• 제목/요약/키워드: Coating Thickness

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원통금형의 전자빔 가공을 위한 PR 코팅 및 측정 팁을 이용한 두께측정 (PR Coating for Electron Beam Lithography of Cylindrical Mold and Measuring Coating Thickness of It using Measuring Tip)

  • 이승우;김정오;서정
    • 한국정밀공학회지
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    • 제29권10호
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    • pp.1144-1148
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    • 2012
  • Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

TiN 이온 플레이팅한 강판의 내식성에 관한 연구(I)-Ti 하지 코팅 및 TiN 코팅 두께의 영향 (Corrosion Behavior of TiN Ion Plated Steel Plate(I)-Effects of Ti interlayer and TiN coating thickness)

  • 연윤모;한전건;김대진;배은현
    • 한국표면공학회지
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    • 제24권1호
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    • pp.34-34
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    • 1991
  • Corrosion behavior of TiN coated steel was studied in terms of thickness of interlayer Ti and TiN coating TiN was are ion plated to a thickness of 1$\mu\textrm{m}$ and 2$\mu\textrm{m}$ respectively with interlayer coating of Ti of 1$\mu\textrm{m}$, 2$\mu\textrm{m}$ and 3$\mu\textrm{m}$. Corrosion resistance of TiN coated steel was evaluated by anodic palarization test in 1N H2SO4 as well as salt spray test. Porosity of each coating was also tested by using SO2 test method. Corrosion current density decreased with increasing TiN coating thickness and Ti interlayer coating markedly enhanced the corrosion resistance. Ti interlayer coating of 2$\mu\textrm{m}$ and 3$\mu\textrm{m}$ prior to 2$\mu\textrm{m}$ TiN coating decreased the corrosion current density of active range by an order of 4 and that of passive range by an order of 2. This improvement was associated with the retardation of corrosive agent penetration with increasing coating thickness and inherent corrosion resistance of Ti interlayer. Ti interlayer coating was also very effective in improvement of corrosion resistance under salt atmosphere.

TiN 이온 플레이팅한 강판의 내식성에 관한 연구(I) - Ti 하지 코팅 및 TiN 코팅 두께의 영향 - (Corrosion Behavior of TiN Ion Plated Steel Plate(I) -Effects of Ti interlayer and TiN coating thickness-)

  • 연윤모;한전건;김대진;배은현
    • 한국표면공학회지
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    • 제25권1호
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    • pp.34-39
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    • 1992
  • Corrosion behavior of TiN coated steel was studied in terms of thickness of interlayer Ti and TiN coating. TiN was arc ion plated to a thickness of 1$\mu\textrm{m}$ and 2$\mu\textrm{m}$ respectively with interlayer coating of Ti of 1$\mu\textrm{m}$, $2\mu\textrm{m}$ and $3\mu\textrm{m}$. Corrosion resistance of TiN coated steel was evaluated by anodic palarization test in 1N $H_2$SO$_4$ as well as salt spray test. Porosity of each coating was also tested by using $SO_2$ test method. Corrosion current density decreased with increasing TiN coating thickness and Ti interlayer coating markedly enhanced the corrosion resistance. Ti interlayer coating of $2\mu\textrm{m}$ and $3\mu\textrm{m}$ prior to $2\mu\textrm{m}$ TiN coating decreased the corrosion current density of active range by an order of 4 and that of passive range by an order of 2. This improvement was associated with the retardation of corrosive agent penetration with increasing coating thickness and inherent corrosion resistance of Ti interlayer. Ti interlayer coating was also very effective in improvement of corrosion resistance under salt atmosphere.

