• 대한설비공학회지:설비저널
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• 제14권3호
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• pp.236-241
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• 1985

• 설비공학논문집
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• 제25권1호
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• pp.7-13
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• 2013

Bio Clean Room(BCR) and pharmaceutical product manufacturing facilities require careful assessment of many factors, including HVAC, controls, room finishes, process equipment, room operations, and utilities. Flow of equipment, personnel, and product must also be considered along with system flexibility, redundancy, and maintenance shutdown strategies. It is important to involve designers, operators, commissioning staff, quality control, maintenance, constructors, validation personnel, and the production representative during the conceptual stage of design. Critical variables for room environment and types of controls vary greatly with the clean space's intended purpose. It is particularly important to determine critical parameters with quality assurance to set limits and safety factors for temperature, humidity, room pressure, and other control requirements. In this paper, oxygen cluster ion equipment was utilized in order to enhance the indoor air quality and to prevent the airborne infection of ward in hospital. Moreover, the performance test of the equipment was also performed in order to develop the optimal sterilization system of BCR using the equipment.

• 한국안전학회지
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• 제21권5호
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• pp.46-52
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• 2006

The purpose of this paper is to investigate the removal efficiency of fine dusts as the configuration condition of machinery and equipments in Clean Room and to analyze the flowing behaviors of fine dusts as the layout of Clean Room. The layout of the Clean Room was classified into side layout type, 2 center line type and center concentration type layout, and the flow rates used in this research were 0.22m/s, 0.44m/s and 0.80m/s. Dust removal efficiency as layout change was decreased 37% for side layout type, 31% for 2 center line type and 20% for center concentration type layout at the flow rate of 0.22m/s, compared with the state without machinery and equipments in Clean Room. The efficiency was decreased 42% for side layout type, 22% for 2 center line type and 8% for center concentration type layout at the flow rate of 0.44m/s, and decreased 20% for side layout type, 18% for 2 center line type and 10% for center concentration type layout at the flow rate of 0.80m/s. According to the result of dust removal behavior, $0.3{\mu}m,\;1{\mu}m\;and\;3{\mu}m$ dust except for $5{\mu}m$ showed the higher change of the behavior in side layout type than in center concentration type layout due to the change of air flow. It was confirmed that removal behavior depends on the layout of machinery and equipments as the dust size decreases.

• 한국가스학회지
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• 제25권6호
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• pp.35-44
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• 2021

반도체 공정 중 PR (Photo Resist) 공정은 여러 인화성 물질을 혼합하여 사용하는 공정으로, 공정 장비가 Clean Room 내 설치되어 인화성 물질이 누출되는 경우 질식, 화재, 폭발 사고로 이어질 위험성이 크므로, 물질 누출시 발생할 수 있는 사고에 대한 영향을 분석하고, 작업자들의 안전을 보장할 수 있는지 평가하는 것이 필요하다. 본 연구는 FLACS CFD - Fire Module을 이용하여 10개의 누출, 화재 시나리오에 대한 CFD Simulation을 통해 Clean Room 내부 가상으로 설정한 Monitor Point에서의 복사열 및 온도 변화 값을 확인하였다. Clean Room 내부에서 발생한 화재는 층간 구조물에 높은 복사열을 전달하지만, 그 범위가 상당히 제한적이며, 단일 화재 사고로 인해 붕괴될 가능성이 희박하다. 화재 사고로 인해 탈출구로 이어지는 2 곳의 계단이 동시에 높은 복사열에 노출되는 시나리오는 없어, 화재 발생시 작업자가 탈출 가능하였다. 또한 복사열 및 온도 상승의 수준은 아래층으로 이동하면서 급격하게 낮아지는 것을 확인하였으며, API 520의 기준에 따라 작업자가 30초 동안 버틸 수 있는 복사열인 6.31 kW/m²에 노출된 작업자도 화재가 발생한 Clean Room 내부에서 충분히 탈출할 수 있음을 확인하였다.

