• 한국재료학회지
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• 제13권5호
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• pp.279-284
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• 2003

The $CoSi_2$ process is widely employed in a salicide as well as an ohmic layer process. In this experiment, we investigated the characteristics of $CoSi_2$ films by combinations of I-type (TiN 100$\AA$/Co 150$\AA$), II-type(TiN 100$\AA$/Co 150$\AA$/Ti 50$\AA$), III-type(Ti 100$\AA$/Co 150$\AA$/Ti 50$\AA$), and IV-type(Ti 100$\AA$/Co 150$\AA$/Ti 100$\AA$). Sheet resistances of $CoSi_2$ show the lowest resistance with 2.9 $\Omega$/sq. in a TiN/Co condition and much higher resistances in conditions simultaneously applying Ti capping layers and Ti interlayers. Though we couldn't observe a $CoSi_2$roughness dependence on the film stacks from RMS values, Ti capping layers turned into 78∼94$\AA$ thick TiN layers of (200) preferred orientation at $N_2$ambient. In addition, Ti interlayers helped to form the epitaxial $CoSi_2$with (200) preferred orientation and ternary compounds of Co-Ti-Si. We propose that film structures of II-type and III-type may be appropriate in the salicide process and the ohmic layer process from the viewpoint of Co diffusion kinetics and the CoSi$_2$epitaxy.

• 자연과학논문집
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• 제4권
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• pp.85-93
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• 1991

$BaCO_3$와 $TiO_2$ 등 mole비 혼합물의 고상반응은 $BaCO_3 + TiO_2\longrightarrow$ $BaTiO_3 + CO_2$의 반응식에 따라 $CO_2$ gas가 발생된다. 이 분해과정을 DTA-TG를 사용하여 속도론적으로 고찰하였다. 그 결과는 다음과 같다. 1. $TiO_2$와 공존하는 $BaCO_3$는 순수한 $BaCO_3$보다 낮은 온도에서 분해된다. 그 이유는 생성물의 free energy가 감소되기 때문이다. 2. $BaCO_3$ 분해과정의 속도론적 고찰에 사용되는 식은 Jander's식보다는 Carter's식이 더욱 의미가 있으며 Carter's식에 의해 구해진 분해 활성화 에너지는 42.8Kcal/mol이다.

• 한국환경과학회지
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• 제17권8호
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• pp.933-941
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• 2008

The formation of $Co_nTiO_{n+2}$ compounds, i.e., $CoTiO_3$ and $CO_2TiO_4$, in a 5wt% $CoO_x/TiO_2$ catalyst after calcination at different temperatures has been characterized via scanning electron microscopy (SEM), Raman and X-ray photoelectron spectroscopy (XPS) measurements to verify our earlier model associated with $CO_3O_4$ nanoparticles present in the catalyst, and laboratory-synthesized $Co_nTiO_{n+2}$ chemicals have been employed to directly measure their activity profiles for CO oxidation at $100^{\circ}C$. SEM measurements with the synthetic $CoTiO_3$ and $CO_2TiO_4$ gave the respective tetragonal and rhombohedral morphology structures, in good agreement with the earlier XRD results. Weak Raman peaks at 239, 267 and 336 $cm^{-1}$ appeared on 5wt% $CoO_x/TiO_2$ after calcination at $570^{\circ}C$ but not on the catalyst calcined at $450^{\circ}C$, and these peaks were observed for the $Co_nTiO_{n+2}$ compounds, particularly $CoTiO_3$. All samples of the two cobalt titanate possessed O ls XPS spectra comprised of strong peaks at $530.0{\pm}0.1$ eV with a shoulder at a 532.2-eV binding energy. The O ls structure at binding energies near 530.0 eV was shown for a sample of 5 wt% $CoO_x/TiO_2$, irrespective to calcination temperature. The noticeable difference between the catalyst calcined at 450 and $570^{\circ}C$ is the 532.2 eV shoulder which was indicative of the formation of the $Co_nTiO_{n+2}$ compounds in the catalyst. No long-life activity maintenance of the synthetic $Co_nTiO_{n+2}$ compounds for CO oxidation at $100^{\circ}C$ was a good vehicle to strongly sup port the reason why the supported $CoO_x$ catalyst after calcination at $570^{\circ}C$ had been practically inactive for the oxidation reaction in our previous study; consequently, the earlier proposed model for the $CO_3O_4$ nanoparticles existing with the catalyst following calcination at different temperatures is very consistent with the characterization results and activity measurements with the cobalt titanates.

