• 반도체디스플레이기술학회지
• /
• 제9권4호
• /
• pp.13-18
• /
• 2010

Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

• 대한안전경영과학회지
• /
• 제16권2호
• /
• pp.19-29
• /
• 2014

Korean societal concern for the train accidents is fast and widely increasing with an ever-increasing demand and use for KTX. Most of these train accidents are inclined to be caused by human error. Experts used to attribute the causes of human error to the defects in various aspects such as technology, organizational system, practices, corporate culture, and/or human resource itself. Among the diverse causes of human error, an important one, even though it was rarely focused, may be the issue of impact of rule or procedure change on human error. Giving attention to the implicit importance of this issue, this study intends to highlight the theme of frequent procedure change in railway driving manual as a critical factor of human error. To attain this purpose mentioned above, dual methodologies were adopted. One is to qualitatively analyze the real cases of procedure change in relevant manuals followed by the incident case(passing the station scheduled to stop) happened lately. Another is to quantitatively perform statistical analysis based on questionnaires received from 224 train drivers. Results show that frequent changes in internal affairs procedure is or may be an important factor causing stress and human error from train drivers.

• 한국CDE학회논문집
• /
• 제11권5호
• /
• pp.327-334
• /
• 2006

Recently, security incidents are growing rapidly in which internal employees let the drawing leak out to competitors or other countries. This type of security incidents has a characteristic that it occurs less frequently than other types of security incidents such as network or server security incident, but the damage is a lot more serious. The existing information security technologies to prevent internal information from being leaked out are only applicable to general documents(office documents, web pages and image files in which data are encrypted one by one). However, architectural drawings made up of collection of files with various formats(extensions) have problems with the process speed of en(de) cryption and accuracy, so the developments of security technologies by new methods are required. In this study, we design and develop a security technology based on work area with which users can protect the leakage of critical information in the kernel level while maintaining their work environment when they have to use sharing information that cannot be managed by the unit of file. As a result, we developed the "Virtual Secure Disk" which allows only authorized users and applications to have an access to drawings, and have verified its security by applying it to the actual company.

• 한국군사과학기술학회지
• /
• 제15권4호
• /
• pp.417-423
• /
• 2012

Radar Cross Section(RCS) is a measure of how detectable an object is with a radar. A larger RCS indicates that an object is more easily detected. Informally, the RCS of an object is the cross-sectional area of a perfectly reflecting sphere that would produce the same amount of reflection strength as the object in question would. In order to estimate RCS of aircraft weapons the external surface is modeled as a collection of simple shape elements. And the overall RCS is estimated as a vector sum of configuring elements' cross-sections which are well known given by analytic formulae. A RCS estimation code is developed for a typical shape of Air-To-Surface bombs and missiles. Size of weapons and location of fins are implemented in the code in addition to the presence of canards. The ability to predict radar return from flying vehicles becomes a critical technology issue in the development of stealth configurations. This simplified method of RCS estimation is known to be fast and accurate enough in an optical region of high frequency incident radio wave.

• 한국전기전자재료학회논문지
• /
• 제31권4호
• /
• pp.193-197
• /
• 2018

The ratio of the period of a diffractive element to the input beam size is a critical parameter in a diffractive beam shaper. We measured and calculated the Fraunhofer diffraction patterns of a periodic hologram with an input beam size similar to the period of the hologram. The measured intensities show very complicated patterns and are strongly dependent upon the center position of the laser beam relative to the hologram. Using a diffraction formula for a periodic hologram, we calculated the diffracted light intensities and fit them to the measured ones. The measured and calculated intensities are in good agreement even when the beam diameter of the incident laser is similar to the period of the hologram. We can therefore use this formula to estimate the output of a periodic beam shaper even under such an extreme condition.

