• 제목/요약/키워드: Chemical Vapor Reaction

검색결과 305건 처리시간 0.046초

메틸삼염화규소로부터 탄화규소 침착의 Pulse-CVI에 대한 수치모사 연구 (Studies on the Mathematical Modelling of the Pulse-CVI for the Infiltration of Siliconcarbide from Methyltrichlorosilane)

  • 김인구;김민기;정귀영
    • Composites Research
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    • 제18권5호
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    • pp.27-33
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    • 2005
  • 본 연구에서는 펄스-CVI (Chemical Vapor Infiltration)에 의해 탄화규소/탄소 복합재료를 제조하는 공정에 대한 수치모사가 행해졌다. 각 펄스가 가스 주입시간, 반응시간, 배출시간으로 구성될 때, 반응시간과 배출시간의 영향이 관찰되었다. 또한 반응가스 농도와 압력의 영향이 연구되었다. 탄소프리폼에의 탄화규소의 균일한 침착과 반응시간 단축을 위한 펄스-CVI공정의 이점이 확인되었다.

열화학기상증착법을 이용한 GaN nanowire 합성 (Synthesis of GaN nanowires using thermal chemical vapor deposition)

  • 류승철;이태재;이철진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.931-934
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    • 2001
  • GaN nanowires has much interest as one-dimensional materials for blue light LED. GaN-based materials have been the subject of intensive research for blue light emission and high temperature/high power electronic devices. In this letter, the synthesis of GaN nanowires by the reaction of mixture of GaN nanowires by the reaction of mixture of Ga meta and GaN powder with NH$_3$ using thermal chemical vapor deposition is reported. X-ray diffraction, energy dispersive x-ray spectrometer, scanning electron microscopy, and transmission electron microscopy indicate that those GaN nanowires with hexagonal wurtzite structure were about 60nm in diameter and up to several hundreds of micrometers in length.

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화학기상응축 공정에서 TiO2나노입자 특성에 미치는 반응온도와 전구체 농도의 영향 -Part II 분말형성에 대한 반응인자적 분석 (Effects of Temperature and Precursor-concentration on Characteristics of TiO2 Nanoparticles in Chemical Vapor Condensation Process -Part II: Analysis of Particle Formation Estimated by Reaction Factors)

  • 이창우;유지훈;임성순;윤성희;이재성;좌용호
    • 한국재료학회지
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    • 제13권5호
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    • pp.328-332
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    • 2003
  • Characteristics of $TiO_2$nanoparticles controlled by precursor flow rate and reaction temperature in chemical vapor condensation process were interpreted in the view of decisive reaction factors, i.e. supersaturation ratio, concentration of vapor molecule, collision frequency and rate, and residence time, which directly affect the particle size and size distribution in CVC reactor. As results, the increases of precursor flow rate and reaction temperature induced the increase in the average sizes of $TiO_2$ nanoparticles in CVC reactor by acceleration of coagulation growth due to the increase of collision between $TiO_2$vapor molecules and particles. The effects of reaction factors on the characteristics of$TiO_2$nanoparticles were discussed with considering particle formation process in CVC reactor under given process parameters.

마이크로웨이브 플라즈마에서 메탄-수소가스로부터 다이아몬드박막의 화학증착 (Chemical Vapor Deposition of Diamond Film from Methane-Hydrogen Gas in Microwave Plasma)

  • 이길용;제정호
    • 한국세라믹학회지
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    • 제26권3호
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    • pp.331-340
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    • 1989
  • In this study, it was tried to deposit diamond films from a mixture of CH4 and H2 by the microwave plasma chemical vapor deposition(MWCVD). The MWCVD process was designed and set up from the 2.45GHz microwave generator. And the diamond film was successfully deposited on silicon wafers from the mixture of methane and hydrogen. The microstructures of the deposited diamond films were studied by using the following deposition variables : (a) methane concentration(0.6-10%), (b) reaction pressure(10-100torr), and (c) the substrate temperature(450-76$0^{\circ}C$).

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화학기상공정을 이용한 나노질화알루미늄 분말 합성 (Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process)

  • 피재환;박종철;김유진;황광택;김수룡
    • 한국분말재료학회지
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    • 제15권6호
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    • pp.496-502
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    • 2008
  • Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the $AlCl_{3}-NH_{3}-N_{2}$ system. Aluminum chloride ($AlCl_3$) as the starting material was gasified in the heating chamber of $300^{\circ}C$. Aluminum chloride gas transported to the furnace in $NH_{3}-N_{2}$ atmosphere at the gas flow rate of 200-400ml/min. For samples synthesized between 700 and $1200^{\circ}C$, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.

