• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.183-187
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• 2007

The magnetron reactive ion etching (RIE) characteristics of polycrystalline (poly) 3C-SiC grown on $SiO_2$/Si substrate by APCVD were investigated. Poly 3C-SiC was etched by $CHF_3$ gas, which can form a polymer as a function of side wall protective layers, with additive $O_2$ and Ar gases. Especially, it was performed in magnetron RIE, which can etch SiC at lower ion energy than a commercial RIE system. Stable etching was achieved at 70 W and the poly 3C-SiC was undamaged. The etch rate could be controlled from $20\;{\AA}/min$ to $400\;{\AA}/min$ by the manipulation of gas flow rates, chamber pressure, RF power, and electrode gap. The best vertical structure was improved by the addition of 40 % $O_2$ and 16 % Ar with the $CHF_3$ reactive gas. Therefore, poly 3C-SiC etched by magnetron RIE can expect to be applied to M/NEMS applications.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2000.10a
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• pp.74-77
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• 2000

Porthole die extrusion has a great advantage in the forming of hollow section tubes difficult to produce by conventional extrusion with a mandrel on the stem. Because of the complicated structure of die assembly, extrusion process as a forming of hollow section tubes has been investigated experimentally Therefore, analytic approaches that are useful in profitable die design and in the improvement of productivity are inevitably demanded Welding strength is affected by many parameters, which are such as extrusion ratio, extrusion speed, die shape, porthole number, bearing length, billet temperature and mandrel shape. In this paper, the parameters, which are such as billet temperature, bearing length and tube thickness, are examined. The welding pressures are examined through 3D simulation of non steady state and compared with experimental results.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.05a
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• pp.406-407
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• 2009

The thermal protection techniques for ramjet combustor are key technology, which block the heat from hot combustion gas, and maintain the structure temperature safely. Film cooling method is one of them. This research proposes the optimal thermal design method through performing the study of thermal protection design for ramjet combustor.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.11a
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• pp.522-525
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• 2009

DC-shift phenomenon can be observed in Hybrid rocket combustion. This phenomenon makes performance drop which is structure problem or reduce thrust. Understanding of DC-shift phenomenon, the condition of the hybrid rocket combustion stability can be found. In this paper, the condition of Negative DC-shift was found and made by changing oxidizer flow with pre-post chamber. The Negative C-shift phenomenon and characteristic were defined from the experimental study.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.207-211
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• 2000

Deep Interests have been paid on the application of non-thermal plasma technique to solve the environmental pollution problems. $CO_2$ is one of the severe pollutants which cause the acid rain and global warming. In this study, in order to improve the conversion efficiency of $CO_2$, the streamer corona discharge plasma and barrier discharge plasma reactors were made, and the conversion characteristics of $CO_2$ by the corona discharge plasma and some discharge characteristics of these discharge chambers are studied experimentally.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.271-274
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• 2002

This paper is investigated construction of the Scramjet test facility and test method of Scramjet engine combustor model. Scramiet engine combustor model test was performed at Lab C-16BK CIAM (Central Institute of Aviation Motors) at Tyraevo in Moscow. The velocity of flow in the combustion chamber equal to Mach number 2.49 with single hole fuel spray nozzle injector and test duration equal to 7 seconds. Therefore In this paper is showed high altitude test method of Scramjet combustor model and the proper structure of combustor with single hole fuel spray nozzle.

• Journal of Power System Engineering
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• v.18 no.5
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• pp.16-21
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• 2014

The structure of the variable liquid column oscillator(VLCO) is analogous to that of the tuned liquide column damper used to suppress oscillatory motion in large structures like tall buildings and cargo ships. VLCO is the technology to absorb high potential energy made by process of accelerated motions to occur the effect of an air spring by installation of inner air chamber. So, the application of VLCO can obtain to improve efficiency of energy than wave energy converters made in Pelamis Company. In this research, the experiments were carried out for the motion characteristics of simple floating body by varying the amount of internal fluid. The experimental results were compared with the calculated results.

• 한국가시화정보학회:학술대회논문집
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• 2001.12a
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• pp.36-43
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• 2001

The flow field structures of two interacting parallel supersonic free jets are studied by flow visualization using planar laser-induced fluorescence of NO seeded in nitrogen gas. The experiments are carried out for several distances between two orifice centers and for various ratios of the pressure in the reservoir to that in the expansion chamber. The flow fields are visualized mainly on the plane including two jet centerlines and its characteristic shock system, especially a cell structure formed secondly by interaction of two jets, are analyzed. The positions of the normal shock depending on the pressure ratios are also compared.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.560-564
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• 2003

In this paper, we carried out performance analysis of mobile station with built-in antenna for PCS(Personal Communication System) band. The radiation patterns for antenna and mobile phone were simulated by using 3D simulation program, HFSS(High Frequency Structure Simulator) and SEMCAD(Simulation Platform for Electromagnetic Compatibility Antenna Design Dosimetry). We observed radiation pattern variation according to installation of LED(Light Emitting Diode) circuit and ground pattern. The radiation pattern of prototype mobile phone was measured, and the radio sensitivity was measured by using Agilent E5515C and chamber. The measured maximum antenna gain at 1.87GHz was 0.21dBi. The measured radio sensitivity of prototype mobile phone shows proper performances comparable to other models with external antennas.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.373-379
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• 2013

Mg-doped zinc tin oxide (ZTO:Mg) thin films were prepared on glasses by rf magnetron sputtering. $O_2$ was introduced into the chamber during the sputtering. The optical properties of the films as a function of oxygen flow rate were studied. The crystal structure, elementary properties, and depth profiles of the films were investigated by X-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and secondary ion mass spectrometry (SIMS), respectively. Bottom-gate transparent thin film transistors were fabricated on $N^+$ Si wafers, and the variation of mobility, threshold voltage etc. with the oxygen flow rate were observed.