• Title/Summary/Keyword: Chamber Structure

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STSAT-3 Main Payload, MIRIS Flight Model Developments

  • Han, Won-Yong;Lee, Dae-Hee;Park, Young-Sik;Jeong, Woong-Seob;Ree, Chang-Hee;Moon, Bong-Kon;Park, Sung-Joon;Cha, Sang-Mok;Nam, Uk-Won;Park, Jang-Hyun;Lee, Duk-Hang;Ka, Nung-Hyun;Seon, Kwang-Il;Yang, Sun-Choel;Park, Jong-Oh;Rhee, Seung-Wu;Lee, Hyung-Mok;Matsumoto, Toshio
    • The Bulletin of The Korean Astronomical Society
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    • v.35 no.1
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    • pp.40.1-40.1
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    • 2010
  • The Main payload of the STSAT-3 (Korea Science & Technology Satellite-3), MIRIS (Multipurpose Infra-Red Imaging System) has been developed for last 3 years by KASI, and its Flight Model (FM) is now being developed as the final stage. All optical lenses and the opto-mechanical components of the FM have been completely fabricated with slight modifications that have been made to some components based on the Engineering Qualification Model (EQM) performances. The components of the telescope have been assembled and the test results show its optical performances are acceptable for required specifications in visual wavelength (@633 nm) at room temperature. The ensuing focal plane integration and focus test will be made soon using the vacuum chamber. The MIRIS mechanical structure of the EQM has been modified to develop FM according to the performance and environment test results. The filter-wheel module in the cryostat was newly designed with Finite Element Analysis (FEM) in order to compensate for the vibration stress in the launching conditions. Surface finishing of all components were also modified to implement the thermal model for the passive cooling technique. The FM electronics design has been completed for final fabrication process. Some minor modifications of the electronics boards were made based on EQM test performances. The ground calibration tests of MIRIS FM will be made with the science grade Teledyne PICNIC IR-array.

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Location and Linkages of Small Firms in the Greater Cincinnati Metropolitan Area, Ohio (소규모 기업의 입지 및 연계구조 관한 연구 -미국 오하이오주 씬씨내티 대도시 지역의 경우-)

  • Lee, Bo-Young
    • Journal of the Korean association of regional geographers
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    • v.5 no.1
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    • pp.121-135
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    • 1999
  • This study investigated the location conditions, spatial linkage structures, and firm specific problems of small firms of the Greater Cincinnati metropolitan area by sectors and by areal distribution. The major locational advantages were closeness to customers and suppliers followed by accessibility to inter-state highways. These results were supported by spatial linkage structures in which within-region linkages occupied a greater portions of linkage, showing the importance of small firms in the regional economy. The linkage patterns showed distance decay effect with high elasticity. While there were no significant differences of locational conditions and spatial linkage structures of small firms between core and peripheral area, a slight difference was identified among sectors. Chemical related manufacturing firms show different locational conditions and spatial linkage structure with weak within-local linkages. The main locational disadvantages were lack of qualified labor, undesirable neighborhood, heavy tax, and space shortage. Considering the biggest problems such as lack of qualified labor, difficulties in sales/marketing, low accessibility to financial resource, and technological inability, the inter-related cooperative business networks among firms and regional institutions, consulting companies, chamber of commerce, and universities are needed to stimulate regional economic development and survival of small firms.

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A Basic Study on the Differential Diagnostic System of Laryngeal Diseases using Hierarchical Neural Networks (다단계 신경회로망을 이용한 후두질환 감별진단 시스템의 개발)