• KIEAE Journal
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• 제13권4호
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• pp.63-68
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• 2013

On the electricity consumption in Korea, the lighting sector takes about 17% of annual total electricity consumptions. In the midst of higher interests on energy conservation measures, design and choice of energy-saving lighting fixtures have been more important. With growth of technology-intensive industries like advanced material, semiconductor, and biotechnology from the 1980s, needs for clean room and thus illumination at clean rooms have been increased. In this paper, development, specification, and features of a Teardrop LED(hereinafter TD LED) lighting fixture as replacement of Teardrop florescent lighting one that has been popularly installed at clean rooms were presented. Also we performed the economic analysis of return on investment(ROI) about energy savings by the installation of the TD LED lighting fixture at a new-built clean room. The economic analysis showed that the new-developed TD LED lighting fixture would be able to withdraw the initial installation cost within 4 years. Lastly, improvement directions and development plans of the next TD LED lighting fixture for wider applications at clean rooms were described.

• 에너지공학
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• 제24권3호
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• pp.122-127
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• 2015

본 연구에서는 클린룸에서의 3차원 유동해석을 수행하였다. 로봇실험 장치에서 로봇의 움직임에 의해 형성되는 유동장에 대한 수치적인 분석을 본 연구에서는 다루고 있으며, 클린룸에서 로봇의 움직임에 대한 영향을 분진이 쌓이는 영역을 찾기 위해서 진행된다. 다관절 로봇의 움직임에 의해 생성되는 바닥 표면의 분진은 유동장 분석에 의해 예측될 수 있으며, 해석결과는 커다란 스월유동이 움직이는 로봇 주위에서 생성된다고 분석된다. 따라서, 가장 바람직한 유동 조건은 공기의 입구와 출구부의 위치를 다시 정하여 유동속도를 변화시키면서 검토해야 한다.

• 대한기계학회논문집
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• 제10권6호
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• pp.852-860
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• 1986

본 연구에서는 청정실 내부에 하나의 작업대가 유동을 방해하고 있으며, 출구 공기덕트가 2개이기 때문에 출구의 평균압력조건은 주어지나 출구속도의 경계조건이 간단히 기술되지 않는 청정실내에서 유동을 예측하고자 하였으며, 수치계산상의 구체 적인 방법을 논하였다. 그 결과로서 작업대 위치 및 각 출구에서의 압력조건에 따른 유동장의 형태 및 각 출구에서의 유출유량 비율등을 논하였다.

• 설비공학논문집
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• 제21권5호
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2540-2543
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• 2008

Liquid crystal displays (LCD's) are continuously coated with some chemicals in the clean room of a factory. Spreading of these chemicals is causing serious problems both in controlling clean room quality as well as to the workers inside the factory. It is required to alleviate or properly control the offensive odor which is mainly composed of propylene glycol mono ethyl acetate, novolak resin and photo active compound. The control strategy employed is to bleed the offensive odor gas out the clean room. A full scale 3D CFD model was created with anisotropic porous media, chemical species transport with no volumetric reaction, and thermal diffusion with propane gas (tracer gas) to simulate the odor spreading. A segregated implicit solver with standard k-$\varepsilon$ model is employed. The detailed CFD analysis made it possible to develop an effective method of ventilating the coater room and optimizing their capacities.

• 한국방재학회 논문집
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• 제1권1호
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• pp.157-163
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• 2001

본 연구의 목적은 청정실 내부에서 가상의 화재가 발생할 경우 화재 확산 및 연기의 전파 현상을 예측하기 위하여 실시하였다. 청정실 내의 화재로 인한 온도 및 속도분포의 해석은 유한체적법을 이용한 수치적 방법으로 해석하였으며 난류유동장의 계산은 표준 $k-{\varepsilon}$ 모델을 적용하여 실시하였다. 본 연구 결과는 화재발생 후 150초가 지난 후에는 화재가 완전히 성장한 것으로 나타났으며 이 경우 환기장치는 화재가 완전히 성장한 후에 정지하는 것으로 가정하였다. 연기의 질량분율은 온도 분포와 거의 유사한 것으로 나타났다. 따라서 청정실에서 화재가 발생할 경우 화재 성장이 60초 내에 전공간의 $20{\sim}30%$까지 확산되므로 내부에 있는 사람은 30초 이내에 대피하는 것이 바람직하다.