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PE-CVD방법을 이용한 DLC 박막의 기계적특성 평가 (Mechanical Property Evaluation of Diamond-like Carbon Coated by PE-CVD)

  • 강석주;이진우;김석삼
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2003년도 학술대회지
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    • pp.368-376
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    • 2003
  • In this research, DLC thin films are produced as several hundred nm thickness by PE-CVD method. And then these thin films are estimated tribological characteristics to find out useful possibilities as a protecting film for high-quality function and life extension at MEMs by mechanical properties observation . These are measured thickness and residual stress of DLC coating. Compared after measuring friction coefficient, adhesion force, hardness, cohesive force of coating films. As results all test, we can decide several conclusions. First, friction coefficient decreased, as the load increased. otherwise, friction coefficient increased, as thickness of coating film increased under low load$(1\~50mN)$. Secod, adhesion force increased as thickness of coating films. Third, hardness of coating film is affected by substrate coating film when it is less than thickness of 300nm and it has general hardness of DLC coating film when it is more than thickness of 500nm. Fourth, cohesive force of coating film is complexly affected by hardness, adhesion force, residual stress, etc.

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Al-MIS(p-Si) 태양전지의 AR Coating 방법 (On the AR Coating Method of Al-MIS(p-Si) Solar Cel)

  • 엄경숙;백수현
    • 대한전자공학회논문지
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    • 제21권6호
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    • pp.64-69
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    • 1984
  • Al-MIS(p-Si)태양전지의 최대 효율은 Al 박막을 0.6A/sec 이하의 속도로 증착시켜 80Å인 두께가 되었을 때임을 알았다. ZnS와 SiO로 AR coating을 했는데, 단층 피막일때는 각각 570Å과 690Å인 박막 두께에서 최대 Isc를 나타냈다. 이는 quarter-coating 조건인 n1d1=λ/4를 만족함을 알았다. 이중층 피막일 때는 한 층을 단층 피막때의 최적 두께를 유지하면서 다른 한 층을 조절했다. 이때의 최대 Isc는 단층피막일 때와 비슷한 값이었으나 넓은 범위의 두께에서 그 값이 그대로 유지되었다. 한편 dzns/ds10=1.9/2.3=570/690인 관계를 유지하면서 총 두께를 각각의 단층피막때의 최적 두께 합에 대해서 70∼90%로 얇게 했을 때 앞에서 논의한 어떤 경우보다도 20%이상의 더 높은 Isc를 얻을 수 있었다 따라서 높은 효율을 얻으면서 정밀한 두께 조절이 불필요한 새로운 AR coating방법을 얻었다.

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흑연소재가공용 공구의 DLC 코팅두께가 가공특성에 미치는 영향 (Effect on Tooling Characteristics to DLC-coated Thickness of Tool for Graphite Material)

  • 윤재호;김형균;최성대
    • 한국기계가공학회지
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    • 제14권5호
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    • pp.22-27
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    • 2015
  • Processing of low toughness graphite material requires high-speed machine tools and DLC coating. In this study, results of investigation of the tool wear and machining properties of the DLC coating according to the thickness, and the machining time of the tool used for the machining of graphite electrodes, were as follows. 1. DLC coating thickness shows a larger wear amount of the tool center in accordance with thickness; the wear amount of the tool increases in proportion to the machining time. 2. The difference between the amount of wear depending on the processing time shows edge portions larger than the tool wear amount in the center. This amount of wear of the tool edge is formed since the rotating torque is in contact with the graphite material surface significantly more than the central portion. 3. The thicker the DLC coating, the more the coating tool eliminated of the coating area by the interface between the cemented carbide tool being coated with an increased friction of the graphite material and the DLC coating area.

