• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.57-60
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• 2009

The conductive coating method was used for a various industrial fields. For example, Sputtering process is using to a coat of ITO layer in LCD or OLED panel manufacture process and fabricate a base layer of substrate of an electric printing device. However, conventional coating process (beam sputtering, spin coating etc.) has a problems in the industrial manufacturing process. These processes have a very high cost and critical manufacturing environment as a vacuum process. Recently, many researchers were proposed a various printing process instead of conventional coating process. In this paper, we propose an ESD printing process in ITO coating layer and apply to fabricate a conductive coating film. Ours transparent electrode had a surface resistance of about $66{\Omega}/{\square}$ and transparent of 74% in the wavelength of 500nm. This transparent electrode manufacturing process will be applied to Roll-to-Roll process. In addition, we developed roll printing process system for the next generation flexible solar cell.

• 한국산학기술학회논문지
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• 제3권2호
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• pp.115-119
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• 2002

본 연구에서는 자이로 펌프의 내구성 및 내마모성을 향상시키고자 로타와 붓싱 재질 개선방안을 조사하였다. 질화강과 SKD11 합금 부품에 스퍼터링 방법으로 TiN Coating과 가스질화법으로 표면처리를 행하였으며, 기지조직의 개선을 위하여 SKD11 합금의 열처리를 행하였다. 실험결과 TiN Coating부품은 펌프 작동 중 Coating층의 밀착력 부족으로 박리현상이 나타났으나, 가스질화 시 우수한 표면경도와 충분한 경화층으로 뜯김현상이 제거되었다. SKD11 합금의 열처리 탄화물 조절을 위한 SKD11 합금의 열처리 결과 경도가 증가하였다.

• 한국전기전자재료학회논문지
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• 제24권3호
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• pp.219-223
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• 2011

Rhenium-Iridium(Re-Ir) thin films were deposited onto the tungsten carbide(WC) molding core by sputtering system. The Re-Ir films were prepared by multi-target sputtering with iridium, rhenium and chromium as the sources. Argon and nitrogen were inlet into the chamber to be the plasma and reactive gases. The Re-Ir thin films were prepared with targets having atomic percent of 3:7 and the Re-Ir thin films were formed with 240 nm thickness. The Re-Ir thin films on tungsten carbide molding core were analyzed by scanning electron microscope(SEM) and surface roughness. Also, adhesion strength and coefficient friction of Re-Ir thin film were examined. The Re-Ir coating technique has been intensive efforts in the field of coating process because the coating technique and process have been their feature, like hardness, high elasticity, abrasion resistance and mechanical stability and also have been applied widely the industrial and biomedical areas. In this report, tungsten carbide(WC) molding core was manufactures using high performance precision machining and the efforts of Re-Ir coating on the surface roughness.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.135-135
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• 2015

Tubes are of extreme importance in industries as for fluid channels or wave guides. Furthermore, some weapon systems such as cannons use the tubes as gun barrels. To increase the service life of such tubes, a protective coating must be applied to the tubes' inner surface. However, the coating methods applicable to the inner surface of the tubes are very limited due to the geometrical restriction. A small-diameter cylindrical magnetron sputtering gun can be used to deposit coating layers on the inner surface of the large-bore tubes. However, for small-bore tubes with the inner diameter of one inch (~25 mm), the magnetron sputtering method can hardly be accommodated due to the space limitation for permanent magnet assembly. In this study, a new approach to coat the inner surface of small-bore tubes with the inside diameter of one inch was developed. Instead of using permanent magnets for magnetron operation, an external electro-magnet assembly was adopted around the tube to confine the plasma and to sustain the discharge. The electro-magnet was operated in pulse mode to provide the strong axial magnetic field for the magnetron operation, which was synchronized with the negative high-voltage pulse applied to the water-cooled coaxial sputtering target installed inside the tube. By moving the electro-magnet assembly along the tube's axial direction, the inner surface of the tube could be uniformly coated. The inner-surface coating system in this study used the tube itself as the vacuum chamber. The SS-304 tube's inner diameter was 22 mm and the length was ~1 m. A water-cooled Cu tube (sputtering target) of the outer diameter of 12 mm was installed inside of the SS tube (substrate) at the axial position. The 50 mm-long electro-magnet assembly was fed by a current pulse of 250 A at the frequency and pulse width of 100 Hz and 100 usec, respectively. The calculated axial magnetic field strength at the center was ~0.6 Tesla. The central Cu tube was synchronously driven by a HiPIMS power supply at the same frequency of 100 Hz as the electro-magnet and the applied pulse voltage was -1200 V with a pulse width of 500 usec. At 150 mTorr of Ar pressure, the Cu deposition rate of ~10 nm/min could be obtained. In this talk, a new method to sputter coat the inner surface of small-bore tubes would be presented and discussed, which might have broad industrial and military application areas.

