• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.436-437
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• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.6
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• pp.101-106
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• 2002

In a bank-to-turn(BTT) missile, if a 2-gimbaled seeker was stabilized using a 2-axis rate gyro mounted along its primary axis, the change of line of sight(LOS) measured by the seeker would be induced by rolling effects due to bank-to-turn(BTT) steering as well as an actual change. It is observed that the body-coupled effects in a homing loop of BTT missile are mainly concerned with the spurious target maneuver and the coupling due to the rate gyro misalignments. In this paper, we formulate a simple linear BTT homing loop model with seeker model including each body-coupling. With the model, we analyze the effects of the couplings on the homing loop stability, and propose a direct linear compensator for the coupling to recover the stability.

• Food Science and Biotechnology
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• v.16 no.4
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• pp.600-604
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• 2007

In this study, we first prepared 3 kinds of powders with different molecular masses from the crude protein-bound polysaccharide extract of Agraricus blazei Murill through ultrafiltration, followed by spray-drying. Then, the antitumor activities of the powders were analyzed. Size exclusion chromatography coupled with a multi-angle laser-light-scattering system showed the 3 powders had the following molecular ranges: below 10 kDa (SD-1), 10 to 150 kDa (SD-2), and above 150 kDa (SD-3), representing peak molecular weights of $8.26{\times}10^3,\;9.65{\times}10^4$, and $5.94{\times}10^6\;g/mol$, respectively. All the powders stimulated macrophage RAW264.7 cells to produce nitric oxide, of which SD-2 and SD-3 were superior to the crude extract powder (CP-SD), while SD-1 showed the lowest activity. Similar results were found for their cytotoxicities against human cancer cell lines (A549, MCF-7, and AGS), where the highest activity was obtained with the SD-2 treatment for 72 hr at $1,000\;{\mu}g/mL$. The MCF-7 cell line was less sensitive to the powders than the other cells. From this research we found that ultrafiltration, in combination with spray-drying, is applicable for preparing protein-bound polysaccharide powders with higher antitumor activities.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.21 no.2
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• pp.495-504
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• 1996

In this paper, series-fed mirostrip array anteenas with coupling-slots are prposed and their operating characteristics are analyzed based on analyzed based on analytical and experimental results. An accurate analysis method for the slot-coupled feed structure is based on using both circuit coupling between anteenas and full-wave analysis which use travling wave mode and non-traveling wave mode on feed line. The basis functions that used for the numerical analysis bas been determined depending upon the accuracy, convergence properties of the solution, and the computation time:The patch uses 3 EB mode, the slot uses 1PWS mode, and feeders use 5 PWS mode. Series-fed array antennas have been designed, built, and tested in a standing-wave configuration. Using the results of the full-wave analysis, the chebyshev array antennas consisting of 8 elements are designed and fabricated changing the amount excited to each array element by adjusting slot length and by the slot position relative to the feeder. Experiment results show that the series-fed array antenna designed by adjusting the slot position relative to the feeder is superior to that designed by slot length.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.15 no.6
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• pp.548-553
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• 2004

In this paper, single, two, and three-section microstrip directional couplers are implemented for realizing the high directivity characteristics. The achievement of the high directivity with microstrip configuration is carried out by the distributed capacitor to decrease the even and odd mode phase difference. Capacitive compensation is performed by gap coupling of open stub formed in sub-coupled line. Therefore, insertion loss and power handling capability are not affected by the gap coupling. The proposed structure is easy to fabricate and incorporate another microwave device due to the planner microstrip. We designed and fabricated single, two, and three-section directional coupler with 20 ㏈ coupling. In spite of microstrip structure, the capacitive compensation structure shows 30 ㏈, 27 ㏈, and 25 ㏈ of directivity in single, two, and three-section directional couplers, respectively.

• Nuclear Engineering and Technology
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• v.44 no.6
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• pp.597-610
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• 2012

