Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Tungsten Nitride Film Growth by MOCD for Cu Diffusion Barrier

  • Lee, Brad H. (Department of the Chemical Eng., Pohang University of Science and Technology) ;
  • Yong, Ki-Jung (Department of the Chemical Eng., Pohang University of Science and Technology)
  • Published : 2003.08.20
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