• Journal of Adhesion and Interface
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• v.21 no.4
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• pp.162-167
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• 2020

The skin-inspired multimodal soft sensors have been developed through multidisciplinary approaches to mimic the sensing ability with high sensitivity and mechanical durability of human skin. For practical application, although the stimulus discriminability against a complex stimulus composed of various mechanical and thermal stimuli experienced in daily life is essential, it still shows a low level actually. In this paper, we first introduce the operating mechanisms and representative studies of the unimodal soft sensor, and then discuss the recent research trend in the multimodal soft sensors and the stimulus discriminability.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3413-3417
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• 2007

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.811-813
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• 2005

Purpose-built ink jet printheads are being recognized as useful tools in manufacturing where precision deposition is required. Ink jet technology is a non-contact, non-contaminating digital process compatible with clean rooms. New manufacturing applications are driving printhead designs to smaller drops, increased productivity. This paper describes Dimatix's new tools designed to facilitate development of manufacturing processes for both rigid and flexible substrates and development of new electronic fluids.

• Korean Journal of Materials Research
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• v.13 no.1
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• pp.64-68
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• 2003

The 1.6 vol% and 2.5 vol% TiNi/6061Al composites were fabricated by permanent mold casting for investigating the effect of heat treatment on tensile strength for composites. The tensile strength without T6 treatment at 293 K was increased with increasing the volume fraction of TiNi fiber and at 363 K the higher the pre-strain, the higher the tensile strength. The tensile strength of the composite with $T_{6}$ treatment at 293 K was found to increase with increasing both the amount of pre-strain and the volume fraction of TiNi fiber and was higher than that without $T_{6}$ treatment. It should be noted that the tensile strength 2.5vol%TiNi/6061Al composites rolled at a 38% reduction ratio was the maximum value of 298 MPa. The tensile strength of composites decreased with increasing the reduction ratio over 38% because of the rupture of TiNi fiber.

• Clean Technology
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• v.14 no.4
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• pp.275-280
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• 2008

In this study, we carry out economic and technical feasibility study for treatment process of waste solvent such as SD waste solution and stripper solution from LCD manufacturing process. Extensive screening work has been done for selecting the best extraction solvent. As a result, it is shown that $CHCl_3$ is the most adequate extraction solvent for separation and recovery of both SD waste solvent and stripper waste. Rigorous simulation study has been carried out for extraction process and distillation process as a candidate of waste solvent treatment. The result shows that the solvent extraction process is more beneficial than the simple distillation process.

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.144-149
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• 2022

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C₄F₉OC₂H₅) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.520-526
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• 2009

This study proposed the optimum design values for the biological clean room system observing the regulations of Hazard Analysis Critical Control Point (HACCP). Even though the standard for industrial clean room system has been well established, the basis for biological food clean room system is the first stage. In order to prevent the contaminations in advance for food storages, processes, and distributions, the criterion of Hazard Analysis Critical Control Point is positively required. This study also suggested the possible ways of how to avoid the hazardous contaminations.

• Clean Technology
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• v.2 no.2
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• pp.90-99
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• 1996

Being confronted with the 21th century at hand, a paradigm shift has been a common topic for development in many fields. Among these, a concept of sustainable development is the most important one to resolve conflict and nurture mutualism between science/technology(SCI/TEC) and society/environment(SOC/ENV). Looking briefly over the resent stats of the chemical industry in Japan, in this paper, we will introduce a research program named simple chemistry as an example for such a challenge.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.5
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• Air Cleaning Technology
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• v.23 no.3
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• pp.1-9
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• 2010

This study proposed the optimum design values for the biological clean room system observing the regulations of Hazard Analysis Critical Control Point (HACCP). Even though the standard for industrial clean room system has been well established, the basis for biological food clean room system is the first stage. In order to prevent the contaminations in advance for food storages, processes, and distributions, the criterion of Hazard Analysis Critical Control Point is positively required. This study also suggested the possible ways of how to avoid the hazardous contaminations.