• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.162.6-162
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• 2001

Confocal scanning microscopy (CSM) is an important instrument in a wide variety of imaging applications because of its ability to provide three-dimensional images of thick, volume specimens. The mechanism for two-dimensional beam scanning and optical sectioning has an important roe in CSM as the three-dimensional profiler. This optical sectioning property arises from the use of a point detector, which serves to attenuate the signals from out-of-focus. The intensity profile for the open loop scanning should be matched with its response for the standard. The non-linearity can be minimized with the optical sectioning or the optical probe of the closed loop control. This paper shows the mathematical expression of the light such as the extinction curve in the optical fields of system using AO deflector, the axial/lateral response experimentally when the error sources change, and the methods of optical sectioning. Thorough design of optical sectioner is crucial to the success of CSM in the field ...

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.221-225
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• 1999

The positive branch confocal unstable resonator equipped with an intra-cavity beam splitter has been studied experimentally to achieve low beam divergence in the copper vapor laser. Output laser beams of 0.15 mrad divergence was achieved from the laser system with a 10 cm curvature convex mirror (M=30), and laser beams of 0.1 mrad was achieved for a 5 cm curvature convex mirror (M=60). The power density of the far-field beam from the M=60 resonator laser was 130 times higher than the case of the 2 mrad-operation with the plane-parallel resonator. We also observed the self-mode-locking from the unstable resonator laser pulses.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.161.6-161
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• 2001

Confocal scanning microscopy (CSM) has an important role as the three-dimensional profiler. An image distribution can be reconstructed by a correlation analysis of spots with the bandwidth of radio frequency. But it is a serious problem for the high performance to align the optical components. Especially, the parasitic motion of focus on the detector gives rise to the fatal distortion of an image profile named the extinction effect while using acousto-optical(AO) deflector. An image profile can be regenerated in CSM with many advantages of non-contact, high speed and high resolution comparatively. In addition to the axial response of the primary focus, the lateral movement of it gives a necessity of the unitary lens to the scanning system. While using the beam deflector, the pupil of beam may be fixed at the nominal position. Furthermore, the use of a deflector may result in ...

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.50-51
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• 2005

• Journal of Welding and Joining
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• v.29 no.1
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• pp.29-32
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• 2011

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.385-386
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• 2008

• Biomedical Science Letters
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• v.18 no.2
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• pp.160-164
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• 2012

The baculovirus/insect cell expression system is of great value for the large-scale production of normal and mutant mammalian passive glucose-transport proteins heterologously for structural and functional studies. In most mammalian cells that express HepG2, this transporter isoform is predominantly located at the cell surface. However, it had been reported that heterologous expression of other membrane proteins using the baculovirus system induced highly vacuolated cytoplasmic membranes. Therefore, how a cell responds to the synthesis of large amounts of a glycoprotein could be an interesting area for investigation. In order to examine the subcellular location of the human HepG2 transport proteins when expressed in insect cells, immunofluorescence studies were carried out. Insect cells were infected with the recombinant baculovirus AcNPVHIS-GT or with wild-type virus at a MOI of 5, or were not exposed to viral infection. A high level of fluorescence displayed in cells infected with the recombinant virus indicated that transporters are expressed abundantly and present on the surface of infected Sf21 cells. The evidence for the specificity of the immunostaining was strengthened by the negative results shown in the negative controls. Distribution of the transporter protein expressed in insect cells was further revealed by making a series of optical sections through an AcNPVHIS-GT-infected cell using a confocal microscope, which permits optical sectioning of cell sample. These sections displayed intense cytoplasmic immunofluorecence surrounding the region occupied by the enlarged nucleus, indicating that the expressed protein was present not only at the cell surface but also throughout the cytoplasmic membranous structures.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.263-268
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• 2004

In the present study, a Nd;YAG Laser (pulse type) was used to emit ultrasonic signals to a test material. In addition, a total ultrasonic investigation system was designed by adopting a Fabry-Perot interferometer, which receives ultrasonic signals without any contact. For non-destructive test SM45C, which contains some flaws was used as a test material. Because it is easy to align light beam in receiver, and the length of the light beam does not change much even if convex mirror leans towards one side, confocal Fabry-Perot interferometer, which has stable frequency, and PI control are used to correct interfered and unstable signals from temperature, fluctuation and time shift of laser frequency. Stable signals are always obtained by the feedback of PI circuit signals in the confocal Fabry-Perot interferometer. The type, size and position of flaws inside the test material were examined by achieving the stabilization of an interferometer. This study presented a useful method, which could quantitatively investigate the fault of objects by using a Fabry-Perot interferometer.

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.39-40
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• 2006

Digital image-projection and several modifications are the classical applications of Digital Micromirror Devices (DMD), however further applications in the field of optical metrology are also available. Operated with certain patterns, a DMD can function, for instance, as an array of pinholes that may substitute the Galvanic mirror or the stage scanning system presently used for 2 dimensional scanning in confocal microscopes. The various process parameters that influence the result of measurement (e.g. pinhole size, lateral scanning pitch and the number of pinholes used simultaneously, etc.) should be configured precisely for individual measurements by appropriately operating the DMD. This paper presents suitable conditions for the diffraction limited analysis between DMD-optics-CCD to achieve the best performance. Also sampling theorem that is necessary for the image acquisition by scanning system is simulated with OPTISCAN which is the simulator based on the diffraction theory.