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Scanning Kelvin Probe Microscopy analysis of silicon carbide device structures (Scanning Kelvin Probe Microscopy를 이용한 SiC 소자의 분석)

  • Jo, Yeong-Deuk;Ha, Jae-Geun;Koh, Jung-Hyuk;Bang, Uk;Kim, Sang-Cheol;Kim, Nam-Gyun;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.132-132
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    • 2008
  • Silicon carbide (SiC) is an attractive material for high-power, high-temperature, and high-frequency applications. So far, atomic force microscopy (AFM) has been extensively used to study the surface charges, dielectric constants and electrical potential distribution as well as topography in silicon-based device structures, whereas it has rarely been applied to SiC-based structures. In this work, the surface potential and topography distributions SiC with different doping levels were measured at a nanometer-scale resolution using a scanning kelvin probe force microscopy (SKPM) with a non-contact mode AFM. The measured results were calibrated using a Pt-coated tip and a metal defined electrical contacts of Au onto SiC. It is assumed that the atomically resolved surface potential difference does not originate from the intrinsic work function of the materials but reflects the local electron density on the surface. It was found that the work function of the Au deposited on SiC surface was higher than that of original SiC surface. The dependence of the surface potential on the doping levels in SiC, as well as the variation of surface potential with respect to the schottky barrier height has been investigated. The results confirm the concept of the work function and the barrier heights of metal/SiC structures.

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Effects of the 1975 Haicheng Earthquake on the Korean Peninsula (1975년에 발생한 중국 해성지진이 한반도에 미친 영향)

  • 추교승
    • Proceedings of the Earthquake Engineering Society of Korea Conference
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    • 1998.10a
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    • pp.210-221
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    • 1998
  • In the period from the year 1500 to 1980. at least 14 large earthquake with epicenters in the northeastern China and Yellow Sea were felt or destructive in the Korean Peninsula. The most sigmificant events among them were the 1668 July 25 Tancheng earthquake of mamnitude 8.5, and the 1975 Feb. 4 Haicheng earthquake of magnitude 7.3. The Haicheng earthquake of the year 1975 in am extraordinary one among those occurred in the northeastern China in the 20th century in the sense the Shake of the event affected all over the Korean Peninsula. The tremor was felt even at the southeastern tip of the Korea and northern part of Kyushu 700km far away from the epicenter. In order to see the variation and trend of the effect of the Haicheng earthquake on the Korean Peninsula, the two data sets of the northern and southern parts of the peninsula were merged into one combined data set. The spatial variation of intensity shows smooth decrease from the value 4 of the northwestern region near the source to the value 1 of the Cheju Island and Kjushu. However, there are four regions of locally high intensity value. They are the region along downstream of Abrok(Yalu) River with intensity 5, the region around Shinpo of intensity 4, the area comprising Seoul and Chuncheon Cities of intensity 4, and Pohang-Pusan area of intensity 3. We suppose that there might be three types of possible mechanisms. The first one is concerned with the lateral inhomogeneity of velocity in the crust caused by wide distribution of relatively fractured rock. The second one is related with reflections of surface waves caused by the crestal thinning effect at border regions of the Peninsular in contact with the Ulleung Basin and the Japan Basin. The third possibility is local site effect caused by thick Tertiary or Quaternary rocks and soil layers.

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Mar Behavior and Quantitative Evaluation of Urethane-Acrylate Coatings with a Different Gloss (다른 광택을 가진 우레탄 아크릴 코팅 소재의 긁힘 거동 및 정량적 평가)

  • Jung, Won-Young;Weon, Jong-Il
    • Polymer(Korea)
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    • v.37 no.4
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    • pp.455-461
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    • 2013
  • Mar behavior and visibility were investigated by applying a constant load to various gloss-coated urethane-acrylate surfaces. Using a area-contact scratch tip which can apply a relatively low stress level to the coated surfaces, the mar damages were generated on the surfaces. When evaluating the mar-induced damage by means of delta-gloss (${\Delta}G$) and delta-luminance (${\Delta}L$) with existing test methodologies, an increase in constant load on the same gloss-coated surface leads to an increase in ${\Delta}G$ and ${\Delta}L$. However, these are not suitable for evaluating and comparing the surface damages of different gloss-coated samples because of a disagreement between the measured values and the mar visibility. It is shown that new mar test assessment proposed in this work not only can be used to quantitatively evaluate the mar damage, but also accounts for the correlation that the increases of the normalized gloss and luminance on coated surfaces correspond with an increase in the mar visibility.