• 한국분말재료학회지
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• 제10권4호
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• pp.281-287
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• 2003

Ultrafine TiC-15%Co powders were synthesized by a thermochemical process, including spray drying, calcination, and carbothermal reaction. Ti-Co oxide powders were prepared by spray drying of aqueous solution of titanium chloride and $Ti(OH)_2$ slurry, both containing cobalt nitrate, fellowed by calcination. The oxide powders were mixed with carbon powder to reduce and carburize at 1100~125$0^{\circ}C$ under argon or hydrogen atmosphere. Ultrafine TiC particles were formed by carbothermal reaction at 1200~125$0^{\circ}C$, which is significantly lower than the formation temperature (~1$700^{\circ}C$) of TiC particles prepared by conventional method. The oxygen content of TiC-15%Co powder synthesized under hydrogen atmosphere was lower than that synthesized under argon, suggesting that hydrogen accelerates the reduction rate of Ti-Co oxides. The size of TiC-15%Co powder was evaluated by FE-SEM and TEM and Identified to be smaller than 300 nm.

• 멤브레인
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• 제25권2호
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• pp.191-201
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• 2015

$TiCo_xFe_{1-x}$(x=0.50~1.00)계 합금을 제조하고, 합금의 특성을 X-ray diffractometer (XRD), pressure composition temperature (PCT)곡선, scanning electron microscopy (SEM)에 의해 조사하였고, $TiCo_xFe_{1-x}$(x=0.50~1.00)-stainless steel (SS) 복합막에 대해 $H_2-N_2$ 혼합기체분리실험을 하였다. X-선 회절분석에 의하면 $TiCo_xFe_{1-x}$(x=0.50~1.00)계 합금의 결정구조는 TiCo와 같은 입방정구조이었다. $TiCo_xFe_{1-x}$(x=0.50~1.00)계 합금은 $120^{\circ}C$에서 hysteresis현상을 나타내었고, 합금 중 Fe의 양이 증가함에 따라 x=0.90~1.00과 0.50~0.55 범위에서는 hysteresis가 증가하였고, x=0.55~0.90 범위에서는 감소하였다. 가장 작은 hysteresis를 나타낸 합금은 $TiCo_{0.55}Fe_{0.45}$이었다. $120^{\circ}C$에서 $TiCo_xFe_{1-x}$(x=0.50~1.00)-SS 복합막의 수소투과압력의 최저값은 $TiCo_{0.55}Fe_{0.45}$에서 2.5 atm을 나타내었고, 최대값은 $TiCo_{0.90}Fe_{0.10}$에서 10 atm을 나타내었다. $TiCo_xFe_{1-x}$(x=0.50~.00)-SS 복합막에 의하여 $120^{\circ}C$에서 $H_2-N_2$ 혼합기체를 분리하는 경우, 가장 우수한 복합막은 고압부의 수소투과압력이 2.5 atm으로 가장 낮고, hysteresis가 가장 작은 $TiCo_{0.55}Fe_{0.45}$-SS 복합막이었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.465-469
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• 1997

In this paper, shape memory compsites are made by powder metallurgy. And then, an self-strengthening effect of the composites by shape memory effect above inverse transformation temperature A/sab f/ of TiNi alloy discussed. Moreover, TiNiCo/Al composite is made by using TiNiCo alloy as fiber. And it is discused aboutaffection of Co in the shape memory composite. The results of the intelligent properties of TiNi/Ai-radical shape memory composite, using SMA, by powder metallurgy are the tensile strength of TiNiCo wire is much higher than that of TiNi wire. and the strength of TiNiCo/Al composite is generally higher than that TiNi/Al composite.

• 한국세라믹학회지
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• 제20권1호
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• pp.43-48
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• 1983

The formation of strontium titanate from several molar $SrCO_3$ and $TiO_2$ mixtures was studied in air and $CO_2$ gas Mixtures of $SrCO_3$ and $TiO_2$ were heated in air at 400-$600^{\circ}C$ DTA-TG was used to obtain thermal histories of simples heated in air and $CO_2$ gas. X-ray diffraction analysis was used to determine both the phase composition and the amounts of each phase present. The phase relationship of various compounds $SrTiO_3$, $Sr_2TiO_4$, $Sr_2Ti_3O_7$ and $Sr_4Ti_3O_{10}$ formed by the sintering in each composition was shown by the calibration curves. High temperature X-ray analysis was used to determine both the formation process and deformation process of each products. Small amount of SrTiO3 is formed first at the surface af contact SrTiO3 reacts with $SrCO_3$ to form Sr2TiO4 this is affected on the $CO_2$ pressure.

