• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.11-15
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• 2004

Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

• Proceedings of the Korean Society of Agricultural Engineers Conference
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• 1999.10c
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• pp.465-472
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• 1999

Hydraulic model tests are performed to find economical and hdrqulically stable design of cooling water intake channel of steam power plant. The result of tests show that the standard distributiion of y-components in the chamber of CWP(circulating Water Pump) are recommended below 3.5 to maintain hydraulic stability, so that this value is considered as the design criteria. Common basin is necessary to improve the hydraulic stability of inflow, however the longer basin does not always improve the hydraulic stability , and the optimal length of basin can be found in some range. From the results the flow stability maintained the best condition when the length of basin is 7.2m. Beside the standard tests the auxiliary tests like edge , baffle, trapezoidal section and increase of pump capacity are carried out based on the optimal condition foudn in the standard tests. From the series of tests the economical and hydraulically stable design of intake channel was proposed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.797-801
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• 2003

The Statistical Energy Analysis is based on the power flow and the energy conservation between sub-systems, which enable the prediction of acoustic and structural vibration behavior in mid-high frequency ranges. This paper discusses the identification of SEA coupling loss factor parameters from experimental measurements of small reverberation chamber sound pressure levels and structural accelerations. As structural subsystems, steel plates with and without damping treatment are considered. Calculated CLFs were verified by both transmission loss values for air-borne CLF case and running SEA commercial software As a result, CLFs have shown a good agreement with those computed by software. Acoustical behavior of air-borne noise and structure-borne noise has been examined. which shows reasonable results, too.

• Proceedings of the IEEK Conference
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• 2006.06a
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• pp.215-216
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• 2006

In this paper, the antenna the with linear active phased array of $1{\times}16$ operated in DBS band was designed. The antenna was composed of sixteen radiating elements, sixteen active channels and five Wilkinson power combiners with 4-channel inputs, a digital control board and a stabilizing DC bias board. The radiating element of the array has the structure of a microstrip stack patch with a left-hand circular polarization. And, each active channel consists of a low noise ampilifier, a 3-bit digital phase shifter and a variable analog attenuator. The breadboard of linear active phased array antenna was also fabricated to test the electrical performances. The radiation patterns of the antenna were measured after correcting initial phases of each active channel in aechoic chamber. And also, the beam scanning chracteristcs of $10^{\circ}$, $20^{\circ}$, $30^{\circ}$ were measured.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1383-1385
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• 2009

This paper suggests that testing method and equipment structure to detect potential failures of LCD cells. LCD Cell Aging Tester is the unique process to detect failures related with ASG circuits. This system consists of four components that is Aging chamber, work table, probe contact unit, and pattern generator. The key factor of the concept is temperature aging and HVS driving. Complicated combination of test parameters including voltage, temperature and frequency provided practical burn-in conditions eligible for prediction of mass production.

• Bulletin of the Korean Chemical Society
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• v.32 no.10
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• pp.3726-3729
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• 2011

Biofilm formation is inevitable in a bioelectrochemical system in which microorganisms act as a sole biocatalyst. Cathodic biofilm (CBF) works as a double-edged sword in the performance of the air-cathode microbial fuel cells (MFCs). Proton and oxygen crossover through the CBF are limited by the robust structure of extracellular polymeric substances, composition of available constituents and environmental condition from which the biofilm is formed. The MFC performance in terms of power, current and coulombic efficiency is influenced by the nature and origin of CBF. Development of CBF from different ecological environment while keeping the same anode inoculums, contributes additional charge transfer resistance to the total internal resistance, with increase in coulombic efficiency at the expense of power reduction. This study demonstrates that MFC operation conditions need to be optimized on the choice of initial inoculum medium that leads to the biofilm formation on the air cathode.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.336-341
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• 2004

This research investigates the feasibility of ultrasonic microscope for nondestructive assessment of thermal degradation in artificially aged commercial Co-base superalloy, FSX414. This alloy has been used for high temperature structure applications such as stationary gas turbine blade and nozzle chamber in fossil plant. Microstructural change was found that the fine carbides became coarser and spheroidized in matrix as aging time increased. The leaky surface acoustic wave velocity gradually decreases by a maximum of 4.7% with increasing aging time up to 4,000hours. However, the longitudinal wave velocity has a little change. Also, it has a good correlation between leaky surface acoustic wave velocity and Vickers hardness. Consequently, LSAW can be used to examine the degree of degradation in thermally aged Co-base superalloy.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2977-2983
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• 2008

The combustion characteristics of a partially premixed flame in a dump combustor were studied to determine the effects of hydrogen enrichment in propane. Bluff-body was used for flame stabilization. Fuel mixtures containing a hydrogen mole fraction ranging from 0.1 to 0.5 were burnt at ambient pressure within a quartz chamber. Tests were carried out keeping the total reactant flow rate by adjusting the fuel and air flow rates. The fluctuations of pressure were measured by piezoelectric pressure sensor. The instantaneous flame structure and OH chemiluminescence images were described by High-speed Intensified Charged Coupled Device (HICCD) camera and Intensified Charged Coupled Device (ICCD) camera. The present results show that hydrogen enrichment in fuel changed the location of primary reaction zone from inner recirculation zone to turbulent shear layer and pressure signal. The reason is that chemical aspects take precedence over flow aspects in the hydrogen-enriched flame.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.1142-1143
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• 2017

In this paper, Underwater propulsion test of SWASH(Small Waterplane Area Single Hull) type underwater vehicle with hybrid rocket system is performed. Watertight structure is applied to prevent a combustion chamber from water, and the control logic is constructed by setting the watertight ignition sequence. As a results, It is confirmed that the ignition is stable in water, and the propulsion system works well along the configured control sequence.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.92-96
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• 2004

Scales, accumulated on semiconductor equipment parts during device fabrication processes, often lower equipment lifetime and production yields. Thus, many equipments parts have be cleaned regularly. In this study, an attempt to establish an effective process for the removal of scales on the sidewall of collimators in the chamber of sputter is made. The EDX analysis revealed that the scales are composed of Ti and TiN with the colummar structure. It was found that the heat-treatment at 700 for 1 min. after the oxide removal in the HF solution, and then etching in the HNO3 : H2SO4 : H2O =4:2:4 solution for 5.5 hrs at 67 was the most effective process for the scale removal.