Chemical Poisoning of Ni/MgO Catalyst by Alkali Carbonate Vapor in the Steam Reforming Reaction of DIR-MCFC

  • 문형대;임태훈;이호인
    • Bulletin of the Korean Chemical Society
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    • 제20권12호
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    • pp.1413-1417
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    • 1999
  • Chemical poisoning of Ni/MgO catalyst was induced by hot alkali carbonate vapor in molten carbonate fuel cell (MCFC), and the poisoned (or contaminated) catalyst was characterized by TPR/TPO, FTIR, and XRD analysis. Carbonate electrolytes such as K and Li were transferred to the catalyst during DIR-MCFC operation at 650 ℃. The deposition of alkali species on the catalyst consequently led to physical blocking on catalytic active sites and structural deformation by chemical poisoning. TPR/TPO analysis indicated that K species enhanced the reducibility of NiO thin film over Ni as co-catalyst, and Li species lessened the reducibility of metallic Ni by chemical reaction with MgO. FTIR analysis of the poisoned catalyst did not exhibit the characteristic ${\vector}_1$$(D_{3h})$ peaks (1055 $cm^{-1},\;1085\;cm{-1})$ for pure crystalline carbonates, instead a new peak (1120 $cm^{-1})$ was observed proportionally with deformed alkali carbonates. From XRD analysis, the oxidation of metallic Ni into $Ni_xMg_{1-x}O$ was confirmed by the peak shift of MgO with shrinking of Ni particles. Conclusively, hot alkali species induced both chemical poisoning and physical deposition on Ni/MgO catalyst in DIR-MCFC at 650 ℃.

Vapor-Phase Chlorination of Chlorobenzene over Solid-Acid Catalysts

  • 장향자;최평호;박상언
    • Bulletin of the Korean Chemical Society
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    • 제16권6호
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    • pp.507-511
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    • 1995
  • Catalytic chlorination of chlorobenzene was studied in vapor phase using various solid-acid catalysts such as silica-alumina, alumina, zeolite and a modified clay prepared by impregnating bentonite with ferric chloride. The conversions of both chlorine gas and chlorobenzene showed high over silica-alumina, alumina and modified clay catalysts. However relatively large amounts of polychlorinated benzene derivatives were also observed. The active species of catalytic activity in chlorination of chlorobenzene in vapor phase were proved to be as Lewis acid sites by in-situ IR experiments. The strength of Lewis acid sites which were effective for the vapor-phase chlorination seemed to be having Hammett acidity Ho >-3.0. The selectivity to dichlorobenzenes was proved to be high over the zeolite catalyst due to their shape-selective properties. p-Dichlorobenzene or dichlorobenzene selectivities were improved more or less by changing the reaction conditions.

Synthesis and Characteristics of FePt Nanopowder by Chemical Vapor Condensation Process

  • Yu, Ji-Hun;Lee, Dong-Won;Kim, Byoung-Kee;Jang, Tae-Suk
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.1196-1197
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    • 2006
  • FePt binary-alloy nanopowder has been successfully synthesized by chemical vapor condensation process with two metal organic precursors, i.e., iron pentacarbonyl and platinum acetylacetonate. Average particle size of the powder was less than 50 nm with very narrow size distribution, revealing high dispersion capability. Characteristics of the powder could be controlled by changing process parameters such as reaction temperature, chamber pressure, as well as gas flow rate. Magnetic properties of the synthesized FePt nanopowder were investigated and analyzed in terms of the powder characteristics.

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분말소재의 표면처리를 위한 회전형 CVD 공정 (Rotary CVD Process for Surface Treatment of Powders)

  • 이종환;정구환
    • 한국표면공학회지
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    • 제56권6호
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    • pp.341-352
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    • 2023
  • This paper reviews the potentials of a rotary chemical vapor deposition (RCVD) process for nanomaterial synthesis and coating on powder-based materials. The rotary reactor offers a significant improvement over traditional CVD methods having horizontal and fixed reaction chambers. The RCVD system yields enhanced productivity and surface coating uniformity of nanoparticles applied in various purposes, such as efficient heat dissipation, surface hardness enhancement, and enhanced energy storage performances. The effectiveness of the RCVD system would open up new possibilities in various applications because uniform coating on powder-based materials with massive productivity is inevitable to develop multi-functional materials with high reliability.