• Journal of the Semiconductor & Display Technology
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• v.6 no.3
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• pp.19-23
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• 2007

The NiSi is very promising candidate for the metallization in 45 nm CMOS process such as FUSI(fully silicided) gate and source/drain contact because it exhibits non-size dependent resistance, low silicon consumption and mid-gap workfunction. Ni film was first deposited by using ALD (atomic layer deposition) technique with Bis-Ni precursor and $H_2$ reactant gas at $220^{\circ}C$ with deposition rate of $1.25\;{\AA}/cycle$. The as-deposited Ni film exhibited a sheet resistance of $5\;{\Omega}/{\square}$. RTP (repaid thermal process) was then performed by varying temperature from $400^{\circ}C$ to $900^{\circ}C$ in $N_2$ ambient for the formation of NiSi. The process temperature window for the formation of low-resistance NiSi was estimated from $600^{\circ}C$ to $800^{\circ}C$ and from $700^{\circ}C$ to $800^{\circ}C$ with and without Ti capping layer. The respective sheet resistance of the films was changed to $2.5\;{\Omega}/{\square}$ and $3\;{\Omega}/{\square}$ after silicidation. This is because Ti capping layer increases reaction between Ni and Si and suppresses the oxidation and impurity incorporation into Ni film during silicidation process. The NiSi films were treated by additional thermal stress in a resistively heated furnace for test of thermal stability, showing that the film heat-treated at $800^{\circ}C$ was more stable than that at $700^{\circ}C$ due to better crystallinity.

• Journal of The Korean Association For Science Education
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• v.8 no.2
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• pp.17-22
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• 1988

Computer based instruction in the elementary science curriculum will be played an important role through the fifth curriculum reform from the 1989 school year. This is essential for the science instruction because the strategies on the problem-solvings and inquiry approaches can be utilized for the science classroom. Computer education can be thought as the education about the computer and the education using the computer. Of them the education using the computer means the computer assisted instruction(CAI) what is called all the possible activities using the computer in the classroom. Student achievement as the result of CAI depends on the learning activities of students and the instructional techniques and strategies of teachers using the computer. However, computer based education to enhance the student achievement is pointed out the lacks of the standardized Korean alphabet code and the compatibility of qualified software. These problems will be relieved according to the coding for the Korean alphabet of SUPER PILOT program language.

• The Journal of Korean Academy of Prosthodontics
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• v.61 no.4
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• pp.367-378
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• 2023

With the recent development of computer-aided design-computer-aided manufacturing technology and 3D printing technology, and the introduction of various digital techniques, the accuracy and efficiency of top-down definitive prosthetic restoration are increasing. In this clinical case, stable occlusion support was obtained through the placement of a total of 9 maxillary and mandibular posterior implants in patient with anterior-posterior crossed occlusion. The edentulous area of the maxillary anterior teeth, which showed a tendency of high resorption of the residual alveolar bone, was restored with a Kennedy Class IV implant assisted removable partial denture to restore soft tissue esthetics. Computed tomography guided surgery was used to place implants in the planned position, double scan technique was used to reflect the stabilized occlusion in the interim restoration stage to the definitive prostheses, and metal 3D printing was used to manufacture the coping and framework. This clinical case reports that efficient and predictable top-down full mouth rehabilitation was achieved using various digital technologies and techniques.

• International Journal of Control, Automation, and Systems
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• v.4 no.1
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• pp.30-41
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• 2006

The goal of this work is to develop and test a robot-assisted surgery system for spinal fusion. The system is composed of a robot, a surgical planning system, and a navigation system. It plays the role of assisting surgeons for inserting a pedicle screw in the spinal fusion procedure. Compared to conventional methods for spinal fusion, the proposed surgical procedure ensures minimum invasion and better accuracy by using robot and image information. The robot plays the role of positioning and guiding needles, drills, and other surgical instruments or conducts automatic boring and screwing. Pre-operative CT images intra-operative fluoroscopic images are integrated to provide the surgeon with information for surgical planning. Some experiments employing the developed robotic surgery system are conducted. The experimental results confirm that the system is not only able to guide the surgical tools by accurately pointing and orienting the specified location, but also successfully compensate the movement of the patient due to respiration.

