• Journal of the Korean Society for Precision Engineering
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• v.34 no.2
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• Journal of Advanced Technology Convergence
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• v.1 no.2
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• pp.11-17
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• 2022

The purpose is to find out where medical workers can receive the minimum radiation does in clinical. In order to sett RQR standard quality of radiation, put a Al 1.5mm filter(row and column: 10 cm × 10 cm) on X-ray tube. Al 0.9 mm, Cu 0.3 mm, Ni 0.3 mm used as a filter. The Acrylic phantom were set to 13.1 cm, 18.5 cm, 21.1 cm. by the object thickness was different. As a results, when we use Al 0.9 mm, 1853 nSv was the highest numeral. It is a point of anode low 50 cm, when we use 13.1 cm Acrylic phantom. When we use Cu 0.3 mm, 173 nSv was the lowest numeral. It is a point of anode low 150 cm, when we use 13.1 cm Acrylic Phantom. In this study, it was confirmed that the spatial scattering dose decreased as the distance from the X-ray tube increased. It is considered that more studies on the exposure of scattered doses are needed in the future.

• Journal of Radiation Protection and Research
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• v.43 no.4
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• pp.160-169
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• 2018

Background: This study aims to develop an integrated optical system that can simultaneously or selectively measure the signals obtained from radioluminescence (RL), thermoluminescence (TL), and optically stimulated luminescence (OSL), which are luminescence phenomena of materials stimulated by radioactivity, heat, and light, respectively. The luminescence mechanism of various materials could be investigated using the glow curves of the luminescence materials. Materials and Methods: RL/TL/OSL integrated measuring system was equipped with a X-ray tube (50 kV, $200{\mu}A$) as an ionizing radiation source to irradiate the sample. The sample substrate was used as a heating source and was also designed to optically stimulate the sample material using various light sources, such as high luminous blue light emitting diode (LED) or laser. The system measured the luminescence intensity versus the amount of irradiation/stimulation on the sample for the purpose of measuring RL, TL and OSL sequentially or by selectively combining them. Optical filters were combined to minimize the interference of the stimulation light in the OSL signal. A long-pass filter (420 nm) was used for 470 nm LED, an ultraviolet-pass filter (260-390 nm) was used for detecting the luminescence of the sample by PM tube. Results and Discussion: The reliability of the system was evaluated using the RL/OSL characteristics of $Al_2O_3:C$ and the RL/TL characteristics of LiF:Mg,Cu,Si, which were used as dosimetry materials. The RL/OSL characteristics of $Al_2O_3:C$ showed relatively linear dose-response characteristics. The glow curve of LiF:Mg,Cu,Si also showed typical RL/OSL characteristics. Conclusion: The reliability of the proposed system was verified by sequentially measuring the RL characteristics of radiation as well as the TL and OSL characteristics by concurrent thermal and optical stimulations. In this study, we developed an integrated measurement system that measures the glow curves of RL/TL/OSL using universal USB-DAQs and the control program.

• Korean Journal of Materials Research
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• v.9 no.10
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• pp.1018-1024
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• 1999

The effects of operating temperature and stress on degradation of components in high temperature steam generator were investigated. Several 2.25CrlMo tubes which had operated over 20 years and an unused 9CrlMoVNb tube were tested. For the former samples, the amount of $\textrm{M}_{6}\textrm{C}$ carbide and its size are increased with the aging or operating time. The precipitation behavior of carbides ($\textrm{M}_{2}\textrm{O}$, $\textrm{M}_{6}\textrm{C}$) is changed with the operating temperature of the tubes. However, unused 9CrlMoVNb samples show a different carbide precipitation process due to high chromium, vanadium, and niobium contents. The amount of Cr-rich $\textrm{M}_{23}\textrm{C}_{6}$ carbide is significantly increased with aging time, but that of $\textrm{M}_{6}\textrm{C}$ type carbide is rarely changed with aging time at elevated temperatures.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.428-428
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• 2016

