Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering (Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.17 no.7
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- pp.738-746
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- 2004