Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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The emissivity and opto-electrical properties of ZnO/Cu/ZnO thin films for the vehicle applications

ZnO/Cu/ZnO 박막의 차량용 저방사 및 전기광학적 특성 연구

  • 이연학 (울산대학교 첨단소재공학부) ;
  • 김선경 (동국실업주식회사) ;
  • 엄태용 (동국실업주식회사) ;
  • 정용하 (울산테크노파크 자동차기술지원단) ;
  • 소상우 (울산테크노파크 자동차기술지원단) ;
  • 손영길 (나라엠앤디(주)) ;
  • 손동일 (동국실업주식회사) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2023.12.11
  • Accepted : 2023.12.21
  • Published : 2023.12.31
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Abstract

Transparent conducting films having a three layered structure of ZnO/Cu/ZnO (ZCZ) were deposited onto the glass substrates by using RF and DC magnetron sputtering at room temperature. The emissivity and opto-electrical properties of the films were investigated with a varying thickness(5, 10, 15 nm) of the Cu interlayer. With increasing the Cu thickness to 15 nm, the films showed a enhanced electrical properties. Although ZnO 30/Cu 15/ZnO 30 nm film shows a lower resistivity of 5.2×10-5 Ωcm, it's visible transmittance is deteriorated by increased optical absorbtion of the films. In addition, X-ray diffraction patterns indicated that the insertion of Cu interlayer improve the grain size of ZnO films, which is favor for the electrical and optical properties of transparent conducting films. From the observed low emissivity of the films, it is concluded that the ZCZ thin films with optimal thickness of Cu interlayer can be applied effectively for the car's window coating materials.

Keywords

Acknowledgement

본 연구는 산업통상자원부와 한국산업기술진흥원의 지역선도산업단지연계협력사업(P0021406)의 지원을 받아 수행되었으며 이에 감사드립니다.

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