• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.6
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• pp.462-465
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• 2009

Schottky barrier thin film transistors (SB-TFT) on polycrystalline silicon(poly-Si) are fabricated by platinum silicided source/drain for p-type SB-TFT. High quality poly-Si film were obtained by crystallizing the amorphous Si film with excimer laser annealing (ELA) or solid phase crystallization (SPC) method, The fabricated poly-Si SB-TFTs showed low leakage current level and a large on/off current ratio larger than 10), Significant improvement of electrical characteristics were obtained by the additional forming gas annealing in 2% $H_2/N_2$ ambient, which is attributed to the termination of dangling bond at the poly-Si grain boundaries as well as the reduction of interface trap states at gate oxide/poly-Si channel.

• Journal of the Korean Vacuum Society
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• v.4 no.1
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• pp.77-84
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• 1995

LCD용 다결정 실리콘 TFT의 제조에 요구되는 고품위의 다결정 실리콘 박막을 60미만의 저온 공정으로 제조하는 기술로 비정질 박막의 고상 결정화(solid phase crystallization) 가 유망하다. 본 연구에서는 고진공 화학증착기를 이용하여 증착된 비정질 실리콘 막의 고상결정거동에 대해 연구하였다. 고상 결정화 속도 및 결정화 후의 결정성(결정립 크기 및 결함 밀도) 화학증착시의 증착가스의 종류(SiH4 혹은 Si2H6), 공정 압력, 증착 온도 등에 민감한 영향을 받으며 Si2H6가스의 사용, 증착 압력의 증가, 증착온도의 감소는 최종 결정립의 크기를 현저히 증가시킨다. 또한 증착전의 기초 진공도를 높임으로써 반응기 잔류 가스에 의한 산소나 탄소 등의 막내 유입이 감소되어 결정화 속도가 증가하고 결정성이 향상되었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.263-266
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• 2000

Effects of excess Pb(50 mole ％) on the crystallization properties of amorphous PZT thin films on the glass substrates by post-annealing in oxygen ambient were investigated to lower the crystallization temperature of the PZT thin films with a single perovskite phase. The PZT thin films(350nm) were prepared on Pt/Ti/corning glass(1737) substrates. The PZT thin films and bottom electrode were deposited by RF magnetron sputtering. Crystallization properties of PZT thin films were strongly dependent on RTA(Rapid Thermal Annealing) temperature. We were able to obtain a perovskite structure of PZT at 600$^{\circ}C$ for 10min. After thermal treatments were done, electrical properties such as I-V, P-E, and fatigue were measured.

• Journal of the Korean institute of surface engineering
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• v.30 no.3
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• pp.183-190
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• 1997

Fabrication and crystallization characteristics of yttria($T_2O_3$) stabilized zirconia(YSZ) thin film by sol-gel process were studied. YSZ sol was synthesized with zirconium n-propoxide($Zr(OC_3H_7)_4)$) and yttrium nitrate pentahydrate ($Y(NO_3)_3.5H_2O$). YSZ film was prepared by depositing the polymeric sol on porous $Al_2O_3$ substrate by spin-coating, and the film characteristics were investigated by FRIR, TG-DTA, XRD, DSC, optical microscopy and SEM. The film topology was uniform and cracks were not found. It was found that the annealing temperature and the concentration of stabilizer affect the crystallization of YSZ film. The YSZ film began to crystallize from amorphous to tetragonal phase at 40$0^{\circ}C$, and it was not converted to cubic structure until $1100^{\circ}C$. It seemed that the grains were formed over $700^{\circ}C$and the average grain size was obtained about 0.2$\mu\textrm{m}$.

• Journal of the Korean Ceramic Society
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• v.27 no.4
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• pp.521-528
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• 1990

Li2O.2SiO2 glass-ceramics were made from the melt by the nucleation and growth treatment. The optimum nucleation temperature and time were determined from DTA curves of as-quenched and thermally treated glasses, and found to be 44$0^{\circ}C$ and 3hrs. The optical microscopic technique was also used to support this result. The volume fractions of crystals present in the partially crystallized specimens were measured using the optical microscopy and the amorphous X-ray scattering methods. The degree of crystallization increased with increasing the crystallization temperature and time. The crystalline phase identified by X-ray diffraction was lithium disilicate. As the crystallinity increased up to 95%, the transmittance of glass-ceramics was decreased linearly. It was also found that for the same heat treatment condition (575$^{\circ}C$, 30min), a thicker specimen showed higher transmittance, presumably due to less crystallinity.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.11
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• pp.106-112
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• 1992

