• 제목/요약/키워드: DLC

검색결과 620건 처리시간 0.032초

Linear Ion Source에 의해 증착된 Diamond-Like Carbon(DLC) 박막의 질화층 형성에 따른 밀착력 특성 연구 (Study on the Adhesion of Diamond Like Carbon Films Using the Linear Ion Source with Nitriding Layers)

  • 신창석;박민석;권아람;김승진;정원섭
    • 한국표면공학회지
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    • 제44권5호
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    • pp.190-195
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    • 2011
  • Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.

PECVD로 증착된 금속층을 포함하는 DLC 박막의 기계적 특성 분석 (An analysis of tribological properties of the metal interlayered DLC films prepared by PECVD method)

  • 전영숙;최원석;박용섭;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.951-954
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    • 2004
  • 본 논문에서는 DLC(Diamond-like Carbon) 박막과 기판 사이에 금속층을 포함하는 DLC 박막의 기계적 특성을 분석하였다. 금속층은 sputtering법을 사용하고, DLC 박막은 PECVD법을 사용하여 각각 중착하였다. 티타늄(Ti), 니켄(Ni), 크롬(Cr)을 각 중간 금속층으로 사용한 후 DLC 박막과 실리콘(Si) 기판 간의 기계적 특성을 분석하였다. 각 막의 두께는 FE-SEM으로 확인하였고, DLC 박막의 구조 평가는 Raman spectrometer를 사용하여 분석하였으며, 각 금속층과 DLC 박막의 표면 상태는 AFM을 이용하여 확인하였다. XRD 분석을 통하여 박막의 격자분석을 하였고, SIMS(secondary ion mass spectrometry) 분석을 통하여 DLC 박막의 depth Profile을 확인하였다.

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직접부하자원의 시간대별 부하배분 전략 (An Hourly Operating Strategy for Direct Load Control Resources)

  • 정상윤;박종배;신중린;김형중;채명석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 A
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    • pp.816-818
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    • 2005
  • In this paper, we have developed an hourly operating strategy for Direct load control (DLC) considering the efficiency of DLC program and increasing the utility of DLC resource. According to the operating code for DLC, the DLC center should curtail the load for 4 hours when the control notification has been enforced. Since the above strategy may limit the participation of entities, who intend to take part in the DLC program, the new strategy to mitigate the above limitation is required. In this paper, we have developed the operating strategy of DLC program and the mechanism to apply the proposed strategy in the DLC center. The proposed strategy makes the important role from the view of guaranteing the effective alternative raising the participation and avoiding the penalty of the entities.

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하드디스크 드라이브에서 슬라이더의 DLC 층 손상에 의한 진동 특성 변화에 관한 연구 (Analysis for flying stability with damaged DLC layer by confined optical energy in TAMR system)

  • 박노철;최종학;임건엽;박경수;박영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 추계학술대회 논문집
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    • pp.984-985
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    • 2014
  • This research investigates to analyze the effect of laser of thermally assisted magnetic recording system on diamond like carbon (DLC) layer of slider. We investigated a damaged DLC layer of slider with laser spot-induced damage and analyze the effect of the damaged DLC layer in slider dynamics. The damaged DLC layer resulted in change of flying height and air bearing stiffness pressure.

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DC Pulsed Magnetron Sputtering 법으로 제조된 B-C 박막과 B-C/DLC 다층막의 물성에 관한 연구

