• Computers and Concrete
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• 제3권6호
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• pp.401-422
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• 2006

A multi-species model based on the Nernst-Planck equation has been developed by using a finite volume method. The model makes it possible to simulate transport due to an electrical field or by diffusion and to predict chloride penetration through water saturated concrete. The model is used in this paper to assess and analyse chloride diffusion coefficients and chloride binding isotherms. The experimental assessment of the effective chloride diffusion coefficient consists in measuring the chloride penetration depth by using a colorimetric method. The effective diffusion coefficient determined numerically allows to correctly reproduce the chloride penetration depth measured experimentally. Then, a new approach for the determination of chloride binding, based on non-steady state diffusion tests, is proposed. The binding isotherm is identified by a numerical inverse method from a single experimental total chloride concentration profile obtained at a given exposure time and from Freundlich's formula. In order to determine the initial pore solution composition (required as initial conditions for the model), the method of Taylor that describes the release of alkalis from cement and alkali sorption by the hydration products is used here. Finally, with these input data, prediction of total and water-soluble chloride concentration profiles has been performed. The method is validated by comparing the results of numerical simulations to experimental results obtained on various types of concretes and under different exposure conditions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 추계학술대회 논문집 전기물성,응용부문
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• pp.245-247
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• 2002

The paper represents the effects of the drive-in process parameters on the residual stress profile of the p+ silicon film. For the quantitative determination of the residual stress profiles, the test samples are doped via the fixed boron diffusion process and four types of the thermal oxidation processes and consecutively etched by the improved process. The residual stress measurement structures with the different thickness are simultaneously fabricated on the same silicon wafer. Since the residual stress profile is not uniform along the direction normal to the surface, the residual stress is assumed to be a polynomial function of the depth. All of the coefficients of the polynomial are determined from the deflections of cantilevers and the displacement of a rotating beam structure. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual tensile stress decreases. Also, near the surface of the p+ film the residual tensile stress is transformed into the residual compressive stress and its magnitude increases.

• Environmental Analysis Health and Toxicology
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• 제22권2호통권57호
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• pp.129-135
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• 2007

Polycyclic aromatic hydrocarbons(PAHs) have been analyzed to assess vertical distribution of them with different land uses. The soils were collected from three layers; surface $(0{\sim}5cm)$, intermediate $(6{\sim}10cm)$, and deep $(11{\sim}15cm)$ layer, respectively considering land use; paddy, upland, and mountain in each site. Total 89 samples of soil from 10 sites were analyzed. Overall mean of ${\sum}PAHs$ were 137 (range $8.87{\sim}625{\mu}g\;kg^{-1}$), 203 (range $16.5{\sim}645{\mu}g\;kg^{-1}$), and $83.4{\mu}g\;kg^{-1}$ (range $6.65{\sim}667{\mu}g\;kg^{-1}$) for paddy, upland, and mountain soil, respectively. The dominant PAHs were fluoroanthene/benzo(b)fluoroanthene>pyrene>indeno(1, 2, 3-cd) pyrene in paddy, fluoroanthene/pyrene>benzo(b)fluoroanthene>chrysene in upland, and benzo(b)fluoroanthene>pyrene>chrysene in mountain soil, whereas the profile was quite similar for each other except that indeno(1, 2, 3-cd)pyrene and benzo(ghi)perylene are relatively higher in the paddy soils. Although the concentration gradient by depth was not observed in the paddy and upland soils because perturbation of soil layer by tillage, significant decrease was in the deep layer relative to the surface and intermediate layer. However, the concentration gradient of PAHs by soil depth was clearly shown in mountain soil without experiencing disturbance of tillage.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1992년도 제2회 학술발표회 논문개요집
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• pp.17-18
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• 1992

SIMS는 뛰어난 원소검찰감도의 깊이분해능을 가지고 있어서 깊이에 따른 미량불순물 분석에 필수적인 장비이지만, 시료와 불순물의 변화에 따라 이온화율과 깎이는 속도가 달라서 일어나는 matrix effect 때문에 표준시료없이 정량분석을 할 수 없는 문제점이 있다. 이런 SIMS의 단점을 보완하기 위한 방법으로 개발된 여러 가지 SNMS기술중 SIMS에 아무런 기계장치를 덧붙이지 않고도 정량화개선효과를 가져오는 CsX+ SNMS에 대한 연구를 진행하여, 지금까지 밝혀진 실리콘 산화막등에서의 주성분원소 조성비분석을 통해 SNMS기능을 확인하고 SIMS의 주 분석대상인 불순물농도분석에의 적용가능성을 실험해 보았다. 이를 위해 실리콘에 BF2 이온주입후 붕소분포분석시 강한 matrix effect를 나타내는 불소의 효과를 SNMS와 SIMS로 비교하였으며, 검출한계와 dynamic range도 조사하였다. 실험결과 CsX+ SNMS기술은 matrix effect 때문에 실제 분포와 다른 값으로 검출되는 불순물 시료 분석에 적용할 수 있음을 알았다.

