• Title/Summary/Keyword: Chemical Vapor Reaction

Search Result 305, Processing Time 0.039 seconds

Imaging on a Vapor Deposited Film by Photopolymerization of a Rod-Like Molecule Consisting of Two Diacetylenic Groups

  • Chang, Ji-Young;Kyung Seo;Cho, Hyun-Ju;Lee, Cheol-Ju;Lee, Changjin;Yongku Kang;Kim, Jaehyung
    • Macromolecular Research
    • /
    • v.10 no.4
    • /
    • pp.204-208
    • /
    • 2002
  • A linear rod-like molecule, bis[4-(1,3-octadynyl)phenyl] terephthalate (2), consisting of two diacetylenic groups, was prepared. The unsymmetric diacetylene was prepared by the Cadiot-Chodkiewicz coupling reaction of 1-bromohexyne with 4-ethynylphenol and linked to a benzene core by an esterification reaction with terephthaloyl chloride in tetrahydrofuran. The thin film (200 nm thickness) of compound 2 was fabricated by the physical vapor deposition on a glass plate with a thermal evaporator. In the X-ray diffraction (XRD) study, the vapor deposited film on the glass plate showed peaks with d spacings of 19.4, 5.7, and 4.5 $\AA$. This XRD pattern was quite different from that observed for compound 2 isolated by recrystallization from methylene chloride/hexane. The vapor deposited film was polymerized by UV irradiation. Photopolymerization was carried out through a photomask, resulting in a patterned image, where the irradiated part became isotropic.

Synthesis and Characterization of $TiO_2$ Ultrafine Powder by Chemical Vapor Deposition (화학 증착법에 의한 $TiO_2$ 초미분의 제조 및 입자 특성에 관한 연구)

  • 염선민;이성호;김광호
    • Journal of the Korean Ceramic Society
    • /
    • v.32 no.1
    • /
    • pp.37-44
    • /
    • 1995
  • TiO2 fine powders were synthesized using oxygenolysis and hydrolysis reaction of TiCl4 vapor in gas phase. The TiO2 powder synthesized showed morphological differences depending on reaction system as follows: TiCl4-O2 reaction system produced the monosized particles having polyhedral shape with well-defined crystal planes and the particles did not agglomerate into secondary particles. TiCl4-H2O reaction system, whereas, produced the spherical secondary particles which consisted of fine primary particles. Other powder characteristics such as particle size, impurity content and rutile content are also reported in this study.

  • PDF

Onset on the Rate Limiting Factors of InP Film Deposition in Horizontal MOCVD Reactor (수평형 MOCVD 반응기 내의 InP 필름성장 제어인자에 대한 영향 평가)

  • Im, Ik-Tae;Sugiyama, Masakazu;Nakano, Yoshiyaki;Shimogaki, Yukihiro
    • Proceedings of the KSME Conference
    • /
    • 2003.11a
    • /
    • pp.73-78
    • /
    • 2003
  • The InP thin films grown by metalorganic chemical vapor deposition (MOCVD) are widely used to optoelectronic devices such as laser diodes, wave-guides and optical modulators. Effects of various parameters controlling film growth rate such as gas-phase reaction rate constant, surface reaction rate constant and mass diffusivity are numerically investigated. Results show that at the upstream region where film growth rate increases with the flow direction, diffusion including thermal diffusion plays an important role. At the downstream region where the growth rate decreases with flow direction, film deposition mechanism is revealed as a mass-transport limited. Mass transport characteristics are also studied using systematic analyses.

