• 한국전기전자재료학회논문지
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• 제11권7호
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• pp.517-521
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• 1998

After etching Al-Cu alloy films using $SiCl_4/Cl_2/He/CHF_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS(X-ray pheotoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, $CHF_3$ plasma treatment subsequent to the etch has been carried put. A passivation layer is formed by fluorine-related compounds on the etched Al-Cu surface after $CHF_3$ treatment, and the layer suppresses effectively the corrosion on the surface as the $CHF_3$treatment in the pressure of 300m Torr.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.383-386
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• 1998

After etching Al-Cu alloy films using SiC1$_4$/Cl$_2$/He/CHF$_3$ plasma, a corrosion phenomenon on the metal surface has been studied with XPS (X-ray photoelectron spectroscopy) and SEM (Scanning electron microscopy). In Al-Cu alloy system, the corrosion occurs rapidly on the etched surface by residual chlorine atoms. To prevent the corrosion, CHF$_3$ plasma treatment subsequent to the etched has been carried out. A passivation layer is formed by fluorine-related compounds on the etched Al-Cu surface after CHF$_3$ and SF$_{6}$ treatment, and the layer supresses effectively the corrosion on the surface as the CHF$_3$ and SF$_{6}$ treatment pressure increases. The corrosion could be suppressed successfully with CHF$_3$ and SF6 treatment in the pressure of 300mTorr.orr.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.1-6
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• 2003

Flow modulation chemical vapor deposition process has been reported as an alternative way to obtain low resistivity, low residual chlorine content and good step-coverage titanium nitride film. Flow and concentration characteristics in a vertical FMCVD reactor are analyzed by using computational fluid dynamics method. The results show that 1.0 second as Cl reduction period is too short and there is still $TiCl_4$ gas above the holder at the end of the period. Time variation of $TiCl_4$ gas concentration on the holder shows that at least 3.0 second is necessary as Cl reduction time for the sake of film characteristics.

• 한국환경보건학회지
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• 제23권4호
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• pp.67-72
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• 1997

To evaluate the effectiveness of water treatment using nanofiltration, ultrafiltration, and microfiltration systems, tapwater contaminated by bacteria and nitrate nitrogen was filtered, and then the rates of removal for many kinds of contaminants were comp.ared and investigated. The rates of turbidity removal by these systems are around 80% all of them. However, nanofiltration system is the most effective as hardness removal is 80%, suspended solids 90%, total residual chlorine 90% and nitrate nitrogen 69%. Among nanofiltration, ultrafiltration and microfiltration systems, nanofiltration system is the most stable in flow rate of permeate. Comparing hollow and spiral type of ultrafiltration, microfiltration each, spiral type is more stable than hollow type owing to rinsing effect of brine. The values of pH in ultrafiltration and microfiltration systems are between 7, 0 and 7.5, and that of nanofiltration system is low to 6.2-7.0. The effectiveness of heterotrophic bacteria removal is the most excellent in the nanofiltration system.

• 상하수도학회지
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• 제11권3호
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• pp.96-104
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• 1997

In-pipe formation of THM in water distribution systems was simulated by using the continuously and easily measurable parameters such as water temperature, residual chlorine and soluble organic compounds. The concentration of miscellaneous organics which could be the precuror of THM, was measured and represented as the absorbance of ultraviolet at wave length 260 nm. As the results, the developed equation in this study showed a more reliability on the change of THM than the normally regressed equation. In addition, the simulation was successfully fitted in the actual water treatment and distribution systems. Of the THM components, dibromochloromethane was the main cause dropping the overall reliability in the simulation.