The passive auxiliary feedwater system (PAFS) is one of the advanced safety features adopted in the APR+, which is intended to completely replace the conventional active auxiliary feedwater system. With an aim of validating the cooling and operational performance of PAFS, an experimental program is in progress at KAERI, which is composed of two kinds of tests; the separate effect test and the integral effect test. The separate effect test, PASCAL ($\underline{P}$AF$\underline{S}$ $\underline{C}$ondensing Heat Removal $\underline{A}$ssessment $\underline{L}$oop), is being performed to experimentally investigate the condensation heat transfer and natural convection phenomena in PAFS. A single, nearly-horizontal U-tube, whose dimensions are the same as the prototypic U-tube of the APR+ PAFS, is simulated in the PASCAL test. The PASCAL experimental result showed that the present design of PAFS satisfied the heat removal requirement for cooling down the reactor core during the anticipated accident transients. The integral effect test is in progress to confirm the operational performance of PAFS, coupled with the reactor coolant systems using the ATLAS facility. As the first integral effect test, an FLB (feedwater line break) accident was simulated for the APR+. From the integral effect test result, it could be concluded that the APR+ has the capability of coping with the hypothetical FLB accident by adopting PAFS and proper set-points of its operation.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.9
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• pp.1-6
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• 2000

Utilizing impurity free vacancy diffusion (IFVD) method, area selective intermixing of InGaAs/InGaAsP multi-quantum well (MQW) structure was done. After this, wavelength division demultiplexing waveguide type photodetectoers was integrated and measured. It showed large blue shift in bandgap due to intermixing of MQW. Photodetectors are based on typical p-i-n structure and devices having large and small bandgap areas line up linearly. Width of waveguide and length of each photodetector are 20 and 250 ${\mu}m$, respectively, TE/TM polarized light from tunable laser was butt-coupled to the photodetector and spectral response was measured. Photodetectors can demultiplexing 1480 and 1550 nm wavelength.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.11a
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• pp.148-150
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• 2002

In this paper, a 5-coupled BPF with teflon substrate is presented. In general, for less than 1 GHz frequency, the narrow bandwidth as well as the good characteristic in the rejection frequency band could be realized using lumped elements. However, for higher than 1 GHz frequency, the distributed elements such as microstrip lines need to be used for the design of the desired BPF For less than 2 GHz, the FR4 shows good filter characteristic at low cost. However, in the range of 2 GHz ~ 10 GHz, the filters with FR4 show a big difference between simulation and measurement results. Thus, in such a high frequency region, the teflon is more preferred to the FR4. The center frequency (fc) of the proposed filter is 2.3 GHz, the insertin loss (IL) is 1.2 dB, the return loss (RL) is 30 dB, bandwidth (BW) is 100 MHz, and the size is 8.3 cm $\times$ 4.9 cm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1093-1098
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• 2007

Tilting trains are currently in operation in 13 countries around the world. With the advances in tilting technology, verification of economic efficiency, and changes in economic situations, the introduction of tilting trains will rapidly spread across the globe. The measurement system is composed of the industrial computers installed in the console and the measurement racks mounted on each car. It is utilized to accumulate the data by the communication card and the optical cable. The optical cable and power cable are coupled at the connector located in joint of train to make easy to disconnect car each other. The signal conditioner is designed to choose and to extend the channel for each sensor readily. The sensor measurement rack has adopted as decentralization method. It is installed in each car to minimize the cable length. In also, it is manufactured based on 19"rack and covered to protect the cable. In this study, the programs for measurement and analysis were also developed to understand the traction system characteristics of TTX. Using this measurement system, we studied that acceleration test, re-powering test, and gradually powering test. The acceleration performance of TTX is 1.735 km/h/s, and it is inner standard value. The notch test result from 1 to 7 steps, DC link voltage is under standard value, and the output electric current of inverter is controlled normally. From the test results, we saw the performances of the traction systems are normal.

• ETRI Journal
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• v.38 no.5
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• pp.981-987
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• 2016

We present a cost-effective dual polarization quadrature phase-shift coherent receiver module using a silica planar lightwave circuit (PLC) hybrid assembly. Two polarization beam splitters and two $90^{\circ}$ optical hybrids are monolithically integrated in one silica PLC chip with an index contrast of $2%-{\Delta}$. Two four-channel spot-size converter integrated waveguide-photodetector (PD) arrays are bonded on PD carriers for transverse-electric/transverse-magnetic polarization, and butt-coupled to a polished facet of the PLC using a simple chip-to-chip bonding method. Instead of a ceramic sub-mount, a low-cost printed circuit board is applied in the module. A stepped CuW block is used to dissipate the heat generated from trans-impedance amplifiers and to vertically align RF transmission lines. The fabricated coherent receiver shows a 3-dB bandwidth of 26 GHz and a common mode rejection ratio of 16 dB at 22 GHz for a local oscillator optical input. A bit error rate of $8.3{\times}10^{-11}$ is achieved at a 112-Gbps back-to-back transmission with off-line digital signal processing.