PEMFC 금속분리판의 내식성에 미치는 DLC 코팅층의 두께 및 결함의 영향 (Effects of Thickness and Defects of DLC Coating Layer on Corrosion Resistance of Metallic Bipolar Plates of PEMFCs)

  • 신동호;김성종
    • Corrosion Science and Technology
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    • 제23권3호
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    • pp.235-245
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    • 2024
  • DLC coatings have been widely applied in industrial fields that require high corrosion resistance due to their excellent mechanical characteristics and chemical stability. In this research, effects of DLC coating thickness and defects on corrosion resistance were investigated for application of metallic bipolar plates in polymer membrane electrolyte fuel cells (PEMFCs). Results revealed that a DLC coating thickness of 0.7 ㎛ could lead to a defect size reduction of about 75.9% compared to that of 0.3 ㎛.As a result of potentiodynamic polarization experiments, the current density under a potential of 0.6 V was measured to be less than 1 ㎂/cm2,which was an excellent value. Inparticular, the delamination ratio and the decrease rate of maximum pitting depth were up to 84.8% and 63.3%, respectively, with an increase in the DLC coating thickness. These results demonstrate that DLC coating thickness and defects are factors that can affect corrosion resistance of DLC coating and its substrate.

피스톤 스커트의 코팅두께 예측에 관한 연구 (A Study on the Coating Thickness Prediction of a Piston Skirt)

  • 전상명
    • 한국자동차공학회논문집
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    • 제19권2호
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    • pp.84-91
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    • 2011
  • The purpose of this study is to find how to be formed the wet film thickness during the low friction coating process for a piston skirt with application to the theory of screen printing. In other words, the general expressions predicting the pressure under a blade and the volume of coating fluid passing through the blade edge are derived. Using these expressions, the coating thickness on a piston skirt during a sample blade coating process can be quantitatively assessed.

TiN 이온 플레이팅한 강판의 내식성에 관한 연구(III)-Ni 및 Ti 하지코팅두께의 영향- (Corrosion Behavior of TiN Ion Plated Steel Plate(III)-Effects of Ni and Ti interlayer thickness-)

  • 한전건;연윤모
    • 한국표면공학회지
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    • 제26권2호
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    • pp.55-62
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    • 1993
  • The effect of interlayer coating thickness of Ni and Ti on corrosion behavior was studied for TiN ion plat-ed steel plate. Interlayer coating was carried out in a single and bi-layer to a various thickness combination prior to final TiN coating. Corrosion behavior was evaluated by anodic polarization test in 1N H2SO4 as well as salt spray test. Ni interlayer coating was effectived in reducing corrosion current density of active region and Ti interlayer coating over Ni coating reduced the anodic corrosion current density by an order of 4 with increasing the thickness of Ti up to$ 3\mu\textrm{m}$. The improvement of corrosion resistance by Ni/Ti interlayer coating was attributed to the effective prevention of penetration of active corrosion agent resulting from the inherent corrosion resistance of Ni and Ti. Putting corrosion behavior was observed from salt spray test result for all specimens and corrosion resistance at salt atmosphere was enhanced with increasing Ni and Ti thickness, Cor-lay TiN coating was spalled out by the generation of corrosion products.

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인쇄 롤의 간접식 레이저 가공을 위한 코팅과 에칭 기술 (Coating and Etching Technologies for Indirect Laser processing of Printing Roll)

  • 이승우;김정오;강희신
    • 한국레이저가공학회지
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    • 제16권4호
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    • pp.12-16
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    • 2013
  • For mass production of electronic devices, the processing of the printing roll is one of the most important key technologies for printed electronics technology. A roll of printing process, the gravure printing that is used to print the electronic device is most often used. The indirect laser processing has been used in order to produce printing roll for gravure printing. It consists of the following processing that is coating of photo polymer or black lacquer on the surface of printing roll, pattering using a laser beam and etching process. In this study, we have carried out study on the coating and etching for $25{\mu}m$ line width on the printing roll. To do this goals, a $4{\mu}m$ coating thickness and 20% average coating thickness of the coating homogeneity of variance is performed. The factors to determine the thickness and homogeneity are a viscosity of coating solution, the liquid injection, the number of injection, feed rate, rotational speed, and the like. After the laser patterning, a line width of $25{\mu}m$ or less was confirmed to be processed through etching and the chromium plating process.

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