Copper indium sulfide (selenide) (CuIn(S,Se)2,CISSe)는 1.0~1.5 eV의 Direct band gap과 105 cm-1이 넘는 큰 광 흡수 계수를 가지고 있어 박막 태양전지의 흡수층으로써 연구되어 왔다. 최근 대량생산 및 저가 공정에 용이하다는 측면에서 용액 공정 기반 CISSe 태양전지 연구가 크게 주목 받고 있다. 용액공정 기반 중 하이드라진을 사용 한 경우 매우 높은 효율을 기록하였으나, 하이드라진 자체의 유독성과 폭발성 때문에 분위기 제어가 필요하고 여전히 저가화 및 대면적 제작에 한계가 있다. 따라서 알코올 솔젤 기반 CISSe 태양전지 제작 연구가 많이 진행되었으나, 결정립 성장 및 칼코겐 원자를 공급하기 위해 불가피하게 황화/셀렌화 후속 열처리 공정을 요구한다. 후속 열처리 공정은 폭발성의 황화수소/황화셀레늄 기체 분위기 제어와 고가의 장비를 필요로 한다. 본 연구에서는 매우 안정적이며 저가 용매인 물과 아민계 첨가제를 이용하여 Cu, In 전구체와 S, Se 이 포함된 Cu-In-S 잉크와 Se잉크를 제작하였다. 잉크 내에 S, Se을 첨가 함으로써 추가적인 후속공정 없이 비활성 가스 분위기에서 고품질의 CISSe 박막 제작을 가능케 하였다. 또한 Se 잉크 증착 횟수에 따른 결정 구조, 광학적 성질의 차이에 주목하였다. 따라서 수계 잉크를 대기 중에서 스핀코팅으로 박막을 제작한 후, Hot plate에서 건조하여 균일한 박막을 제조하고, 제작된 박막을 tube furnace에서 환원 분위기 및 비활성 가스 분위기에서 열처리 진행하여 $1.3{\mu}m$ 두께의 고품질의 CISSe 흡수층을 제작하였다. 이러한 흡수층에 대해 XRD, SEM, EDS 분석을 진행하여, 결정성, 미세구조, 및 조성을 확인하였으며, 제작된 흡수층 위에 버퍼층/투명전극층을 차례로 증착하여 CISSe 태양전지를 제작하여 셀 성능 및 양자 효율 특성을 파악하였다. 또한 액상 Raman 분석을 통해 결정립 성장 과정 메커니즘을 제시하였다.

• Korean Journal of Materials Research
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• v.17 no.1
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• pp.11-17
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• 2007

Turbulent in-situ mixing process is a new material process technology to get dispersed phase in nanometer size by controlling reaction of liquid/solid, liquid/gas, flow ana solidification speed simultaneously. In this study, mixing which is the key technology to this synthesis method was studied by computational fluid dynamics. For the simulation of mixing of liquid metal, static mixers investigated. Two inlets for different liquid metal meet ana merge like 'Y' shape tube having various shapes and radios of curve. The performance of mixer was evaluated with quantitative analysis with coefficient of variance of mass fraction. Also, detailed plots of intersection were presented to understand effect of mixer shape on mixing. The simulations show that the Reynolds number (Re) is the important factor to mixing and dispersion of $TiB_2$ particles. Mixer was designed according to the simulation, and $Cu-TiB_2$ nano composites were evaluated. $TiB_2$ nano particles were uniformly dispersed when Re was 1000, and cluster formation and reduction in volume fraction of $TiB_2$ were found at higher Re.

