• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.29-33
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• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Economic and Environmental Geology
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• v.46 no.5
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• pp.425-444
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• 2013

This study was carried out in order to determine the remediation of total petroleum hydrocarbons (TPHs), trichloroethylene (TCE), perchloroethylene (PCE), benzene, toluene, ethylbenzene and xylenes (BTEX) compounds for non-aqueous phase liquids (NAPLs) using in-situ air sparging (IAS) / vapor extraction (VE) with the marine sediments of Mandol, Hajeon, Sangam and Busan, South Korea. Surface sediment of Mandol area had sand characteristics (average particle size, 1.789 ${\Phi}$), and sandy silt characteristics (average particle size, 5.503 ${\Phi}$), respectively. Sangam surface sediment had silt characteristics (average particle size, 5.835 ${\Phi}$). Sediment characteristics before experiment in the Busan area showed clay characteristics (average particle size, 8.528 ${\Phi}$). TPHs level in the B1 column of Mandol, Hajeon, Sangam, and Busan sediments were 2,459, 6,712, 4,348, and 14,279 ppm. B2 (3 L/min) to B5 (5 L/min) columns reduced 99.5% to 100.0% of TCE and 93.2% to 100.0% of PCE. Removal rates of TCE, PCE, and BTEX are closely correlated (0.90-0.99) with particle sizes and organic carbon concentrations. However, TPHs (0.76) and benzene (0.71) showed the poorer but moderate correlations with the same parameters.

• Journal of the Korean Geosynthetics Society
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• v.11 no.4
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• pp.9-16
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• 2012

Standardized remediation process for the soil contaminated with arsenic is insufficient due to characteristics of its anion-mobility and speciation changed by Eh-pH of soil. One of the well-known efficient remediation processes is the modified soil washing that particle separation process by only water. However, it is required that the treatment plan for the fine soil what was discharged after modified soil washing. Therefore, this research suggests the treatment plan that the recycling method using arsenic immobilization by FeS-$H_2O_2$. The batch experiments results for the arsenic immobilization showed that the water content was at least 50%, the injection of FeS and $H_2O_2$ (assay-35%) were 8% (w/watdrybase) and 0.2 mL/10 g of fine soil respectively. Arsenic concentration with KSLT was decreased about 95.4%. The results indicated that the mixing of FeS-$H_2O_2$ was highly efficient on the immobilization of As-contaminated soil. The mixing ratio as 13% of bentonite with 3% of cement (at based on 100% of immobilized fine soil) was satisfied with standard of liner for landfill construction.

• Journal of the Korean GEO-environmental Society
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• v.14 no.11
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• pp.25-31
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• 2013

Civil and military firing ranges are usually contaminated with heavy metals such as lead and copper and remediation is required. Acid washing and extraction are common remediation methods. Lead contaminated firing range soil samples were collected and a preliminary study was conducted to evaluate the characteristics of the contamination and the contribution of high specific gravity particles. Ethylenediamine tetra acetic acid(EDTA) extraction was applied for the removal of heavy metal but the extraction was not feasible for the firing range soil. Even after the repeated EDTA extraction, the contamination were still over the Korean environmental standard indicating that soil particles highly contaminated with heavy metal which release the heavy metal ion even after the repeated extraction. Some colored and higher specific gravity particles were separated from the soil samples and analyzed. The colored particles have specific gravity of 2.5-6.6. The saturation ratio of Pb and EDTA was 4.9-32%. After removal of these colored particles, the sandy soil showed moderate contamination which can be treated with soil washing. This was proved with the five-level sequential extraction and TCLP tests.