• 한국진공학회지
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• 제1권1호
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• pp.115-120
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• 1992

SIMS는 뛰어난 원소검출감도와 깊이 분해능을 가지고 있어서 깊이에 따른 미량불 순물 분석에 필수적인 장비이지만, 시료와 불순물의 변화에 따라 이온화율과 깍이는 속도가 달라서 일어나는 matrix effect 때문에 표준 시료없이 정량분석을 할 수 없는 문제점이 있 다. 이런 SIMS의 단점을 보완하기 위한 방법으로 개발된 여러 가지 SNMS 기술 중 SIMS에 아무런 기계장치를 덧붙이지 않고도 정량화 개선효과를 가져오는 CsX+ SNMS에 대한 연구 를 진행하여, 지금까지 밝혀진 실리콘 산화막 등에서의 주성분원소 조성비분석을 통해 SNMS 기능을 확인하고 SIMS의 주 분석대상인 분순물 농도분석에의 적용가능성을 실험해 보았다. 이를 위해 실리콘에 BF2 이온 주입 후 붕소분포 분석시 강한 matrix effect를 나타 내는 불소의 효과를 SNMS와 SIMS로 비교하였으며, 검출한계와 dynamic range도 조사하였 다. 실험결과 CsX+ SNMS 기술은 matrix effect 때문에 실제분포와 다른 값으로 검출되는 불순물 시료분석에 적용할 수 있음을 알았다.

• Applied Science and Convergence Technology
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• 제26권1호
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• pp.16-19
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• 2017

A thin metal layer of molybdenum is placed between the conventional barrier layer and the stainless steel substrate for investigating the diffusion property of iron (Fe) atoms. In this study, the protection probability was confirmed by measuring the concentration of out-diffused Fe using a SIMS depth profile. The Fe concentration of chromium (Cr) barrier layer with 10 nm molybdenum (Mo) layer is 5 times lower than that of Cr barrier without the thin Mo layer. The insertion of a thin Mo metal layer between the barrier layer and the stainless steel substrate effectively protects the out-diffusion of Fe atoms.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.659-660
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• 2006

High-aspect-ratio(max. 12.5) microchannels with excellent surface quality and good shape uniformity have been realized utilizing laser-induced etching technique. Etch width and depth variations depend largely upon process variables such as laser power and etchant concentration. Etchant concentration in association with viscosity also influence on the cross-sectional profile of the channels. The optimum process conditions for the fabrication of high-aspect-ratio microchannels applicable to micro thermal devices are demonstrated.

• 한국진공학회지
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• 제7권s1호
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• pp.118-122
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• 1998

$Al_2O_x$(0$Al_2O_3$ gradient coatings were formed by evaporating pure aluminium(99.9%) in $O_2$ environment with an IBAD facility, 12keV $Ar^+$ was used to irradiate the coatings simultaneously during the deposition. Sample's composition and depth profile were analysed by RBS and AES measurement, and their microhardness and porosity property were also measured in the experiment. Results show that, the oxygen concentration in the deposited coatings has a nearly linear relationship with the inputting gas flow before $O_2$ partial pressure in the target chamber reaches $1.2\times10^{-3}$ mbar under which stoichiometric $Al_2O_3$ could be formed; and sample's microhardness and porosity property is affected significantly by the oxygen concentration in the coatings.

• 조명전기설비학회논문지
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• 제27권6호
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• pp.95-99
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• 2013

Furnace is currently the most important doping process using POCl3 in solar cell. However furnace need an expensive equipment cost and it has to purge a poisonous gas. Moreover, furnace typically difficult appling for selective emitters. In this study, we developed a new atmospheric pressure plasma source, in this procedure, we research the atmospheric pressure plasma doping that dopant is phosphoric acid($H_3PO_4$). Metal tube injected Ar gas was inputted 5 kV of a low frequency(scores of kHz) induced inverter, so plasma discharged at metal tube. We used the P type silicon wafer of solar cell. We regulated phosphoric acid($H_3PO_4$) concentration on 10% and plasma treatment time is 90 s, 150 s, we experiment that plasma current is 70 mA. We check the doping depth that 287 nm at 90 s and 621 nm at 150 s. We analysis and measurement the doping profile by using SIMS(Secondary Ion Mass Spectroscopy). We calculate and grasp the sheet resistance using conventional sheet resistance formula, so there are 240 Ohm/sq at 90 s and 212 Ohm/sq at 150 s. We analysis oxygen and nitrogen profile of concentration compared with furnace to check the doped defect of atmosphere.

• 한국정밀공학회지
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• 제19권1호
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• pp.186-195
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• 2002

The mechanism of micro machining of reacted layer on silicon surface were proposed. The depth of reacted layer and the change of mechanical property were measured and analyzed. Depth of hydrated layer which is created on the surface of silicon by potassium hydrate was analyzed with SEM and XPS. The decrease of the micro victors hardness of silicon surface was shown with the increase of the concentration of potassium hydrate and the change of the dynamic friction coefficient by chemical reacted layer was measured due to the readiness of machining. The experiment of groove machining was done with 3-axis machine with constant load. With chemical mechanical micro machining the surface crack and burrs generated by both brittle and ductile micro machining were diminished. And the surface profile and groove depth was shown in accordance with the machining speed and reaction time with SEM and AFM.