• 한국전기전자재료학회논문지
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• 제18권5호
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Membrane and Water Treatment
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• 제9권4호
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• pp.211-220
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• 2018

Incorporating nano-materials in thin-film composite (TFC) membranes has been considered to be an approach to achieve higher membrane performance in various water treatment processes. This study investigated the rejection efficiency of three target compounds, i.e., reserpine, norfloxacin and tetracycline hydrochloride, by TFC membranes with different graphene oxide proportions. Graphene oxide (GO) was incorporated into the polyamide active layer of a TFC membrane via an interfacial polymerization (IP) reaction. The TFC membranes were characterized with FTIR, FE-SEM, AFM; in addition, the water contact angle measurements as well as the permeation and separation performance were evaluated. The prepared GO-TFC membranes exhibited a much higher flux ($3.11{\pm}0.04L/m2{\cdot}h{\cdot}bar$) than the pristine TFC membranes ($2.12{\pm}0.05L/m2{\cdot}h{\cdot}bar$) without sacrificing their foulant rejection abilities. At the same time, the GO-modified membrane appeared to be less sensitive to pH changes than the pure TFC membrane. A significant improvement in the anti-fouling property of the membrane was observed, which was ascribed to the favorable change in the membrane's hydrophilicity, surface morphology and surface charge through the addition of an appropriate amount of GO. This study predominantly improved the understanding of the different PA/GO membranes and outlined improved industrial applications of such membranes in the future.

• 한국컴퓨터정보학회논문지
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• 제12권5호
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• pp.321-326
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• 2007

냉동 컨테이너의 내용물들은 적정 온도를 유지하지 못하면 화물의 파손이 발생할 수 있다. 현재 냉동 컨테이너는 전담 관리원이 주기적이고 수동적으로 컨테이너의 내부 온도를 감시한다. 그래서 컨테이너 내부 온도를 실시간으로 감시할 수 없기 때문에 화물에서 문제가 발생하면 즉각적으로 대응하지 못한다. 본 논문은 무선 센서 네트워크를 이용하여 냉동 컨테이너에 센서 노드를 탑재하여 컨테이너 내부 온도를 실시간으로 감시하는 시스템을 제안한다. 무선 센서 네트워크는 독립된 센서들을 물리적 공간에 배치하여 주위의 온도, 빛 가속도 등의 정보를 감지하여, 무선으로 전송할 수 있는 기술이다. 제안된 시스템은 냉동 컨테이너의 상태를 실시간으로 감시하기 때문에 컨테이너의 적정 온도를 유지함으로써 화물을 효율적으로 관리할 수 있다.

• Elastomers and Composites
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• 제37권1호
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• pp.31-38
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• 2002

카르복실화 스티렌-부타디엔 라텍스의 중합시간은 사용되는 부타디엔 모노머가 공액 이중결합을 가진 화학적 구조로 인하여 라디칼 중합시 홀 전파의 비편재화로 인해 아크릴 에멀젼의 제조시 보다 중합시간이 매우 길다. 또한 라텍스 자체가 고분자와 분산매의 분리 없이 사용되기 때문에 라텍스의 안정성은 대단히 중요하다. 물성의 저하없이 반응시간을 단축하기 위하여 기존에 사용하던 연쇄이동제인 사염화탄소 대신 tert-dodecylmercaptane 과 ${\alpha}$-methylstyrene dimer를 혼합 사용하여 반응시간을 14시간에서 12시간으로 줄일 수 있었다. 반응 성장단계에서 아크릴산의 투입량을 0.3 part로 제한하여 라텍스의 점도 상승을 막고 초기중합단계 직후에 아크릴아미드를 0.1 part 첨가하여 라텍스 입자의 내부영역과 외부영역의 고분자 사슬의 상호간확산을 막아 단단하면서도 접착력을 유지할 수 있는 라텍스의 합성 결과를 얻었다.

• 설비공학논문집
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• 제17권10호
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• pp.883-890
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• 2005

In this study, 2 pure hydrocarbon refrigerants of R1270 (Propylene) and R290 (Propane) and 3 binary mixtures composed of R1270, R29O and R152a were tested in a refrigerating bench tester with a scroll compressor in an attempt to substitute R502 used in most of the low temperature applications. The test bench provided 3\sim3.5$ kW capacity and water and water/glycol mixture were employed as the secondary heat transfer fluids. All tests were conducted under the same external conditions resulting in the average saturation temperatures of -28 and $45^{\circ}C$ in the evaporator and condenser, respectively. Test results showed that all refrigerants tested had $9.6\sim18.7\%$ higher capacity and $17.1\sim27.3\%$ higher COP than R502. The compressor discharge temperature of R1270 was similar to that of R502 while those of all other refrigerants were $23.7\sim27.9\%$ lower than that of R502. For all alternative refrigerants, the amount of charge was reduced up to $60\%$ as compared to R502. Overall, these alternative refrigerants offer better system performance and reliability than R502 and can be used as long term substitutes for R502 due to their excellent environmental properties.

