• 센서학회지
• /
• 제20권1호
• /
• pp.40-45
• /
• 2011

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 추계학술대회 논문집
• /
• pp.347-348
• /
• 2007

On-chip micro humidity sensor, using $CN_x$ films for the sensing material, was designed, simulated, and fabricated with Op amp based readout circuit and diode temperature sensors. To compensate the temperature and other gases, two methods were applied. One is wheatstone-bridge with reference FET that eliminates other undesirable chemical species, and the other is a diode temperature sensor to compensate the temperature effect. $CN_x$ film can be a new humidity sensing material, and has a strong potential to adapt to smart sensors or multi-sensors using MEMS or nano-technology. A particular design technology for integration of sensors and systems together was proposed that whole fabrication process could be achieved by a standard CMOS process.

• Korean Chemical Engineering Research
• /
• 제53권2호
• /
• pp.243-246
• /
• 2015

색센서는 액상 내 존재하는 특정 물질에 대하여 선택적인 색상변화를 통하여 대상물질을 검지할 수 있다. 기존 유기염료를 이용한 색센서는 단일종의 중금속 이온만을 검지한다는 단점이 있지만, 디티존(dithizone, DTZ)은 최소 5개 이상의 중금속 이온을 서로 다른 색상 변화로 검지해 낼 수 있다는 장점이 있다. 즉 다중검지용 색센서 물질로 사용할 수 있다. 그러나 디티존은 액상에서 주로 사용되어서 종이나 분말형태로 제조된 사례가 없어서 활용범위가 제한적이다. 이에 본 연구에서는 폴리스티렌(polystyrene, PS)과 디티존을 결합시켜 DTZ/PS 펠렛을 제조하여 10가지 중금속 이온에 대한 선택적인 색상변화를 관찰하였다. 제조한 DTZ/PS 펠렛에 대하여 10 ppm의 중금속 이온의 노출 결과, 수은과 코발트가 뚜렷한 색상 변화를 보였으며 선택적인 중금속 이온 검지에 활용할 수 있음을 확인하였다.

• 한국진공학회지
• /
• 제20권2호
• /
• pp.86-92
• /
• 2011

본 연구에서는 새롭게 개발된 센서인 in-situ particle monitor (ISPM)와 기존센서의 기능을 업그레이드 한 센서인 self-plasma optical emission spectroscopy (SPOES)를 이용해 화학기상증착 진공공정을 진단하였다. 본 연구에서 사용된 증착공정 장비는 silane 가스를 이용한 silicon plasma enhanced chemical vapor deposition과 borophosphosilicate glass 증착장비이다. 두 장비의 증착 또는 클리닝 조건에서의 배출되는 오염입자와 배기가스를 개발된 센서를 이용해 공정상태를 실시간으로 진단하는 것과 개발된 센서의 센싱 능력을 검증하고자 하는 목적으로 연구가 진행되었다. 개발된 센서는 장비 배기구 설치되었으며, 공정압력, 유량, 플라즈마 파워 등의 공정변수 변화에 따른 오염입자 크기 및 분포와 배기 부산물의 변화를 측정하고, 측정 결과의 상호 연관성을 분석하였다.

• 한국물환경학회지
• /
• 제24권1호
• /
• pp.1-6
• /
• 2008

Biological and chemical sensors are the two most frequently used sensors to monitor the water resource. Chemical sensor is very accurate to pick up the types and to measure the concentration of the chemical substance. Drawback is that it works for just one type of chemical substance. Therefore a lot of expensive monitoring system needs to be installed to determine the safeness of the water, which costs too much expense. Biological sensor, on the contrary, can judge the degree of pollution of the water with just one monitoring system. However, it is not easy to figure out the type of contaminant with a biological sensor. In this study, an endeavor is made to identify the toxicant in the water using the shape of the chlorophyll fluorescence induction curve (FIC) from a biological monitoring system. Wem-tox values are calculated from the amount of flourescence of contaminated and reference water. Curve fitting is executed to find the representative curve of the raw data of Wem-tox values. Then the curves are digitalized at the same interval to train the neural network model. Taguchi method is used to optimize the neural network model parameters. The optimized model shows a good capacity to figure out the toxicant from FIC.

• 센서학회지
• /
• 제15권3호
• /
• pp.199-204
• /
• 2006

Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{\circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.

• 한국진공학회지
• /
• 제14권3호
• /
• pp.110-114
• /
• 2005

본 연구는 화학증착(Chemical Vapor Deposition, CVD) 시스템에서 전구체 소모량을 모니터링 하기 위한 방법이다. 전구체는 가격이 매우 비싸기 때문에 이를 모니터링 하기 위한 효과적인 방법이 요구된다. 하나의 예로서 용기내 수위진단을 할 수 있는 초음파 센서를 들 수 있는데 이는 비접촉식이고 가격이 저렴한 유리한 점이있다 본 연구에서는, CVD 시스템에서의 전구체 소모량 모니터링을 위한 초음파 진단기술 개발에 관해 연구한다. 또한 반도체 생산라인에 적용이 가능한 실제 진단장치를 개발, 적용한다.

• Bulletin of the Korean Chemical Society
• /
• 제33권7호
• /
• pp.2229-2237
• /
• 2012

The two chelates based on calix[4]arene and thiacalix[4]arene have been synthesized and used as neutral ionophores for preparing PVC based membrane sensor selective to $Ho^{3+}$ ion. The addition of potassium tetrakis(4-chlorophenyl)borate (KTpClPB) and various plasticizers, viz., NDPE, o-NPOE, DOP, TEP and DOS have been found to improve significantly the performance of the sensors. The best performance was obtained with the sensor no. 6 having membrane of $L_2$ with composition (w/w) ionophore (2%): KTpClPB (4%): PVC (37%): NDPE (57%). This sensor exhibits Nernatian response with slope $21.10{\pm}0.3mV/decade$ of activity in the concentration range $3.0{\times}10^{-8}-1.0{\times}10^{-2}M\;Ho^{3+}\;ion$, with a detection limit of $1.0{\times}10^{-8}M$. The proposed sensor performs satisfactorily over a wide pH range of 2.8-10, with a fast response time (5 s). The sensor was also found to work successfully in partially non-aqueous media up to 25% (v/v) content of methanol, ethanol and acetonitrile, and can be used for a period of 4 months without any significant drift in potential. The electrode was also used for the determination of $Ho^{3+}$ ions in synthetic mixtures of different ions and the determination of the arsenate ion in different water samples.

• 센서학회지
• /
• 제31권6호
• /
• pp.397-402
• /
• 2022

In this short review, we explore the recent progress in metal-based gas-sensing techniques. The strong interaction between the metal films and hydrogen gas can be considered to play a considerably important role in the gas-sensing technique. The physical and chemical reactions in Pd-Pd hydride systems were studied in terms of the phase transition and lattice expansion of the metals. Two types of represented detection, electrical and optical, were introduced and discussed along with their advantages.

• 한국고분자학회지:고분자과학과기술
• /
• 제26권4호
• /
• pp.299-304
• /
• 2015