• Title/Summary/Keyword: Cu diffusion

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In-situ electron beam growth of $YBa_2Cu_3O_{7-x}$ coated conductors on metal substrates

  • Jo, W.;Ohnishi, T.;Huh, J.;Hammond, R.H.;Beasley, M.R.
    • Progress in Superconductivity
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    • v.8 no.2
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    • pp.175-180
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    • 2007
  • High temperature superconductor $YBa_2Cu_3O_{7-x}$ (YBCO) films have been grown by in-situ electron beam evaporation on artificial metal tapes such as ion-beam assisted deposition (IBAD) and rolling assisted biaxially textured substrates (RABiTS). Deposition rate of the YBCO films is $10{\sim}100{\AA}/sec$. X-ray diffraction shows that the films are grown epitaxially but have inter-diffusion phases, like as $BaZrO_3\;or\;BaCeO_3$, at their interfaces between YBCO and yttrium-stabilized zirconia (YSZ) or $CeO_2$, respectively. Secondary ion mass spectroscopy depth profile of the films confirms diffused region between YBCO and the buffer layers, indicating that the growth temperature ($850{\sim}900^{\circ}C$) is high enough to cause diffusion of Zr and Ba. The films on both the substrates show four-fold symmetry of in-plane alignment but their width in the -scan is around $12{\sim}15^{\circ}$. Transmission electron microscopy shows an interesting interface layer of epitaxial CuO between YBCO and YSZ, of which growth origin may be related to liquid flukes of Ba-Cu-O. Resistivity vs temperature curves of the films on both substrates were measured. Resistivity at room temperature is between 300 and 500 cm, the extrapolated value of resistivity at 0 K is nearly zero, and superconducting transition temperature is $85{\sim}90K$. However, critical current density of the films is very low, ${\sim}10^3A/cm^2$. Cracking of the grains and high-growth-temperature induced reaction between YBCO and buffer layers are possible reasons for this low critical current density.

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Characteristics and Physical Property of Tungsten(W) Related Diffusion Barrier Added Impurities (불순물을 주입한 텅스텐(W) 박막의 확산방지 특성과 박막의 물성 특성연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
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    • v.17 no.6
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    • pp.518-522
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    • 2008
  • The miniaturization of device size and multilevel interlayers have been developed by ULSI circuit devices. These submicron processes cause serious problems in conventional metallization due to the solubility of silicon and metal at the interface, such as an increasing contact resistance in the contact hole and interdiffusion between metal and silicon. Therefore it is necessary to implement a barrier layer between Si and metal. Thus, the size of multilevel interconnection of ULSI devices is critical metallization schemes, and it is necessary reduce the RC time delay for device speed performance. So it is tendency to study the Cu metallization for interconnect of semiconductor processes. However, at the submicron process the interaction between Si and Cu is so strong and detrimental to the electrical performance of Si even at temperatures below $200^{\circ}C$. Thus, we suggest the tungsten-carbon-nitrogen (W-C-N) thin film for Cu diffusion barrier characterized by nano scale indentation system. Nano-indentation system was proposed as an in-situ and nanometer-order local stress analysis technique.

Removal of Cu(II) and Pb(II) by Solid-Phase Extractant Prepared by Immobilizing D2EHPA with Polysulfone (D2EHPA를 Polysulfone으로 고정화하여 제조한 고체상 추출제에 의한 Cu(II)와 Pb(II)의 제거)

  • Kam, Sang-Kyu;Jeon, Jin-Woo;Lee, Min-Gyu
    • Journal of Environmental Science International
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    • v.23 no.11
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    • pp.1843-1850
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    • 2014
  • PS-D2EHPA beads were prepared by immobilizing di-2-ethylhexyl-phosphoric acid (D2EHPA) with polysulfone (PSf). The removal experiments of Cu(II) and Pb(II) by the prepared PS-D2EHPA beads were conducted batchwise. The removal efficiency of Cu(II) and Pb(II) by PS-D2EHPA beads was increased with increasing pH of solution. The removal rate of Cu(II) and Pb(II) was well described by the pseudo-second-order kinetic model. The maximum removal capacity of Cu(II) and Pb(II) obtained from Langmuir isotherm were 2.58 mg/g and 12.63 mg/g, respectively. External mass transfer coefficients for the removal of Cu(II) and Pb(II) by PS-D2EHPA beads were obtained $0.61{\times}10^{-2}{\sim}5.87{\times}10^{-2}/min$ and $1.55{\times}10^{-2}{\sim}8.53{\times}10^{-2}/min$, respectively and diffusion coefficients were obtained $1.32{\times}10^{-4}{\sim}3.98{\times}10^{-4}cm^2/min$ and $1.80{\times}10^{-4}{\sim}2.28{\times}10^{-4}cm^2/min$, respectively.

Resistivity Changes and Intermetallic Growth After Thermal Aging of Matte Tin-Plated Copper Sheet for Current Collector in Fuel Cell (연료전지 집전판용 주석도금 동판의 열 열화에 따른 금속간화합물 성장 및 비저항 변화)

  • Kim, Jae-Hun;Kim, Ju-Han;Han, Sang-Ok;Koo, Kyung-Wan;Keum, Young-Bum;Jeong, Kwi-Seong;Ko, Haeng-Zin
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.2067_2068
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    • 2009
  • Resistivity changes and intermetallic growth after thermal aging of Matter tin-plated copper sheet for current collector in fuel cell were investigated to survey the diffusion of Cu into Sn in interface and surface. The results show that the intermetallic growth and resistivity depended on thermal aging temperature and dwell time. In Sn plate on a Cu substrate, $Cu_6Sn_5({\mu})$ and $Cu_3Sn({\varepsilon})$ intermetallics layer were formed at plate/substrate interface. $Cu_6Sn_5({\mu})$ intermetallics layer gradually changed $Cu_3Sn({\varepsilon})$. Moreover Cu get through Sn layer and it was diffused in the surface at $200^{\circ}C$. On the other hand, only $Cu_3Sn({\varepsilon})$ intermetallics layer were formed at plate/substrate interface at $300^{\circ}C$. Consequently, the intermetallics formation, thermal condition and oxidation of surface, causes increase in the resistivity of Tin-plated copper sheet.

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