High-Pressure Finger Injection Injury Caused by Paint Thinner: Case Report (페인트 신나에 의한 수지 고압 손상의 경험)

  • Song, Jin Woo;Choi, Hwan Jun;Kim, Mi Sun
    • Archives of Plastic Surgery
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    • v.34 no.2
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    • pp.269-273
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    • 2007
  • Purpose: High-pressure injection(HPI) injury is an injury caused by accidental injection of substances by industrial equipment. HPI injury of the hand is a serious injury that can be potentially devastating. There have been a number of publications on the results of its treatment and its functional outcome of these hands. Unfortunately, the clinical outcomes were unsatisfactory following an initial treatment approach of digital expression of the injection material, elevation, soaks, dressing changes, and antibiotics. Methods: A 43-year-old right handed man sustained a high pressure injection injury to the tip of the left index finger. The injected material was industrial paint thinner. Tissue necrosis was noted at the pulp of the finger. Several debridements and irrigation were required. A pedicled chest flap transfer was performed on the eighteenth day after injury as the dorsal nail complex remained viable. This is a retrospective review of our experience with high-pressure finger injection injury caused by paint. A literature review, retrospective chart and radiologic review were presented. Results: Follow-up length was about 1 year. The injuried hand was left nondominant hand, the index. Patient complaints were cold intolerance, paresthesia, contact pain, and impairment of activities of daily living. Conclusion: The outcome of high-pressure injection injuries of the hand is affected by many factors. The time between injury and operative treatment has been regarded as a key determinant by a number of authors. The nature of the injected material is probably more important. It has been noted by many authors that injuries with paints have a worse outcome than those with oil or grease. This study confirms the fact that high-pressure injection injury caused by paint thinner to the hand is a significant problem. Virtually a patient suffers sequelae of this injury. The injury has significant repercussions for future function and reintegration into the work force.

GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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An Experimental Study on Dynamic Behavior Evaluation of Transitional Track (접속부 궤도의 동적거동분석을 위한 실험적 연구)

  • Cho, Sung-Jung;Choi, Jung-Youl;Chun, Dae-Sung;Kim, Man-Cheol;Park, Yong-Gul
    • Proceedings of the KSR Conference
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    • 2007.11a
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    • pp.1379-1385
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    • 2007
  • In domestic transitional zone design, there is regulation to prevent generation of irregular substructure behaviors that negatively influence in prevention of plasticity settlement on approach section and contact section as well as relieve overall track rigidity by reducing sectional foundation and track stiffness difference, but design guideline that considers dynamic behavior of transitional track in actual service line is very insignificant. Therefore in this study, characteristics of transitional track dynamic behaviors by substructure stiffness are researched and measured dynamic response of transitional track by substructure stiffness in order to prove correlation between substructure and track and calculate elasticity(stiffness) and track load of transitional track by using measurement and formula to provide basic information for developing design guideline considering dynamic behavior of service line transitional track.

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Selective growth of GaN nanorods on the top of GaN stripes (GaN stripe 꼭지점 위의 GaN 나노로드의 선택적 성장)

  • Yu, Yeonsu;Lee, Junhyeong;Ahn, Hyungsoo;Shin, Kisam;He, Yincheng;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.4
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    • pp.145-150
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    • 2014
  • GaN nanorods were grown on the apex of GaN stripes by three dimensional selective growth method. $SiO_2$ mask was partially removed only on the apex area of the GaN stripes by an optimized photolithography for the selective growth. Metallic Au was deposited only on the apex of the GaN stripes and a selective growth of GaN nanorods was followed by a metal organic vapor phase epitaxy (MOVPE). We confirmed that the shape and size of the GaN nanorods depend on growth temperature and flow rates of group III precursor. GaN nanorods were grown having a taper shape which have sharp tip and triangle-shaped cross section. From the TEM result, we confirmed that threading dislocations were rarely observed in GaN nanorods because of the very small contact area for the selective growth. Stacking faults which might be originated from a difference of the crystal facet directions between the GaN stripe and the GaN nanorods were observed in the center area of the GaN nanorods.

