• 설비공학논문집
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• 제13권2호
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• pp.134-143
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• 2001

This paper presents the characteristics of flank and tip seal leakage in a scroll compressor for air-conditioners with R-22 under actual operating conditions. It is well known that the leakage has significant effect on the performance of the scroll compressor. Experiments were performed by using indirect method for measuring mass flow rate passing through flank and tip seal under actual operating conditions, In addition, an analytical model for tip seal leakage was developed to investigate tangential and radial leakage observed at grooves and contact points of tip seals. For low oil concentration, theoretical results were compared with experimental data to verify the analytical model. As a result, leakages through flank and tip seal parts were evaluated as afunction of pressure ratio, orbiting angle, discharge pressure, tip clearance, and leakage point. It was also found that the tip seal leakage was considerable even though the tip seal provided adequate sealing effect.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• 한국표면공학회지
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• 제52권5호
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• pp.239-245
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• 2019

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{\circ}$ for an array with maximum tip-to-tip separation of 100 mm.

• 대한기계학회논문집A
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• 제30권2호
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• pp.135-140
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• 2006

In tapping mode atomic force microscopy (TM-AFM), the vibro-contact response of a resonating tip is used to measure the nanoscale topology and other properties of a sample surface. However, the nonlinear tipsurface interactions can affect the tip response and destabilize the tapping mode control. Especially it is difficult to obtain a good scanned image of high adhesion surfaces such as polymers and biomolecules using conventional tapping mode control. In this study, theoretical and experimental investigations are made on the nonlinear dynamics and control of TM-AFM. Also we report the surface adhesion is an additional important parameter to determine the control stability of TM-AFM. In addition, we proved that it was adequate to use Johnson-Kendall-Roberts (JKR) contact model to obtain a reasonable tapping response in AFM for the soft and high adhesion samples.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.502-505
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• 2005

To overcome some of the limitations in the conventional photolithography technique, MC-SPL which has advantages such as flexibility and high speed was developed in the past. To make a fine pattern using MC-SPL, there are many variables to control, for example, applied load, scribing speed, chemical etching condition, and etc. In this work, the effect of contact load on the width of the pattern was investigated. The load not only influences the width of the pattern but it also affects the wear of the probe tip. It was found that it is beneficial to load the tip in two stages. Futhermore, the experimental results showed that the pattern width was more sensitive to the initial contact force.

• Tribology and Lubricants
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• 제10권3호
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• pp.54-61
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• 1994

The regimes of elastohydrodynamic lubrication at the points where line contacts occur between the vane tip and camring in an oil hydraulic vane pump is studied. A study of the contact conditions in vane pump provided most of the early interest in the possibility of fluid film lubrication in highly loaded contacts. The variation of viscosity with pressure and the elastic deformation associated with the high pressures generated in the contact region are the major causes of the complexity attributed to lubrication behavior. Therefore a numerical solutions to the problem of elastohydrodynamic lubrication of line contact are obtained by using a finite-difference formulation.

• 한국정밀공학회지
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• 제20권8호
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• pp.101-107
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• 2003

A new mechanical probe for 3-D feature measurement on coordinate measuring machines (CMMs) is presented. The probe is composed of the contact stylus and the three-component force sensor. With the stylus mounted on the force sensor, the probe can not only measure 3-D features, but also detect contact force acting on the stylus tip. Furthermore, the probing direction and the actual contact position can be determined by the relationship among three components of contact force to be detected. In this paper, transformation matrix representing the relationship between the external force acting on the stylus tip and the output voltages of measurement gauges is derived and calibrated. The prototype of probe is developed and its availability is investigated through the experimental setup for calibration test of the probe. A series of experimental results show that the proposed probe can be an effective means of improving the accuracy of touch probing on CMM.

• Tribology and Lubricants
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• 제38권5호
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• pp.199-204
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• 2022

This paper presents a numerical investigation of the influence of water molecule thickness on frictional behavior at the nanoscale using molecular dynamics simulation. Three different models, comprising water thin films of various thicknesses, were built, and indentation and sliding simulations were performed using the models. Various normal loads were applied by indenting the Si tip on the water film for the sliding simulation to evaluate the interplay between the water thin film thickness and the normal load. The results of the simulations showed that the friction force generally increased with respect to the normal load and thickness of the water thin film. The friction coefficient varied with respect to the normal load and the water film thickness. The friction coefficient was the smallest under a moderate normal force and increased with decreasing or increasing normal loads. As the water film became thicker, the contact area between the tip and water film became larger. Under well-lubricated conditions, the friction force was proportional to the contact area regardless of the water film thickness. As the normal force increased above a critical condition, the water molecules beneath the Si tip spread out; thus, the film could not provide lubrication. Consequently, the substrate was permanently deformed by direct contact with the Si tip, while the friction force and friction coefficient significantly increased. The results suggest that a thin water film can effectively reduce friction under relatively low normal load and contact pressure conditions. In addition, the contact area between the contacting surfaces dominates the friction force.

• Tribology and Lubricants
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• 제11권3호
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• pp.48-53
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• 1995

In this paper, the friction characteristics of contact region between vane tip and camring is studied using a modeled experimental device. The contact region is under the influence of variable loads with the amplitude of hundreds of Newton and frequency of tens of Hz. The condition of lubrication between vane and disk is modeled after the actual condition between vane and camring. The coefficient of friction is obtained by measuring the frictional forces in the contact region between camring and vane. The friction characteristics of the actual oil hydraulic vane pump is estimated on the basis of coefficient of friction. The analysis of frictional characteristics shows us that the lubrication condition of vane tip is that of transition regime between hydrodynamic lubrication and mixed lubrication.

• 대한기계학회논문집B
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• 제30권1호
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.