• 한국터널지하공간학회 논문집
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• 제25권2호
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• pp.101-120
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• 2023

전기비저항 탐사 방법은 매질의 표면에 관입된 두 전극의 전위차와 전류와의 관계를 통해 전기 저항을 측정하고, 형상 계수를 이용하여 매질의 고유한 특성인 전기비저항을 계산한다. 현장 및 실대형 크기의 전기비저항 실험은 전극과 매질 사이의 접촉 면적이 적고, 전극 간 거리가 충분하기 때문에 계산상 편의를 위해서 동일한 표면적을 가진 반구형으로 치환하여 전기비저항을 산정한다. 하지만, 실내 소규모 크기의 전기비저항 실험은 전극의 지오메트리(전극의 관입 깊이, 전극사이의 거리, 전극의 길이와 반지름 크기)로 인해서, 등전위면과 전류 흐름이 달라지게 되므로, 궁극적으로 전기비저항값의 오차를 야기한다. 본 연구는 기존 연구에서 유도된 4가지 전극 형상(반구, 원기둥, 반구형 팁을 가진 원기둥, 콘형 팁을 가진 원기둥)에 따른 전기 저항 이론식을 정리하고, 전극 형상을 고려한 전기 저항 수치 해석을 실시하였으며, 이론식과 수치 해석 결과들의 비교를 통해서 개발된 수치 해석 모듈을 검증하였다. 또한, 각 전극 형상에 따른 전극 주변과 전극사이에 형성된 전기 저항 분포를 분석하였다. 추가적으로, 현장 전기비저항 탐사에서 주로 사용되는 콘형 팁을 가진 원기둥 전극의 전기적 특성에 따른 전류 흐름 분포를 고찰하였다.

• 한국재료학회지
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• 제26권9호
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• pp.486-492
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• 2016

Tungsten (W) thin film was deposited at $400^{\circ}C$ using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of $WF_6$ with $SiH_4$. (2) Inert gas purge. (3) $SiH_4$ exposure without $WF_6$ supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of $WF_6$ and $SiH_4$. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (${\sim}100{\mu}{\Omega}-cm$) than that of the latter (${\sim}25{\mu}{\Omega}-cm$). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1378-1380
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• 2001

Ohmic contacts have been fabricated on p-type 4H-SiC using Pt/Ti. Low resistivitf Ohmic contacts of Pt/Ti to p-type 4H-SiC were investigated. Specific contact resistances were measured using the transmission line model method, and the physical properties of the contacts were examined using x-ray diffraction, scanning electron microscopy. Ohmic behavior with linear current-voltage characteristics was observed following anneals at $900^{\circ}C$ for 90sec at a pressure of $3.4{\times}10^{-5}$ Torr. The Pt/Si/Ti films was measured lower value of the specific contact resistance by the annealing process, and the contact resistances were improved more than one order compared to Ti contact the annealed sample. Scanning electron microscopy shows that the Pt layer effectively reduce the oxidation of Ti films. And results are obtained as $4.6{\times}10^{-4}$ ohm/$cm^2$ for a Pt/Ti metal structure after a vacuum annealing at $900^{\circ}C$ for 90sec. Titanium has a relatively high melting point, thus Ti-based metal contacts were attempted in this study.

• Composites Research
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• 제23권2호
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• pp.24-30
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• 2010

니켈-나노분말/에폭시 복합재료의 계면 특성과 소수성을 자체-감지능과 작동기 측정을 위해 평가하였다. 경사형 시편을 사용하여 접촉 저항 및 저항도를 측정하였다. 자기장에서 복합재료의 작동성을 세가지 파형들, 즉, 싸인, 삼각, 그리고 사각파를 사용하여 평가하였다. 균일하지 않은 표면에 존재하는 소수성 영역 때문에 Ni-에폭시 나노복합재료의 어떤 부분은 초소수성보다는 다소 낮은 접촉각인 110도를 가졌다. 동적 접촉각은 정적 접촉각과 경향이 상호 일치함을 보였다. 니켈-나노분말의 고유의 금속성질 때문에 자체 감지를 확인하였으며, 또한 전자기장에 작동 반응을 잘 하였다. 니켈-나노분말/에폭시 복합재료의 최대 및 최적의 성능을 얻기 위해서, 레이져 변위 센서를 사용하여, 파형, 주파수, 그리고 전압의 함수로 작동기의 변위를 평가하였다. 니켈-나노분말/에폭시 복합재료의 작동은 적용된 주파수와 전압의 함수로써 증가하였다. 작동된 복합재료들의 연신율은 전압의 증가에 따라 삼각 혹은 사각파보다 싸인파에서 더욱 빨리 증가하였다.