• Journal of the Korean Society for Heat Treatment
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• v.16 no.6
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• pp.320-328
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• 2003

A specimen of Cu-35%Sn alloy has been subjected to the unidirectional heat treatment in an attempt to examine the evolution of microstructures under varying thermal conditions. The specimen was cast in the form of a cylinder 10 mm in diameter and 200 mm in length, which was then installed in the temperature gradient field established inside a vertical tube furnace. The furnace temperature was adjusted to make the upper part at $750^{\circ}C$ and bottom end part at $300^{\circ}C$ of the specimen. The experiment was terminated by dropping it into water after the 30 minutes holding at given temperature. By the rapid cooling, the high temperature phases, ${\gamma}$ and ${\zeta}$, were retained at ambient temperature with some of ${\gamma}$ phase transformed to ${\varepsilon}$ phase, especially at the grain boundaries of ${\gamma}$ phase. The presence of ${\varepsilon}$ phase was found to determine the nature of phase transformations of the ${\zeta}$ phase undergoes upon cooling. In the close area of the ${\varepsilon}$ phase, ${\varepsilon}$ phase grew separately out of ${\zeta}$, and adds to the preexisting ${\varepsilon}$ whereas in areas away from ${\varepsilon}$, both ${\delta}$ and ${\varepsilon}$ grew simultaneously out of ${\zeta}$, and formed a lamella eutectoid structure. The transformation to ${\delta}$ was found to occur only in slow cooling. The hardness on each phase showed that the retained phases, ${\gamma}$ and ${\zeta}$, could be plastically deformed without brittle fracture while the phases, ${\varepsilon}$ and ${\delta}$, were too brittle to be deformed.

• Progress in Superconductivity
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• v.10 no.2
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• pp.103-107
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• 2009

$Bi_2Sr_2Ca_1Cu_2O_x$(BSCCO 2212) superconductors for current lead were fabricated by centrifugal melting process(CMP). BSCCO 2212 powder was melted at $1200^{\circ}\C$ in a resistance furnace using a Pt crucible and poured in a rotating cylindrical mold preheated at $550^{\circ}\C$ for 2 hour. The solidified BSCCO-2212 samples were heat-treated by partial melting process in oxygen atmosphere. The current-voltage curves at 77 K of the samples were obtained by transport measurement, and the microstructure was investigated by scanning electron microscope. The $J_c$ values at 77 K of the tubes partially melted at $840^{\circ}C,\;860^{\circ}C\;and\;880^{\circ}C$ were 492, 430 and 398 $A/cm^2$, respectively. It was observed that the plate-like grains in BSCCO 2212 tube was more developed in the sample heat-treated at $840^{\circ}C$. It was found that the critical current of the BSCCO 2212 samples was dependent on the partial melting schedule regarding the grain shape and size of the BSCCO 2212.

• Journal of the Korean Solar Energy Society
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• v.33 no.4
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• pp.8-14
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• 2013

The conversion of solar energy into acoustic waves is experimentally studied. Measurements were made on the Sound Pressure Level(SPL), onset time and the temperature gradient across the stack, with the Cell Per Square Inch(CPSI) of stack changed. A pyrex resonance tube is used with a honey-comb structure ceramic stack along with Ni-Cr and Cu wires. An AL1 acoustical analyzer was used to measure the SPL and frequency of acoustic waves whereas K-type thermocouples were hired to estimate temperature gradients. As a result, when the supply electric power was 25W, maximum SPLs of 104.1 dB, 109.4 dB and 112.8 dB were detected for the stacks of 200, 300 and 400 CPSI and their respective stack positions of 70mm, 60mm and 50mm from the closed end.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.474-477
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• 2002

We performed a continuous heat treatment experiment for long Si$_2$Sr$_2$CaCuO$_{x}$ (Bi2212) superconductor tapes on copper substrates. A precursor that contains a mixture of Bi$_2$O$_3$, SrCO$_3$, and CaCO$_3$ powders was prepared and screen-printed on Cu tapes. The screen- printed tapes were thermally treated by consecutive processes with various temperature settings using an air-filled tube furnace. The diffraction patterns and the microstructures of the high temperature superconductor thick films were analyzed by X-ray diffractometry (XRD) and optical Microscopy respectively, and the critical temperatures of the superconducting thick films were measured. The critical temperatures of the superconducting films were measured to be about 77K, and the films'crystallographic c-axes were confirmed to be normal to the film surfaces by XRD and morphology observation. We also observed that the thick superconducting layer is formed and aligned on the copper substrate via partial melted state that consists of a liquid phase and a secondary phase.e.