  • 전계록;김기련;권순복;예수영;이승진;왕수건
    • Journal of Biomedical Engineering Research
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    • v.23 no.3
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    • pp.197-205
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    • 2002
  • The objectives of this Paper is to implement a diagnostic classifier of differential laryngeal diseases from acoustic signals acquired in a noisy room. For this Purpose, the voice signals of the vowel /a/ were collected from Patients in a soundproof chamber and got mixed with noise. Then, the acoustic Parameters were analyzed, and hierarchical neural networks were applied to the data classification. The classifier had a structure of five-step hierarchical neural networks. The first neural network classified the group into normal and benign or malign laryngeal disease cases. The second network classified the group into normal or benign laryngeal disease cases The following network distinguished polyp. nodule. Palsy from the benign laryngeal cases. Glottic cancer cases were discriminated into T1, T2. T3, T4 by the fourth and fifth networks All the neural networks were based on multilayer perceptron model which classified non-linear Patterns effectively and learned by an error back-propagation algorithm. We chose some acoustic Parameters for classification by investigating the distribution of laryngeal diseases and Pilot classification results of those Parameters derived from MDVP. The classifier was tested by using the chosen parameters to find the optimum ones. Then the networks were improved by including such Pre-Processing steps as linear and z-score transformation. Results showed that 90% of T1, 100% of T2-4 were correctly distinguished. On the other hand. 88.23% of vocal Polyps, 100% of normal cases. vocal nodules. and vocal cord Paralysis were classified from the data collected in a noisy room.

Characterization of Cold Hollow Cathode Ion Source by Modification of Electrode Structure (전극 구조 변화에 따른 Cold Hollow Cathode Ion Source의 특성 변화)

  • Seok, Jin-Woo;Chernysh, V.S.;Han, Sung;Beag, Young-Hwoan;Koh, Seok-Keun;Yoon, Ki-Hyun
    • Journal of the Korean Ceramic Society
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    • v.40 no.10
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    • pp.967-972
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    • 2003
  • The inner-diameter 5 cm cold hollow cathode ion source was designed for the high current density and the homogeneous beam profile of ion beam. The ion source consisted of a cylindrical cathode, a generation part of magnetic field, a plasma chamber, convex type ion optic system with two grid electrode, and DC power supply system. The cold hollow cathode ion sources were classified into standard type (I), electron output electrode modified type (II). The operation of the ion source was done with discharge current, ion beam potential and argon gas flow rate. The modification of electron output electrode resulted in uniform plasma generation and uniform area of ion beam was extended from 5 cm to 20 cm. Improved ion source was evaluated with beam uniformity, ion current, team extraction efficiency, and ionization efficiency.

Effect of Alcohols on the Dry Etching of Sacrificial SiO2 in Supercritical CO2 (초임계 이산화탄소를 이용한 웨이퍼의 건식 식각에서 알콜 첨가제의 효과)

  • Kim, Do-Hoon;Jang, Myoung-Jae;Lim, Kwon-Taek
    • Clean Technology
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    • v.18 no.3
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    • pp.280-286
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    • 2012
  • The dry etching of sacrificial $SiO_2$ was performed in supercritical carbon dioxide. The etching of boron phosphor silica glass (BPSG), tetraethyl orthosilicate (TEOS), thermal $SiO_2$, and Si-nitride (SiN) was investigated by using a two chamber system with HF/py etchant and alcohol additives. The etch rate of sacrificial $SiO_2$ increased upon the addition of methanol. The etch selectivity of BPSG with respect to SiN was highest with IPA although the highest etch rate was resulted from methanol except BPSG. The etch rate increased with the temperature in HF/py/MeOH system. Especially the increase of the etch rate was much higher for BPSG with an increase in the reaction temperature. The etch residue was not reduced apparently upon the addition of alcohol cosolvents to HF/py. While the etch rate in HF/$H_2O$ was higher than HF/py/alcohol system, the rate decreased with the addition of alcohols to HF/$H_2O$. The cantilever beam structure of high aspect ratios was released by the dry ething in supercritical carbon dioxide without damage.