• Resources Recycling
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• v.22 no.5
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• pp.13-19
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• 2013

The effect of pH on the citrate leaching behavior of heavy metal ion was investigated to develop an eco-friendly process for removing heavy metals from soil contaminated with copper, zinc, and lead. The leaching tests were performed using citrate solution with pH adjusted by mixing citric acid and sodium citrate under the following leaching conditions: particle size, under $75{\mu}m$; temperature, $50^{\circ}C$; citrate concentration, $1kmol/m^3$; pulp density, 5%; shaking speed, 100 rpm; leaching time, 1 hour. The difference of pH before and after the leaching test was not observed, and this result indicates the direct effect of hydrogen ion concentration on the leaching of metals was insignificant. The removal ratios of copper, zinc, and lead from the contaminated soil decreased with increasing pH. The thermodynamic calculation suggests that the leaching behaviors of metal ions were determined by two reactions; one is the reaction to form complex ions between heavy metal ions and citrate ion species, and the other is the reaction to form metal hydroxide between heavy metal ions and hydroxide ion.

• Proceedings of the Korean Geotechical Society Conference
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• 2000.03b
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• pp.504-511
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• 2000

Geotube is a tube made of permeable but soil-tight geotextile, hydraulically filled with soil include dredged sand and mud, which has been successfully applied in hydraulic and coastal engineering projects. This method is getting popular and used a lot in the advanced countries of the world because of economical, useful, and enable to store and isolate contaminated materials as obtained by harbor dredging. Laboratory and pilot scale in-situ tests were performed to determine the design methodology and construction procedures. From the results of laboratory and in-situ model tests, the retention ratio of solid particle is minimum 86% and minimum permeability and tensile strength of geotextile is ${\alpha}$${\times}$10$\^$-2/ and 20 t/m, respectively. Also, based on the environmental model test results, it can be concluded that this method does meet the Korean EPA standards.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1990.11a
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• pp.58-62
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• 1990

The size and concentration of wear debris in lubricating oil often reveal the operating condition of the rotating machinery. To evaluate the possible application of light attenuation measurement for the estimation of wear debris concentration in the lubricating oil, the light transmittance through the lubricating oil cell contaminated with various concentrations of diatomite particles was measured, the attenuation coefficient was estimated from the transmittance measurement and the coefficients were compared with those obtained from the scattering theory. The comparision showed good agreements between them. It is also noted that the experimentally determined attenuation coefficient showed almost linear relation with particle weight concentrations for the concentrations within the range of 2000 ppm. For the case of 0 ppm weight concentration of diatomite particles in the lubricating oil cell, the thickness of the cell required to give $100 \mu W$ light attenuation is 7.75 mm. This result indicates that the light attenuation method will be one of the possible candidates of machine failure diagnostic sensors for the estimation of wear debris concentration in the lubricating oil.

• Journal of Environmental Health Sciences
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• v.30 no.5 s.81
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• pp.395-401
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• 2004

In this study, lots of methods have been studing to utilize energy and decrease contaminated effluents. There has been great progress on IGCC (Integrated gasification combined cycle) to reduce thermal energy losses. The following results have been conducted from desulfurization experiments using waste shell to remove $H_{2}S$. Unreacted core model ior desulfuriration rate prediction of sorbent was indicated. These were linear relationship between time and conversion. So co-current diffusion resistance was conducted reaction rate controlling step. The sulfidation rate is likely to be controlled primarily by countercurrent diffusion through the product layer of calcium sulfide(CaS) formed. Maximum desulfurization capacity was observed at 0.631 mm for lime, oyster and hard-shelled mussel. The kinetics of the sorption of $H_{2}S$ by CaO is sensitive to the reaction temperature and particle size at $800^{\circ}C$, and the reaction rate of oyster was faster than the calcined limestone at $700^{\circ}C$.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2000.05a
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• pp.41-45
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• 2000

Geotube is made of permeable but soil-tight geotextile, hydraulically filled with soil include dredged sand and mud, which has been successfully applied in hydraulic and coastal engineering projects. Ceotube method is getting popular and being used a lot in many countries of the world because of the simplicity of the placement and construction, cost effectiveness and minimum impact on the environment, and enable to store & isolate contaminated materials as obtained by harbor dredging. Laboratory tests and field construction were performed to determine the design methodology and construction procedures. From the results of laboratory and field construction, the retention ratio of solid particle is a minimum 86%. The minimum permeability and the tensile strength of geotextile are $\alpha$ x 10$^{-4}$ cm/sec and 20t/m, respectively Also, based on the environmental test results, it can be concluded that this method does meet the Korean EPA standards.