II, it was decreased in diameters of resin specimens between before heating and increased in diameters of resin specimens after storing in distilled water, but it was not in P-50. 4. There is little difference in diametral tensile strengths, compressive strengths, and dimensional changes followed by heating the resin specimens for 5 minutes and 10 minutes, but there is no statistical significances.

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