• 한국안광학회지
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• 제13권1호
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• pp.53-58
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• 2008

목적: 안경렌즈용 소형 suptter coating system을 설계하고 제작하고자 한다. 방법: sputter system의 target 설계에 있어서 Essential Macleod thinfilm design software를 이용해 AR 코팅과 mirror 코팅이 동시에 설계 가능한 Si target 을 결정하였으며. 그 후 sputtering 장비를 제작하였다. 결과: $SiO_2$와 $Si_3N_4$의 5층 박막으로 구성되는 AR 코팅의 최적조건은 [air|$SiO_2$(81.3)|$Si_3N_4$(102)|$SiO_2$(19.21)|$Si_3N_4$(15.95)| $SiO_2$(102)|glass] 이였다. Mirror 코팅의 경우, blue color 코팅의 최적조건은 [air|$SiO_2$(56.61)|$Si_3N_4$(135.86)|$SiO_2$(67.64)| $Si_3N_4$(55.4)|$SiO_2$ (53.53)|$Si_3N_4$(51.28)|glass] 이고, green color 코팅의 최적조건은 [air|$SiO_2$(66.2)|$Si_3N_4$(22.76)|$SiO_2$(56.58)| $Si_3N_4$(140.35) |$SiO_2$(152.35)|$Si_3N_4$(70.16)|$SiO_2$(121.87)|glass] 이였으며, gold color 코팅의 최적조건은 [air|$SiO_2$(83.59)|$Si_3N_4$(144.86) |$SiO_2$(11.82)|$Si_3N_4$(129.93)|$SiO_2$(90.01)|$Si_3N_4$(88.37)|glass] 이였다. 결론: 코팅 시간을 줄여 안경단가를 줄이기 위하여 안경렌즈 코팅 시 렌즈의 전 후면을 동시에 코팅을 해야 하기 때문에 sputtering장비 설계를 할 때 안경렌즈 전면과 후면에 동일하게 Si target을 갖춘 cathode를 사용하였고, 렌즈의 곡률을 고려하여 각 층이 동일하게 코팅이 되어야 하기 때문에 target-substrate 간의 간격은 12.5 cm에서 20 cm로 가변할 수 있도록 설계하고 제작하였다. 고품질의 안경렌즈 코팅을 위하여 고진공 펌프로 turbo pump를 이용하였으며, 코팅박막의 균일함을 얻기 위해서 치구를 회전할 수 있도록 설계하고 제작하였다.

• 한국표면공학회지
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• 제39권2호
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• pp.70-75
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• 2006

As technology advances, there is a demand for development of hard, solid lubricant coating. (Ti,Cr)N-$MoS_2$, films were deposited on SKD 11 tool steel substrate by co-deposition of $MoS_2$, with (Ti,Cr)N using a D.C. magnetron sputtering process. The influence of the $N_2/Ar$ gas ratio, the deposition temperature, the amount of $MoS_2$ in the films, and the bias voltage on the mechanical and the structural properties of the films were investigated. Wear tests were performed on the films deposited in various conditions.