  • 김강삼;조용기
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.311-311
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    • 2012
  • Boron carbide (B-C) 박막은 높은 경도, 열적 안전성, 화학적 안전성이 우수한 하드 코팅 소재로 사용되고 있다. 우수한 특성을 가지는 B-C 박막에 대한 연구는 B4C 비전도성 타겟을 이용하여 RF Sputtering 법으로 증착 공정변수에 대해서 박막의 물성에 관해 일부 연구자들이 진행하였으나, Pulsed dc margnetron sputtering 법으로 증착 공정변수에 대한 물성의 연구는 미진하였다. 반면에, DLC 박막은 우수한 특성을 가지는 하드 코팅 소재이나 400도 이상에서는 내열성이 떨어지는 단점을 가지고 있다. 연구에서는 B-C 박막의 내열성이 우수한 특성을 이용하여 DLC 박막의 내열성을 높이기 위한 목적으로 B-C 박막과 DLC 박막을 다층막으로 제조함으로서 DLC 박막을 구조적으로 안정화를 시키고자 하였다. 그리고 비전도성 B4C 타겟으로 Pulsed dc 마그네트론 스퍼터링법을 이용하여 증착기술을 개발하기 위해서 공정압력과 인가전력에 따른 B-C 박막을 제조하여 그 물성을 조사하였고, B-C/DLC 다층막을 제조하여 DLC 박막의 내열성을 증가시키고자 하였다. B-C 박막과 B-C/DLC 다층막의 경도와 탄성율은 나노인덴테이션과 마이크로 비커스를 이용하였으며, 박막의 성장구조와 박막의 구조를 조사하기 위해 SEM과 FTIR 및 XRD 을 이용하여 측정하였다.

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증착방법에 따른 DLC 막의 마찰-마모 특성평가 (Characterization of Tribological Properties of DLC Films Prepared by Different Deposition Method)

  • 오윤석
    • 한국세라믹학회지
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    • 제46권5호
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    • pp.497-504
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    • 2009
  • DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. Different deposition method such as arc plating, ion gun plating and PECVD were used for comparing mechanical and tribological properties of each DLCs deposited on stainless steel with 1 um thick respectively. Among these 3 types of DLCs, the arc plated DLC film showed highest value for wear resistance in dry condition. From the results of analysis for physical properties of DLC films, it seems that the adhesion force and crack initiation modes were more important factors than intrinsic mechanical properties such as hardness, elastic modulus and/or roughness to the wear resistance of DLC films. Raman spectroscopy was used for understanding chemical bonding natures of each type of DLC films. Typical D and G peaks were identified based on the deposition method. Hardness of the coating layers were identified by nanoindentation method and the adhesions were checked by scratch method.

PECVD 방법으로 성장시킨 DLC 박막의 복소굴절율 및 성장조건에 따른 박막상수 변화 (Complex refractive index of PECVD grown DLC thin films and density variation versus growth condition)

  • 김상준;방현용;김상열;김성화;이상현;김성영
    • 한국광학회지
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    • 제8권4호
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    • pp.277-282
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    • 1997
  • 광학소자나 전자소자의 코팅에 많이 이용되고 있는 Diamond-like Carbon(DLC) 박막의 복소굴절율을 광학적 방법을 사용하여 구하였다. PECVD(Plasma enhanced CVD)법에 의해 Si(100)기판과 비정질실리카 기판위에 각각 성장시킨 DLC 박막을 분광타원해석기와 분광광도계를 이용하여 타원해석 스펙트럼과 광투과율 스펙트럼을 측정하고, Sellmeier 분산관계식과 양자역학적 진동자 모델을 이용하여 분석하였다. 비정질실리카 위에 증착된 DLC 박막의 광투과영역에서 분광타원해석분석으로 굴절률 및 박막의 유효두께를 구하고 광흡수영역에서 투과스펙트럼을 역방계산하여 소광계수를 구한 뒤, 이 소광계수 스펙트럼에 최적 근사하는 양자역학적 분산식의 계수들을 회귀분석법으로 결정하여 복소굴절율을 구하였다. 그리고 모델링방법을 타워해석 스펙트럼에 적용하여 Si기판과 비정질이산화규소 기판위에 증착된 DLC 박막의 조밀도, 표면거칠기 등 박막상수를 박막의 성장조건에 따라 분석하였다.