• Transactions on Electrical and Electronic Materials
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• v.4 no.6
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• pp.17-20
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• 2003

This paper describes the effect of halogenic gettering during oxide passivation of commercial solar cell with the $N^{+}$-P-$N^{+}$ structure. In order to study the effect of halogenic gettering on $N^{+}$-P-$N^{+}$ structure mono-crystalline silicon solar cell, we performed conventional POCl$_3$ diffusion for emitter formation and oxide passivation in the presence of HCl vapors. The $N^{+}$-P-$N^{+}$ structure based silicon solar cells were found to have higher short circuit current and minority carrier lifetime. Their performance was also found to be superior than the conventional $N^{+}$-P-$N^{+}$ structure based mono-crystalline silicon solar cell. The cell parameters of the $n^{+}$-p-$p^{+}$ and $n^{+}$-p-$n^{+}$ structure based cells, passivated by HCl assisted oxidation were measured. The improvement in $I_{sc}$ was attributed to the effect of the increased diffusion length of minority carriers, which came from the halogenic gettering effect during the growth of passivating oxide. The presence of chlorine caused gettering of the cells by removing the heavy metals, if any. The other advantage of the presence of chlorine was the removal of the diffusion induced (in oxygen environment) stacking faults and line defects from the surfaces of the silicon wafers. All these effects caused the improvement of the minority carrier lifetime, which in-turn helped to improve the quality of the solar cells.

• 한국정보교육학회:학술대회논문집
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• 2010.01a
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• pp.343-346
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• 2010

최근 지능형 교육서비스로봇을 이용한 교육적 효과가 입증되면서, 유치원에 상용화가 시작되었으며, 2010년에는 초등학교 방과후 학교 영어수업을 위한 기술 개발과 필드 적용 연구가 진행되어 로봇보조학습, 즉 서비스로봇에 의한 r-Learning 패러다임의 본격적인 도래를 예고하고 있다. 이에 본 연구에서는 교육용 로봇의 개념과 종류를 정의하고, 관련 연구 동향을 살펴보았다.

• 한국가시화정보학회:학술대회논문집
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• 2003.11a
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• pp.51-54
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• 2003

Fluid is an effective element in computer animation. Recently, the techniques from CFD have been actively applied to CG production. In this paper, we describe our fluid animation system which implements a variety of established simulation and rendering methods. We also explain our new techniques such as chemical reaction and hardware-assisted fluid animation that are being developed to enhance the features of our software system.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2015.10a
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• pp.233-236
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• 2015

전 세계 해기교육기관에서 해사영어(Maritime English, ME)를 가르치고 있는 교원들이 모여 매년 개최하는 IMEC (International Maritime English Conference)을 소개하고, 2015년에 개최된 제27차 컨퍼런스의 프로그램을 우리 회원들에게 안내하고자 하며, IMEC 27에서 소개된 ChatBot를 가지고 참석한 회원들과 함께 진행하는 워크숍을 개최하고자 한다.

• Current Optics and Photonics
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• v.3 no.4
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• pp.292-297
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• 2019

We propose a ring resonator-based orbital angular momentum carrying vortex beam generator design with high vertical directional emission efficiency. By adopting a vertically asymmetric grating structure in the ring resonator, optimized for enhanced vertical emission, an emission efficiency in one direction reaches as high as 78%, exceeding the 50% theoretical limit of previously designed vertically symmetric grating-assisted ring resonator-based structures.

• Proceedings of the Korean Society of Toxicology Conference
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• 2003.10b
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• pp.84-85
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• 2003

The process of drug development has seen major changes over the last two decades with the movement away from standard small molecule drug discovery programs, through computer-assisted drug design methodologies towards biotechnologically derived products. The aim of duplication of endogenously active materials to be administered exogenously has enormous impact on development practices and evaluation of safety.(omitted)