• 지구물리와물리탐사
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• 제7권1호
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• pp.80-87
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• 2004

During excavation work for the construction of a highway bridge in a limestone area in Korea, several cavities were found, and construction work was stopped temporarily. Cavities under the bridge piers might seriously threaten the safety of the planned bridge, because they could lead to excessive subsidence and differential settlement of the pier foundations. In order to establish a method for reinforcement of the pier foundations, borehole radar reflection and tomography surveys were carried out, to locate cavities under the planned pier locations and to determine their sizes where they exist. Since travel time data from the crosshole radar survey showed anisotropy, we applied an anisotropic tomography inversion algorithm assuming heterogeneous elliptic anisotropy, in order to reconstruct three kinds of tomograms: tomograms of maximum and minimum velocities, and of the direction of the symmetry axis. The distribution of maximum velocity matched core logging results better than that of the minimum velocity. The degree of anisotropy, defined by the normalized difference between maximum and minimum velocities, was helpful in deciding whether an anomalous zone in a tomogram was a cavity or not. By careful examination of borehole radar reflection and tomography images, the spatial distributions of cavities were delineated, and most of them were interpreted as being filled with clay and/or water. All the interpretation results implied that two faults imaged clearly by a DC resistivity survey were among the most important factors controlling the groundwater movement in the survey area, and therefore were closely related to the development of cavities. The method of reinforcement of the pier foundations was based on the interpretation results, and the results were confirmed when construction work was resumed.

• 한국표면공학회지
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• 제39권5호
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• pp.206-209
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• 2006

Indium tin oxide (ITO) films were synthesized on polymer (PES, polyethersulfone) at room temperature by pulsed DC magnetron sputtering. By the control of introducing hydrogen to argon atmosphere, the resistivity of ITO films was obtained at $5.27\;{\times}\;10^{-4}\;{\Omega}{\cdot}cm$ without substrate heating in comparison with $2.65\;{\times}\;10{-3}\;{\Omega}{\cdot}cm$ under hydrogen free condition. ITO film synthesized at Ar condition was changed from amorphous to crystalline. These result from the enhancement of electron temperature in $Ar\;+\;H_2$ plasma, which induces the increase of ionization of target materials and argon. The dominant increase of ions such as In II and O II and neutral Sn I was monitored by optical emission spectroscopy (OES). Thermal energy required for the crystalline film formation is compensated by kinetic energy transfer through ion bombardments to substrate.

• 대한전자공학회논문지TE
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• 제39권2호
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• pp.6-10
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• 2002

플라스틱 기반 평판디스플레이 장치를 위한 Al 박막(1000-4000${\AA}$)을 직류-마그네트론 스퍼터링으로 유리 기판과 고분자 플라스틱 기판위에 증착하였다. 고분자 플라스틱 기판위에 증착된 Al박막의 전기적 특성을 향상시키고, 열 팽창을 줄이기 위하여 단계적 열 처리법을 사용하였다. 이러한 공정을 사용함으로써, 고분자 기판위에 증착된 박막의 크랙과 기판의 휨현상이 없는 Al 박막을 성공적으로 증착하였다. 또한, Al 박막의 열처리와 증착공정은 모두 200$^{\circ}C$ 이하에서 이루어 졌기 때문에, 이러한 저온 공정은 고분자 플라스틱 기판에 적용이 가능하다. Al 박막의 특성과 신뢰성을 조사하기 위하여 주사 전자 현미경(SEM), 원자력 현미경(AFM), X-선 회절 분석법(XRD)과 비저항등의 전기적 특성을 측정하였다.

• 한국재료학회지
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• 제20권3호
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• pp.137-141
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• 2010

The $(1-x)La_{0.7}Sr_{0.3}MnO_3(LSMO)/xZnFe_2O_4$(ZFO) (x = 0, 0.01, 0.03, 0.06 and 0.09) composites were prepared by a conventional solid-state reaction method. We investigated the structural properties, magnetic properties and electrical transport properties of (1-x)LSMO/xZFO composites using X-ray diffraction (XRD), scanning electron microscopy (SEM), field-cooled dc magnetization and magnetoresistance (MR) measurements. The XRD and SEM results indicate that LSMO and ZFO coexist in the composites and the ZFO mostly segregates at the grain boundaries of LSMO, which agreed well with the results of the magnetic measurements. The resistivity of the samples increased by the increase of the ZFO doping level. A clear metal-to-insulator (M-I) transition was observed at 360K in pure LSMO. The introduction of ZFO further downshifted the transition temperature (350K-160K) while the transition disappeared in the sample (x = 0.09) and it presented insulating/semiconducting behavior in the measured temperature range (100K to 400K). The MR was measured in the presence of the 10kOe field. Compared with pure LSMO, the enhancement of low-field magnetoresistance (LFMR) was observed in the composites. It was clearly observed that the magnetoresistance effect of x = 0.03 was enhanced at room temperature range. These phenomena can be explained using the double-exchange (DE) mechanism, the grain boundary effect and the intrinsic transport properties together.

• 한국지하수토양환경학회지:지하수토양환경
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• 제25권2_spc호
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• pp.86-100
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• 2020

Analyzing and monitoring environmental contaminants based on geophysical exploration techniques have become important and it is now widely applied to delineate spatial distribution geophysical characteristics in wide area. Among the techniques, induced polarization (IP) method, which measures polarization effects on electrical potential distribution, has drawn much attention as an effective tool for environmental monitoring since IP is sensitive to changes in biochemical reactions. However, various reactions stemming from the presence of multiple contaminants have greatly enhanced heterogeneity of polluted sites to result in highly variable electrical characteristics of the site. Those contaminants influence chemical and physical state of soil and groundwater to alter electrical double layer, which in turn influences polarization of the media. Since biochemical reactions between microbes and contaminants result in various IP effects, IP laboratory experiments were conducted to investigate IP responses of the contaminated soil samples under various conditions. Field IP surveys can delineate the spatial distribution of contamination, while providing additional information about electrical properties of a target medium, together with DC resistivity. Reviewing IP effects of contaminants as well as IP surveys can serve as a good starting point for the application of IP survey in site assessment for environmental remediation.