• 한국정밀공학회지
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• 제26권9호
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• pp.121-126
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• 2009

Stainless steel 316L (STS 316L) is widely used as a material of biopsy needle. However it has a side effect that tissue can be damaged by electrochemical operation between tissue and STS 316L. Many studies have been made on the ceramic coating of biopsy needle to reduce the side effect. In this study, STS 316L was coated with three bioceramics, $Al_2O_3$, $SiO_2$ and $ZrO_2$ using a RF magnetron sputtering method. The effects of ceramic coating on the electrical conductivity and coating strength of ceramic-coated STS 316L were investigated. The results showed that the electrical conductivity of ceramic-coated STS 316L was much lower than that of uncoated STS 316L. The coating strength of $ZrO_2$-coated STS 316L was 30% and 70% higher, respectively than those of $Al_2O_3$-coated STS 316L and $SiO_2_3$-coated STS 316L.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.189-189
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• 2003

WO$_3$ 박막은 H$^{+}$이온이나 Li$^{+}$ 이온과 반응하여 H$_2$WO$_4$나 Li$_{x}$WO$_{3+x}$의 화합물을 이루고 파란색을 나타내는 효과를 보인다. 이러한 효과를 전기변색 (electrochromic) 효과라 한다. 이러한 전기변색효과를 이용하여 건축물의 창문을 통하여 들어오는 태양에너지와 빛의 양을 조절하는 윈도우를 제작하려는 국가적인 프로젝트가 미국, EU, 일본 등의 선진국에서 활발하게 진행되고 있다. WO$_3$ 박막을 제조하는 방법으로는 sputtering, CVD, 그리고 sol-gel coating 법 등이 있다. sputtering이나 CVD의 경우는 매우 균일하고 전기변색 특성이 좋은 박막을 제조할 수 있는 이점이 있지만 장치의 제조비가 비싸고 대형 패널을 제작하는 데에는 어려움이 있다. 솔-젤 코팅의 경우는 WO$_3$의 전구체인 솔을 합성하고 bath에 솔을 넣은 후 코팅하고자 하는 글라스 기판을 담갔다가 꺼내어 건조하고 열처리하는 간단한 방법으로 제조할 수 있는 장점이 있다. 솔-젤 코팅의 경우 제조비가 값싸고 대면적 코팅이 용이하다는 점이 다른 코팅 방법에 비하여 장점이라고 한 수 있다.다.다.

• 한국세라믹학회지
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• 제54권1호
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• pp.38-42
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• 2017

Vanadium nitride (VN) coatings were deposited using inductively coupled plasma (ICP) assisted sputtering at different ICP powers. Microstructural, crystallographic and mechanical characterizations were performed by FE-SEM, AFM, XRD and nanoindentation. The results show that ICP has significant effects on coating's microstructure, structural and mechanical properties of VN coatings. With an increase in ICP power, coating microstructure evolved from a porous columnar structure to a highly dense one. Single- phase cubic (FCC) VN coatings with different preferential orientations and residual stresses were obtained as a function of ICP power. Average crystal grain sizes of single phase cubic (FCC) VN coatings were decreased from 10.1 nm to 4.0 nm with an increase in ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained in the VN coating sputtered at ICP power of 200 W.

• 한국표면공학회지
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• 제46권2호
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• pp.55-60
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• 2013

Superhard TiN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 300 W, on coating microstructure, preferred orientation mechanical properties were systematically investigated with HR-XRD, SEM, AFM and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of TiN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Grain sizes of TiN coatings were decreased from 12.6 nm to 8.7 nm with increase of ICP power. The maximum nanohardness of 67.6 GPa was obtained for the coatings deposited at ICP power of 300 W. Preferred orientation in TiN coatings also vary with ICP power, exerting an effective influence on film nanohardness.