• Journal of Advanced Marine Engineering and Technology
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• 제38권8호
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• pp.1010-1020
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• 2014

Ballast water effluent treated by an electrolytic method contains reactive chlorine species and disinfection by-products (DBPs). In this study, we conducted whole effluent toxicity (WET) testing and ecological risk assessment (ERA) to investigate its ecotoxicological effects on marine environment. WET testing was carried out for three marine pelagic organisms, i.e., diatom Skeletonema costatum, rotifer Brachionus plicatilis and fish Paralichthys olivaceus. The biological toxicity test revealed that S. costatum was the only organism that showed apparent toxicity to the effluent; it showed no observed effect concentration (NOEC), lowest observable effect concentration (LOEC) and effect concentration of 50% (EC50) values of 12.5%, 25.0% and 83.3%, respectively, at brackish water condition. In contrast, it showed insignificant toxicity at seawater condition. B. plicatilis and P. olivaceus also showed no toxicities to the effluent at the both salinity conditions. Meanwhile, chemical analysis revealed that the ballast water effluent contained total residual oxidants (TROs) below $0.03{\mu}g/L$ and a total of 20 DBPs including bromate, volatile halogenated organic compounds (VOCs), halogenated acetonitriles (HANs), halogenated acetic acids (HAAs) and chloropicrin. Based on ERA, the 20 DBPs were not considered to have persistency, bioaccumulation and toxicity (PBT) properties. Except monobromoacetic acid, the ratio of predicted environmental concentration (PEC) to predicted no effect concentration (PNEC) of the other 19 DBPs did not exceed 1. Thus, our results of WET testing and ERA indicated that the ballast water effluent treated by electrolysis and subsequently neutralization was considered to have no adverse impacts on marine environment.

• 상하수도학회지
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• 제31권2호
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• pp.177-186
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• 2017

This study concerned the analysis on the efficiency of the conversion of water tank type supply system to direct water supply system to examine the feasibility of the conversion, as well as the calculation of optimal conversion range that enables the supply of safe, high-quality water at stable pressure in accordance with the standards of water supply facility. The results of this research showed that when converting water supply system from water tank type supply system to direct water supply system, more nodal points could be properly converted and more reduction of electricity usage was expected in case water pressure rather than residence time was fixed. This means that higher efficacy can be obtained by fixing water pressure when converting water supply system. However, since the number of the locations that received on-spot inspection was small and the electricity usage measured was not exclusively by water supply facility, it is difficult to judge that such reduction of electricity usage accurately represents reduced electricity usage by water supply facility alone. therefore, after having secured on-spot information about a larger number of locations in apartment complexes that have converted water supply system, and utilizing information about electricity usage exclusively by water supply facility, the proposed method of this research could be applied to accurately deducing expected reduction of electricity usage by water supply facilities of various other apartment complexes. It is also considered possible to deduce an effective operation method of water supply system by finding out an area that shows low pressure or low residual chlorine concentration in the optimal conversion range of water supply, followed by estimating the proper location of pumping station or the proper chlorine dosage at the power purification plant that supply water to the target area.

• Environmental Analysis Health and Toxicology
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• 제12권3_4호
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• pp.23-29
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• 1997

The main reason of applying chlorination is to sterilize microbes existing in the drinking water treatment. But chlorination could lead to the formation of disinfection by-products (DBPs) by the reaction of free chlorine with humic substance in the water. Especially the DBPs including trihalomethanes (THMs), haloacetic acids (HAAs), haloacetonitriles (HANs), and haloketones (HKs) exist in the tap water. The US environmental protection agency (US EPA) defines that trihalomethanes, dichloroacetic acid, trichloroacetic acid, and dichloroacetonitrile among DBPs are probable/possible human carcinogens. US EPA suggests maximum contaminant levels (MCLs) for THMs (80$\mu$g/L) and HAAs (60$\mu$g/L) in drinking water. In Korea, THMs in drinking water has been surveyed but DBPs in general has not been studied in drinking water practically. Therefore only THMs have been regulating as criteria compounds since 1990 but neither HAAs nor HANs. Researches on HAAs are yet to be found. HAA formation potentials(HAAFPs) have not been practiced. HAAs depends on the characteristics of water sources by chlorination. In this study, HAAFPs from three distinct sources were investigated by laboratory chlorination experiments. This study was performed to measure the level of HAAs in drinking water in Seoul area. At April 1996, after collecting the raw waters from the three sites with the different properties, the water samples were chlorinated at various conditions(pH 5.5, pH 7.0 and without pH adjustment) in the state of raw water to have 0. 5mg/L of residual chlorine concentration. And the raw water, treated water, and tap water of water treatment were collected to measure the HAAs concentration. The quantitative analysis of HAAs was conducted by US EPA methods.