Materials Compatibility and Structure Optimization of Test Department Probe for Quality Test of Fingerprint Sensor (지문인식센서 품질평가를 위한 검사부 프로브의 소재 적합성과 구조 최적화 연구)

  • Son, Eun-Won;Youn, Ji Won;Kim, Dae Up;Lim, Jae-Won;Kim, Kwang-Seok
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.4
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    • pp.73-77
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    • 2017
  • Recently, fingerprint sensors have widely used for personal information security, and require quality evaluation to reduce an error of their recognition rate. Quality of fingerprint sensors is evaluated by variation of their electrical resistance introducing by contacts between a probe tip and a sensor electrode, Investigation on the materials compatability and structure optimization of probe is required to reduce deformation of sensor electrode for repeatability of quality testing. Nickel, steel(SK4), beryllium copper, and phosphor bronze were considered as probe materials, and beryllium copper was the most appropriate for materials of probe tips, considering indentation and contact resistance while being contacted probe tips on electrodes. Probes of an inspection part were manufactured with the single-unit structure for physical damage prevention and parallel processing capability. Inspection repeatability was evaluated by voltage variation of fingerprint sensors when the specific current was applied. A single-unit inspection part with beryllium copper probe tips showed excellent repeatability within ${\pm}0.003V$ of its voltage variation.

Fine Structural Analysis of the Attachment Devices in the Jumping Spider Plexippus setipes (깡충거미 표면 접착장치의 미세구조 분석)

  • Moon, Myung-Jin;Park, Jong-Gu
    • Applied Microscopy
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    • v.39 no.2
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    • pp.149-156
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    • 2009
  • Fine structure of the dry adhesion system in the tarsal appendages of the jumping spider Plexippus setipes (Araneae: Salticidae) with examined using field emission scanning electron microscope (FESEM). The jumping spiders have the distinctive attachment apparatus for adhesion on smooth dry surface without sticky fluids. They attach to rough substrates using tarsal claws, however attachment on smooth surfaces is achieved by means of a tuft-like hair called a scopula. All eight legs have the scopulae with a pair of claws on the tip of feet, and each scopula is composed of two groups of setae that are capable of dry adhesion on smooth surface. The apex of each seta is flattened pad bearing many specialized adhesive setules on one side. The cuticular sensillae are interspersed at the dorsal surface of the seta. It has been revealed by this research that the contact area of the setule is always a triangular shape, and these cuticular surfaces are connected by the elongated stalks from the underlying setae. Moreover, adhesion between the numerous setules and the setae was prevented by the microscopic hairs, since these were interspersed on the upper side of the setae.

Simultaneous Rhinoplasty with Fracture Reduction in Nasal Bone Fracture (비골 골절 환자에서 골절 정복과 동시에 시행한 코성형술)

  • Kim, Na Yeon;Lee, Soo Hyang;Choi, Hyun Gon;Kim, Soon Heum;Shin, Dong Hyeok;Uhm, Ki Il
    • Archives of Plastic Surgery
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    • v.35 no.5
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    • pp.589-596
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    • 2008
  • Purpose: The nasal bone fracture is most common fracture in facial bone injuries. Regardless of the severity or type of fracture, closed reduction has traditionally been the common method of treatment. However, through detailed pre-operative evaluation, we found out that many patients consider rhinoplasty prior to trauma due to aesthetic desire or nasal deformity with or without septal deviation. In treatment of nasal bone fracture, we focused not only on the fracture management but also on the patients' desire prior to trauma, and we made additional operation according to patients' desire with fracture reduction and gained rewarding outcomes. Methods: From March 2005 to June 2007, total 263 patients were treated for nasal bone fracture. Among these patients, 57 patients (21%) had the additional operation with nasal fracture reduction. The additional operations were categorized in three types: augmentation rhinoplasty with tip plasty (40%), septoplasty only (16%), corrective rhinoplasty (44%). The mean follow-up period was 5.6 months and results were evaluated by scoring. Results: Forty four of 57 patients (77%) were highly satisfied regardless of any additional operation kinds. The complications were one septal perforation, two displacement of implant and four remnant nasal deformities. For the septal perforation, no further management was performed because we lost the contact with the patient. Then 4 of the other complicated patients were revised. Conclusion: In general, many physicians tend to consider nasal fracture as a simple trauma. However through the strict history taking, physical examination and professional counseling, we could catch the patient's cosmetic desire and get the eyes on new concept: the nasal fracture is not only a trauma but a cosmetic and functional field. In the treatment of nasal bone fracture, if additional rhinoplasty is performed, patients will be more satisfied and we also can expect higher profits.