The New X-ray Induced Electron Emission Spectrometer

  • Yu.N.Yuryev;Park, Hyun-Min;Lee, Hwack-Ju;Kim, Ju-Hwnag;Cho, Yang-Ku;K.Yu.Pogrebitsky
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.5-6
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    • 2002
  • The new spectrometer for X-ray Induced Electron Emission Spectroscopy (XIEES) .has been recently developed in KRISS in collaboration with PTI (Russia). The spectrometer allows to perform research using the XAFS, SXAFS, XANES techniques (D.C.Koningsberger and R.Prins, 1988) as well as the number of techniques from XIEES field(L.A.Bakaleinikov et all, 1992). The experiments may be carried out with registration of transmitted through the sample x-rays (to investigate bulk samples) or/and total electron yield (TEY) from the sample surface that gives the high (down to several atomic mono-layers in soft x-ray region) near surface sensitivity. The combination of these methods together give the possibility to obtain a quantitative information on elemental composition, chemical state, atomic structure for powder samples and solids, including non-crystalline materials (the long range order is not required). The optical design of spectrometer is made according to Johannesson true focusing schematics and presented on the Fig.1. Five stepping motors are used to maintain the focusing condition during the photon energy scan (crystal angle, crystal position along rail, sample goniometer rail angle, sample goniometer position along rail and sample goniometer angle relatively of rail). All movements can be done independently and simultaneously that speeds up the setting of photon energy and allows the using of crystals with different Rowland radil. At present six curved crystals with different d-values and one flat synthetic multilayer are installed on revolver-type monochromator. This arrangement allows the wide range of x-rays from 100 eV up to 25 keV to be obtained. Another 4 stepping motors set exit slit width, sample angle, channeltron position and x-ray detector position. The differential pumping allows to unite vacuum chambers of spectrometer and x-ray generator avoiding the absorption of soft x-rays on Be foil of a window and in atmosphere. Another feature of vacuum system is separation of walls of vacuum chamber (which are deformed by the atmospheric pressure) from optical elements of spectrometer. This warrantees that the optical elements are precisely positioned. The detecting system of the spectrometer consists of two proportional counters, one scintillating detector and one channeltron detector. First proportional counter can be used as I/sub 0/-detector in transmission mode or by measuring the fluorescence from exit slit edge. The last installation can be used to measure the reference data (that is necessary in XANES measurements), in this case the reference sample is installed on slit knife edge. The second proportional counter measures the intensity of x-rays transmitted through the sample. The scintillating detector is used in the same way but on the air for the hard x-rays and for alignment purposes. Total electron yield from the sample is measured by channeltron. The spectrometer is fully controlled by special software that gives the high flexibility and reliability in carrying out of the experiments. Fig.2 and fig.3 present the typical XAFS spectra measured with spectrometer.

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Improvement of Sediment Trapping Efficiency Module in SWAT using VFSMOD-W Model (VFSMOD-W 모형을 이용한 SWAT 모형의 초생대 유사 저감 효율 모듈 개선)

  • Park, Younshik;Kim, Jonggun;Kim, Namwon;Park, Joonho;Jang, Won-Seok;Choi, Joongdae;Lim, Kyoung Jae
    • Journal of Korean Society on Water Environment
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    • v.24 no.4
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    • pp.473-479
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    • 2008
  • Environment problem has been arising in many countries. Especially, soil erosion has been deemed as one of the biggest issues because sediment causes muddy water and pollutants, such as agricultural chemicals, flow in the stream with this sediment. Many studies, regarding soil loss and non-point source pollution from watershed, has been performed while serious problem has been known. Soil loss occurred in most agricultural area by rainfall and runoff. It makes hydraulic structure unstable, causes environmental economical problems because muddy water destroys ecosystem and causes intake water deterioration. As revealing serious effects of muddy water by sediment, many researches have been doing with various methods. Hydraulic structures establishments such as soil erosion control dams and grit chamber are common. Vegetative filter strip is investigated in this study because vegetative filter strip is designed for reducing sediment from upland areas of the watershed, and it has many functions, not only sediment reduction but also runoff water quality improvement and wildlife habitat. With these positive functions of the vegetative filter strip, the study about vegetative filter strip has been increasing for reducing sediment because it is more effective than hydraulic structures from an environmental perspective. But the sediment trapping efficiency by vegetative filter strip, needs to be investigated and designed first. Therefore the model, VFSMOD-W, was used in this study as it can estimate sediment trapping efficiency of vegetative filter strip under various field, vegetation, weather condition. Sensitive factors to sediment trapping efficiency are studied with VFSMOD-W, and sediment trapping efficiency equation has been derived using two most sensitive factors. It is thought that the equation suggested in this study can be used in Soil and Water Assessment Tool (SWAT), to overcome the limit of SWAT filter strip module, which is based solely on filter strip width.