• 한국안전학회지
• /
• 제23권5호
• /
• pp.73-78
• /
• 2008

The fire hazards and combustion heat of puzzle mats in group day care home were analysed using variable external irradiation level. The fire hazards such as ignition time, ignition temperature, mass loss rate, and flame temperature profile were measured. Incident heat fluxes of $15kW/m^2$, $20kW/m^2$, $25kW/m^2$, $35kW/m^2$, $50kW/m^2$ and $75kW/m^2$ were selected for these experiments. All samples were tested in the horizontal orientation and were wrapped in a single layer of aluminium foil. Each sample was nominally 20mm thick and 100mm square. Five samples of puzzle mat were tested in the study : Type A, B, C, D and E. Type A, B and C are all general grades whereas Type D and E are both Flame retardant grades. As results, Type E of FR-grade showed the best characteristics in safety of the early fire from ignition time, critical heat flux, and ignition and flame temperature data of this study. All specimen of G-grade(Type A, B and C), however, showed the weak in safety of fire.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 추계학술대회 논문집
• /
• pp.322-325
• /
• 2005

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.

• 의학교육논단
• /
• 제15권1호
• /
• pp.9-18
• /
• 2013

An outcome-based curriculum is perceived to be one alternative educational approach in medical education. Nonetheless, it is difficult for curriculum developers to convert from traditional curriculum to an outcome-based curriculum because research documenting its development process is rare. Therefore, this study aims to introduce the development process and method of outcome-based curriculum. For the purpose of this study, we used diverse data analyses, such as an existing literature search, development model analysis, and case analysis. We identified five phases from the analysis. First, the curriculum developers analyze the physician's job or a high performer in a medical situation. Second, curriculum developers extract outcomes and competencies through developing a curriculum, affinity diagraming, and critical incident interviews. Third, curriculum developers determine the proficiency levels of each outcome and competency evaluation methods. Fourth, curriculum developers conduct curriculum mapping with outcomes and competencies. Fifth, curriculum developers develop an educational system. Also, it is important to develop an assessment system for the curriculum implementation in the process of developing the outcome-based curriculum. An outcome-based curriculum influences all the people concerned with education in a medical school including the professors, students, and administrative staff members. Therefore, curriculum developers should consider not only performance assessment tools for the students but also assessment indicators for checking curriculum implementation and managing curriculum quality.

• Wind and Structures
• /
• 제29권1호
• /
• pp.65-75
• /
• 2019

A heated square cylinder (with height $A^*$) is kept parallel to the cold wall at a fixed gap height $0.5A^*$ from the wall. Another adiabatic rectangular cylinder (of same height $A^*$ and width $0.5A^*$) is placed upstream in an inline tandem arrangement. The spacing between the two cylinders is fixed at $3.0A^*$. The inlet flow is taken as Couette-Poiseuille flow based non-linear velocity profile. The conventional fluid (also known as base fluid) is chosen as water (W) whereas the nanoparticle material is selected as $Al_2O_3$. Numerical simulations are performed by using SIMPLE algorithm based Finite Volume approach with staggered grid arrangement. The dependencies of hydrodynamic and heat transfer characteristics of the cylinder on non-dimensional parameters governing the nanofluids and the fluid flow are explored here. A critical discussion is made on the mechanism of improvement/reduction (due to the presence of the upstream cylinder) of heat transfer and drag coefficient, in comparison to those of an isolated cylinder. It is observed that the heat transfer increases with the increase in the non-linearity in the incident velocity profile at the inlet. For the present range studied, particle concentration has a negligible effect on heat transfer.

• International Journal of Naval Architecture and Ocean Engineering
• /
• 제11권1호
• /
• pp.178-201
• /
• 2019

The appropriate design of a mooring system to maintain the position of an offshore structure in deep sea under various environmental loads is important. Fatigue design of the mooring line considering OPB/IPB(out-of-plane bending/in-plane bending) became an essential factor after the incident of premature fatigue failure of the mooring chain due to OPB/IPB in the Girassol region in West Africa. In this study, mooring line fatigue analysis was performed considering the OPB/IPB of a spread moored FPSO in deep sea. The tension of the mooring line was derived by hydrodynamic analysis using the de-coupled analysis method. The floater motion time histories were calculated under the assumption that the mooring line behaves in quasi-static manner. Additional time domain analysis was carried out by prescribing the obtained motions on top of the selected critical mooring line, which was determined based on spectral fatigue analysis. In addition, nonlinear finite element analysis was performed considering the material nonlinearities, and both the interlink stiffness and stress concentration factors were derived. The fatigue damage to the chain surface was estimated by combining both the hydrodynamic and stress analysis results.