• 한국물환경학회지
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• 제38권6호
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• pp.267-274
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• 2022

This paper is a result of research conducted on the 800,000 m³/d capacity of A Water Treatment Plant (WTP) and 400,000 m³/d capacity of B WTP plant in operation in the Nakdong River region. We evaluated the effect of algae broom on the WTP operation based on the running data of both WTP and the data on the pre-oxidation process field test for algae control using sodium permanganate (SPM) at the B WTP. The study results showed that during the algal bloom period, the coagulant dose increased by 102% in A WTP and 58% in B WTP, respectively, and the chlorine dose also increased by 38% and 29%, respectively, which may affect Total trihalomethane (THM) production. Data such as algal populations and Chl-a, residual chlorine and THM, algal populations, and ozone dose appeared also highly correlated, confirming that algal broom affects WTP operations, including water quality and chemical dosage. As a result of the field test of B WTP, THMs appeared lower than that of the control, suggesting the possibility of the SPM pre-oxidation process as an alternative to algae-related water quality management. Furthermore, in terms of GHG emissions due to energy consumption, it was observed that the pre-oxidation process using SPM was approximately 10.8%, which is a very low ratio compared to the pre-ozonation process. Therefore, these results suggest that the SPM pre-oxidation process can be recommended as an alternative to low-carbon water purification technology.

• 대한환경공학회지
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• 제30권7호
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• pp.721-728
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• 2008

정수처리과정 중 염소처리로 발생되는 소독부산물(DBPs) 발생현황을 파악하고 저감방안을 제시하기 위해 대표적인 염소소독부산물인 트리할로메탄(THMs)의 공정별 발생현황을 조사하였다. 또한, 계절별 수질별 영향인자와의 상관관계를 분석하고, 공정에서 전 염소 다단투입을 통하여 THMs 생성현황을 파악하고, 원수 수질에 따라 THMs을 저감시킬 수 있는 최적의 운영방안을 고찰하고자 하였다. Y 정수센터는 취수장과 착수정간의 도수시간이 평균 10시간이 소요되어 취수장에서 전염소 처리 시 염소와 THMs 전구물질간의 충분한 반응시간을 제공함으로써, THMs 발생을 억제하는데 한계를 가지고 있다. 따라서, 도수관로상의 THMs 생성을 억제하고 염소 과잉투입을 방지하기 위하여 전염소를 취수장과 착수정에 동시에 투입하여 정수중 THMs 발생을 저감시키고자 하였다. 계절별 정수의 THMs 발생량은 저수온기(겨울철)에 0.015 mg/L 이하로 적게 생성되었고, 고수온기(여름철)에는 평균 0.021 mg/L 이상 생성되어 수온상승에 따라 증가하였다. 공정별 THMs 발생량은 전염소 처리 후 착수정 원수에서 평균 0.013 mg/L, 응집/침전/여과 공정에서 0.014 mg/L, 후염소 처리 후 정수에서 평균 0.016 mg/L로 정수처리공정 시 착수정원수에서 대부분의 THMs이 발생하였다. 정수처리 공정에서 트리할로메탄생성능(THMFP)은 응집 침전공정 후 42.7%가 제거되었고, 여과공정 후 약 50%가 제거되어 공정에서 TOC 제거율과 비슷한 추세를 보였다. 전염소 다단투입은 취수장과 착수정에 염소를 분할하여 주입함으로써 유기물질과 염소와의 접촉시간(T) 및 농도(C)를 감소시키고, 염소주입량을 최적화하여 도수관로에서 생성되는 THMs을 억제시키고 염소사용량을 저감시킬 수 있었다. 수온이 높은 하절기에 전염소 다단 투입을 실시한 결과, 정수에서 THMs 농도는 평균 0.013 mg/L이 생성되어 취수장 단독 전염소 처리 시기에 발생된 정수 THMs 농도 대비 약 50%를 저감시킬 수 있었다.