In this paper, we analyze the structure characteristics of $As_{40}Se_{50-x}S_{x}Ge_{10}$ system bulk and thin films. As the results of XRD patterns, it identified amorphous state. In order to find the glass transition temperature($T_g$), crystallization($T_c$) and melting point ($T_m$)of bulk sample, it ascertained that TS1gT is 238$^{\circ}C$ in $As_{40}Se_{15}S_{35}Ge_{10}$, and 231$^{\circ}C$ in $As_{40}Se_{25}S_{25}Ge_{10}$ & $As_{40}Se_{50}Ge_{10}$ following the thernal analysis by DSC, DTA, & TGA method. Also it was confirmed the phase seperation of continuous phase and dispertion phase by the optical texture of polarizing microscope and $T_g$ near 20$0^{\circ}C$ in thin film. Therefore, it was found that it occurs the phase seperation of Ge-rich dontinuous phase and Se-rich dispersion phase following the EDS analysis of thin film and the surface SEM photograph.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.655-659
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• 1998

The effect of quenching speed of melt-spinning on intrinsic coercivity ($_iH_c$$) of annealed ribbons and the crystallization behavior from amorphous $Nd_{14.73}Fe_{78.67}B_{6.60}$ alloy have been studied. We have found that the intrinsic coecivity for annealed melt-spun ribbon is reduced with increasing of quenching rate. $\alpha$-Fe and $Fe_3B$ were formed as intermediate phases prior to the formation of $Nd_2Fe_{14}B$ phase during crystallization. The $Fe_3B$ is disappeared with crystallization of $Nd_2Fe_{14}B$ phase. But the $\alpha$-Fe phase is retained in fully crystallized ribbon by annealing. The intrinsic coercivity loss of annealed ribbon with increasing of quenching speed is believed to be due to existence of soft magnetic phase $\alpha$-Fe in annealed ribbons.

• Applied Science and Convergence Technology
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• v.24 no.3
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• pp.60-66
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• 2015

The modified amorphous GeTe formed by pulsed laser irradiation in as-grown GeTe has been analyzed in terms of variations of local bonding structure using extended x-ray absorption fine structure (EXAFS). The modified GeTe film has octahedral-like Ge-Te bonding structure that can be effectively induced by irradiation process. The EXAFS data clearly shows that the irradiation can lead to reduction of the average coordination number. Variations in the transition temperature for the irradiated film during crystallization can be described by the presence of octahedral-like local structure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.134-134
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• 2009

In this work, we report that crystallization speed as well as the electrical and optical properties about the N-doped $Ge_2Sb_2Te_5$ thin films. The 200-nm-thick N-doped $Ge_2Sb_2Te_5$ thin film was deposited on p-type (100) Si and glass substrate by RF reactive sputtering at room temperature. The amorphous-to-crystalline phase transformation of N-doped $Ge_2Sb_2Te_5$ thin films investigated by X-ray diffraction (XRD). Changes in the optical transmittance of as-deposited and annealed films were measured using a UV-VIS-IR spectrophotometer and four-point probe was used to measure the sheet resistance of N-doped $Ge_2Sb_2Te_5$ thin films annealed at different temperature. In addition, the surface morphology and roughness of the films were observed by Atomic Force Microscope (AFM). The crystalline speed of amorphous N-doped $Ge_2Sb_2Te_5$ films were measured by using nano-pulse scanner with 658 nm laser diode (power : 1~17 mW, pulse duration: 10~460 ns). It was found that the crystalline speed of thin films are decreased by adding N and the crystalline temperature is higher. This means that N-dopant in $Ge_2Sb_2Te_5$ thin film plays a role to suppress amorphous-to-crystalline phase transformation.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 1998.03a
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• pp.72-75
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• 1998

High temperature deformation behavior of Al85Ni10Y5 alloy extrudates fabricated with amorphous ribbons was investigated at temperature range form 300 to 550$^{\circ}C$ by torsion tests. Thermal properties of amorphous ribbons as a function of aging temperature was studied by Differential Scanning Calorimetry(DSC). The Al phase crystallite firstly formed in the amorphous ribbons and its crystallization temperature(Tx) was ∼210$^{\circ}C$. During the processings of consolidation and extrusion, nano-grained structure was formed in the Al85Ni10Y5 alloy extrudates. The as-extrudated Al85Ni10Y5 alloy and the Al85Ni10Y5 alloy annealed at 250$^{\circ}C$ for 1 hour showed the flow curve of DRV(dynamic recovery) during hot deformation at 400-550$^{\circ}C$. On the other hand, the Al85Ni10Y5 alloy annealed at 400$^{\circ}C$ for 1 hour showed the flow curve of DRX(dynamic recrystallization) during hot deformation at 450-500$^{\circ}C$.