• Proceedings of the KAIS Fall Conference
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• 2009.05a
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• pp.450-453
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• 2009

Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites. Compare economic estimation of SiC ceramic heater with sheathe heater are as followings. (1) Temperature rising time of sheath heater is 1.1 times faster than SiC ceramic heater. (2) Heating insulation of SiC ceramic heater is 2.7 times larger than sheath heater. If SiC ceramic heater is one body type of a product application, contact resistance will decrease. I think that temperature initial rising time is faster than now. The more SiC ceramic heater is used for a long time, the more economic benefit is larger in the view point of heat insulation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.12
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• pp.776-781
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• 2017

In this study, we investigated the effect of electrode pattern design on the thermal shock resistance and temperature uniformity of a ceramic heater. A cordierite substrate with a low thermal expansion coefficient was fabricated by tape casting, and a tungsten electrode was printed and used as a heating element. The temperature distribution of the ceramic heater was calculated by a finite-element method (FEM) by considering various electrode patterns, and the tensile stress distribution due to the thermal stress was calculated. In the electrode pattern with a single-line width, the central part of the ceramic heater was heated to the maximum temperature, and the position of the ceramic heater having a double-line width was changed to the maximum temperature, depending on the position of the minimum line width pattern. The highest tensile stress was found along the edges of the ceramic heater. The temperature gradient at the edge determined the tensile stress intensity. The smallest tensile stress was observed for electrode pattern D, which was expected to be advantageous in resisting thermal shock failures in ceramic heaters.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.3
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• pp.1275-1278
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• 2012

Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of electroconductive ceramic composites. Temperature rising time of sheath heater is 1.1 times faster than SiC ceramic heater. Heating insulation of SiC ceramic heater is 2.7 times larger than sheath heater. If SiC ceramic heater is one body type of a product application, contact resistance will decrease. I think that temperature initial rising time is faster than now. The more SiC ceramic heater is used for a long time, the more economic benefit is larger in the view point of heat insulation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.7
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• pp.1631-1634
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• 2009

Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites. Temperature rising time of sheath heater is 1.1 times faster than SiC ceramic heater. Heating insulation of SiC ceramic heater is 2.7 times larger than sheath heater. If SiC ceramic heater is one body type of a product application, contact resistance will decrease. I think that temperature initial rising time is faster than now. The more SiC ceramic heater is used for a long time, the more economic benefit is larger in the view point of heat insulation.

• Journal of the Korean Ceramic Society
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• v.47 no.4
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• pp.319-324
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• 2010

Screen printable $MoSi_2$ paste and its ceramic sheet heater were investigated. $MoSi_2$ powder without $Mo_5Si_3$ second phase, which causes so-called pest phenomena, was synthesized by SHS technique. Over glaze was also developed for preventing pest phenomenon. The maximum temperature of $MoSi_2$ ceramic heater was over $500^{\circ}C$. After several heat up and cooling cycle, the $MoSi_2$ heater reveals pest phenomenon. Conductive $MoSi_2$ paste could be used in electronic ceramics, i.e., MLCC, LTCC, HTCC, and etc.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.67-72
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• 2013

Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.

• Journal of Applied Reliability
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• v.17 no.4
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• pp.355-361
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• 2017

Purpose: The purpose of this research is to establish the life test method for ceramic heater and identify the failure mechanisms. Methods: We do accelerated life test in the condition of thermal shock and failure analysis for failed samples. Conclusion: The main failure mechanisms of ceramic heater are identified as overstress failure mechanisms as results of failure analysis and the shape parameters of weibull distribution by accelerated life test are identified as 0.8, 1.2 and 0.4 each at $400^{\circ}C$, $600^{\circ}C$ and $900^{\circ}C$. At $900^{\circ}C$, the shape parameter 0.4 means that It is exactly initial failure caused that the stress exceeds the strength of ceramic heater highly and the shape parameters 0.8, 1.2 at $400^{\circ}C$, $600^{\circ}C$ means that the shape parameters are around 1.0 so that the main failure mechanism is overstress failure which is same result as failure analysis. It means that the appropriate life test method for ceramic heater is reliability qualification test method rather than accelerated life test.

• Journal of the Korean Ceramic Society
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• v.50 no.1
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• pp.57-62
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• 2013

We investigated the thermal and electrical properties of the $B_2O_3-ZnO-Bi_2O_3$ glass system as a sealing material in sheath heater modules. A composition with over 90 wt% $Bi_2O_3$ in the $B_2O_3-ZnO-Bi_2O_3$ system was glassified by controlling the cooling rate. The glass transition temperature and thermal expansion coefficient in bismate glass could be controlled by the minor ingredients of ZnO, $SiO_2$, $BaO_2$, and $K_2O$. The $B_2O_3-ZnO-Bi_2O_3$ glass system bonded well to metal, and bismate glass insulating properties were comparable to those of bismate glass $B_2O_3-ZnO-PbO$ glass system in a sheath heater module.

• The Journal of the Korea institute of electronic communication sciences
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• v.6 no.5
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• pp.717-722
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• 2011

This paper presents that the electronic controller is developed for controlling the setting temperature and water in the ceramic pipe system. The heating water system is designed for controlling the temperature to supply the heat through the ceramic pipe heater to input the water, also for controlling quantity of water using the water sensor and impeller. The control method of the heating water system is applied the mathematic modeling of the ceramic pipe heater on the suppling the heat at coming water, and the test result of the electronic controller is present to smartly control the setting temperature, therefore the ceramic pipe heater is proposed to be able to apply the heating structure and the control methods as a product.

• Journal of Biomedical Engineering Research
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• v.43 no.4
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• pp.219-229
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• 2022

In this study, we propose a miniaturized micro-ceramic heater device. After screen-printing a silver paste between pre-sintered two aluminum oxide plates to integrate a heating circuit, the device was fabricated through a low-temperature sintering process. In order to configure the optimal heating circuit integration condition, the output current evaluation and heating test were performed according to the number of screen prints of the silver paste at various voltages. A silver paste-based heating circuit printed with a line width of 200 ㎛ and a thickness of 60 ㎛ was successfully integrated on a pre-sintered alumina substrate through a low-temperature sintering process. In the case of the 5 times printed device, the thermal response showed a response rate of 18.19 ℃/sec. To demonstrate feasibility of the proposed device in the medical field, such as bio-tissue suturing and hemostasis, a voltage was applied to pig tissue in the device to test tissue change due to heat generated from the device. These results show the possibility that the proposed small ceramic heater could be used in the medical field based on its excellent temperature response.