• Journal of the Optical Society of Korea
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• 제12권1호
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• pp.49-51
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• 2008

The wide-band spiral inductor to be monolithically integrated on the AlN substrate as a choking inductor for a compact 10 Gb/s optical transmitter applications is investigated. In order to reduce the parasitic capacitance limiting the choking bandwidth, the AlN substrate is partially etched away, which is analyzed by using an equivalent circuit model. The measured $S_{21}$ transmission response of the fabricated inductor is suppressed as low as -10 dB in the frequency range of 5 to 16 GHz.

• Journal of Magnetics
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• 제19권2호
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• pp.130-139
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• 2014

This paper focuses on the modeling and analysis a novel two-axis rotary normal-stress electromagnetic actuator with compact structure for fast steering mirror (FSM). The actuator has high force density similar to a solenoid, but its torque output is nearly a linear function of both its driving current and rotation angle, showing that the actuator is ideal for FSM. In addition, the actuator is designed with a new cross topology armature and no additional axial force is generated when the actuator works. With flux leakage being involved in the actuator modeling properly, an accurate analytical model of the actuator, which shows the actuator's linear characteristics, is obtained via the commonly used equivalent magnetic circuit method. Finally, numerical simulation is presented to validate the analytical actuator model. It is shown that the analytical results are in a good agreement with the simulation results.

• 대한전자공학회논문지TC
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• 제41권12호
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• pp.125-130
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• 2004

본 논문에서는 EM field 시뮬레이션을 통한 CMOS 공정의 온-칩 직사각형 나선 구조의 인덕터 특성을 보여 주고있다. EM field 시뮬레이션을 위해서 ADS 모멘텀을 사용하였으며, 실제 검증은 하이닉스 0.35㎛ CMOS 공정을 이용하여 인덕터를 제작, 측정하였다. 이 연구에서는 일반 CMOS 공정에서의 전송선로의 넓이, 턴 횟수와 같은 기하학적인 변화에 따른 인덕터의 특성이 조사되었다. 실험과 시뮬레이션 결과는 거의 일치하였으며 5이하의 Q- factor를 가질 때 1nH에서 6nH의 인덕턴스 분포를 가지는 것을 확인할 수 있었다.