• 한국재료학회지
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• 제8권7호
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• pp.579-583
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• 1998

P가 고농도로 도핑된 다결정 Si 기판 위에 Co/Ti 이중층막을 스퍼터 증착하고 급속열처리함으로써 얻어지는 실리사이드 층구조, 실리사이드막의 응집, 그리고 도펀트의 재분포 등을 단결정 Si 기판 위에서의 그것들과 비교하여 조사하였다. 다결정 Si 기판위에 형성한 Co/Si 이중층을 열처리할 때 단결정 기판에서의 경우보다 $CoSi_2$로의 상천이는 약간 더 낮은 온도에서 시작되며, 막의 응집은 더 심하게 일어난다. 또한, 다결정 Si 기판내의 도펀트보다 웨이퍼 표면을 통하여 바깥으로 outdiffusion 함으로써 소실되는 양이 훨씬 더 많다. 이러한 차이는 다결정 Si 내에서의 결정립계 확산과 고농도의 도펀트에 기인한다. Co/Ti/doped-polycrystalline si의 실리사이드화 열처리후의 층구조는 polycrystalline CoSi2/polycrystalline Si 으로서 Co/Ti(100)Si을 열처리한 경우의 층구조인 Co-Ti-Si/epi-CoSi2/(100)Si 과는 달리 Co-Ti-Si층이 사라진다.

• 한국세라믹학회지
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• 제24권5호
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• pp.484-490
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• 1987

Diffusion coupling experiment was done to study expansion of body and soild reaction in BaCO3-TiO2 system. Specimen of BaCO3 and TiO2 was formed with Pt-mark's method. Each specimen was fired at interval of 25℃ from 900℃ to 1000℃ for 2hrs. After that, specimen was fixed with resin and polished. Product layers of specimen were observed with SEM and EDS. The result were following; 1. Diffusion component is Ba2+, which diffuse toward TiO2. 2. Large crack between layer of BaCO3 and Ba2TiO4 was generated because of difference of thermal expansion coefficient. 3. Ba2TiO4 is formed to TiO2 body by the reaction of BaTiO3 and BaO and its structure is very porous. 4. BaTiO3 changes immediately to Ba2TiO4 by the reaction of BaO. But BaTiO3 which formed by the reaction of TiO2 and Ba2TiO4 exsists as layer because the diffusion distance of Ba2+ is far.

• 한국자기학회지
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• 제18권4호
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• pp.131-135
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• 2008

Full-Heusler 화합물인 $Co_2TiSn$(001) 표면의 전자구조, 자성 및 반쪽금속성을 일반기울기근사(GGA)를 채택한 총퍼텐셜선형보강평면파동(FLAPW)방법을 이용하여 이론적으로 연구하였다. $Co_2TiSn$ 화합물의 (001)방향에서 2가지 가능한 표면, 즉 Co 원자들로 끝나는 면(Co-term)과 TiSn 원자들로 끝나는 면(TiSn-term)을 고려하였다. 계산된 상태밀도로부터 Co-term의 표면에서는 반쪽금속성이 깨어졌지만 TiSn-term의 표면에서는 반쪽금속성이 유지됨을 알 수 있었다. Co-term의 경우 표면 Co 원자의 좌표수가 줄어들면서 Co 원자의 채워진 소수 스핀 d-상태가 높은 에너지 영역으로 이동하여 페르미에너지에 걸치면서 반쪽금속성이 깨어진다. TiSn-term에서는 표면상태가 페르미에너지 바로 아래에 위치하면서 소수 스핀 띠간격이 가운데 층에 비하여 많이 줄어들었다. Co 원자의 자기모멘트는 Co-term의 표면에서는 내부 층에 비하여 약 10 % 증가한 1.16 ${\mu}_B$의 값을 가지는 반면 TiSn-term의 표면 바로 아래층에서는 내부 층과 비슷한 값(1.03 ${\mu}_B$)을 가졌다.