• Title/Summary/Keyword: Czochralski Crystal Growth

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Evaluation of mechanical backside damage by minority carrier recombination lifetime and photo-acoustic displacement method in silicon wafer (실리콘 웨이퍼에서 광열 변위법과 소수 반송자 재결합 수명 측정에 의한 기계적 후면 손상 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.1
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    • pp.117-123
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    • 1998
  • We investigated the effect of mechanical backside damage in Czochralski grown silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductivity decay method, photo-acoustic displacement method, X-ray section topography, and wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the photo-acoustic displacement values increased proportionally, and it was at Grade 1: Grade 2:Grade 3 = 1:19.6:41 that the normalized relative quantization ratio of excess photo-acoustic displacement in damaged wafer was calculated, which are normalized to the excess PAD from sample Grade 1.

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Relative quantitative evaluation of mechanical damage layer by X-ray diffuse scattering in silicon wafer surface (실리콘 웨이퍼 표면에서 X-선 산만산란에 의한 기계적 손상층의 상대 정량 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.4
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    • pp.581-586
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    • 1998
  • We investigated the effect of mechanical back side damage in Czochralski grown silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductivity decay method, degree of X-ray diffuse scattering, X-ray section topography, and wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the magnitude of diffuse scattering and X-ray excess intensity increased proportionally, and it was at Grade 1:Grade 2:Grade 3=1:7:18.4 that the normalized relative quantization ratio of excess intensity in damaged wafer was calculated, which are normalized to the excess intensity from sample Grade 1.

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Prediction of transition in Czochralski process (초크랄스키 공정에서의 천이예측)

  • 최정일;성형진
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.1
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    • pp.108-116
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    • 1997
  • A laboratory experiment was made of critical transition flow modes in Czocllralski convection. Numerical computation was also made to delineate the dynamic transition. The period of temperature oscillation ($t_p$) and the interval of temperature oscillation ($\Delta\theta$) were scrutinized to capture the critical transition regime. The mixed convection parameter was varied in the range of $0.134\le Ra/PrRe^2 \le3.804$. The data from calculation were in good agreement with ones from experiment. The influence of the Prandtl number on the transition was examined for Pr = 910, 4445 and 8889. To understand the transition mechanism, the detailed temperature oscillation modes, the isolines of meridional temperature and the axial velocity profiles were investigated.

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A TECHNIQUE TO OPTICALLY DETERMINE THE STOICHIOMETRY OF $C_2$ GROWN LITHIUM NIOBATE CRYSTALS (Czochralski법으로 성장시킨 $LiNbO_3$단결정의 화학양론(Stoichiometry)을 결정하기 위한 광학적 방법)

  • Kim, You-Song
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.1 no.2
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    • pp.1-14
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    • 1991
  • In growing single crystals, which exhibit incongruent melting behavor, it is extremely difficult to maintain the stoichiometry of its chemical compositions for given crystals. For instance, $LiNbO_3$ is a typical one which exhibits such incongruent melt, especially with a large solid solution region that makes it difficult to maintain the chemical compositions. Such a variation can then cause a serious problem for the practical applications in designing a precision electro /optic device. Of the known methods of determining its composition and quality, an optical technique of measuring refractive index of the crystals has been implemented. This technique is also capable of determining optical uniformity of the grown crystals and the chemical compositions. The technique used for such characterizations is herein described and some of results are discussed.

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Growth and defect structures of undoped and heavily MgO-doped LiNbO3 single crystals (Undoped and heavily MgO-doped $LiNbO_3$ 결정의 성장 및 결함구조)

  • 김상수
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.5
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    • pp.447-453
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    • 1999
  • Congruent $LiNbO_3$ crystals with doped Mg and codoped with Mn or Fe were grown by the Czochralski method. It is known that the physical properties of $LiNbO_3$ depend strongly on the addition of Mg and transition metals. This is established by studying the following properties; XRD patterns, the phase transition temperature, energy of the fundamental absorption edge, the shape of the absorption band of the $OH^-$ vibration and lines of the ESR of $Fe^{3+},\; Mn^{2+}$. The position of the UV absorption edge and the shape and peak point of the absorption band of the $OH^-$ vibrational band changed monotonously up to a critical concentration of $Mg^{2+}$ ions. The mechanism of the incorporation of Mg ions changes at this concentration. The transition temperature was estimated by measuring the dielectric temperature behavior up to $1230^{\circ}C$ in a frequency range of 100Hz to 10MHz. EPR of $Mn^{2+}\;and\; Fe^{3+}$ ions were employed to investigated the Mg doping effects in the $LiNbO_3$ crystal. The increase of linewidths and the asymmetry of signals were observed in all crystals. New signals of $Fe^{3+}$ arising from the new centers were observed I the heavily Mg-doped crystals.

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A Numerical study of the fluctuation behavior of the oxygen concentration and the temperature in the silicon melt of Czochralski crystal growth system

  • Yi, Kyung-Woo;Kim, Min-Cheol
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.197-201
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    • 1997
  • The momentum, heat and mass trasfer phenomena in the silicon melt of the Czochralki crystal growth system are calculated using a three dimensional numerical simulation thechnique. Even though axisymmetrical boundary conditions are imposed to all calculations in a 3cm diameter crucible, several types of non-axisymmetric profiles of velocities, temperature and oxygen concentration appeared in the melt. Because of the non-axisymmetric profiles of velocities, temperature and oxygen concentration appeared in the melt. Because of the non-axisymmetric profiles and rotations of fluid induced by the crucible rotation, temperatures and oxygen concentrations in the silicon melt fluctuate. The rotating velocity of the profile is calculated from the phase shift of the data of temperature or oxygen at two different points which have same radius from center but 90 degree angular difference. From this calculation, it is found that the rotating veolocity of the oxygen and temperature is different from the crucible rotation rates. Therefore the frequencies of the oscillating temperature and oxygen concentrations are not same to the frequencies of the crucible rotations. Futhermore, the components of the frequencies of the temperature and oxygen concentration at the same point are not same. The fluctuation behaviors of the temperature or oxygen themselves are also different when the points are different. The calculation show that the temperature and the oxygen concentration near the interface also fluctuate. The results suggest that the striation pattern found in the grown silicon single crystals may ben generated by the oxygen concentration and the temperature oscillations of the melt occurred near the interface.