• 약학회지
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• 제36권2호
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• pp.159-166
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• 1992

A neoglycolipid, N-stearyl lactobionamide(N-SLBA) was synthesized and the incorporation of the neoglycolipid into liposomes was achieved in order to prepare neo-galactosylated liposome as potential drug carrier for active targeting to galactose receptor existing cell and tissue. N-SLBA was synthesized by the covalent linkage between carboxyl group of lactobionic acid and amino group of stearylamine(SA). The yield of N-SLBA was about 52.3%. It was identified with $1650\;cm^{-1}$ in IR chart, 7.5 ppm in NMR spectra, $61^{\circ}C$ endothermic peak in DSC heating curve. Surface-modified large unilamellar vesicle with galactose(N-SLBA-LUV) could be prepared with N-SLBA by reverse evaporation method. N-SLBA-LUV was identified by TEM and measuring of membrane function. The maximum amount of N-SLBA incorporated into liposome is up to about 15 mol%. Compared with control liposome (SA-LUV), N-SLBA-LUV showed lower encapsulation efficiency of MTX. It might due to the loss of positive surface charge of stearylamine. N-SLBA-LUV was similar to SA-LUV in aspect of osmotic behavior. N-SLBA-LUV prepared with N-SLBA would be expected to be a good carrier for active targeting to galactose receptor existing cell and tissue.

• Bulletin of the Korean Chemical Society
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• 제34권2호
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• pp.384-388
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• 2013

Fluorine-doping on the $Li_{1+x}Mn_{1.9-x}Al_{0.1}O_4$ spinel cathode materials is found to alter crystal shape, and enhance initial interfacial reactivity and solid electrolyte interphase (SEI) formation, leading to improved initial coulombic efficiency in the voltage region of 3.3-4.3 V vs. Li/$Li^+$ in the room temperature electrolyte of 1 M $LiPF_6$/EC:EMC. SEM imaging reveals that the facetting on higher surface energy plane of (101) is additionally developed at the edges of an octahedron that is predominantly grown with the most thermodynamically stable (111) plane, which enhances interfacial reactivity. Fluorine-doping also increases the amount of interfacially reactive $Mn^{3+}$ on both bulk and surface for charge neutrality. Enhanced interfacial reactivity by fluorine-doping attributes instant formation of a stable SEI layer and improved initial cyclic efficiency. The data contribute to a basic understanding of the impacts of composition on material properties and cycling behavior of spinel-based cathode materials for lithium-ion batteries.

• 수산해양교육연구
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• 제5권2호
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• pp.98-109
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• 1993

By the Article 28 of the Korean Fishing Vessels Act and the Article 47-1 of the Enforcement Ordinance of the Act, fishing vessels over 5 gross tone must be insured the fishing vessels mutual insurance or marine insurance. Therefore the distant-water fishing vessels and vessels registered with Classification Society can be insured to the marine insurance, and non-registered vessels and the small fishing vessels can be insured to the fishing vessels mutual insurance of Fisheries Co-operatives. Moreover, the shipowners of fishing vessels over 5 gross tons to be insured a liability insurance for their crew, and it is to compensate effectively the crewman's accidents prescribed in the Seaman's Act. The shipowner's Liability Insurance to be insured the seaman's Compensation Insurance or the seaman's mutual insurance of the Fisheries Co-operatives and the Protection and Indemnity but they still involve lots of problems to cover the crewman's accidents reasonably. The author's views on the improvement way of the fisheries mutual insurance system are as follows. 1. The size of fishing vessels over 5 gross tons prescribed by the Article 28 of the Fishing Vessels Act must be revised into over 1 gross tons. And the regulations concerning penalties against nonfulfilment of the regulation must be strengthened in order to have legal effectiveness. 2. The level of the government subsidy for the fisheries mutual insurance must be raised up from the large point of view for protection of fishermen. It is concluded that the Government have to take charge of the remutual insurance in order to develop the fisheries mutual insurance system. 3. The mutual insurance system of fish catch have to be executed in order to guarantee the stable income for fishermen on the base of the amount of money by fish catch in the previous year.

• 설비공학논문집
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• 제23권12호
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• pp.791-798
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• 2011

In this study, performance of R410A(50%R32/50%R125) and HFC32/HFC125 mixture is measured to examine the effect of composition shift of R410A used for various air-conditioners and heat pumps. The composition of HFC32/HFC125 mixture varies from the reference composition of R410A ${\pm}10%$ with 5% interval. Tests carried out in a heat pump bench tester at the evaporation and condensation temperatures of $7/45^{\circ}C$ and $-7/41^{\circ}C$ for summer and winter conditions, respectively. Test results show that both the coefficient of performance (COP) and compressor power of the HFC32/HFC125 mixture have the maximum difference of 2.0% as compared to those of R410A. Compressor discharge temperatures of HFC32/HFC125 mixture are increased up to $6.7^{\circ}C$ as compared to that of R410A. The amount of charge for HFC32/HFC125 mixture vary within 5.6% as compared to that of R410A. Overall, performance of R410A is not appreciably affected by the composition shift of ${\pm}10%$ of R32 under both air-conditioning and heat pumping conditions.

• 한국진공학회지
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• 제17권4호
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• pp.317-321
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• 2008

세라믹 강유전체 $0.65Pb(Mg_{1/3}Ta_{2/3})O_3-0.35PbTiO_3$ 고용체에 $ZrO_2$를 첨가하여 유전 및 초전 특성을 관찰하였다. 유전상수, 유전손실 및 초전계수의 측정온도는 상온에서 $250^{\circ}C$사이에서 측정되었다. 유전상수와 초전계수는 $0.2\;mol%ZrO_2$ 첨가에서 최대값을 얻었다. $ZrO_2$의 첨가량이 증가할수록 각 시료의 유전상수와 초전계수의 최대값은 낮은 온도로 이동하였고, 최대유전상수의 퍼짐현상은 증가하였다.