Development of Planar Active Electronically Scanned Array(AESA) Radar Prototype for Airborne Fighter (항공기용 평면형 능동 전자주사식 위상 배열(AESA) 레이더 프로토 타입 개발)

  • Chong, Min-Kil;Kim, Dong-Yoon;Kim, Sang-Keun;Chon, Sang-Mi;Na, Hyung-Gi
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.21 no.12
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    • pp.1380-1393
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    • 2010
  • This paper presents a design, fabrication and the test results of planar active electronically scanned array(AESA) radar prototype for airborne fighter applications using transmit/receive(T/R) module hybrid technology. LIG Nex1 developed a AESA radar prototype to obtain key technologies for airborne fighter's radar. The AESA radar prototype consists of a radiating array, T/R modules, a RF manifold, distributed power supplies, beam controllers, compact receivers with ADC(Analog-to-Digital Converter), a liquid-cooling unit, and an appropriate structure. The AESA antenna has a 590 mm-diameter, active-element area capable of containing 536 T/R modules. Each module is located to provide a triangle grid with $14.7\;mm{\times}19.5\;mm$ spacing among T/R modules. The array dissipates 1,554 watts, with a DC input of 2,310 watts when operated at the maximum transmit duty factor. The AESA radar prototype was tested on near-field chamber and the results become equal in expected beam pattern, providing the accurate and flexible control of antenna beam steering and beam shaping.

KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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Improvement of Light Extraction Efficiency of GaN-Based Vertical LED with Microlens Structure

  • Kwon, Eunhee;Kang, Eun Kyu;Min, Jung Wook;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.221-221
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    • 2013
  • Vertical LED (VLED) has been recognized as a way to obtain the high-power LED due to their advantages [1]. However, approximately 4% of the light generated from the active region is extracted, if the light extraction from side walls and back side is neglected because of Fresnel reflection (FR) and total internal reflection (TIR) [2,3]. In this study, the optical simulation of the VLED with the various microstructures was performed. Among them, the microlens having the diameter of 3 ${\mu}m$ and the height of 1.5 ${\mu}m$ shown the best result was chosen, and then, optimized microlens was formed on a GaN template using conventional semiconductor process. Various microstructures were proposed to improve the light extraction efficiency (LEE) of the VLED for the simulation. The LEE was simulated using LightTools based on a Monte Carlo ray tracing. The microstructures with hemisphere, cone, truncated and cylinder pattern having diameter of 3 ${\mu}m$ were employed on the top layer of the VLED respectively. The improvement of the LEE by using the microstructure is 87% for the hemisphere, 77% for the cone, 53% for the truncated, 21% for the cylinder, compared with the LEE of the flat surface at the reflectance of 85%. The LEE was increased by 88% at the height of 1.5 ${\mu}m$, compared with the LEE of the flat surface. We found that the microlens on the top layer is the most suitable for increasing the LEE. In order to apply the proposed microlens on n-GaN surface, we fabricated microlens on a GaN template. A photoresist array having hexagonal-closed packed microlens was fabricated on the GaN template. Then, optimization of etching the GaN template was performed using a dry etching process with ICP-RIE. The dry etching carried out using a gas mixture of Cl2 and Ar, each having a flow rate of 16 sccm and 10 sccm, respectively with RF power of 50 W, ICP power of 900 W and chamber pressure of 2 mTorr was the optimum etching condition as shown in Fig. 2(a).

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