• 한국표면공학회지
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• 제55권2호
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• pp.91-95
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• 2022

ZnO single layer (60 nm thick) and ZnO with Ag interlayer (ZnO/Ag/ZnO; ZAZ) films were deposited on the glass substrates by using radio frequency (RF) and direct current (DC) magnetron sputter to evaluate the effectiveness of Ag interlayer on the optical visible transmittance and the conductivity of the films. In the ZAZ films, the thickness of ZnO layers was kept at 30 nm, while the Ag thickness was varied as 5, 10, 15 and 20 nm. In X-ray diffraction (XRD) analysis, ZnO films show the (002) diffraction peak and ZAZ films also show the weak ZnO (002) peak and Ag (111) diffraction peak. As a thickness of Ag interlayer increased to 20 nm, the grain size of the Ag films enlarged to 11.42 nm and the optical band gap also increased from 4.15 to 4.22 eV with carrier concentration increasing from 4.9 to 10.5×10²¹ cm^-3. In figure of merit measurements, the ZAZ films with a 10 nm thick Ag interlayer showed the higher figure of merit of 4.0×10^-3 Ω^-1 than the ZnO single layer and another ZAZ films. From the experimental result, it is assumed that the Ag interlayer enhanced effectively the opto-electrical performance of the ZAZ films.

• 대한토목학회논문집
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• 제28권6D호
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• pp.905-913
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• 2008

최근 고속전철의 자갈도상에 대한 대안으로 콘크리트 슬래브궤도가 도입되어 고속전철 신규노선에 시공되고 있다. 콘크리트 슬래브궤도는 자갈도상에 비해 내구성, 유지관리 측면에서의 경제성, 열차운행의 안정성 등의 측면에서 우위에 있지만, 우수 및 지하수로 인한 노반강성의 저하, 연약한 원지반의 침하 등으로 인한 슬래브궤도의 처짐은 열차안정성에 치명적인 결함이 된다. 본 연구에서는 슬래브궤도의 처짐 지표로서 슬래브궤도의 휨강성을 설정하고, 슬래브궤도의 휨강성을 2차원 영상으로 표현할 수 있는 FRACTAL (Flexural-Rigidity Assessment of Concrete Tracks by Antisymmetric Lamb Waves) 기법이라는 비파괴 탄성파 기법을 제안하였다. 이론적 근거 확보를 위하여 콘크리트 슬래브궤도에서의 탄성파 시험을 수치해석적으로 모사하여 영향인자 연구를 수행하였고, FRACTAL 기법의 적용성 평가를 위하여 실제 고속전철 슬래브궤도에 적용하여 보았다. 그리고 FRACTAL 시험측선과 동일 측선에서 Impulse-Response 기법과 인접지반에서 전기비저항시험을 수행하여, FRACTAL 기법의 신뢰성을 검증하였다.

• 한국표면공학회지
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• 제56권6호
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• pp.451-456
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• 2023

Transparent conducting films having a three layered structure of ZnO/Cu/ZnO (ZCZ) were deposited onto the glass substrates by using RF and DC magnetron sputtering at room temperature. The emissivity and opto-electrical properties of the films were investigated with a varying thickness(5, 10, 15 nm) of the Cu interlayer. With increasing the Cu thickness to 15 nm, the films showed a enhanced electrical properties. Although ZnO 30/Cu 15/ZnO 30 nm film shows a lower resistivity of 5.2×10^-5 Ωcm, it's visible transmittance is deteriorated by increased optical absorbtion of the films. In addition, X-ray diffraction patterns indicated that the insertion of Cu interlayer improve the grain size of ZnO films, which is favor for the electrical and optical properties of transparent conducting films. From the observed low emissivity of the films, it is concluded that the ZCZ thin films with optimal thickness of Cu interlayer can be applied effectively for the car's window coating materials.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.188.2-188.2
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• 2015

The presence of the conduction interface in epitaxial $LaAlO_3/SrTiO_3$ thin films has opened up challenging applications which can be expanded to next-generation nano-electronics. The metallic conduction path is associated with two adjacent insulating materials. Such device structure is applicable to frequency-dependent impedance spectroscopy. Impedance spectroscopy allows for simultaneous measurement of resistivity and dielectric constants, systematic identification of the underlying electrical origins, and the estimation of the electrical homogeneity in the corresponding electrical origins. Such unique capability is combined with the intentional control on the interface composition composed of $SrTiO_3$ and $CaTiO_3$, which can be denoted by $SrxCa1-_xTiO_3$. The underlying $Sr_xCa1-_xTiO_3$ interface was deposited using pulsed-laser deposition, followed by the epitaxial $LaAlO_3$ thin films. The platinum electrodes were constructed using metal shadow masks, in order to accommodate 2-point electrode configuration. Impedance spectroscopy was performed as the function of the relative ratio of Sr to Ca. The respective impedance spectra were analyzed in terms of the equivalent circuit models. Furthermore, the impedance spectra were monitored as a function of temperature. The ac-based characterization in the 2-dimensional conduction path supplements the dc-based electrical analysis. The artificial manipulation of the interface composition will be discussed towards the electrical application of 2-dimensional materials to the semiconductor devices in replacement for the current Si-based devices.