• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.195-196
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• 2009

This paper describes the fabrication and characteristics of polycrystalline 3C-SiC thin film diodes for extreme environment applications, in which the this thin film was deposited onto oxidized Si wafers by APCVD using HMDS In this work, the optimized growth temperature and HMDS flow rate were $1,100^{\circ}C$ and 8sccm, respectively. A Schottky diode with a Au, Al/poly 3C-SiC/$SiO_2$/Si(n-type) structure was fabricated and its threshold voltage ($V_d$), breakdown voltage, thickness of depletion layer, and doping concentration ($N_D$) values were measured as 0.84V, over 140V, 61nm, and $2.7{\times}10^{19}cm^2$, respectively. To produce good ohmic contact, Al/3C-SiC were annealed at 300, 400, and $500^{\circ}C$ for 30min under a vacuum of $5.0{\times}10^{-6}$Torr. The obtained p-n junction diode fabricated by poly 3C-SiC had similar characteristics to a single 3C-SiC p-n junction diode.

• 전자공학회논문지D
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• 제36D권9호
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• pp.31-36
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• 1999

다공질 실리콘 층을 이용한 정전용량형 알코올 센서를 제조하여 수용액 상태의 알코올(혹은 에탄올) 농도를 측정하고 그 특성을 평가하였다. 알코올 중에서 술의 주성분인 에탄올은 실리콘 웨이퍼에 대해 침투성이 강하여 수용액 내에서 실리콘 웨이퍼를 가공할 때 반응을 촉진시키는 물질로서 자주 사용된다. 본 연구에서는 각각 25와 35%의 불화수소용액에서 만든 다공질 실리콘 층을 알코올 감지막으로 한 알코올 센서를 제작하여 0%에서 100%의 알코올 농도범위에 대해 감지 특성을 측정하였다. 그 결과, 100kHz 이상의 인가 주파수에 대해 빠른 응답속도 및 선형성 뿐만 아니라 양호한 재현성이 관측되었으며, 측정된 정전용량은 수용액 속의 알코올 농도가 증가할 때 다공질 실리콘 층의 전체 유전 상수가 감소하게 되어 반비례하는 관계가 관측되었다.

• 센서학회지
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• 제21권4호
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• pp.283-286
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• 2012

This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromic materials of Pd and Pd/$WO_3$ were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change to transparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/$WO_3$. However, phase transition from ${\alpha}$ to ${\beta}$ is shown at 6 %. Pd/$WO_3$ structure show the more linear response to hydrogen range of 2 % ~10 %. Also, almost 2 times fast response and recovery characteristics are shown at Pd/$WO_3$. These fast performances are come from the fact that Pd promoted the chemical reaction between hydrogen and $WO_3$.

• 센서학회지
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• 제26권2호
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• pp.122-127
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• 2017

Graphene grown on copper-foil substrates by chemical vapor deposition (CVD) has been attracting interest for sensor applications due to an extraordinary high surface-to-volume ratio and capability of large-scale device fabrication. However, CVD graphene has a polycrystalline structure and a high density of grain boundaries degrading its electrical properties. Recently, processes such as electropolishing for flattening copper substrate has been applied before growth in order to increase the grain size of graphene. In this study, we systemically analyzed the effects of the process condition of electropolishing copper foil on the quality of CVD graphene. We observed that electropolishing process can reduce surface roughness of copper foil, increase the grain size of CVD graphene, and minimize the density of double-layered graphene regions. However, excessive process time can rather increase the copper foil surface roughness and degrade the quality of CVD graphene layers. This work shows that an optimized electropolishing process on copper substrates is critical to obtain high-quality and uniformity CVD graphene which is essential for practical sensor applications.

• 센서학회지
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• 제27권2호
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• pp.132-136
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• 2018

We report the development of a room-temperature hydrogen ($H_2$) gas sensor based on carbon nanotubes (CNT) yarn. To detect $H_2$ gas in room temperature, a highly ordered CNT yarn was placed on a substrate from a spin-capable CNT forest, followed by the deposition of a platinum (Pt) layer on surface of the CNT yarn. To examine the effect of the Pt-layer on the response of the CNT sensor, a comparative sensing performance was characterized on both the Pt deposited and non-deposited CNT yarn at room temperature. The Pt-CNT yarn yielded high response, whereas the non-deposited CNT yarn showed negligible response for $H_2$ detection at room temperature. Pt is a reliable and efficient catalyst that can substantially improve the detection of $H_2$ gas by chemical sensitization via a "spillover" effect. It can be efficiently utilized to increase the sensitivity and selectivity as well as to obtain fast response and recovery times.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.252-252
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• 2009

In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

• 센서학회지
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• 제13권5호
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• pp.378-382
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• 2004

A micromachined fluidic structure for the introduction of liquid samples into a chip-based sensor array composed of individually addressable polymeric microbeads has been developed. The structure consists of a separately attached cover glass, a single silicon chip having micromachined channels and microbead storage cavities, and a glass carver. In our sensor array, transduction occurs via colorimetric and fluorescence changes to receptors and indicator molecules that are covalently attached to termination sites on the polymeric microbeads. Data streams are acquired for each of the individual microbeads using a CCD. One of the key parts of the structure is a passive fluid introduction system driven only by capillary force. The velocity of penetration of a horizontal capillary for the device having a rectangular cross section has been derived, and it is quite similar to the Washburn Equation calculated for a pipe with a circular cross section having uniform radius. The test results show that this system is useful in a ${\mu}$-TAS and biomedical applications.

• Tribology and Lubricants
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• 제26권1호
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• pp.73-77
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• 2010

One of the important trends for condition monitoring in the 21st century is the development of smart sensors that will permit the cost-effective continuous monitoring of key machine equipments. In this study, an integrated in-line oil monitoring sensor assigned for continuous in situ monitoring multiple parameters of oil performance is presented. The sensor estimates oil deterioration based on the information about chemical degradation, total contamination, water content of oil and oil temperature. The oil oxidation is estimated by "chromatic ratio", total contamination is measured by the changes in optical density of oil in three optical wave-bands ('Red', 'Green' and 'Blue') and water content is evaluated as relative saturation of oil by water. In order to evaluate the sensor's effectiveness, the sensor was applied to several used oil samples in steel making industry and the results were compared with those measured by standard test methods.

• 한국안전학회지
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• 제16권1호
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• pp.1-8
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• 2001

All objects emit thermal radiation and this radiation is the basis of the techniques used to detect flames. The usual phenomena occurring in the initial stage of the fire are generally invisible products of a combustion and visible smoke. Liquid or gaseous materials do not undergo a smoldering stage so that fires develop very rapidly. Also, the heat generated by the initial flames is usually not sufficient to activate a heat detector. In this case the most effective criterion for automatic fire detection is the flame. According to the fire regulation of korea, the compulsory standard provided that a flame detector shall be installed in a place that the attachment height of detector is higher than 20 m, chemical plants, hangar, refinery, etc.. The results of the research and development are discriminated between a flame and other radiant emitters, developed a UV detector tube contains an inert gas which absorbs UV radiation, developed PZT pyroelectric element is based on the use of photovoltanic cell, developed IR band-pass filter that only allow a 4.3 $\mu\textrm{m}$ radiation wavelength to reach the sensors and developed UV-IR combination flame detector combined into a single detection device.