• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.6-11
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• 2016

For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

• Journal of Environmental Science International
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• v.3 no.2
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• pp.157-164
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• 1994

Various antimicrobial agents are widely used for the purpose of antimicrobial process. We investigated antimicrobial activity and reduction efficiency of mal-ordour by the diphenyl ether compound (2,4,4'- trichloro -2'- hydroxy diphenyl ether) against Sraphylocom aureus(S.aureus and Proton vulgaris(p.vulgaris causing the mal-ordour, Especially, the diphenyl ether compound is not restricted to the regulation of water-contamination. In this research, we found that the optimum concentration of diphenyl ether compound was 1.5w% for both strains and antimicrobial expressions were c0.38t= 2.56 for S.aureus, c0.38t=2.67 for P.vulgaris. We found also that -OH group played the role of antimicrobial functional group. Lastly, reduction effect of mal-ordour was more than 90% for both strain at the optimum conditions. Key Words : antimicrobial agents, antimicrobial activity, reduction effect of mal-ordour, antimicrobial expression, antimicrobial functional group.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.233-236
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• 2004

Recently, the polymer insulators that are used for high voltage applications have some advantages such as light weight, small size, vandalism resistance, hydrophobicity and easy making process. During outdoor service of polymer insulators, the surface of the insulating material is frequently subjected to moisture and contamination that lead to dry band arcing. Their tracking resistance, erosion resistance, end sealing and shed design are very important because dry band arcing causes degradation of polymer surface. The shape design of porcelain insulator is formalized but design standard for polymer insulator is no standardized up to now, much research is necessary in real condition. In this paper, the surface and tracking properties of polymer suspension insulator for power transmission is investigated with ICP-AES, SEM, EDX, tracking wheel test and flashover voltage test. The diagnosis of insulator sample in tracking test hass been analyzed by leakage current STRI Guide and thermal image.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.2
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• pp.131-136
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• 2000

We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.529-529
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• 2007

Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.310-314
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• 2020

Although waste oil derived fuel (WDF) production technology was developed under a government initiative ~10 years ago, it became stagnant owing to the small size of participating companies, residents' rejection of foul odor, and the nature of the technology for recycling waste that was avoided. However, this subject is under the spotlight again because of recent developments, such as garbage crisis. In particular, plastic is the most difficult waste to dispose of, with more than 4 million tons of plastic waste produced every year according to statistics from the Ministry of Environment. The most effective method for treating plastic waste is to produce WDF through low temperature thermal decomposition. The WDF includes several volatile ingredients that mostly limit the use of fuel for boilers, owing to safety concerns. In particular, flash point is legally stipulated because of secondary contamination in the distribution process and the risk of fire and explosion. It is required that external shipments (distribution) should be maintained in the range of at least 30~60℃ (excluding explosion prevention facilities) for diesel power generation. Therefore, this study seeks to find the flash point that is best suited to WDFs produced from plastic waste.

• KIEAE Journal
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• v.7 no.5
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• pp.53-58
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• 2007

In order to predict the indoor air pollutant, the VOCs emission rate is used through small chamber in the design process. However, the small chamber method has limitations as the convective mass transfer coefficient, the most important factor when predicting VOCs contamination of indoor air, is different between the small chamber result and the measured data in the actual building. Furthermore, the existing studies which analyzed mass transfer coefficient in the small chamber were directed on the small chambers developed at the time and FLEC(Field and Laboratory Emission Cell), thus, are different from the current small chamber which has been changed with improvements. The purpose of this study is to determine the emission rate of pollutant in multi-layered building materials, and predict the indoor pollutant concentration through the CFD(Computational of Fluid Dynamics) and CRIAQ2 based on the mass transfer coefficient on singled-layered building material by using the current small chamber widely used in Korea. Futhermore, this study used the new convective mass transfer coefficient(hm') which indicates the existing convective mass transfer coefficient(hm) including VOC partition coefficient(k). Also, formaldehyde was selected as target pollutant.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.539-542
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• 2003

Recently, the polymer insulators which are being used for high voltage applications have some advantages such as light weight, small size, vandalism resistance, hydrophobicity and easy making process. During outdoor service of polymer insulators, the surface of the insulating material is frequently subjected to moisture and contamination which lead to the well known phenomenon of dry band arcing. Their tracking resistance, erosion resistance, end sealing and shed design are very important because dry band arcing causes degradation of polymer surface. The shape design of porcelain insulator is formalized but design standard for polymer insulator is no standardized up to now, much research is necessary in real condition. In this paper, the aging property of polymer insulator with shed shape(regular, alternative type) is analyzed through numerical analysis, CEA(canadian electricity association) tracking wheel test and IEC 61109 Annex C.

• Journal of Soil and Groundwater Environment
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• v.16 no.1
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• pp.71-81
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• 2011

Cause of contamination in the study area nearby Jang Hang Refinery is dust scattering in refinery stack, and soil washing treatment is one of the proper technologies for soil remediation in this area. Site conditions frequently limit the selection of a treatment process. A treatment technology may be eliminated based on the soil classification or physicochemical characteristics of soil. This study was assessed the soil washing efficiency by conducting of soil characteristic analysis in the vicinity of Jang Hang Refinery Stack within a 2 km radius. Also, it was decided about remedial range with comparative analysis of As in soil by Korean Standard Test Method before/after revision, whereupon As concentration in soil showed a increasing tendency after revision. As a result, the soil washing using the size separation of soil was determined through identifying of As species in the soil. In this site, only particle size distribution and water content of soil can provide the initial means of screening for the potential use of soil washing.

• Journal of Soil and Groundwater Environment
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• v.19 no.3
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• pp.134-141
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• 2014

A testing inspection is one of the important in the industry, owing to determine the reliability and directivity of testing inspection results. Therefore, the quality assurance and quality control (QA/QC) work which performed by personnel not directly in the inventory compilation development, in testing inspection must be thoroughly considered. Some agencies for environmental test inspection, they sometimes misunderstood that the QA/QC was ended with proficiency testing performance and on-site assessment by a director. Thus, results were often calculated without QA/QC work by self manual when conducting test. The objective of this study was to improve reliability of testing and inspection agency through the QA/QC case study which basically performed to raising reliability of testing and inspection agency. In this study, it increased reliability of result by verifying calibration curve (IC, ICV, CCV), blank, accuracy (LCS, MS) and precision as QA/QC performance, while performing investigation of soil contamination in mining areas. This study suggests that reliability establishing method of test result and management method of analysis process, through the QA/QC instance of testing agency.