  • PDF

Metal-Organic Vapor Phase Epitaxy : A Review II. Process and charactristics (MOVPE 단결정층 성장법 II. MOVPE공정 및 특징)

  • 정원국
    • Journal of the Korean institute of surface engineering
    • /
    • v.23 no.2
    • /
    • pp.1-10
    • /
    • 1990
  • Metal-Organic Vapor Phase Epitaxy (MOVPE) is an epitaxial process utilizaing ane or more of organometallice as reactnte to grow compound semicond semiconductror layers. MOVPE is basically a cold wall process in which reactants are delivered without reacting with each other to the heated substrate where reactants are thermally decomposed to from compound semiconductors through chemical reaction. Since reactants are delivered as gas phase and the formation of the single crystal compunds depends on the thermal decomposition of the reactants, details of MOVPE relies on the hydrodynamics and pyroltsis and chemical reation of reactants inside on reaction chamber. It has been demonstrated that MOVPE is capable of growing virtually all of the III-V, II-VI and IV-VI compound semiconductrs, fabricating ultrathin epilayers, for ming abrupt hetrointerfaces with monolayer transition width, and is suitable for multi-wafer operation yilding a high throghtput. Overiew of reactror componts and layer, characteristics, and status of MOVPE are discussed.

  • PDF

Growth and Resistance Properties of Carbon Nanowall According to the Variation of Reaction Gas (반응가스의 변화에 따른 탄소나노월의 성장 및 저항 특성)

  • Kim, Sung Yun;Lee, Sangjoon;Choi, Won Seok;Joung, Yeun-Ho;Lim, Dong-Gun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.27 no.4
    • /
    • pp.217-220
    • /
    • 2014
  • Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway to increase the reaction area of graphite electrodes. In this study, we have investigated the growth properties of carbon nanowall (CNW) according to the ingredient of gas. Microwave plasma enhanced chemical vapor deposition (MPECVD) system was used to grow CNW on Si substrate with a variety of the reaction gas. The planar and vertical growth conditions of the grown CNWs according to the ingredient of the gas were characterized by a field emission scanning electron microscopy (FE-SEM) and energy dispersive spectroscopy (EDS). The electrical characteristics of CNWs were analyzed using a 4-point probe.

Decontamination of Chemical Warfare Agent Simulants using Vapor-phase Hydrogen Peroxide (과산화수소 증기를 이용한 유사화학작용제의 제독)

  • Kim, Yun-Ki;Yoo, Hyun-Sang;Kim, Min-Cheol;Hwang, Hyun-Chul;Ryu, Sam-Gon;Lee, Hae-Wan
    • Korean Chemical Engineering Research
    • /
    • v.52 no.3
    • /
    • pp.360-365
    • /
    • 2014
  • Vapor-phase hydrogen peroxide(VPHP) has been used as a sterilant in the field of medical and pharmaceutical application due to low corrosive than chlorine contained sterilant. In addition, it is well known that VPHP is effective for decontamination of chemical warfare agents by adding ammonia gas. In this study, the decontamination efficiency was confirmed about CEPS, DFP and dimethoate as simulants of HD, GD and VX using VPHP respectively. For this purpose, VPHP generated from self configured device was injected into decontamination chamber and maintained for reaction time. After the decontamination, the residues are analyzed by GC/MS and decontamination efficiency was calculated. Through by-product for each simulants, the similarities in reaction mechanism of chemical warfare agents were confirmed. CEPS was completely decontaminated at 30% relative humidity within 60 min. By adding ammonia gas, DFP and dimethoate were completely decontaminated within 30 and 150 min respectively.

Mass production of carbon nanotubes using Vapor Phase Growth (기상합성법을 이용한 탄소나노튜브의 대량합성)

  • 류승철;이태재;이철진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2001.07a
    • /
    • pp.123-126
    • /
    • 2001
  • Multiwalled carbon nanotubes were massively produced by the catalytic reaction of C$_2$H$_2$ - Fe(CO)$\sub$5/ mixture at 750 - 950$^{\circ}C$ in a quartz tube reactor and over quartz substrates. Well-aligned MWNT array grows perpendicular to the quartz tube reactor and the quartz substrates at an average of 60 nm in diameter and up to several thousands of micrometers in length. This method does not require any pretreatment of substrates and CNTs are grown at atmospheric pressure. It could be suitable for mass production of multiwalled nanotubes. Scanning electron microscope and transmission electron microscope images of the nanotubes deposited on the substrates allowed us to monitor the quality of MWNTs grown under different operating conditions.

  • PDF