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지르코니아 광페룰 사출성형용 WC 코아 핀의 Diamond Like Carbon 코팅 (Diamond Like Carbon Coating on WC Core Pin for Injection Molding of Zirconia Optical Ferrule)

  • 박현우;정세훈;김현영;이광민
    • 한국재료학회지
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    • 제20권11호
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    • pp.570-574
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    • 2010
  • A diamond-like carbon (DLC) film deposited on a WC disk was investigated to improve disk wear resistance for injection molding of zirconia optical ferrule. The deposition of DLC films was performed using the filtered vacuum arc ion plating (FV-AIP) system with a graphite target. The coating processing was controlled with different deposition times and the other conditions for coating, such as input power, working pressure, substrate temperature, gas flow, and bias voltage, were fixed. The coating layers of DLC were characterized using FE-SEM, AFM, and Raman spectrometry; the mechanical properties were investigated with a scratch tester and a nano-indenter. The friction coefficient of the DLC coated on the WC was obtained using a pin-on-disk, according to the ASTM G163-99. The thickness of DLC films coated for 20 min. and 60 min. was about 750 nm and 300 nm, respectively. The surface roughness of DLC films coated for 60 min. was 5.9 nm. The Raman spectrum revealed that the G peak of DLC film was composed of $sp^3$ amorphous carbon bonds. The critical load (Lc) of DLC film obtained with the scratch tester was 14.6 N. The hardness and elastic modulus of DLC measured with the nano-indenter were 36.9 GPa and 585.5 GPa, respectively. The friction coefficient of DLC coated on WC decreased from 0.2 to 0.01. The wear property of DLC coated on WC was enhanced by a factor of 20.

IEC 61400-1 DLC1.1과 DLC1.3에 대한 풍력터빈의 극한하중 특성 (Characteristics of Ultimate Load in a Wind Turbine for IEC 61400-1 DLC1.1 and DLC1.3)

  • 김충옥;남현우;음학진;김귀식
    • 한국태양에너지학회 논문집
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    • 제32권1호
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    • pp.15-24
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    • 2012
  • IEC 61400-1 requires design lifetime of wind turbines at least 20 years, thus wind turbine should be assured for structural safety through load assessment. DLCs have been defined with respect to the load assessment in IEC 61400-1. In addition, if the extreme design values for DLC1.3 are equal or exceed the extreme design value for DLC1.1, DLC1.1 may be omitted. To omit DLC1.1, scale factor (c) will be increased in DLC1.3. However, this particular adjustment is not specified guidelines. Thus, this study was conducted. DLC1.1 was calculated for extrapolation of 50 years-extreme events using several probability distribution functions and fitting methods. And DLC1.3 was calculated for up to seven different values of scale factor (c) with $2{\leq}c{\leq}5$ in steps of 0.5. Finally, in this study, scale factor (c) that was the value of 4.51 was determined.

Clinicopathological Significance of DLC-1 Expression in Cancer: a Meta-Analysis

  • Jiang, Yan;Li, Jian-Ming;Luo, Huai-Qing
    • Asian Pacific Journal of Cancer Prevention
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    • 제16권16호
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    • pp.7255-7260
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    • 2015
  • Background: Recent reports have shown that DLC-1 is widely expressed in normal tissues and is down-regulated in a wide range of human tumors, suggesting it may act as a tumor suppressor gene. We conducted a meta-analysis to determine the correlation between DLC-1 expression and clinicopathological characteristics in cancers. Materials and Methods: A detailed literature search was made for relevant publications from PubMed, EMBASE, Cochrane library databases, Web of Science, CNKI. The methodological quality of the studies was also evaluated. Analyses of pooled data were performed and odds ratios (ORs) were calculated and summarized. Results: Final analysis was performed of 1,815 cancer patients from 19 eligible studies. We observed that DLC- 1 expression was significantly lower in cancers than in normal tissues. DLC-1 expression was not found to be associated with tumor differentiation status. However, DLC-1 expression was obviously lower in advance stage than in early-stage cancers and was more down-regulated in metastatic than non-metastatic cancers. Conclusions: The results of our meta-analysis suggested that DLC-1 expression is significantly lower in cancers than in normal tissues. Aberrant DLC-1 expression may play an important role in cancer genesis and metastasis.