• Journal of Electrochemical Science and Technology
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• 제12권3호
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• pp.330-338
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• 2021

An integral electrode-bipolar plate assembly, which is composed of electrode, conductive adhesive film (CAF) and bipolar plate, has been developed and evaluated for application with a vanadium redox flow battery (VRB) to decrease contact resistance between electrode and bipolar plate. The CAF, made of EVA (ethylene-vinyl-acetate) material with carbon black or CNT (Carbon Nano Tube), is applied between the electrode and the bipolar plate to enable an integral assembly by adhesion. In order to evaluate the integral assembly of VRB by adhesive film, the resistivity of integral assembly and the performance of single cell were investigated. Thus, it was verified that the integral assembly is applicable to redox flow battery. Through resistance and contact resistance of bare EVA and CAF films on bipolar plate were changed. Among the adhesive films, CAF film coated with carbon black showed the lowest value in through resistance, and CAF film coated with CNT showed the lowest value in contact resistance, respectively. The efficiency of VRB single cell was improved by applying CAF films coated with carbon black and CNT, resulting in the reduced overvoltage in charging process. Therefore, the energy efficiency of both CAF films, about 84%, were improved than that of blank cell, about 79.5 % under current density at 40 mA cm^-2. The energy efficiency of the two cells were similar, but carbon black coated CAF improved the coulomb efficiency and CNT coated CAF improved the voltage efficiency, respectively.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.269-272
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• 2005

Nondestructive damage sensing and load transferring mechanism of Ni nanowire strands and multi-wall carbon nanotube (MWCNT)/epoxy composites were investigated using electro-micromechanical techniques. MWCNT composite was especially prepared for high volume contents, 50 vol % of reinforcement. Electro-micromechanical techniques were applied to measure apparent modulus and contact resistance of Ni nanocomposites with their alignment and different diameters, and adding contents. Applied cyclic load affected on apparent modulus and electrical properties on nanocomposites due to various inherent properties of each CNMs. Contact resistivity on humidity sensing was a good indicator for monitoring as for multifunctional applications. Further study on actuation as well as sensing will be investigated for the following work continuously.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 추계학술발표대회 논문집
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• pp.153-156
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• 2005

Nondestructive sensing of electrospun PYDF web and multi-wall carbon nanotube (MWCNT)/epoxy composites were investigated using electro-micromechanical technique. Electrospinning is a technique used to produce micron to submicron diameter polymeric fibers. Electrospun PVDF web was also evaluated for the sensing properties by micromechanical test and by measurement electrical resistance. CNT composite was especially prepared for high volume contents, 50 vol% of reinforcement. Electrical contact resistivity on humidity sensing was a good indicator for monitoring as for multifunctional applications. Work of adhesion using contact angle measurement was studied to correlate acid-base surface energy between carbon fiber and CNF composites, and will study furher for interfacial adhesion force by micromechanical test.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1352-1353
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• 2008

In this study, aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET(polyethylen terephthalate) substrate by r.f. magnetron sputtering method. PET substrate was surface-treated in an atmospheric pressure DBD(dielectric barrier discharge) plasma to increase deposition rate and to improve electrical propesties. Morphological changes by DBD plasma were obsered using contact angle measurement. The contact angle of water on PET was reduced from 62$^{\circ}$ to 42$^{\circ}$ by DBD plasma surface treatment. The plasma treatment also increased deposition rate and electrical propesties. The electrical resistivity as low as $4.97{\times}10^{-3}[{\Omega}-cm]$ and the deposition rate of 234[${\AA}$-m/min] were obtained in ZnO:Al film with surface treatment time of 5min, and 20min., respectively.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.185-189
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• 2005

We reported here nano-scale electrical phase-change recording in amorphous $Ge_2Sb_2Te_5$ media using an atomic force microscope (AFM) having conducting probes. In recording process, a pulse voltage is applied to the conductive probe that touches the media surface to change locally the electrical resistivity of a film. However, in contact operation, tip/media wear and contamination could major obstacles, which degraded SNR, reproducibility, and lifetime. In order to overcome tip/media wear and contamination in contact mode operation, we adopted the W incorporated diamond-like carbon (W-DLC) films as a protective layer. Optimized mutilayer media were prepared by a hybrid deposition system of PECVD and RF magnetron sputtering. When suitable electrical pulses were applied to media through the conducting probe, it was observed that data bits as small as 25 nm in diameter have been written and read with good reproducibility, which corresponds to a data density of $1 Tbit/inch^2$. We concluded that stable electrical phase-change recording was possible mainly due to W-DLC layer, which played a role not only capping layer but also resistive layer.

• Journal of Electrical Engineering and Technology
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• 제12권3호
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• pp.1314-1319
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• 2017

A handheld sheet resistance meter that can easily and quickly measure the sheet resistance of indium tin oxide films was developed. The dual-configuration four-point probe method was adopted for this instrument, which measured sheet resistance in the range from $0.26{\Omega}/sq$. to $2.6k{\Omega}/sq$. with 0.3 % ~ 0.5 % uncertainty. The screen of the instrument displayed the sheet resistance when the probe was in contact with the sample surface and the value continued to be displayed during the probe contact. Even after separating the probe from the surface, the value was still displayed on the screen and could be read easily. A feature of the instrument was the use of the dual-configuration technique to reduce edge effects markedly compared with the single-configuration technique and its ease of operation without applying correction factors for sample size and thickness.