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Congruent Melt Composition of $LiTaO_3$ Single Crystal ($LiTaO_3$ 단결정의 완전용융조성)

  • 정대식;박병학;김유성;노용래
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.3 no.2
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    • pp.99-106
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    • 1993
  • A relationship $(T_c = -17.869C^2+1840.2C-46623)$ between Curie Temperature$(T_c)$ and (C), $Li_2O$ mole percent(%) was established from the measurement results of Curie temperature $(T_c)$) analysed by DTA(Differential Thermal Analysis) in the range from 48.50 to 49.00 $Li_2O$ mole %. Congruent melt composition of $LiTaO_3$ single crystal was to be 48.65 $Li_2O$ mole % and its Curie temperature was also determined to be $610{\pm}1^{\circ}C$ from the results of Curie temperature difference, ${\Delta}T (T_{c(Top)}-T{_c(Tail)})$ of Czochralski grown $LiTaO_3$ crystals and the distribution coefficient(k). The k was calculated from $LiO_2$ mole ratio of initial melt to final melt and initial crystal to final crystal in the range from 48.60 to 48.70 $Li_2O$ mole %.

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Crystal Growth of Yb:YAG and Fabrication of Microchip Laser Device (Yb:YAG 단결정 성장과 마이크로칩 레이저 소자 제조)

  • 이성영;김충렬;김도진;정석종;유영문
    • Journal of the Korean Ceramic Society
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    • v.38 no.8
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    • pp.771-776
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    • 2001
  • 용액인상법으로 질소분위기 하에서 Yb$^{3+}$ 이온이 각각 5, 15, 25 at% 치환된 Yb:Y$_3$Al$_{5}$ O$_{12}$ (Yb:YAG) 단결정을 이리듐 도가니를 사용하여 성장시켰다. 양질의 단결정을 성장시키기 위한 인상속도와 회전속도는 각각 2mm/h와 10rpm이었다. 흡수 및 형광스펙트럼 측정결과, Yb$^{3+}$ 이온의 농도가 높아짐에 따라 흡수계수가 선형적으로 증가하였고, 1051nm 파장을 중심으로 1020~1050nm 영역에서 선폭이 확대된 강한 형광스펙트럼을 나타내었다. 한편, 성장된 단결정을 이용하여 마이크로칩 레이저용 소자를 정밀하게 제조하였다.

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Analysis of surface defect in RE : YAG (RE = Nd3+, Er3+, Yb3+) single crystal using chemical polishing and etching (화학적 polishing 및 etching을 통한 RE : YAG (RE = Nd3+, Er3+, Yb3+) 단결정의 표면 결함 분석)

  • Shim, Jang Bo;Kang, Jin Ki;Lee, Young Kuk
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.4
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    • pp.131-134
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    • 2016
  • The conditions for chemical polishing and etching technique were investigated to reveal surface defects in RE : YAG ($RE=Nd^{3+},\;Er^{3+},\;Yb^{3+}$) single crystals grown by Czochralski method. The optimal condition for chemical polishing was in 85 % $H_3PO_4$ solution at $330^{\circ}C$ for 30 minutes with a specimen fixed in the vertical direction. In addition, the optimal condition for chemical etching was in 85 % $H_3PO_4$ solution at $260^{\circ}C$ for 1 hour, and $70{\sim}80{\mu}m$ sized triangular etch pits were observed on (111) face. As a result of defect density analysis, $1.9{\times}10^3/cm^2$ for Nd(1 %) : YAG, $4.3{\times}10^2/cm^2$ for Er(7.3 %) : YAG, and $5.1{\times}10^2/cm^2$ for Yb(15 %) : YAG were measured.

A promising new piezoelectric material -Langasite and its related compounds-

  • Kawanaka, Hiroyuki;Takeda, Hiroaki;Shimamura, Kiyoshi;Onozato, Norio;Fukuda, Tsuguo
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.06a
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    • pp.145-145
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    • 1997
  • Recent progress of electric technology requires new piezoelectric crystals having superior properties such as zero temperature coefficients and large electromechanical coupling factors. We have developed a series of new leading chandidates, La$_3$Ga5SiO14(langasite, LGS), La3Nb0.5Ga5.5O14(LNG), La3Ta0.5O14(LTG), to satisfy those requirements. High quality LGS, LNG and LTG single crystals, with dimensions of 2 inches in diameter, were successfully grown by the Czochralski method at a pulling rate of 1mm/h. Since no variation of chemical composition was observed when whole melt in a crucible was crystallized, congruency of these compositions was confirmed. Physical constants such as elastic constants, dielectric constants and piezoelectric constants were measured. Filters and oscillators made of grown LGS, LNG and LTG single crystals showed superior properties such as three times wider passband than that of quartz, low insertion loss and easy processing, Langasite family crystals were shown to be superior materials to other known materials such as quartz, LiTaO$_3$, $\alpha$-AlPO$_4$ and Li$_2$B$_4$O7.

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